Abstract: To provide a minute foreign matter analysis method and device wherein the observation, analysis and estimation of minute foreign matter is permitted by linking the device coordinate of a particle inspection device and those of other analysis devices with by far higher accuracy.

Abstract: An xy scanning unit produces a scanning signal along an x-direction and a scanning signal along a y-direction, which are determined by a contour of a sample to be monitored, scanning time of the x-direction, and a pixel number of the x-direction, supplied from a CPU. Then, the xy scanning unit outputs these scanning signals along the x-direction and the y-direction to a piezoelectric scanning apparatus. On the other hand, a second oscillator outputs a sine wave signal having a frequency determined by the scanning time of the x-direction and the pixel number of the x-direction to a second piezoelectric plate. A sample/hold circuit holds observation data of a probe at such timing after preselected time has passed since the output of the second oscillator becomes maximum, and then outputs the held observation data to a differential amplifier and a P.I control system. An output signal Q of the P.

Abstract: A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample comprises a probe and voice coil motors for generating a moving force for moving the probe in each of three directions x, y and z upon activation of the voice coil motors. A probe supporting mechanism is mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors upon activation thereof to effect coarse/fine movement of the probe in the direction z and to scan the probe in the directions x and y.

Abstract: A spindle scans a scanner unit comprising a slender tube portion, a thick tube portion and the like in x and y directions by receiving power from a movable member of a voice coil motor. A mechanical zoom switch is provided with a metal having a low melting point at inside thereof and connects a spring for zoom to the spindle when the metal is solidified. Therefore, the spring constant of the spring for zoom is added to the spring constant of the slender tube portion whereby zoom operation is caused. Meanwhile, when heat is applied from a heating coil to the switch, the metal having a low melting point is softened and the spring for zoom is separated from the spindle. Since the metal having a low melting point is used for the switch, the switch can be switched swiftly and the operational performance of the zoom mechanism is improved.

Abstract: A scanning probe microscope has a probe for measuring the shape of a sample surface and various physical properties of the sample, and a micro-positioning mechanism for positioning the sample proximate the probe. The micro-positioning mechanism has spring elements for effecting fine movement of the sample in a predetermined direction toward the probe, an electromagnetic power generating mechanism for driving the spring elements, a support mechanism mounted for movement in the predetermined direction and having a support member supported through a viscous element for effecting coarse movement of the sample in the predetermined direction, and a heating mechanism for heating the viscous element.

Abstract: To enable observation, analysis and evaluation of minute foreign substances by adopting a method for enabling performance of linkage between equipment coordinates of a particle examination equipment and apparatus coordinates of an analyzing apparatus such as SEM which is not a particle examination equipment with a precision higher than that with which coordinate linkage is performed between conventional equipment and apparatus coordinates. An analyzing method for analyzing minute foreign substances includes the steps of determining the position of a minute foreign substance on the surface of a sample in a particle examination equipment, transferring the sample to a coordinate stage of an analyzing apparatus and inputting the position of the minute foreign substance determined by the particle examination equipment to thereby analyze the contents of this minute foreign substance.

Abstract: A scanning probe microscope used for obtaining a surface topographical image, a surface potential image and an electrostatic capacitance distribution includes a probe having a tip attached to a lever, an oscillator for oscillating the probe in close proximity to a specimen, a displacement detector for detecting the probe oscillations and outputting a displacement signal in accordance therewith, a positioning device for relative positioning of the probe tip with respect to the specimen in the X and Y directions and for controlling the distance between the probe tip and the specimen in the Z direction, an AC voltage source for applying an AC voltage between the probe to oscillate the probe at a composite frequency having components at .omega. and 2.omega., a DC voltage source for applying a DC voltage between the probe and the specimen to maintain the .omega.

Abstract: A light-scattering optical system is incorporated in an AFM instrument for a large sample. The instrument is equipped with an optical microscope. Incident light is introduced into the optical microscope to provide a dark field. The incident angle to the surface of a sample is made variable. The incident light is introduced into the main enclosure of the AFM through two optical fibers. Light reflected from the surface of the sample is received by a detector split into two parts. The dark field microscope is automatically brought to focus in response to signals from the detector. The whole apparatus is enclosed in a sound-insulating dark box to enhance the S/N during detection of scattered light.

Abstract: A magnetic force microscope for measuring a magnetic field near a surface of a magnetic sample includes a cantilever having a ferromagnetic probe at one end thereof and receiving a magnetic force from the surface of the magnetic sample. An oscillation device is fixed to another end of the cantilever for oscillating the cantilever. A voltage application device applies an alternating voltage to the oscillation device. A deflection detecting device detects the oscillation of the cantilever. A magnetic field generating device supplies a magnetic field near the ferromagnetic probe. By this construction, it is possible to correct fluctuations in magnetic field measurements using probes with different magnetic characteristics and magnetic field detecting sensitivity, and to measure an absolute value of the detected magnetic field. Further, since the ferromagnetic probe can be magnetized, it is possible to increase the magnetic sensitivity of the ferromagnetic probe.

Abstract: An electrode capable of pushing against a silicon substrate with a constant force is mounted inside a vacuum chamber or a gas-replacing chamber. A bias voltage source can supply a given electrical current between the silicon substrate and the electrode. A temperature-controlled heater and a positioning mechanism are mounted under the silicon substrate. A gas inlet nozzle for adjusting the ambient is mounted close to the location of the substrate.

Abstract: A surface analyzing and processing apparatus analyzes the surface of a sample by detecting secondary electrons, secondary ions, and the like coming out from the surface of the sample while exciting the surface of the sample by means of a probe of an atomic force microscope (AFM) and minutely etches the surface of the sample or deposits a thin film thereon after observing the sample with a high resolving power in the nanometer range by means of the AFM.

Abstract: A scanning probe microscope uses a conductive material as a probe of AFM. The probe scans a sample while the probe is forcibly oscillated by applying alternating current voltage from an oscillator between the probe and the sample. Signals .omega. and 2.omega. from the probe are extracted with an analog processor using a discrete Fourier transformation, so that distribution of surface potential of the sample is obtained using the signals .omega. and 2.omega..

Abstract: A probe microscope has a displacement detecting system formed of a spring element and a photodetecting element, the system being attached to a fine movement element, and a holder, which attached to the spring element fixed to the photodetecting system by a magnetic force, is moved by an alignment jig removably mounted on a sample moving stage in a three-dimensional fashion and a laser beam is converged on a selected point of the spring element with ease while confirming the state of alignment of the spring element with laser light based on an image produced by a camera and displayed on a monitor.

Abstract: In a probe-scanning type of microscope, a cantilever arm carries a probe, a Z-direction distance adjusting piezoelectric element for adjusting the distance of the cantilever arm in a Z direction and the end portion of a fiber for directing a laser beam onto the back surface of the cantilever arm are secured to a three-dimensional scanner tube for scanning in X,Y and Z directions, whereby displacement of the cantilever arm is measured by observing interference of light.

Abstract: A composite apparatus including a scanning tunneling microscope linked to an optical microscope or electron microscope, wherein the focal length obtained while observing the surface of a sample with the optical or electron microscope or SEM sample is recorded, and, based on this length, the speed (hereinafter referred to as the Z crude drive) at which the gap between the STM needle and the sample approaches the tunneling region (approximately 10.ANG.) is controlled and the calibration throughput is improved.

Abstract: This invention relates to a scanning tunnelling microscope which has a mechanism which accurately guides the needle of the STM to a portion the position of which has been determined by another calibrating means. In the invention, a standard sample for positioning is observed under an optical microscope or SEM, then the same sample is observed under the STM and the positional relationship between the optical axis and the STM needle is determined from the two images. In such circumstances, because the scanning region of the STM is 10 to 12.mu. at most, it is necessary to have a standard sample with specific properties such that the position within this picture frame is recognizable. Here, we relate to a device which incorporates such a standard sample, determines the positional relationship between the two (the distance between the optical axis and the STM needle), compensates for this distance alone and makes it possible to observe the same point with both devices.

Abstract: In a tunneling unit of a scanning tunneling microscope (STM), a rough feed mechanism for approaching a sample and a probe to a tunnel area is disposed separately (or is provided to a stage on a sample side, for example), a fine movement element block is formed as a separate unit and the tunnel unit main body is made compact and provided with high rigidity so that it can be mounted to an optical microscope or a laser microscope. If the fine movement element block of the tunnel unit is mounted to a revolver of an optical microscope or the like, rotation positioning accuracy of the revolver is a few microns. Therefore, high precision positioning of the position to be observed by STM can be attained by optical means and measurement having high resolution in an nm order can be conducted by use of STM. Since STM can be mounted to an existing apparatus in accordance with the present invention, measurement accuracy can be improved drastically and the invention is extremely useful industrially.

Abstract: A system for determining photo-chemical reaction heat evolved from a sample material irradiated with radiant energy comprises a calorimeter having a pair of sample holders connected to heat-leakage type thermo-electric elements which develop electric output signals proportionate to the amount of heat energy conducted therethrough. Both sample holders are initially irradiated with radiant energy before disposing the sample material thereon to heat the sample holders and thereby develop electric output reference signals. The amount of radiant energy being irradiated on at least one of the sample holders is then selectively adjusted to effectively compensate for any difference between the two reference signals.