Patents by Inventor Masahiko Hata

Masahiko Hata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8022440
    Abstract: A compound semiconductor epitaxial substrate having a pseudomorphic high electron mobility field effect transistor structure including an InGaAs layer as a strained channel layer and an AlGaAs layer containing n type impurities as a front side electron-donating layer, wherein said substrate contains an InGaP layer in an orderly state on the front side of the above described InGaAs layer as the strained channel layer.
    Type: Grant
    Filed: February 4, 2004
    Date of Patent: September 20, 2011
    Assignee: Sumitomo Chemical Company, Limited
    Inventors: Tsuyoshi Nakano, Masahiko Hata
  • Publication number: 20110186911
    Abstract: There is provided a semiconductor wafer including a base wafer, an insulating layer, and a Si crystal layer in the stated order. Here, the semiconductor wafer includes a seed crystal disposed on the Si crystal layer where the seed crystal has been subjected to annealing, and a compound semiconductor that has a lattice match or a pseudo lattice match with the seed crystal. There is provided an electronic device including a substrate, an insulating layer disposed on the substrate, a Si crystal layer disposed on the insulating layer, a seed crystal disposed on the Si crystal layer where the seed crystal has been subjected to annealing, a compound semiconductor that has a lattice match or a pseudo lattice match with the seed crystal, and a semiconductor device formed using the compound semiconductor.
    Type: Application
    Filed: October 1, 2009
    Publication date: August 4, 2011
    Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventor: Masahiko Hata
  • Publication number: 20110186816
    Abstract: A device forming thin film for forming a semiconductor device; an inhibition portion that surrounds the device forming thin film and inhibits growth of a precursor of the device forming thin film into a crystal; a sacrificial growth portion that is formed by causing the precursor to sacrificially grow into a crystal, and is positioned around the device forming thin film separated by the inhibition portion; and a protection film that covers a top portion of the sacrificial growth portion and exposes a top portion of the device forming thin film are included. The protection film may be made of polyimide.
    Type: Application
    Filed: October 1, 2009
    Publication date: August 4, 2011
    Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Tomoyuki Takada, Masahiko Hata, Sadanori Yamanaka
  • Publication number: 20110180849
    Abstract: There is provided a semiconductor wafer having a base wafer, an insulating layer, and a SixGe1-x crystal layer (0?x<1) in the stated order. The semiconductor wafer includes an inhibition layer disposed on the SixGe1-x crystal layer, and a compound semiconductor that has a lattice match or a pseudo lattice match with the SixGe1-x crystal layer. Here, the inhibition layer has an opening penetrating therethrough to reach the SixGe1-x crystal layer, and inhibits crystal growth of the compound semiconductor.
    Type: Application
    Filed: October 1, 2009
    Publication date: July 28, 2011
    Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventor: Masahiko Hata
  • Publication number: 20110180903
    Abstract: There is provided a semiconductor wafer having a base wafer, an insulating layer, and a SixGe1-x crystal layer (0?x<1) in the stated order. Here, at least a partial region of the SixGe1-x crystal layer (0?x<1) has been subjected to annealing, and the semiconductor wafer comprises a compound semiconductor that has a lattice match or a pseudo lattice match with the at least partial region of the SixGe1-x crystal layer (0?x<1). Furthermore, there is provided an electronic device including a substrate, an insulating layer disposed on the substrate, a SixGe1-x crystal layer (0?x<1) disposed on the insulating layer, at least a partial region of the SixGe1-x crystal layer (0?x<1) having been subjected to annealing, a compound semiconductor that has a lattice match or a pseudo lattice match with the at least partial region of the SixGe1-x crystal layer (0?x<1), and a semiconductor device formed using the compound semiconductor.
    Type: Application
    Filed: October 1, 2009
    Publication date: July 28, 2011
    Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventor: Masahiko Hata
  • Patent number: 7956366
    Abstract: A monolithic light-emitting device and driving method therefore includes a plurality of light-emitting diodes, array-arranged monolithically on a single substrate. The light-emitting diodes include a pn junction-containing semiconductor material and a phosphor-containing layer passing light emitted from the semiconductor material, absorbing part, or whole of the light for conversion into light having a different wavelength. The array is constituted of a light-emitting diode group consisting of m (m?2) pieces of the light-emitting diode, the light emitting diode group being constituted of N types (N?2, providing N?m) of light-emitting diodes, each having either one of preset N types of light-emitting spectrum patterns. An average light-emitting spectrum from the whole array can be changed by regulating a power supplied to the light-emitting diodes for each light-emitting diode group sorted according to the type of the light-emitting spectrum pattern.
    Type: Grant
    Filed: March 22, 2007
    Date of Patent: June 7, 2011
    Assignee: Sumitomo Chemical Company, Limited
    Inventors: Yuichi Hiroyama, Masahiko Hata, Yoshihiko Tsuchida
  • Patent number: 7951685
    Abstract: The present invention provides a method for manufacturing a gallium nitride semiconductor epitaxial crystal substrate with a dielectric film which has a low gate leak current and negligibly low gate lag, drain lag, and current collapse characteristics. The method for manufacturing a semiconductor epitaxial crystal substrate is a method for manufacturing a semiconductor epitaxial crystal substrate in which a dielectric layer of a nitride dielectric material or an oxide dielectric material in an amorphous form functioning as a passivation film or a gate insulator is provided on a surface of a nitride semiconductor crystal layer grown by metal organic chemical vapor deposition. In the method, after the nitride semiconductor crystal layer is grown in an epitaxial growth chamber, the dielectric layer is grown on the nitride semiconductor crystal layer in the epitaxial growth chamber.
    Type: Grant
    Filed: September 14, 2007
    Date of Patent: May 31, 2011
    Assignee: Sumitomo Chemical Company, Limited
    Inventors: Hiroyuki Sazawa, Naohiro Nishikawa, Masahiko Hata
  • Publication number: 20110108885
    Abstract: The object of the present invention is to increase channel current density while a GaN-based field effect transistor operates in a normally-off mode. Provided is a semiconductor device comprising a group 3-5 compound semiconductor channel layer containing nitrogen, an electron supply layer that supplies electrons to the channel layer, a semiconductor layer that is formed on a side of the electron supply layer opposite the side facing the channel layer and that is an intrinsic or n-type group 3-5 compound semiconductor containing nitrogen, and a control electrode that is formed to contact the semiconductor layer or formed with an intermediate layer interposed between itself and the semiconductor layer.
    Type: Application
    Filed: March 18, 2009
    Publication date: May 12, 2011
    Applicant: Sumitomo Chemical Company Limite
    Inventors: Hiroyuki Sazawa, Naohiro Nishikawa, Yasuyuki Kurita, Masahiko Hata
  • Patent number: 7923752
    Abstract: A thin-film crystal wafer having a pn junction includes a first crystal layer of p GaAs, a second crystal layer of n InxAlyGa1?x?yP, the first and second crystal layers being lattice-matched layers that form a heterojunction, and a control layer of a thin-film of InxAlyGa1?x?yP differing in composition from the n InxAlyGa1?x?yP of the second crystal layer is formed at the interface of the heterojunction. The control layer enables the energy discontinuity at the interface of the InxAlyGa1?x?yP/GaAs heterojunction to be set within a relatively broad range of values and thus enables the current amplification factor and the offset voltage to be matched to specification values by varying the energy band gap at the heterojunction.
    Type: Grant
    Filed: January 17, 2002
    Date of Patent: April 12, 2011
    Assignee: Sumitomo Chemical Company, Limited
    Inventors: Hisashi Yamada, Noboru Fukuhara, Masahiko Hata
  • Patent number: 7904765
    Abstract: Provided is a test apparatus including: test signal supply sections supplying a test signal writing test data to the connected memory under test, to a terminal of the memory; terminal correspondence determination sections outputting a terminal unit determination result indicating whether test data from the connected terminal matches an expected value; a determination result selection section selecting, for each memory, terminal unit determination results from the terminal correspondence determination sections; a memory correspondence determination section determining whether writing succeeded to each memory, based on the selection result by the determination result selection section; an identifying section identifying a test signal supply section connected to the memory to which writing succeeded and a test signal supply section connected to the memory to which writing failed; and a mask treatment section instructing each test signal supply section whether to perform re-testing, according to whether writing s
    Type: Grant
    Filed: September 19, 2007
    Date of Patent: March 8, 2011
    Assignee: Advantest Corporation
    Inventors: Masahiko Hata, Shinya Sato
  • Publication number: 20110042719
    Abstract: It is an objective of the present invention to increase channel current density while allowing a GaN field effect transistor to perform normally-off operation. Provided is a a semiconductor device comprising a group 3-5 compound semiconductor channel layer including nitrogen; an electron supply layer that has a groove in a surface thereof that is opposite a surface facing the channel layer and that supplies the channel layer with electrons; a p-type semiconductor layer that is formed in the groove of the electron supply layer; and a control electrode formed directly on the p-type semiconductor layer or on an intermediate layer formed on the p-type semiconductor layer.
    Type: Application
    Filed: March 18, 2009
    Publication date: February 24, 2011
    Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Hiroyuki Sazawa, Naohiro Nishikawa, Yasuyukl Kurita, Masahiko Hata
  • Publication number: 20110037099
    Abstract: A high-quality GaAs-type crystal thin film using an inexpensive Si wafer with good thermal release characteristics is achieved. Provided is a semiconductor wafer comprising an Si wafer; a Ge layer that is crystal-grown on the wafer and shaped as an isolated island; a butler layer that is crystal-grown on the Ge layer and is a group 3-5 compound semiconductor layer containing P; and a functional layer that is crystal-grown on the buffer layer. The Ge layer may be shaped as an island having a size that does not exceed double a distance moved by crystal defects as a result of annealing the Ge layer at a certain temperature for a certain time. The Ge layer may be shaped as an island having a size for which stress due to a difference relative to a thermal expansion coefficient of Si, which is material of the wafer, does not cause crystal defects when the Ge layer is annealed at a certain temperature.
    Type: Application
    Filed: December 26, 2008
    Publication date: February 17, 2011
    Applicant: Sumitomo Chemical Company, Limited
    Inventors: Tomoyuki Takada, Sadanori Yamanaka, Masahiko Hata
  • Publication number: 20110018033
    Abstract: It is an objective of the present invention to form a favorable interface between an oxide layer and a group 3-5 compound semiconductor using a practical and simple method. Provided is a semiconductor wafer comprising a first semiconductor layer that is a group 3-5 compound not containing arsenic and that lattice matches or pseudo-lattice matches with InP; and a second semiconductor layer that is formed to contact the first semiconductor layer, is a group 3-5 compound semiconductor layer that lattice matches or pseudo-lattice matches with InP, and can be selectively oxidized relative to the first semiconductor layer.
    Type: Application
    Filed: March 26, 2009
    Publication date: January 27, 2011
    Applicants: SUMITOMO CHEMICAL COMPANY, LIMITED, THE UNIVERSITY OF TOKYO
    Inventors: Mitsuru Takenaka, Shinichi Takagi, Masahiko Hata, Osamu Ichikawa
  • Publication number: 20110018030
    Abstract: A high-quality GaAs-type crystal thin film using an inexpensive Si water with good thermal release characteristics is achieved. Provided is a semiconductor wafer comprising an Si wafer; an inhibiting layer that is formed on the wafer and that inhibits crystal growth, the inhibiting layer including a covering region that covers a portion of the wafer and an open region that does not cover a portion of the wafer within the covering region; a Ge layer that is crystal-grown in the open region; a buffer layer that is crystal-grown on the Ge layer and is a group 3-5 compound semiconductor layer containing P; and a functional layer that is crystal-grown on the buffer layer. The Ge layer may be formed by annealing with a temperature and duration that enables movement of crystal defects.
    Type: Application
    Filed: December 26, 2008
    Publication date: January 27, 2011
    Inventors: Tomoyuki Takada, Sadanori Yamanaka, Masahiko Hata
  • Publication number: 20110012178
    Abstract: Provided is a semiconductor wafer having decreased interface state density at the semiconductor-insulator interface, a method of manufacturing this semiconductor wafer, and a semiconductor device. Provided is a semiconductor wafer comprising a group 3-5 compound semiconductor layer containing arsenic; and an insulating layer that is an oxide, a nitride, or an oxynitride, wherein arsenic oxides are not detected between the semiconductor layer and the insulating layer. This semiconductor wafer may be such that, when using X-ray photoelectron spectroscopy to observe photoelectron intensity of an element existing between the semiconductor layer and the insulating layer, an oxide peak caused by oxidized arsenic is not detected on a higher bonding energy side of an element peak caused by the arsenic.
    Type: Application
    Filed: March 26, 2009
    Publication date: January 20, 2011
    Inventors: Masakazu Sugiyama, Yukihiro Shimogaki, Masahiko Hata, Osamu Ichikawa
  • Publication number: 20110012175
    Abstract: A high-quality GaAs-type crystal thin film using an inexpensive Si wafer with good thermal release characteristics is achieved. Provided is a semiconductor wafer comprising an Si wafer; a Ge layer that is crystal-grown on the wafer and shaped as an isolated island; and a functional layer that is crystal-grown on the Ge layer. The Ge layer may be shaped as an island having a size that docs not exceed double a distance moved by crystal defects as a result of annealing the Ge layer at a certain temperature for a certain time. The Ge layer may be shaped as an island having a size for which stress due to a difference relative to a thermal expansion coefficient of Si, which is material of the wafer, does not cause crystal dejects when the Ge layer is annealed at a certain temperature.
    Type: Application
    Filed: December 26, 2008
    Publication date: January 20, 2011
    Applicants: SUMITOMO CHEMICAL COMPANY, LIMITED, The University of Tokyo
    Inventors: Tomoyuki Takada, Sadanori Yamanaka, Masahiko Hata, Taketsugu Yamamoto, Kazumi Wada
  • Publication number: 20110006368
    Abstract: The objective is to improve capabilities such as high-speed switching of a compound semiconductor device. Provided is a semiconductor wafer comprising a silicon wafer; an insulating film that is formed on the silicon wafer and that includes an open portion reaching the silicon wafer and having an aspect ratio of ?3/3 or more; a seed compound semiconductor crystal that is formed in the open portion and that protrudes beyond a surface of the insulating film; and a laterally grown compound semiconductor layer that is laterally grown on the insulating film with a specified surface of the seed compound semiconductor crystal as a seed surface.
    Type: Application
    Filed: February 27, 2009
    Publication date: January 13, 2011
    Applicant: Sumitomo Chemical Company, Limited
    Inventors: Masahiko Hata, Tomoyuki Takada
  • Publication number: 20110006399
    Abstract: A high-quality GaAs-type crystal thin film using an inexpensive Si wafer with good thermal release characteristics is achieved.
    Type: Application
    Filed: December 26, 2008
    Publication date: January 13, 2011
    Applicants: SUMITOMO CHEMICAL COMPANY, LIMITED, THE UNIVERSITY OF TOKYO
    Inventors: Tomoyuki Takada, Sadanori Yamanaka, Masahiko Hata, Taketsugu Yamamoto, Kazumi Wada
  • Publication number: 20110006343
    Abstract: The objective is to improve capabilities such as high-speed switching of a compound semiconductor device. Provided is a semiconductor wafer comprising a silicon wafer; an insulating film that is formed on the silicon wafer and that has an open portion reaching the silicon wafer; a Ge crystal formed in the open portion; a seed compound semiconductor crystal that is grown with the Ge crystal as a nucleus and that protrudes beyond a surface of the insulating film; and a laterally grown compound semiconductor layer that is laterally grown on the insulating film with a specified surface of the seed compound semiconductor crystal as a seed surface.
    Type: Application
    Filed: February 27, 2009
    Publication date: January 13, 2011
    Applicant: Sumitomo Chemical Company, Limited
    Inventors: Masahiko Hata, Tomoyuki Takada
  • Publication number: 20100308376
    Abstract: A high-quality GaAs-type crystal thin film using an inexpensive Si wafer with good thermal release characteristics is achieved. Provided is a semiconductor wafer comprising an Si wafer; an inhibiting layer that is formed on the wafer and that inhibits crystal growth, the inhibiting layer including a covering region that covers a portion of the wafer and an open region that does not cover a portion of the wafer within the covering region; a Ge layer that is crystal-grown in the open region; and a functional layer that is crystal-grown on the Ge layer. The Ge layer may be formed by annealing with a temperature and duration that enables movement of crystal defects, and the annealing is repeated a plurality of times.
    Type: Application
    Filed: December 26, 2008
    Publication date: December 9, 2010
    Inventors: Tomoyuki Takada, Sadanori Yamanaka, Masahiko Hata, Taketsugu Yamamoto, Kazumi Wada