Abstract: Disclosed is a method of forming a pattern, comprising the steps of forming an underlying film on a semiconductor substrate, bringing a vapor of a neutralizer, which generates an acid upon exposure to light, into contact with the surface of the underlying film so as to form a primer layer, coating the primer layer with a chemical amplification resist, and selectively exposing the resist layer to light, followed by developing to form a resist pattern.

Abstract: A method in a plasma processing chamber for etching through a selected portion of a layer stack. The layer stack comprises a metallization layer, a first barrier layer disposed adjacent to the metallization layer, and a photoresist layer disposed above the metallization layer. The method includes etching at least partially through the first barrier layer using a high sputter component etch. The method further includes etching at least partially through the metallization layer using a low sputter component etch. The low sputter component etch has a sputter component lower than a sputter component of the high sputter component etch.

Abstract: The current disclosure discloses methods of and systems for automatically adjusting or selecting a pitch between beams in a multi-beam scanning system. An array of light sources is mounted on a rotatable housing and emits light in a direction perpendicular to the rotational plane. The system or method measures a pitch on or near an intermediate image-forming surface. In response to the measured pitch, the scanning as well as sub-scanning pitch is automatically adjusted or selected by rotating a housing unit to maintain a desired pitch.

Abstract: A multiple beam scanning apparatus in which a plurality of light beams are repeatedly scanned at the same time, including a light source unit defining an optical axis and including plural laser diodes, collimator lenses for respectively converting light beams emitted by the laser diodes to respective parallel light fluxes, and a beam composing unit for superposing the light beams and emitting the superposed light beams therefrom. The light source unit is rotatively adjustable around the optical axis and is constructed such that respective light fluxes emitted from the beam composing unit are emitted with predetermined respective different angles at least in a main scanning direction.

Abstract: A surface processing apparatus comprises a container provided with a first electrode and a second electrode disposed opposite to the first electrode for supporting a substrate to be processed and filled with a gas at a reduced pressure, an electric field generator for generating an electric field between the first and second electrodes, and a magnetic field generator for generating a magnetic field in the vacuum container. The magnetic field generator comprises a plurality of magnet element groups arranged in a circle around the container so as to form a ring, each of the magnet element groups having an axis directed to a center of the circle and a synthetic magnetization direction and comprising one or a plurality of magnet elements having respective magnetization directions which are synthesized to be equal to the synthetic magnetization direction of the each of the magnetic element groups.

Abstract: In an image forming system, an image forming apparatus with an optional main box having a plurality of bins prevents the cover of each bin from being locked in its closed position unless papers output to all the bins are taken out. Hence, all the bins are empty when they are used later, and can be used by any users. This implements a mail box which can be efficiently used by many users.

Abstract: A fault-diagnosing device for an evaporation system which is adapted to minimize variations in pressure within a fuel tank and improve the accuracy of diagnosis for determining leakage. To this end, a control section is provided with an additional function for setting purging duty to a predetermined fixed value when determination conditions are fulfilled, the predetermined fixed value being varied in accordance with temperatures and residual fuel amounts. The control section is further provided with an additional function for monitoring a pressure gradient within the fuel tank when a negative pressure is established within the fuel tank, whereby the purging duty is feedback-controlled in accordance with the monitored pressure gradient.

Abstract: A surface processing device and method for forming a magnetic field having a uniform strength over a wide area of an electrode surface to generate a uniform high density plasma over the overall surface of a wafer. The device comprises a vacuum container contains a first electrode and a second electrode disposed opposite to the first electrode; a gas feeding system for feeding a predetermined gas into the vacuum container; an evacuating system for maintaining the inside of the container at a reduced pressure; an electric field generating system for generating an electric field in a region between the first and second electrodes; and a magnetic field generating system for generating a magnetic field in the vacuum container.

Abstract: An air-fuel ratio control apparatus of an internal combustion engine in which a canister to adsorb and hold evaporated fuel is provided in a supply passage which communicates an intake passage of the internal combustion engine and a fuel tank, and an atmosphere opening/closing valve is provided so as to open the canister to the atmosphere. A purge valve is provided in the supply passage between the intake passage and the canister, and a pressure sensor communicates with the supply passage between the canister and the fuel tank. A control that closes the atmosphere opening/closing valve is closed when leakage is judged and reduces a pressure in the fuel tank to a predetermined negative pressure value, and thereafter closes the purge valve so that a leakage state of an evaporating system is discriminated.

Abstract: A self-diagnostic apparatus for determining whether an exhaust gas recirculating apparatus is in an abnormal condition. The exhaust gas recirculating apparatus includes a second negative pressure path for directly connecting an intake path to an EGR valve for bypassing a modulator, a second switching valve located in line with the second negative pressure path, and a control unit for controlling the second switching valve which fully opens and closes the EGR valve when a vehicle is decelerating. Pressure variations within the intake path are caused by the opening and closing action of the EGR valve. The pressure variations are detected by the intake path pressure sensor in order to determine a deteriorating condition of the exhaust gas recirculating apparatus in accordance with the detected pressure variation values.

Abstract: An image forming apparatus forms an image described by an input image information on a recording sheet by electrophotography. An optical unit of the image forming apparatus is replaceable while maintaining an accurate positional relationship with a photosensitive unit when the optical unit is set in the image forming apparatus. The optical unit is automatically and accurately positioned three-dimensionally with respect to the photosensitive unit when the optical unit is set in the image forming apparatus.