Abstract: An electric potential fixing apparatus of the present invention is an electric potential fixing apparatus that is connected to a connection line (17) between two capacitances, the first capacitance (14) and the second capacitance (15) that is directly connected to the first capacitance, includes the first high resistance (3), the second high resistance (4) that is connected directly to the first high resistance, a voltage dividing unit that outputs electric potential divided by the first high resistance and the second high resistance to the output terminal, the third capacitance (8) that is connected in parallel to at least either of the first high resistance and the second high resistance, and a voltage supply unit (1) operable to maintain constantly electric potential of the connection line between the two capacitances (14) and (15), holding combined total electric charge quantity of the first capacitance and the second capacitance, and the output terminal of the voltage supply unit is connected to a signal

Abstract: A probing card and an inspection apparatus which precisely inspect a microstructure having a minute moving section by a simple method are provided. A probing card (6) has a speaker (2), and a circuit substrate (100) which fixes a probe (4), and the speaker (2) is disposed on the circuit substrate (100). The circuit substrate (100) is provided with an aperture region. As the speaker (2) is disposed on that region, a test sound wave is output to the moving section of the microstructure. The probe (4) detects a change in an electrical characteristic caused by the motion of the moving section according to the test sound wave, thereby inspecting the characteristic of the microstructure.

Abstract: In a manufacturing method for an interposer, a seed layer is formed at an opening portion in a through hole on back surface side of a substrate, an electrode layer for electroplated coating is formed based on the seed layer, and an electroplated coating layer is formed to fill the through hole from the electrode layer for electroplated coating layer to a front surface side. As a result, a manufacturing method for an interposer is provided in which the manufacturing process is simple and the void is not generated inside of the through hole.

Abstract: In a semiconductor device a substrate is formed in a rectangular shape having four edges along dicing lines, and a jetty portion is formed so as to surround an actuator element and an electrode pad for signal input and output. The jetty portion is a rectangular shape having four sides and each side continuously extends along each edge of the substrate in parallel. A foreign object generated when dicing process is performed, is prevented from attaching onto the actuator element and the electrode pad because close adhesion of a protecting tape is improved by the jetty portion.

Abstract: A probe, wherein a beam 3 is cantilevered by a supporter 2 with a predetermined space from a probe substrate 1, and a contact 4 extending in a direction away from the probe substrate 1 is attached to the beam 3. A projection 5 extending toward the probe substrate 1 is formed on the beam 3. Since the projection 5 is brought into contact with the probe substrate 1 when a load is applied to the probe substrate 1, stress imposed on the beam 3 can be dispersed.

Abstract: A through substrate which comprises a silicon substrate (10) having a through hole (19) penetrating a front surface (11) and a back surface (12), a oxidized silicon film (13) being provided along the inner wall surface of the through hole (19), layers (14, 15) comprising Zn and Cu, respectively, being formed on the inner wall surface of the oxidized silicon film (13), and a Cu plating layer (18) which has been grown from a Cu seed layer (17) along the inner wall surface of layers (14, 15) comprising Zn and Cu, respectively, via an insulating layer (16) between them. The above through substrate can provide a through electrode capable of avoiding the noise due to the cross talk.

Abstract: A capacity detection type sensor element includes a rectangular vibrating plate, a flat back electrode which are provided opposedly with each other, and fixing portions which are provided adjoining to the vibrating plate, and has a predetermined length A of edge at a side adjoining to the vibrating plate. The back electrode is held by the fixing portions in a state that space is provided between the back electrode and the vibrating plate. Outer edges of the back electrode which are not held by the adjoining fixing portions, are straight lines and the straight lines define an octagonal shape as a whole.

Abstract: A probing card and an inspection apparatus which precisely inspect a microstructure having a minute moving section by a simple method are provided. A probing card (6) has a speaker (2), and a circuit substrate (100) which fixes a probe (4), and the speaker (2) is disposed on the circuit substrate (100). The circuit substrate (100) is provided with an aperture region. As the speaker (2) is disposed on that region, a test sound wave is output to the moving section of the microstructure. The probe (4) detects a change in an electrical characteristic caused by the motion of the moving section according to the test sound wave, thereby inspecting the characteristic of the microstructure.

Abstract: A capacitor C and an impedance converter Hiz are included in a feedback circuit of the first operational amplifier OP1 in series; an electrode P1 of a capacitive sensor is connected to a connection point of the said capacitor and the converter via a signal line L. The signal line L is connected to a predetermined standard electric potential through resistance R3 whose resistance value is high. When the capacitor is included in the feedback circuit, the signal line becomes in a state of floating and a circuit operation becomes unstable, however, the signal line L is fixed at predetermined electric potential, and therefore, the operation becomes stable. It is acceptable to configure the impedance converter with a voltage follower and connect the resistance R3 to the output.

Abstract: An electric potential fixing apparatus is provided that can prevent the combined total amount of electricity of a connection line between the first capacitance and the second capacitance from changing even when the electric potential of the connection line between the first capacitance and the second capacitance is fixed in the case where the first capacitance and the second capacitance are directly connected. This electric potential fixing apparatus has the first high resistance (3) and the second high resistance (4) and includes a voltage supply circuit (1) that preserves the combined total amount of electric charge of a measuring capacitance (14) and a fixed capacitance (15) and maintains constant the electric potential of a signal line (17) that connects the measuring capacitance (14) and the fixed capacitance (15). And an output terminal (5) of the voltage supply circuit (1) is connected to the signal line (17).

Abstract: An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, a first operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), a second operational amplifier 16 that includes a voltage follower, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the first operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the first operational amplifier 14 and an output terminal of the second operational amplifier 16, and an impedance element (a capacitor) 15 connected between an output terminal of the first operational amplifier 14 and a non-inverting input terminal of the second operational amplifier 16, and a capacitor to be detected 17 is connected between the non-inverting input terminal of the second operational amplifier 16 and specific potential.

Abstract: An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter 16, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and an impedance element (a capacitor) 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and the specific potential.

Abstract: An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), an impedance converter 16, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and an impedance element (a capacitor) 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16, and a capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and specific potential. The electrostatic capacitance detection circuit 10 and the capacitor 17 are located adjacently.

Abstract: An electrostatic capacitance detection circuit 10 comprises a DC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential, an impedance converter 16, a resistance (R1) 12 connected between the DC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and a capacitor 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and specific potential.

Abstract: Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.

Abstract: An electric potential fixing apparatus is provided that can prevent the combined total amount of electricity of a connection line between the first capacitance and the second capacitance from changing even when the electric potential of the connection line between the first capacitance and the second capacitance is fixed in the case where the first capacitance and the second capacitance are directly connected. This electric potential fixing apparatus has the first high resistance (3) and the second high resistance (4) and includes a voltage supply circuit (1) that preserves the combined total amount of electric charge of a measuring capacitance (14) and a fixed capacitance (15) and maintains constant the electric potential of a signal line (17) that connects the measuring capacitance (14) and the fixed capacitance (15). And an output terminal (5) of the voltage supply circuit (1) is connected to the signal line (17).

Abstract: An analog multiplier 11 raises a base reference voltage “Vref0” to the nth power so that a reference voltage “Vref1” is produced. Analog multipliers 12 and 13 sequentially raise the reference voltage “Vref1” to the nth power so that reference voltages “Vref2” and “Vref3” are produced. Switch groups 38-41 control the reference voltages “Vref0” to “Vref3”, which are then sent to an analog multiplier 14 together with an input voltage “Vin”. A comparator 14 sequentially compares a multiplication result “Vx” of the multiplier 14 with a voltage “Vout” outputted from a sensor circuit 2, so that a digital output value “Dout” is produced. The analog multiplier 14 is set as appropriate.

Abstract: An electrostatic capacitance detection circuit 10 comprises an AC voltage generator 11, a first operational amplifier 14 of which non-inverting input terminal is connected to specific potential (a ground in this example), a second operational amplifier 16 that includes a voltage follower, a resistance (R1) 12 connected between the AC voltage generator 11 and an inverting input terminal of the first operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the first operational amplifier 14 and an output terminal of the second operational amplifier 16, and an impedance element (a capacitor) 15 connected between an output terminal of the first operational amplifier 14 and a non-inverting input terminal of the second operational amplifier 16, and a capacitor to be detected 17 is connected between the non-inverting input terminal of the second operational amplifier 16 and specific potential.

Abstract: An electrostatic capacitance detection circuit 10 comprises a DC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential, an impedance converter 16, a resistance (R1) 12 connected between the DC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and a capacitor 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and specific potential.

Abstract: A capacitor C and an impedance converter Hiz are included in a feedback circuit of the first operational amplifier OP1 in series; an electrode P1 of a capacitive sensor is connected to a connection point of the said capacitor and the converter via a signal line L. The signal line L is connected to a predetermined standard electric potential through resistance R3 whose resistance value is high. When the capacitor is included in the feedback circuit, the signal line becomes in a state of floating and a circuit operation becomes unstable, however, the signal line L is fixed at predetermined electric potential, and therefore, the operation becomes stable. It is acceptable to configure the impedance converter with a voltage follower and connect the resistance R3 to the output.