Abstract: A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode to cover end faces of the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiOx) insulator film. The lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiyOx) orientation control layer.

Abstract: A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode to cover end faces of the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiOx) insulator film. The lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiyOx) orientation control layer.

Abstract: A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiOx) insulator film. The lower electrode has a top layer formed of a lanthanum nickel oxide (LaNiyOx) orientation control layer.

Abstract: A liquid ejecting head includes a channel-forming substrate that communicates with nozzle orifices for ejecting a liquid and that includes a plurality of pressure-generating chambers separated by a plurality of partition walls and arranged in parallel in a direction in which a short side thereof extends; and pressure-generating elements that are provided on a surface of the channel-forming substrate, with a diaphragm therebetween, and that provide the pressure-generating chambers with a pressure change.

Abstract: A method of manufacturing an actuator apparatus includes forming, on the base plate, a test pattern that is electrically discontinuous with the electrodes of the piezoelectric element and has the same layer as the lower electrode, the test pattern having the lower electrode with the upper electrode and the piezoelectric material layer removed by etching, and measuring electric resistance of the lower electrode of the test pattern to acquire the etch amount of the lower electrode when the piezoelectric element is formed.

Abstract: A liquid-jet head and a manufacturing method thereof are provided. The liquid-jet head includes a channel substrate which has pressure generation chambers formed therein and communicating nozzle orifices for discharging liquid droplets, and piezoelectric elements. The piezoelectric element includes a lower electrode, a piezoelectric layer and an upper electrode, and disposed on one surface of the channel substrate via a vibration plate, wherein at least pattern regions of the respective layers which constitute the piezoelectric element are covered with an insulating film formed of an inorganic insulating material.

Abstract: An actuator device includes a plurality of piezoelectric elements formed on a surface of a substrate. Each piezoelectric element is configured of a piezoelectric layer, an upper electrode, and a lower electrode that is formed across the plurality of piezoelectric elements. The actuator device also includes a thin film portion provided to a region in the lower electrode between each adjacent two of the piezoelectric elements. The thin film portion has a thickness smaller than that of a region in the lower electrode provided to each piezoelectric element. The actuator device also includes a concave portion provided to the boundary portion between each thin film portion and the piezoelectric element adjacent thereto. In the actuator device, the inner surface and an edge of the opening, which is opposite to the adjacent piezoelectric element, of the concave portion are formed into curved surfaces.

Abstract: Disclosed is a method of manufacturing a liquid jet head, which enables a passage-forming substrate to be easily handled, thus realizing good formation of pressure generating chambers and an improvement in manufacturing efficiency. The method includes the steps of: forming a vibration plate and piezoelectric elements on one surface of the passage-forming substrate; thermally adhering a reinforcing substrate for reinforcing the rigidity of the passage-forming substrate, onto the passage-forming substrate; processing the passage-forming substrate to have a predetermined thickness; depositing an insulation film on other surface of the passage-forming substrate at lower temperature than that for adhering the passage-forming substrate and the reinforcing substrate, and patterning the insulation film into a predetermined shape; and etching the passage-forming substrate using the patterned insulation film as a mask to form the pressure generating chambers.

Abstract: A piezoelectric element includes a lower electrode film disposed on a substrate, a piezoelectric layer 70 disposed on the lower electrode film, a upper electrode film 80 disposed on the piezoelectric layer 70, wherein the piezoelectric layer 70 is formed of a plurality of columnar grains 70a, and the upper electrode film 80 conforms to the surface shape of each of the grains 70a of the piezoelectric layer 70.

Abstract: An actuator device includes a plurality of piezoelectric elements formed on a surface of a substrate. Each piezoelectric element is configured of a piezoelectric layer, an upper electrode, and a lower electrode that is formed across the plurality of piezoelectric elements. The actuator device also includes a thin film portion provided to a region in the lower electrode between each adjacent two of the piezoelectric elements. The thin film portion has a thickness smaller than that of a region in the lower electrode provided to each piezoelectric element. The actuator device also includes a concave portion provided to the boundary portion between each thin film portion and the piezoelectric element adjacent thereto. In the actuator device, the inner surface and an edge of the opening, which is opposite to the adjacent piezoelectric element, of the concave portion are formed into curved surfaces.

Abstract: A liquid ejecting head includes a channel-forming substrate that communicates with nozzle orifices for ejecting a liquid and that includes a plurality of pressure-generating chambers separated by a plurality of partition walls and arranged in parallel in a direction in which a short side thereof extends; and pressure-generating elements that are provided on a surface of the channel-forming substrate, with a diaphragm therebetween, and that provide the pressure-generating chambers with a pressure change.

Abstract: A liquid-jet head is provided. In the liquid-jet head, a lower electrode, as a common electrode common to a plurality of piezoelectric elements, is continuously formed as far as an outer region opposite the piezoelectric elements, an auxiliary electrode layer is provided which comprises the same layers as layers constituting a lead-out electrode, and which is electrically connected to the lower electrode located outwardly of the region opposite the piezoelectric elements, a first insulation film at least in the vicinity of an end portion of a passage-forming substrate in a direction parallel to the arrangement of the piezoelectric elements is provided with a penetrated portion in a region opposite the auxiliary electrode layer, and the auxiliary electrode layer is in contact with the lower electrode via the penetrated portion provided in the first insulation film.

Abstract: A vehicle body structure of a vehicle including a seat, having a baggage compartment at a rear portion in a cabin, comprises a seat back supported by a hinge member provided at a lower portion of the seat so as to rotate in a longitudinal direction, the seat back being provided to be held in a specified upright position, a first engagement portion provided at an outside end portion of the seat back, a second engagement portion provided at a portion of a vehicle sidewall portion corresponding to the first engagement portion, wherein the first and second engagement portions are configured to be fixed in a vehicle width direction when the seat back is in the specified upright position. Thereby, a rigidity of the vehicle body can be improved by using the seat back.

Abstract: Provided are, a liquid-jet head capable of enhancing durability thereof when it is driven, and of making an arrangement density of piezoelectric elements high-density, a method of manufacturing the same, and a liquid-jet apparatus. The liquid-jet head includes: piezoelectric elements which are provided on a passage-forming substrate with a vibration plate interposed therebetween, and are respectively configured of a lower electrode, piezoelectric layers and upper electrodes, the passage-forming substrate having pressure generating chambers, which communicate with nozzle orifices for ejecting liquid droplets, formed therein, in which, while the lower electrode is continuously provided across plural piezoelectric elements, near-end portions of the lower electrode at least in regions of the lower electrode between adjacent ones of the piezoelectric elements are formed into thin-thickness portions thinner than portions of the lower electrode in other regions of the lower electrode.

Abstract: There are provided a liquid-jet head which can reliably prevent breakage of piezoelectric elements over a long period of time, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus. Further, there are provided a liquid-jet head which can effectively prevent a drop in the amount of displacement of a vibration plate caused through drive of a piezoelectric element, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus.

Abstract: A manufacturing method of an ink-jet recording head for improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof. The manufacturing method includes the steps of: forming a passage-forming layer on a passage-forming substrate and imparting etching selectivity to a region that will be a space portion of the passage-forming layer; forming a vibration plate on the passage-forming layer and a piezoelectric element; performing anisotropic etching on the passage-forming substrate to form a penetrated portion at least to a region that will be the space portion, etching the passage-forming layer to form the space portion, and forming a pressure generating chamber opposite the space portion; and joining a nozzle plate to the passage-forming substrate.

Abstract: To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.

Abstract: To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.

Abstract: A liquid-jet head is provided. In the liquid-jet head, a lower electrode, as a common electrode common to a plurality of piezoelectric elements, is continuously formed as far as an outer region opposite the piezoelectric elements, an auxiliary electrode layer is provided which comprises the same layers as layers constituting a lead-out electrode, and which is electrically connected to the lower electrode located outwardly of the region opposite the piezoelectric elements, a first insulation film at least in the vicinity of an end portion of a passage-forming substrate in a direction parallel to the arrangement of the piezoelectric elements is provided with a penetrated portion in a region opposite the auxiliary electrode layer, and the auxiliary electrode layer is in contact with the lower electrode via the penetrated portion provided in the first insulation film.

Abstract: Provided is a liquid jet head, a method of manufacturing the same, and a liquid jet apparatus, in which liquid ejecting characteristics can be kept constant for a long period and in which nozzle blockage is prevented. In a liquid jet head including a passage-forming substrate (10) which is made of a single crystal silicon substrate and in which pressure generating chambers (12) communicating with nozzle orifices are formed, and pressure generating elements (300) for causing pressure changes in the pressure generating chambers (12), a protective film (100) which is made of tantalum oxide and has resistance to liquid, is provided at least on the inner wall surfaces of the pressure generating chambers (12).