Patents by Inventor Masashi Sugishita

Masashi Sugishita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240393050
    Abstract: There is provided a technique that includes: a heat generator installed for each of control zones and configured to raise an internal temperature of a reaction tube by heat generation; a circuit configured to equalize resistance values in the respective control zones, wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit.
    Type: Application
    Filed: July 31, 2024
    Publication date: November 28, 2024
    Applicant: Kokusai Electric Corporation
    Inventors: Tetsuya KOSUGI, Masaaki UENO, Shinobu SUGIURA, Masashi SUGISHITA
  • Publication number: 20240309509
    Abstract: There is provided a technique that includes: transferring a substrate from a process chamber to a transfer chamber, after processing the substrate disposed at the process chamber while detecting a temperature by a temperature sensor installed at a substrate support configured to support the substrate; and cooling the substrate so that the temperature detected by the temperature sensor becomes equal to or lower than a set temperature while the substrate support is located at a predetermined position.
    Type: Application
    Filed: February 27, 2024
    Publication date: September 19, 2024
    Applicant: Kokusai Electric Corporation
    Inventors: Hideto YAMAGUCHI, Masashi SUGISHITA
  • Patent number: 12085338
    Abstract: There is provided a technique that includes: a heat generator installed for each of control zones and configured to raise an internal temperature of a reaction tube by heat generation; a circuit configured to equalize resistance values in the respective control zones, wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit.
    Type: Grant
    Filed: June 11, 2020
    Date of Patent: September 10, 2024
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Tetsuya Kosugi, Masaaki Ueno, Shinobu Sugiura, Masashi Sugishita
  • Publication number: 20230383411
    Abstract: According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a heater heating a substrate in a reaction tube; a temperature controller controlling the heater; a valve controller adjusting an opening degree of a control valve to adjust a gas flow rate; and a main controller instructing a recipe including: (a) elevating an inner temperature of the reaction tube to a predetermined temperature at an elevating rate; (b) processing the substrate at the predetermined temperature; and (c) lowering the inner temperature of the reaction tube at a lowering rate. The main controller controls the temperature controller and the valve controller so that the inner temperature of the reaction tube changes in (a) or (c) at the elevating or lowering rate by heating in parallel with cooling by the gas supplied through the control valve.
    Type: Application
    Filed: August 15, 2023
    Publication date: November 30, 2023
    Inventors: Masashi SUGISHITA, Masaaki UENO
  • Patent number: 11761087
    Abstract: According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a heater heating a substrate in a reaction tube; a temperature controller controlling the heater; a valve controller adjusting an opening degree of a control valve to adjust a gas flow rate; and a main controller instructing a recipe including: (a) elevating an inner temperature of the reaction tube to a predetermined temperature at an elevating rate; (b) processing the substrate at the predetermined temperature; and (c) lowering the inner temperature of the reaction tube at a lowering rate. The main controller controls the temperature controller and the valve controller so that the inner temperature of the reaction tube changes in (a) or (c) at the elevating or lowering rate by heating in parallel with cooling by the gas supplied through the control valve.
    Type: Grant
    Filed: May 29, 2019
    Date of Patent: September 19, 2023
    Assignee: Kokusai Electric Corporation
    Inventors: Masashi Sugishita, Masaaki Ueno
  • Publication number: 20230257883
    Abstract: There is provided a technique that includes: a reaction tube where a process chamber configured to process a substrate is formed; a heater structure including a heater heating the substrate; a cooler including a cooling valve supplying a cooling medium; an exhaust fan supplying the cooling medium to the cooler; and a cooling controller configured to: acquire a prediction model that includes information of the exhaust fan, final target temperature, and opening state of the cooling valve and estimates a predicted temperature predicting at least one selected from the group of a temperature of the heater and a temperature of the process chamber; acquire the at least one selected from the group of the temperature of the heater and the temperature of the process chamber, the opening state of the cooling valve, and the information of the exhaust fan; and regulate the opening state of the cooling valve.
    Type: Application
    Filed: March 23, 2023
    Publication date: August 17, 2023
    Applicant: Kokusai Electric Corporation
    Inventors: Hideto YAMAGUCHI, Seiya Shigematsu, Masaaki Ueno, Masashi Sugishita, Shuhei Maeda, Tetsuya Kosugi
  • Publication number: 20230221700
    Abstract: According to one aspect of the technique of the present disclosure, there is provided a temperature control method including: (a) controlling a current heater supply power such that a predicted temperature column calculated according to a prediction model stored in advance approaches a future target temperature column, wherein the future target temperature column is updated in accordance with a current temperature, a final target temperature and one of a temperature convergence ramp rate and a designated temperature convergence time.
    Type: Application
    Filed: March 8, 2023
    Publication date: July 13, 2023
    Inventors: Hideto YAMAGUCHI, Masaaki UENO, Seiya SHIGEMATSU, Masashi SUGISHITA, Shuhei MAEDA
  • Patent number: 11316178
    Abstract: A checking method of a resin-framed membrane electrode assembly includes checking whether there is breakage in one of short sides of a first rectangular peripheral shape of a clearance provided in the resin-framed membrane electrode assembly without checking whether there is breakage in any other part of the clearance, the resin-framed membrane assembly including a solid polymer electrolyte membrane, a gas diffusion layer provided on the solid polymer electrolyte membrane, and a resin frame member that has a second rectangular peripheral shape and surrounds the solid polymer electrolyte membrane and the gas diffusion layer to provide the clearance between the resin frame member and the gas diffusion layer, the solid polymer electrolyte membrane being made from a solid polymer electrolyte membrane roll in which a solid polymer electrolyte membrane sheet is wound in a winding direction, long sides of the rectangular peripheral shape extending in the winding direction.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: April 26, 2022
    Assignee: HONDA MOTOR CO., LTD.
    Inventors: Suguru Ohmori, Masashi Sugishita, Seiji Sugiura
  • Patent number: 11158529
    Abstract: There is provided a technique that includes (a) acquiring temperature data of at least one of a heater temperature defined by a temperature of a heater and a furnace temperature defined by an inner temperature of a process chamber, and acquiring a power supply value indicating an electric power supplied to the heater; (b) acquiring a reference temperature of the temperature data; (c) creating a predetermined equation using a prediction model of estimating a predicted temperature of the temperature data; (d) calculating a solution of minimizing a deviation between the reference temperature and the predicted temperature based on the predetermined equation; and (e) outputting a calculated power supply value calculated from the solution, and processing a substrate while controlling heating of the heater based on the calculated power supply value.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: October 26, 2021
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Hideto Yamaguchi, Masashi Sugishita
  • Publication number: 20210313205
    Abstract: According to one aspect of the technique, there is provided a configuration including: a furnace body covering a reaction chamber; a heating element divided into zones and provided in the furnace body; first temperature sensors provided for the zones such that its temperature measuring point is arranged near the heating element; second temperature sensors provided such that its temperature measuring point is provided close to a temperature measuring point of a first temperature sensor; and temperature meters provided at the zones to hold the temperature measuring points of the first and the second temperature sensors to be close to each other in a protection pipe. Each temperature meter penetrates an outer periphery of the furnace body perpendicular to a central axis of the reaction chamber such that a front end of the protection pipe is located outside the reaction tube and on a tube axis thereof.
    Type: Application
    Filed: June 16, 2021
    Publication date: October 7, 2021
    Inventors: Shinobu SUGIURA, Masaaki UENO, Tetsuya KOSUGI, Hitoshi MURATA, Masashi SUGISHITA, Tomoyuki YAMADA
  • Publication number: 20200393197
    Abstract: There is provided a technique that includes: a heat generator installed for each of control zones and configured to raise an internal temperature of a reaction tube by heat generation; a circuit configured to equalize resistance values in the respective control zones, wherein the circuit is a parallel circuit and is configured such that an output variable element is installed in one or more of output circuits constituting the parallel circuit.
    Type: Application
    Filed: June 11, 2020
    Publication date: December 17, 2020
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Tetsuya KOSUGI, Masaaki UENO, Shinobu SUGIURA, Masashi SUGISHITA
  • Publication number: 20200333766
    Abstract: The present disclosure provides a substrate processing apparatus, a substrate processing method, a semiconductor device manufacturing method, and a control program capable of controlling thickness uniformity of a film formed on a substrate. The substrate processing apparatus includes a process chamber into which a substrate is transferred; a heating device heating the substrate, transferred into the process chamber, from its periphery side; a cooling device cooling the substrate, transferred into the process chamber, from its periphery side; a process gas supply unit supplying a process gas into the process chamber; and a control unit controlling the heating device and the cooling device to generate temperature difference between a center and the periphery sides of the substrate and controls the process gas supply unit. The control unit operates the process gas supply unit to stop operation of the cooling device during supply of the process gas into the process chamber.
    Type: Application
    Filed: July 6, 2020
    Publication date: October 22, 2020
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Masashi SUGISHITA, Yuuji URANO, Kiyohiko MAEDA, Masaaki UENO, Tetsuya KOSUGI, Masaya NISHIDA
  • Patent number: 10658683
    Abstract: A method for preparing a fuel cell membrane electrode assembly, where the membrane electrode assembly includes a solid polymer electrolyte membrane and a first electrode and a second electrode provided on both sides of the solid polymer electrolyte membrane. The first electrode and the second electrode each include an electrode catalyst layer and a gas diffusion layer. The method includes forming the first electrode and the second electrode on both sides of the solid polymer electrolyte membrane, providing a preformed resin frame member around the solid polymer electrolyte membrane, overlapping an outer marginal portion of the first electrode and an inner marginal portion of the resin frame member with each other and applying heat and pressure to the overlapped portions of the first electrode and the resin frame member to join the resin frame member around the solid polymer electrolyte membrane.
    Type: Grant
    Filed: December 29, 2017
    Date of Patent: May 19, 2020
    Assignee: Honda Motor Co., Ltd.
    Inventors: Masashi Sugishita, Daisuke Okonogi, Yoshihito Kimura, Yukihito Tanaka
  • Publication number: 20190276938
    Abstract: According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a heater heating a substrate in a reaction tube; a temperature controller controlling the heater; a valve controller adjusting an opening degree of a control valve to adjust a gas flow rate; and a main controller instructing a recipe including: (a) elevating an inner temperature of the reaction tube to a predetermined temperature at an elevating rate; (b) processing the substrate at the predetermined temperature; and (c) lowering the inner temperature of the reaction tube at a lowering rate. The main controller controls the temperature controller and the valve controller so that the inner temperature of the reaction tube changes in (a) or (c) at the elevating or lowering rate by heating in parallel with cooling by the gas supplied through the control valve.
    Type: Application
    Filed: May 29, 2019
    Publication date: September 12, 2019
    Inventors: Masashi SUGISHITA, Masaaki UENO
  • Publication number: 20190273270
    Abstract: A checking method of a resin-framed membrane electrode assembly includes checking whether there is breakage in one of short sides of a first rectangular peripheral shape of a clearance provided in the resin-framed membrane electrode assembly without checking whether there is breakage in any other part of the clearance, the resin-framed membrane assembly including a solid polymer electrolyte membrane, a gas diffusion layer provided on the solid polymer electrolyte membrane, and a resin frame member that has a second rectangular peripheral shape and surrounds the solid polymer electrolyte membrane and the gas diffusion layer to provide the clearance between the resin frame member and the gas diffusion layer, the solid polymer electrolyte membrane being made from a solid polymer electrolyte membrane roll in which a solid polymer electrolyte membrane sheet is wound in a winding direction, long sides of the rectangular peripheral shape extending in the winding direction.
    Type: Application
    Filed: May 15, 2019
    Publication date: September 5, 2019
    Applicant: HONDA MOTOR CO., LTD.
    Inventors: Suguru OHMORI, Masashi SUGISHITA, Seiji SUGIURA
  • Publication number: 20190267267
    Abstract: There is provided a technique that includes (a) acquiring temperature data of at least one of a heater temperature defined by a temperature of a heater and a furnace temperature defined by an inner temperature of a process chamber, and acquiring a power supply value indicating an electric power supplied to the heater; (b) acquiring a reference temperature of the temperature data; (c) creating a predetermined equation using a prediction model of estimating a predicted temperature of the temperature data; (d) calculating a solution of minimizing a deviation between the reference temperature and the predicted temperature based on the predetermined equation; and (e) outputting a calculated power supply value calculated from the solution, and processing a substrate while controlling heating of the heater based on the calculated power supply value.
    Type: Application
    Filed: February 22, 2019
    Publication date: August 29, 2019
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Hideto YAMAGUCHI, Masashi SUGISHITA
  • Patent number: 10381661
    Abstract: A resin frame equipped membrane electrode assembly includes an MEA having different sizes of components and a resin frame member. A clearance is formed between an outer end of a second gas diffusion layer and an inner expansion. The second electrode layer has a frame shaped outer marginal portion provided at the clearance. The crack density of cracks of the frame shaped outer marginal portion is 30 cracks/mm2 or less, and the interval between the cracks is 0.06 mm or more.
    Type: Grant
    Filed: July 12, 2016
    Date of Patent: August 13, 2019
    Assignee: Honda Motor Co., Ltd.
    Inventors: Suguru Ohmori, Masashi Sugishita, Takashi Kato, Yukihito Tanaka, Seiji Sugiura
  • Patent number: 10141592
    Abstract: A resin-framed membrane electrode assembly for a fuel cell includes a stepped membrane electrode assembly and a resin frame member. The stepped membrane electrode assembly includes a solid polymer electrolyte membrane, an anode electrode, and a cathode electrode. The resin frame member surrounds an outer periphery of the solid polymer electrolyte membrane and includes an inner protruding portion that protrudes from an inner peripheral base portion toward the cathode electrode and that has a thickness. The inner protruding portion has an adhesive application portion to which an adhesive is applied so as to surround a part of the inner protruding portion. The part is in contact with the stepped membrane electrode assembly. A thickness of a cathode diffusion layer is larger than a thickness of an anode diffusion layer.
    Type: Grant
    Filed: October 7, 2014
    Date of Patent: November 27, 2018
    Assignee: HONDA MOTOR CO., LTD.
    Inventors: Seiji Sugiura, Yoshihito Kimura, Naoki Mitsuta, Masashi Sugishita, Kenichi Tanaka, Yukihito Tanaka
  • Patent number: D818850
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: May 29, 2018
    Assignee: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Tetsuya Kosugi, Hitoshi Murata, Masashi Sugishita, Kenji Shinozaki
  • Patent number: D819463
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: June 5, 2018
    Assignee: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Tokunobu Akao, Atushi Umekawa, Masaaki Ueno, Tetsuya Kosugi, Hitoshi Murata, Masashi Sugishita, Kenji Shinozaki