Abstract: A catalyst for purification of exhaust gas in which Pd-based nanoparticles and ceria nanoparticles are supported on a composite metal oxide support containing alumina, ceria, and zirconia, wherein a molar ratio (Ce/Pd) of Ce and Pd supported on the support is 1 to 8, a proximity ? between Pd and Ce is 0.15 to 0.50, wherein the proximity ? is determined, based on Pd and Ce distribution maps in an element mapping image of energy dispersive X-ray analysis, by the following formula (1): ? = ? j = 0 N - 1 ? ? i = 0 M - 1 ? ( ( I ? ( i , j ) - I ave ) ? ( T ? ( i , j ) - T ave ) ) ? j = 0 N - 1 ? ? i = 0 M - 1 ? ( I ? ( i , j ) - I ave ) 2 - ? j = 0 N - 1 ? ? i = 0 M - 1 ? ( T ? ( i , j ) - T ave ) 2 , ( 1 ) a Pd dispersity after a heat-resistance test at 1050° C. for 25 hours is 0.8% or more.

Abstract: An ultrafine bubble water manufacturing device includes a whirlpool pump, an ejector, a cascade pump, a branch portion on the downstream side of the cascade pump, a return path which communicates from the branch portion between the ejector and the cascade pump, a flow rate adjusting valve and a first ultrafine bubble manufacturing unit interposed in the return path, an emission path which communicates with the branch portion, a second ultrafine bubble manufacturing unit interposed in the emission path and a control device. The control device controls an air amount adjusting valve, the whirlpool pump, the cascade pump and the flow rate adjusting valve based on the measurement values of a concentration meter for the emission path and first and second pressure gauges and on the downstream and upstream sides of the cascade pump.

Abstract: To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.

Abstract: In an inertial sensor that includes an angular rate detection circuit having a structure synchronized with a resonant frequency of an angular rate detection element, an object thereof is to realize an angle output having high accuracy with less integration error in an integration circuit for detecting an angle. The inertial sensor includes an angular rate detection element chip C1 that has a mechanical structure for angular rate detection; and a signal processing LSI chip C2 that is angular rate detection circuit for detecting an angular rate from the angular rate detection element chip C1. The signal processing LSI chip C2 calculates an angle by sampling a signal obtained from the angular rate detection element chip C1 at a discrete time synchronized with a drive frequency of the angular rate detection element chip C1.

Abstract: What is provided is an electric resistance welded steel pipe manufacturing device that is configured to perform welding while forming a strip-shaped steel sheet in a tubular shape and supplying a plasma flow to a pair of abutment end surfaces to perform shielding. The electric resistance welded steel pipe manufacturing device includes a mandrel; and a plasma flow feeder that is provided in the mandrel to supply the plasma flow.

Abstract: The present invention addresses the problem of providing an inertial force detection device with which it is possible to diagnose sensor output without hindrance even when a vehicle is traveling. In order to solve this problem, there is provided an inertial force detection device for measuring inertial force according to a displacement amount of an oscillating body, wherein a diagnosis voltage that is synchronous with an output command signal inputted from the outside is applied. Furthermore, the period over which the diagnosis voltage is applied is shorter, by a prescribed period, than a cycle of the output command signal. Furthermore, at least one of the period over which the diagnosis voltage is applied, the diagnosis voltage, a diagnosis threshold value, and a filter characteristic is varied according to the cycle of the output command signal.

Abstract: An inertial sensor having a simple configuration by vacuum sealing a resonator which detects acceleration and exploits a resonance vibration using a high Q value MEMS device. The sensor includes: a detecting proof mass and beam which detects acceleration; a driving electrode which excites the detecting proof mass and beam; a resonant frequency tuning electrode which changes the resonant frequency of the detecting proof mass and beam; and a detecting circuit which applies voltage to the resonant frequency tuning electrode for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam when the acceleration is applied to the detecting proof mass and beam during the vibration of the detecting proof mass and beam by the voltage applied to the detecting proof mass and beam, and outputs the acceleration based on a value of the voltage applied to resonant frequency tuning electrode.

Abstract: Provided is a highly reliable acceleration sensor having little 0-point drift. For example, an acceleration sensor having a support substrate having a first direction and a second direction orthogonal thereto in a single surface, a device layer disposed on the support substrate with a space interposed therebetween and having a weight that deforms according to the application of acceleration, and a cap layer disposed on the device layer with a space interposed therebetween, wherein a fixed part fixed to the support substrate is provided in the center of the weight, a beam is provided that extends from the fixed part and makes the weight mobile by being connected thereto, a plurality of posts for coupling the support substrate and the cap layer are disposed on the fixed part, and electric signals are applied to and received from the weight via the posts.

Abstract: The present invention addresses the problem of providing an inertial force detection device with which it is possible to diagnose sensor output without hindrance even when a vehicle is traveling. In order to solve this problem, there is provided an inertial force detection device for measuring inertial force according to a displacement amount of an oscillating body, wherein a diagnosis voltage that is synchronous with an output command signal inputted from the outside is applied. Furthermore, the period over which the diagnosis voltage is applied is shorter, by a prescribed period, than a cycle of the output command signal. Furthermore, at least one of the period over which the diagnosis voltage is applied, the diagnosis voltage, a diagnosis threshold value, and a filter characteristic is varied according to the cycle of the output command signal.

Abstract: To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.

Abstract: Provided is a highly reliable acceleration sensor that keeps production costs low and has low zero point drift initially and over time even when used in a poor installation environment. In this acceleration sensor, a weight that rotates when acceleration is applied in the z-direction is disposed in a cavity surrounded by a support substrate and a cap layer. The cap layer is formed such that both sides thereof across the axis of rotation of the weight have different masses per unit area.

Abstract: In an inertial sensor that includes an angular rate detection circuit having a structure synchronized with a resonant frequency of an angular rate detection element, an object thereof is to realize an angle output having high accuracy with less integration error in an integration circuit for detecting an angle. The inertial sensor includes an angular rate detection element chip C1 that has a mechanical structure for angular rate detection; and a signal processing LSI chip C2 that is angular rate detection circuit for detecting an angular rate from the angular rate detection element chip C1. The signal processing LSI chip C2 calculates an angle by sampling a signal obtained from the angular rate detection element chip C1 at a discrete time synchronized with a drive frequency of the angular rate detection element chip C1.

Abstract: A movable part rotates about a rotation axis, which passes through a support, when an inertial force in a detecting direction is applied to an inertial sensor. The movable part includes a first region and a second region displaced in a direction opposite to a direction of the first region when the inertial force is applied. A second substrate includes first and second detection electrodes opposed to the first and second regions, respectively. The first detection electrode and the second detection electrode are provided symmetrically with respect to the rotation axis. A cavity is provided symmetrically with respect to the rotation axis. In a direction perpendicular to the detecting direction and a direction in which the rotation axis extends, a length from the rotation axis to an end of the first region and a length from the rotation axis to an end of the second region are different.

Abstract: To provide a high-reliable transfer mold type sensor device in which a combined sensor including a plurality of sensors having a function of detecting physical amounts, a substrate processing a signal from the combined sensor and controlling a signal input/output with an external device, a chip pad mounted with the combined sensor and the substrate, and a lead frame are sealed with a mold resin and a package is formed, the combined sensor is configured to be thicker than the substrate and the chip pad, a principal surface side of the combined sensor is covered with the mold resin and a back surface side thereof contacts the substrate by a joint material, and the combined sensor is arranged on a package neutral surface in a cross-section of a thickness direction of the package including the combined sensor, the substrate, and the chip pad.

Abstract: The purpose of the present invention is to provide an inertial force detection device that can more accurately detect faults in a temperature sensor. Provided is an inertial force detection device configured so that in a state where an oscillating body is made to oscillate in a first direction, the amount of displacement when the oscillating body is displaced in a second direction due to the generation of angular velocity is detected as angular velocity, wherein the inertial force detection device has a means for performing control so that the oscillating body enters a state of resonance in the first direction, a temperature detection means for detecting temperature, and a means for detecting faults in the temperature detection means, and outputs a plurality of signals, which indicate the fault detection results of the three means, continuously from a single signal wire.

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

Abstract: The purpose of the present invention is to improve the pressure resistance of a cavity in a semiconductor sensor device employing a resin package, and to do so without adversely affecting the embeddability of an electrically conductive member. The semiconductor sensor device has a gap 1a sealed in an airtight manner inside a laminate structure of a plurality of laminated substrates 1, 4, and 5, and has a structure in which the outside of the laminate structure is covered by a resin, wherein a platy component 2 having at least one side that is greater in length than the length of one side of the gap 1a along this side is arranged to the outside of an upper wall 1b of the gap 1, the upper wall 1b of the gap being mechanically suspended by the platy component 2.

Abstract: A compound sensor capable of suppressing a fault which has occurred in a detection element from affecting other detection units in which no fault has occurred is provided. The compound sensor includes: a plurality of detection units including C/V conversion circuits 321a and 321b, amplifier circuits 322a and 322b, ADCs 323a and 323b, diagnosis voltage outputting DACs 327a and 327b, carrier signal generating DACs 328a and 328b and substrate voltage generating DACs 329a and 329b which are signal detection circuits provided for each of a plurality of detection elements; a power source voltage input unit 331 and a GND voltage input unit 332 shared among each of the plurality of detection units; and overcurrent switch circuits 101a and 101b which are fault detection circuits for detecting a fault of each detection element and stopping power supply to the detection unit in which the fault has occurred.

Abstract: An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG. 9, an extending portion EXU is provided so as to connect to a fixing portion FU3, this extending portion EXU and a third region P3 which configures part of a mass body MS are connected via a support beam BM3 and a support beam BM4, and the support beam BM3 and the support beam BM4 are disposed oppositely with respect to a virtual line IL1. With this, natural frequency of an unwanted mode due to rotation and torsion of the mass body MS can be shifted to a high frequency band.

Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.