Abstract: There is provision of an electrostatic chuck for supporting a substrate and an edge ring including a first region, a second region, an electrode provided in the second region, and an elastic member. The first region includes a first top surface and is configured to hold the substrate that is placed on the first top surface. The second region extends in a circumferential direction of the first region so as to surround the first region. The second region includes a second top surface, and is configured to support the edge ring placed on the second top surface. The first top surface and the second top surface extend along a single flat plane. A part of the edge ring is accommodated in a space provided between the first region and the second region, and the elastic member is disposed between the part of the edge ring and the electrostatic chuck.

Abstract: A method of manufacturing an electrostatic chuck includes: preparing a first ceramic plate having a first hole formed therein; preparing a second ceramic plate having a second hole formed at a position different from a position of the first hole in a horizontal direction; forming a first slurry layer on the first ceramic plate or the second ceramic plate with a first slurry, the first slurry layer having a flow path formed therein to connect the first hole and the second hole; stacking the first ceramic plate and the second ceramic plate one above the other via the first slurry layer; and bonding the first ceramic plate and the second ceramic plate stacked one above the other via the first slurry layer.

Abstract: The present invention aims to develop a technique for efficiently preparing deinked pulp from prints made with UV-curable inks. According to the processes for preparing deinked pulp of the present invention, high quality deinked pulp can be obtained by performing the steps of: disintegrating printed waste paper containing UV prints in water to give a waste paper slurry; and applying a mechanical process to the waste paper slurry using a rotary disintegrator.

Abstract: Provided is an oxidized microfibrillated cellulose fiber having a Canada standard freeness of less than 200 mL and an average fiber diameter of not less than 500 nm. Said fiber provides a composition having excellent water retention ability.

Abstract: Provided is an oxidized microfibrillated cellulose fiber having a Canada standard freeness of not less than 200 mL and an average fiber diameter of not less than 500 nm. Said fiber enhances paper strength when added to a paper.

Abstract: Provided is a CM-modified microfibrillated cellulose fiber having a Canada standard freeness of not less than 200 mL and an average fiber diameter of not less than 500 nm. Said fiber enhances paper strength when added to a paper.

Abstract: Provided is a carboxymethylated microfibrillated cellulose fiber having a Canada standard freeness of less than 200 mL and an average fiber diameter of not less than 500 nm. Said fiber provides a composition having excellent water retention ability.

Abstract: Provided is a fibrillated chemically modified cellulose fiber, which has a type-I cellulose crystallinity of at least 50%, an anionic charge density of 0.10-2.00 meq/g, and an average fiber diameter of greater than 500 nm. Also, provided is a fibrillated chemically modified cellulose fiber, wherein the value (A/B) obtained by dividing the viscosity A measured at a shear rate of 0.01/sec by the viscosity B measured at a shear rate of 1000/sec in an aqueous dispersion having a solid content of 1 mass % is at least 100. These fibers have high water retention and high thixotropy.

Abstract: A method of manufacturing an electrostatic chuck includes: preparing a first ceramic plate having a first hole formed therein; preparing a second ceramic plate having a second hole formed at a position different from a position of the first hole in a horizontal direction; forming a first slurry layer on the first ceramic plate or the second ceramic plate with a first slurry, the first slurry layer having a flow path formed therein to connect the first hole and the second hole; stacking the first ceramic plate and the second ceramic plate one above the other via the first slurry layer, and bonding the first ceramic plate and the second ceramic plate stacked one above the other via the first slurry layer.

Abstract: Provided is a CM-modified microfibrillated cellulose fiber having a Canada standard freeness of not less than 200 mL and an average fiber diameter of not less than 500 nm. Said fiber enhances paper strength when added to a paper.

Abstract: Provided is an oxidized microfibrillated cellulose fiber having a Canada standard freeness of not less than 200 mL and an average fiber diameter of not less than 500 nm. Said fiber enhances paper strength when added to a paper.

Abstract: Provided is an oxidized microfibrillated cellulose fiber having a Canada standard freeness of less than 200 mL and an average fiber diameter of not less than 500 nm. Said fiber provides a composition having excellent water retention ability.

Abstract: Provided is a carboxymethylated microfibrillated cellulose fiber having a Canada standard freeness of less than 200 mL and an average fiber diameter of not less than 500 nm. Said fiber provides a composition having excellent water retention ability.

Abstract: This pulverized product of carboxymethylated pulp has a carboxymethyl substation degree of 0.50 or less and a cellulose-I crystallinity index of 50% or more. This additive contains the pulverized product. Preferably, the carboxymethylated pulp is produced by performing a mercerization reaction in a solvent mainly containing water, and then performing a carboxymethylation reaction in a mixed solvent containing water and an organic solvent, and is fibrillated by wet pulverization.

Abstract: The present invention aims to develop a technique for efficiently preparing deinked pulp from prints made with UV-curable inks. According to the processes for preparing deinked pulp of the present invention, high quality deinked pulp can be obtained by performing the steps of: disintegrating printed waste paper containing UV prints in water to give a waste paper slurry; and applying a mechanical process to the waste paper slurry using a rotary disintegrator.

Abstract: There is provision of an electrostatic chuck for supporting a substrate and an edge ring including a first region, a second region, an electrode provided in the second region, and an elastic member. The first region includes a first top surface and is configured to hold the substrate that is placed on the first top surface. The second region extends in a circumferential direction of the first region so as to surround the first region. The second region includes a second top surface, and is configured to support the edge ring placed on the second top surface. The first top surface and the second top surface extend along a single flat plane. A part of the edge ring is accommodated in a space provided between the first region and the second region, and the elastic member is disposed between the part of the edge ring and the electrostatic chuck.

Abstract: A processing system includes a thermo viewer 51 which measures a temperature distribution over a top surface of a semiconductor wafer; a temperature measuring device 14 which measures, for each of divided areas of the semiconductor wafer, a temperature of a portion in the divided area; a median value calculating unit 202 which calculates, for each divided area, a median value of a temperature distribution of the divided area, based on the temperature distribution measured by the thermo viewer 51; an offset calculating unit 204 which calculates, for each divided area, a difference between the median value and the temperature of the portion as an offset; and a temperature control unit 205 which controls, for each divided area, the temperature of the divided area such that the median value becomes equal to a set temperature, based on the offset and the temperature measured by the temperature measuring device 14.

Abstract: A propylene-ethylene copolymer resin composition including: 97 to 65 parts by weight of a propylene-ethylene copolymer (D) produced with a metallocene catalyst and having properties (D-i) to (D-ii) and 3 to 35 parts by weight of a propylene-ethylene copolymer (B) having properties (B-i) to (B-ii).