Abstract: An object of the present invention is to enable very easy installation of a stopper buffering material for absording impacts during tilt and telescopic adjustment, in a steering device having a tilt and telescopic adjustment mechanism, and to ensure that the stopper buffering material is not readily detachable, once installed.

Abstract: A manufacturing method for semiconductor devices that can improve uniformity in the surface of a silicon nitride film or a nitride film to be formed and improve production efficiency is provided. A step of forming a first film that is a silicon oxide film or a silicon oxynitride film on a silicon substrate, a step of forming a second film that is a tetrachlorosilane monomolecular layer, and a step of forming a third film that is a silicon nitride monomolecular layer by performing a nitriding process on the second film are included. A silicon nitride film having a predetermined film thickness is formed by repeating the step of forming the second film and the step of forming the third film for a predetermined number of times. In a manufacturing apparatus, a plurality of silicon substrates are arranged on a stair-like wafer boat, and a process gas is supplied toward the upper side of a reaction tube from a process gas supply pipe.

Abstract: Oppositely of a temperature measuring surface of an object-to-be-measured 16, a reflecting member 28 is disposed while being spaced by a reflection gap 35 from the temperature measuring surface. The reflecting member 28 is composed of a heat ray reflecting material capable of reflecting heat ray in a specific wavelength band, in a portion including a reflection surface 35a. A heat ray extraction pathway section 30 is disposed through the reflecting member 28 so that one end thereof faces the temperature measuring surface. Heat ray extracted through the heat ray extraction pathway section from the reflection gap is detected by a temperature detection section 34. The heat ray reflecting material is configured in a form of a stack comprising a plurality of element reflecting layers composed of a material having transparent properties to the heat ray, in which every adjacent two element reflecting layers are composed of a combination of materials having refractive indices which differ from each other by 1.

Abstract: A method of forming an insulating film containing silicon oxy-nitride includes a loading step, temperature raising step, oxidation step, cycle purge step, and annealing step, in this order. The temperature raising step is performed while supplying nitrogen gas and oxygen gas for preventing a silicon layer surface from being nitrided, at a supply ratio 100:1 to 1000:1. The oxidation step is performed at a temperature of 700 to 950° C. while supplying a gas that contains 1 to 5 vol % of water vapor and 95 to 99 vol % of nitrogen gas, to form a silicon oxide film. The annealing step is performed at a temperature of 800 to 950° C. while supplying a gas that contains 10 to 100 vol % of nitrogen monoxide gas, to convert a portion of the silicon oxide film into silicon oxy-nitride.

Abstract: A manufacturing method for semiconductor devices that can improve uniformity in the surface of a silicon nitride film or a nitride film to be formed and improve production efficiency is provided. A step of forming a first film that is a silicon oxide film or a silicon oxynitride film on a silicon substrate, a step of forming a second film that is a tetrachlorosilane monomolecular layer, and a step of forming a third film that is a silicon nitride monomolecular layer by performing a nitriding process on the second film are included. A silicon nitride film having a predetermined film thickness is formed by repeating the step of forming the second film and the step of forming the third film for a predetermined number of times. In a manufacturing apparatus, a plurality of silicon substrates are arranged on a stair-like wafer boat, and a process gas is supplied toward the upper side of a reaction tube from a process gas supply pipe.

Abstract: The sensitivity of a pressure-sensitive element in a pressure-sensitive part of a control valve for variable-capacity compressor is made adjustable by means of an adjusting screw provided so as to permit an adjustment of forward and backward movement with respect to a frame supporting the pressure-sensitive part. The adjusting screw is rotated by engaging an engagement part, which is annexed to a coil assembly constituting a solenoid excitation part, against the adjusting screw thereby to operate the coil assembly.

Abstract: An object of the present invention is to enable very easy installation of a stopper buffering material for absording impacts during tilt and telescopic adjustment, in a steering device having a tilt and telescopic adjustment mechanism, and to ensure that the stopper buffering material is not readily detachable, once installed.

Abstract: In a control valve for a variable capacity compressor, a patch member is provided to a movable-side end portion of a bellows main body. A valve rod is fitted in the fitting recessed portion formed in the patch member. A compression coil spring is disposed between the patch member and a lower patch member for supporting a fixed-side end portion of the bellows main body.

Abstract: A valve element disposed in the valve chamber of a control valve body of a control valve for variable capacity compressors performs opening and closing operations by a plunger. The upper end of the valve element of this control valve body is inserted in the pressure chamber, while the lower end of the valve element is inserted in the plunger chamber of the solenoid excitation part. And the plunger chamber and the pressure chamber communicate with each other through a cancel hole formed in this valve element.

Abstract: The sensitivity of a pressure-sensitive element in a pressure-sensitive part of a control valve for variable-capacity compressor is made adjustable by means of an adjusting screw provided so as to permit an adjustment of forward and backward movement with respect to a frame supporting the pressure-sensitive part. The adjusting screw is rotated by engaging an engagement part, which is annexed to a coil assembly constituting a solenoid excitation part, against the adjusting screw thereby to operate the coil assembly.

Abstract: A method of forming an insulating film containing silicon oxy-nitride first forms a silicon oxide film on the surface of a silicon wafer by oxidizing the water. In this oxidation, the atmosphere in a process chamber accommodating the silicon wafer is set at a first temperature of from 700 to 950° C. and a first pressure of from 0.7 to a value of [atmospheric pressure −0.375] Torr for a first processing time of from 0.5 to 30 min, and a first processing gas for oxidation is supplied into the process chamber. This first processing gas contains 1 to 5 vol % of water vapor and 95 to 99 vol % of nitrogen gas. After the silicon oxide film is formed, annealing is performed to convert at least a portion of the silicon oxide film into silicon oxy-nitride. In this annealing, the atmosphere in the process chamber is set at a second heating temperature of from 800 to 950° C. and a second pressure of from 0.

Abstract: A steering device comprises a fixed bracket 1; a movable bracket 2, to which a steering column 10 is attached; two sets of through holes 3, 3 including front and back through hole sets formed in fixed bracket 1 and movable bracket 2, respectively, at least one set a transverse slot 3a and a vertical slot 3b intersecting each other; two clamping/fastening bolts 5, 5 inserted through holes 3, 3; an arm member 6 fastened to one of clamping/fastening bolts 5,; an operating lever member 9; a retaining member 7 for holding the clamping/fastening bolts 5, 5 to be spaced by a predetermined distance; and a linking member 8, which is pivotally linked to the arm member 6 and operating lever member 9.

Abstract: A valve element disposed in the valve chamber of a control valve body of a control valve for variable capacity compressors performs opening and closing operations by a plunger. The upper end of the valve element of this control valve body is inserted in the pressure chamber, while the lower end of the valve element is inserted in the plunger chamber of the solenoid excitation part. And the plunger chamber and the pressure chamber communicate with each other through a cancel hole formed in this valve element.

Abstract: A control valve for a variable capacity compressor, which comprises a solenoid magnetization portion disposed at a central portion, a main body disposed on one side of the solenoid magnetization portion, and a pressure sensitive portion disposed on the other side of the solenoid magnetization portion. The main body comprises a discharge coolant port communicating with a discharge pressure region of the variable capacity compressor, a first intermediate coolant port communicating with a first intermediate pressure region, a suction coolant port communicating with a suction pressure region, and a second intermediate coolant port communicating with a second intermediate pressure region of the variable capacity compressor.

Abstract: A control valve for a variable capacity compressor, which comprises a valve housing having a valve port formed between an inlet port and an outlet port, a valve disposed inside the valve housing for controlling the flow rate through the adjustment of opening degree of the valve port, a pressure sensitive bellows for actuating the opening or closing of the valve, and a solenoid magnetization means, wherein the pressure sensitive bellows is incorporated into the plunger of the solenoid magnetization means.

Abstract: A medium issuing apparatus using at least a paper roll medium and an automatic teller machine including the apparatus are disclosed, in which the operation of changing the width of the paper rolls for issuing a medium, the maximum diameter of the paper rolls, the printing surface and the tandem arrangement or juxtaposition of the paper rolls is performed with a single apparatus. The medium issuing apparatus is so configured that the paper rolls are held on a replaceable holding frame, the roll paper from the desired paper roll is transported and printed in a common printing mechanism. The printed roll paper is cut off and a predetermined number of cut pieces are stored and bundled in a temporary storage section. The roll paper cut off and bundled are transported to a common ejection opening by a transport mechanism, and ejected from the same common ejection opening by another transport mechanism. The outer diameter, width and winding direction of the paper rolls can be changed by the holding frame.

Abstract: The present invention relates to a steering device of the type which carries out tilt/telescopic adjustments using front-back dual-location clamping/fastening bolts disposed at front and back, two locations, and has objects to stabilize and improve operation at the time of a tilt/telescopic adjustment thereof, and to provide better lever operation feeling.

Abstract: A medium issuing apparatus using at least a paper roll medium and an automatic teller machine including the apparatus are disclosed, in which the operation of changing the width of the paper rolls for issuing a medium, the maximum diameter of the paper rolls, the printing surface and the tandem arrangement or juxtaposition of the paper rolls is performed with a single apparatus. The medium issuing apparatus is so configured that the paper rolls are held on a replaceable holding frame, the roll paper from the desired paper roll is transported and printed in a common printing mechanism. The printed roll paper is cut off and a predetermined number of cut pieces are stored and bundled in a temporary storage section. The roll paper cut off and bundled are transported to a common ejection opening by a transport mechanism, and ejected from the same common ejection opening by another transport mechanism. The outer diameter, width and winding direction of the paper rolls can be changed by the holding frame.

Abstract: A solenoid operated valve 10′ comprises a coil 21, a suction element 24, a plunger 31, a spring 25, a valve member 26, a bobbin 22, a housing 27 and a cap 28, wherein the plunger 31 is moved toward the suction element 24 when electricity is supplied to the coil 21. A pipe sleeve 30 is formed as a deep-drawn integrated pipe with a bottom, which is inserted to the inner side of the bobbin 22, and to which the suction element 24 is inserted and fixed. The plunger 31 is slidably inserted to the pipe sleeve 30. The valve member fixed to the end of plunger 31 opens or closes a valve opening 32. A cylindrical filter is fit to the outer peripheral of a flow-in opening 33, and assembled to a corresponding member.

Abstract: A control valve for a variable capacity compressor; wherein an opening degree of a valve member disposed in a coolant gas passage for communicating a discharge pressure region of the variable capacity compressor with a crankcase thereof is made adjustable by a magnetization action of a solenoid, thereby causing an inclination angle of a wobble plate to change and also causing a discharging capacity of the compressor to change; and which is characterized in that the main valve body comprises a solenoid, a pressure sensitive chamber provided with bellows and a valve chamber provided with the valve member, and that the solenoid is provided with a plunger connected with one end of a stem, whose other end of the stem being detachably contacted with a stopper of the bellows, and the other end of the plunger being linked to a rod to be contacted with the valve member.