Thermometry tool for substrate processing apparatus
Latest HITACHI KOKUSAI ELECTRIC INC. Patents:
The dashed-dot-dashed lines represent the boundary lines of the claimed design.
The broken lines shown in the drawings represent portions of the thermometry tool for substrate processing apparatus that form no part of the claimed design.
Claims
We claim the ornamental design for a thermometry tool for substrate processing apparatus, as shown (and described).
9488528 | November 8, 2016 | Schlipf |
Type: Grant
Filed: Jul 28, 2016
Date of Patent: Nov 21, 2017
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Tokunobu Akao (Toyama), Motoya Takewaki (Toyama), Akihiro Osaka (Toyama), Masaaki Ueno (Toyama), Tetsuya Kosugi (Toyama), Masashi Sugishita (Toyama)
Primary Examiner: Antoine D Davis
Application Number: 29/572,550