Abstract: A data correction method for allowing any observer to satisfactorily perform height correction on an image is provided. Specifically, a data correction method for correcting height of a plurality of pieces of measurement data by using image data acquired by a scanning probe microscope is disclosed. In this data correction method, a computer extracts a reference plane region from the image data, selects three pieces of measurement data, from the pieces of measurement data, at three points in the extracted reference plane region as first to third reference point data, and performs height correction on the other pieces of measurement data on the assumption that the first to third reference point data have the same height.

Abstract: An inclination correcting processor performs an image process for correcting inclination of a surface image to a Z direction intersecting an X direction and a Y direction on the surface image of a sample which has been acquired from scanning by a scanning processor. The inclination correcting processor extracts a plurality of pixels from the surface image on a straight line along a predetermined direction and corrects inclination of the surface image based on luminance of the extracted pixels. In a case where correction is performed on the surface image of the sample having a flat surface at least in the one direction (P direction) intersecting the X direction and the Y direction, the inclination correcting processor performs the image process such that the predetermined direction (a direction of a straight line 28) substantially matches the one direction (P direction).

Abstract: A scanning probe microscope includes: a laser source 61; a photodetector 62; and a Y-drive mechanism 701 provided for at least either the laser source 61 or photodetector 62, for driving the object in a first direction (Y direction) in a plane perpendicular to an optical axis of the object. The Y-drive mechanism 701 includes: a Y-screw shaft 21 extending in the Y direction; a Y-guide shaft 23 extending parallel to the Y-screw shaft; a support member 24 for supporting the object, the support member coupled with the Y-screw shaft 21 via a nut member 211 screwed on the Y-screw shaft 21 as well as coupled with the Y-guide shaft 23 via a slide member 231 mounted on the Y-guide shaft 23 in a slidable manner; and a Y-drive motor 22 for rotating the Y-screw shaft 21.

Abstract: In a scanning probe microscope including a condensing optical system which includes a laser beam source, a collimator lens and a focus lens, a cantilever, and a detector, the condensing optical system including a cylindrical lens barrel having the laser beam source fixed to one end thereof, and a cylindrical lens mount which is coaxially disposed inside the lens barrel and has the collimator lens fixed to an end portion close to the laser beam source and the focus lens fixed to the opposite end portion, ring-shaped elastic members and are attached to the outer circumferential surface of the lens mount.

Abstract: Provided is a scanning probe microscope capable of performing observation with high accuracy even when a beam splitter is configured to be movable. When checking positions of a sample and a cantilever in a scanning probe microscope, by disposing an optical microscope to face a first opening portion of a top surface of a housing, and by gripping and rotating an operating portion provided on a side surface of the housing, a user rotates and moves a beam splitter held by a holding portion in the housing, and retracts the beam splitter from the field of view of the optical microscope. Therefore, the beam splitter can always be disposed in the housing, and the user can be prevented from touching the beam splitter. As a result, it is possible to prevent the beam splitter from being damaged or stains from adhering to the beam splitter. Further, the moving distance of the bears splitter 6 can be shortened. Therefore, it is possible to suppress the occurrence of a deviation in the position of the beam splitter.

Abstract: A scanning probe microscope includes: a laser source 61; a photodetector 62; and a Y-drive mechanism 701 provided for at least either the laser source 61 or photodetector 62, for driving the object in a first direction (Y direction) in a plane perpendicular to an optical axis of the object. The Y-drive mechanism 701 includes: a Y-screw shaft 21 extending in the Y direction; a Y-guide shaft 23 extending parallel to the Y-screw shaft; a support member 24 for supporting the object, the support member coupled with the Y-screw shaft 21 via a nut member 211 screwed on the Y-screw shaft 21 as well as coupled with the Y-guide shaft 23 via a slide member 231 mounted on the Y-guide shaft 23 in a slidable manner; and a Y-drive motor 22 for rotating the Y-screw shaft 21.

Abstract: Provided is a scanning probe microscope capable of performing observation with high accuracy even when a beam splitter is configured to be movable. When checking positions of a sample and a cantilever in a scanning probe microscope, by disposing an optical microscope to face a first opening portion of a top surface of a housing, and by gripping and rotating an operating portion provided on a side surface of the housing, a user rotates and moves a beam splitter held by a holding portion in the housing, and retracts the beam splitter from the field of view of the optical microscope. Therefore, the beam splitter can always be disposed in the housing, and the user can be prevented from touching the beam splitter. As a result, it is possible to prevent the beam splitter from being damaged or stains from adhering to the beam splitter. Further, the moving distance of the bears splitter 6 can be shortened. Therefore, it is possible to suppress the occurrence of a deviation in the position of the beam splitter.

Abstract: A scanning probe microscope capable of increasing a relative speed of a probe and making noise unlikely to occur in a measurement result for the surface shape of a sample. When a relative movement direction of the probe is switched at the time of reciprocation in an X direction and a direction opposite to the X direction (at a starting position P1 and a return position P2), the relative speed is gradually decreased and then the direction is switched, and after the switching, the relative speed is gradually increased, to prevent a rapid change in the relative speed. At the time of shifting the probe in a Y direction and a direction opposite to the Y direction (at the starting position P1 and the return position P2), the relative speed of the probe is gradually increased and then the relative speed is gradually decreased, to prevent a rapid change in the relative speed.

Abstract: A scanning probe microscope includes sample moving means 111 and 133 including a cylindrical piezoelectric scanner and configured to move a sample 110 arranged on an upper end surface of the piezoelectric scanner by bending the piezoelectric scanner 111 by an applied voltage, scanning control means configured to control a relative position of the probe 114 and the sample 110 by controlling the applied voltage, sample thickness acquisition means 138 configured to acquire a thickness value of the sample 110, and correlative information determination means 139 configured to determine correlative information showing a corresponding relationship between the applied voltage to the piezoelectric scanner 111 and a displacement amount of a surface of the sample 110 in a horizontal direction using the thickness value, wherein the scanning control means 132 performs controlling of the relative position using the correlative information.

Abstract: A scanning probe microscope includes sample moving means 111 and 133 including a cylindrical piezoelectric scanner and configured to move a sample 110 arranged on an upper end surface of the piezoelectric scanner by bending the piezoelectric scanner 111 by an applied voltage, scanning control means configured to control a relative position of the probe 114 and the sample 110 by controlling the applied voltage, sample thickness acquisition means 138 configured to acquire a thickness value of the sample 110, and correlative information determination means 139 configured to determine correlative information showing a corresponding relationship between the applied voltage to the piezoelectric scanner 111 and a displacement amount of a surface of the sample 110 in a horizontal direction using the thickness value, wherein the scanning control means 132 performs controlling of the relative position using the correlative information.

Abstract: A cantilever heating mechanism, and a cantilever holder and cantilever heating method that use the same, which make high-efficiency heating possible in air or in a high or low vacuum even for a general cantilever where no heating wiring pattern is provided, and further that enable localized heating and localized high-pressure/high-temperature treatment of specimens. Provided are a holder (1), which can detachably hold a cantilever (L) with a probe tip, and at least a first electrode (2a) and a second electrode (2b), which are in electric contact with the cantilever (L) held by the holder (1). The holder (1) is equipped with a stationary base (11) and a fixing part (12), which fulfills the function of an electrode.