Abstract: A discharge pulse number generated between a wire electrode and a workpiece is counted every predetermined time. A ratio Px/Ps of this counted value Px to the reference pulse number Ps will be determined to control an amount of coolant in response to this ratio Px/Ps. Also, in response to this ratio Px/Ps, an amount of movement within predetermined time is controlled. Further, through the ratio Px/Ps and the like, quiescent time to be controlled by the detection voltage generator is controlled. Thereby, surplus supply of energy is prevented, the machining speed and machining precision is improved and any disconnection of the wire electrode is avoided.

Abstract: A discharge pulse number generated between a wire electrode and a workpiece is counted every predetermined time. A ratio Px/Ps of this counted value Px to the reference pulse number Ps will be determined to control an amount of coolant in response to this ratio Px/Ps. Also, in response to this ratio Px/Ps, an amount of movement within predetermined time is controlled. Further, through the ratio Px/Ps and the like, quiescent time to be controlled by the detection voltage generator is controlled. Thereby, surplus supply of energy is prevented, the machining speed and machining precision is improved and any disconnection of the wire electrode is avoided.

Abstract: A composition includes (A) an alkali-soluble resin, (B) a quinonediazide ester of a compound represented by the following formula: and (C) a compound represented by the following formula: This composition is a positive photoresist composition that is excellent in sensitivity and definition and causes less shrink.

Abstract: The present invention provides a chemical amplification type positive photoresist composition which is excellent in storage stability as a resist solution in a bottle. A novolak resin or a hydroxystyrenic resin is reacted with a crosslinking agent to give a slightly alkali-soluble or alkali-insoluble resin having such a property that solubility in an aqueous alkali solution is enhanced in the presence of an acid, which is then dissolved in an organic solvent, together with (B) a compound generating an acid under irradiation with radiation to obtain a chemical amplification type positive photoresist composition wherein the content of an acid component is 10 ppm or less.

Abstract: An image processing apparatus which uses morphology is provided. A masked image is provided to a morphological processing section of the image processing apparatus. The morphological processing section calculates the opening gap of the masked image, calculates the minimum number N of iterations of dilations required for filling the opening gap and, after performing N dilations, executes N erosions to remove a mesh pattern. Then, an edge detecting section detects the edges of a wiring pattern in the image and a measuring section calculates the distance between the edges, which is the width of the wiring.

Abstract: A controller for a wire electric discharge machine which can achieve stable machining with high surface accuracy without requiring adjustment of a gain or the like in wire-electrode feed control. A discharge gap detection unit detects a voltage between a wire electrode and a workpiece. An amount-of-machining-per-unit-distance change detection unit obtains an average machining voltage, and a voltage drop EX that is a difference between the obtained average machining voltage and a no-load voltage. A comparative determination unit obtains a ratio ES/EX between a reference voltage drop ES stored in a reference-amount-of-machining-per-unit-distance relative value storage unit and the drop voltage EX. A feed pulse arithmetic unit obtains a feed speed that makes the amount of machining per unit time constant, on the basis of the ratio ES/EX and a predetermined feed speed, and distributes feed pulses to motors to thereby move the wire electrode relatively to the workpiece.

Abstract: An electron beam drawing apparatus has a sample chamber having a bottom plate, a side wall, and a top plate. Pillar members are disposed at four corners of the sample chamber and a frame is fixed to the pillar members. A plurality of supporting apparatuses for positioning a column mounted on the top plate to the frame are arranged around the column, thereby suppressing vibration of the column at the time of movement of a stage.

Abstract: A composition includes (A) an alkali-soluble resin, (B) a quinonediazide ester of a compound represented by the following formula: 1

Abstract: An electron beam drawing apparatus has a sample chamber having a bottom plate, a side wall, and a top plate. Pillar members are disposed at four corners of the sample chamber and a frame is fixed to the pillar members. A plurality of supporting apparatuses for positioning a column mounted on the top plate to the frame are arranged around the column, thereby suppressing vibration of the column at the time of movement of a stage.

Abstract: A main computer for performing numerical simulation and a sub-computer for controlling each shaking machine are provided. Data transfer between the main computer and sub-computer is performed by communications. The main computer is provided with a model substituting function of modeling a specimen to be shaken, a parameter modification function of sequentially modifying parameters of a model in accordance with the vibration test result, and an abnormality inspection function of judging an abnormality of each shaking system and if an abnormality is detected, substituting the measured value of a reaction force with an output of the model substituting function. It is possible to make an experiment of evaluating the strength and reliability of a massive structure, for example, relative to an earthquake and to make a vibration test at a high precision and with an economical cost.

Abstract: A main computer for performing numerical simulation and a sub-computer for controlling each shaking machine are provided. Data transfer between the main computer and sub-computer is performed by communications. The main computer is provided with a model substituting function of modeling a specimen to be shaken, a parameter modification function of sequentially modifying parameters of a model in accordance with the vibration test result, and an abnormality inspection function of judging an abnormality of each shaking system and if an abnormality is detected, substituting the measured value of a reaction force with an output of the model substituting function. It is possible to make an experiment of evaluating the strength and reliability of a massive structure, for example, relative to an earthquake and to make a vibration test at a high precision and with an economical cost.

Abstract: A composition includes (A) an alkali-soluble resin, (B) a quinonediazide ester of a compound represented by the following formula: 1

Abstract: A discharge pulse number generated between a wire electrode and a workpiece is counted every predetermined time. A ratio Px/Ps of this counted value Px to the reference pulse number Ps will be determined to control an amount of coolant in response to this ratio Px/Ps. Also, in response to this ratio Px/Ps, an amount of movement within predetermined time is controlled. Further, through the ratio Px/Ps and the like, quiescent time to be controlled by the detection voltage generator is controlled. Thereby, surplus supply of energy is prevented, the machining speed and machining precision is improved and any disconnection of the wire electrode is avoided.

Abstract: Oil from an oil source is introduced into an inside of a reciprocal oil hydraulic pressure cylinder through a port, and a lock shaft is pushed against a lock plate by the oil pressure to restrict movement of a tilt table. A cylindrical portion made of a material having a large friction coefficient to the lock plate is attached to a top end of the lock shaft so as to contact with the lock plate in a surface contact state. Releasing of stage locking is performed by introducing the oil into the inside of the reciprocal oil hydraulic pressure cylinder through another port to draw back the lock shaft by the oil pressure. Thereby, the stiffness of the sample stage lock mechanism in the x-direction becomes large and the friction force in the y- and z-directions also becomes large. Therefore, vibration of the tilt table in the x-, y- and z-directions can be effectively suppressed.

Abstract: A positive photoresist composition for forming a contact hole which comprises (A) an alkali-soluble resin; (B) a naphthoquinonediazide group-containing compound; and (C) a solvent, wherein the ingredient (B) comprises: at least one naphthoquinonediazidesulfonic ester of a polyphenol compound, where said polyphenol compound is composed of from 4 to 6 benzene rings each bonding via a methylene chain, each of the methylene chains is in a meta position to other methylene chains, and each of the benzene rings has a hydroxyl group is provided. According to tie present invention, a positive photoresist composition and a process for forming a contact hole can be provided each of which gives a contact hole pattern image in exact accordance with a mask pattern without dimple formation, in the contact hole forming technologies using the phaseshift method.

Abstract: A controller of a wire electric discharge machine monitoring a change in thickness of a workpiece and a current density in real time, promoting a machining speed by preventing occurrence of disconnection of a wire electrode even when the change in the thickness is caused in the workpiece and improving a dispersion in a machining enlargement amount. A machining distance calculating device outputs a signal at each progress of machining by a predetermined distance &Dgr;x. A main pulse number storing device counts a main pulse number for discharge machining outputted from a main pulse generator during a time period of the signal. A thickness calculating device calculates the thickness from a reference main pulse number in machining a reference thickness, the main pulse number stored to the main pulse number storing device and the reference thickness at each reception of the signal. The calculated thickness, further, a machining current, the machining speed and a machining current density are displayed.

Abstract: A positive photoresist composition for forming a contact hole which comprises (A) an alkali-soluble resin; (B) a naphthoquinonediazide group-containing compound; and (C) a solvent, wherein the ingredient (B) comprises: at least one naphthoquinonediazidesulfonic ester of a polyphenol compound, where said polyphenol compound is composed of from 4 to 6 benzene rings each bonding via a methylene chain, each of the methylene chains is in a meta position to other methylene chains, and each of the benzene rings has a hydroxyl group is provided. According to the present invention, a positive photoresist composition and a process for forming a contact hole can be provided each of which gives a contact hole pattern image in exact accordance with a mask pattern without dimple formation, in the contact hole forming technologies using the phaseshift method.

Abstract: A positive photoresist composition for forming a contact hole which comprises (A) an alkali-soluble resin; (B) a naphthoquinonediazide group-containing compound; and (C) a solvent, wherein the ingredient (B) comprises: at least one naphthoquinonediazidesulfonic ester of a polyphenol compound, where said polyphenol compound is composed of from 4 to 6 benzene rings each bonding via a methylene chain, each of the methylene chains is in a meta position to other methylene chains, and each of the benzene rings has a hydroxyl group is provided. According to the present invention, a positive photoresist composition and a process for forming a contact hole can be provided each of which gives a contact hole pattern image in exact accordance with a mask pattern without dimple formation, in the contact hole forming technologies using the phaseshift method.

Abstract: When a state for electric discharge is established, switching elements T2 and T3 are turned on so that a machining current J0 from a low-voltage auxiliary DC power source (2) flows between a workpiece (W) and a machining electrode (P). Thereupon, an electric discharge machining current J0 sharply rises as a high voltage is applied from a main DC power source (1). When the switching element T1 is turned off, the electric discharge machining current (J0) reaches its peak value, which is maintained by the current from the auxiliary DC power source (2). When the switching elements T2 and T3 are turned off, a current produced by induced energy is fed back to the main DC power source (1) through diodes D1 and D2, whereupon the machining current sharply falls.

Abstract: A shaking test system for testing a structure including a shaking device for shaking the structure, measuring devices mounted on the shaking device for shaking the structure, external signal input device for inputting data indicative of external force for shaking the structure, as well as other calculating arrangements. The shaking test system permits the setting of a large time interval of a shaking test by converting natural modes of vibration expressed by a second-order differential equation, namely second-order lag system of a vibration differential equation into a first-order lag system or (O)th order lag system for short period mode.