Abstract: There is disclosed a cleaning liquid for producing a semiconductor device which comprises (A) fluorine-containing compound; (B) water-soluble or water-miscible organic solvent; and (C) inorganic acid and/or organic acid, optionally, further comprises (D) quaternary ammonium salt or (D') a specific organic carboxylic acid ammonium salt and/or an organic carboxylic acid amine salt; as well as a process for producing a semiconductor device by forming a resist pattern on a substrate equipped on the surface with an insulating film layer or a metallic electroconductive layer, forming a via hole or electric wiring by dry etching, removing the resist pattern by ashing treatment with oxygen plasma; and effecting an cleaning treatment with the above cleaning liquid. The above cleaning liquid and production process can readily remove the deposit polymer formed in the case of dry etching without impairing metallic film and insulating film.

Abstract: A semiconductor integrated circuit comprising first n-channel MISFETs constituting the memory cells of a storage system, second n-channel MISFETs constituting the peripheral circuits of the storage system, and third n-channel MISFETs constituting the output circuit among the peripheral circuits. The respective threshold voltages of the first n-channel MISFETs, the second n-channel MISFETs and the third n-channel MISFETs are decreased in that order when the respective gate lengths of those MISFETs are substantially the same.

Abstract: An automatic film unloading apparatus permits an undeveloped film to be automatically unloaded from its cartridge, rewound correctly in a case within a short period of time, and moved to a location where it is joined to a film leader. An intermediate film takeup cartridge for use in the automatic film developer apparatus includes an intermediate cartridge body including a film takeup roller and a base which can easily be separated from each other. When the entire length of an undeveloped film is rewound on the film takeup roller or the undeveloped film is jammed, the intermediate cartridge body is readily separated from the base, hence allowing the taken up or jammed undeveloped film to be removed from the film takeup roller with ease.

Abstract: Disclosed is apparatus for treating samples, and a method of using the apparatus. The apparatus includes processing apparatus (a) for treating the samples (e.g., plasma etching apparatus), (b) for removing residual corrosive compounds formed by the sample treatment, (c) for wet-processing of the samples and (d) for dry-processing the samples. A plurality of wet-processing treatments of a sample can be performed. The wet-processing apparatus can include a plurality of wet-processing stations. The samples can either be passed in series through the plurality of wet-processing stations, or can be passed in parallel through the wet-processing stations.

Abstract: A film cartridge case which holds and carries therein a group of film cartridges for feeding sheets of undeveloped film loaded in their respective film cartridges to the development unit of an automatic photographic film development processor apparatus includes a plurality of cartridge pockets. Each pocket has a mispositioning preventing projection provided on one side of an inner wall thereof for engaging with a barcode readout window in the film cartridge upon the film cartridge being placed in the cartridge pocket in a correct orientation. The case includes holding members for detachably holding the film cartridges in their respective cartridge pockets. A conveyor element is arranged to be engaged by a conveying device. Film sheets can be loaded to and unloaded from respective film cartridges installed in the cartridge pockets.

Abstract: An automatic film development apparatus includes a cartridge case for carrying a group of film cartridges loaded with undeveloped films. A feeder unit stores a plurality of the cartridge cases and delivering them one by one to an unloading station for unloading sheets of undeveloped film from respective film cartridges in the cartridge case. The undeveloped film sheet is rewound at a rewinding station into a takeup cartridge. A splicer unit joins one end of the undeveloped film sheet from the takeup cartridge to a short film leader supplied from a film leader supply unit for feeding short film leaders one at the time. A development unit developes the undeveloped film sheet joined to the short film leader. A separator unit separates a developed film sheet from the short film leader. The developed film sheet separated from the short film leader is loaded at a loading station back into its film cartridge.

Abstract: A splicing device which can automatically connect films to a leader, includes a table for supporting the leader. The table has an opening over which is provided a support portion for supporting a film cartridge. A fixed guide and a movable guide are provided under the opening. Defined between the fixed and movable guides is a film turning passage having a film outlet and inlet that face the opening. A feed roller and a press roller are provided at the inlet of the film turning passage. With the leader set in position on the table, a swing arm is pivoted to catch the film end protruding from the film cartridge supported by the support portion. The swing arm is further pivoted to guide the film end through a second hole formed in the leader into the film turning passage. In this state, the feed roller is rotated to feed the film through the film turning passage and into the first hole formed in the leader while resiliently deforming prongs extending across the first hole.

Abstract: A leader transport apparatus in a automatic film processing apparatus includes a fixed base having transporting rollers, a movable base having transporting rollers and a driving unit for driving the transporting rollers. The fixed base and the movable base are so disposed that the transporting rollers of the fixed base can each confront the transporting rollers of the movable base, and the driving unit is adapted to drive the transporting rollers of at least one of the fixed base and the movable base so that a leader and an undeveloped film can be transported with sandwiched between the transporting rollers of the fixed base and the transporting rollers of the movable base, the movable base being supported at one end thereof by a hinge so that it can be opened and closed arbitrarily.

Abstract: A parallel-plate plasma etching apparatus includes a susceptor electrode and a shower electrode which are arranged in a process chamber. A semiconductor wafer is placed on the susceptor electrode. A shower region defined by a plurality of process gas supply holes is formed in the shower electrode. The shower electrode is cooled by a cooling block and causes an effective electrode portion of the shower electrode to have a temperature gradient such that a temperature at the central portion of the effective electrode portion is lower than a temperature at the peripheral portion of the effective electrode portion. The diameter of the shower region is selected to be smaller than the diameter of the wafer by 5 to 25% such that degradation of planar uniformity of a degree of etching anisotropy on the wafer caused by the temperature gradient of the effective electrode portion is compensated for.

Abstract: An automatic photosensitive material developing machine supplies a solid processing solution to be dissolved according to consumption of processing solution for a silver halide photosensitive material to be treated. The developing machine includes a solid processing solution supplying section for supplying the solid processing solution from a solid processing solution cartridge containing the solid processing solution, and a solid processing solution transferring section for receiving the solid processing solution supplied by the solid processing solution supplying section in a bucket, and for transferring the bucket upward.

Abstract: A semiconductor integrated circuit comprising first n-channel MISFETs constituting the memory cells of a storage system, second n-channel MISFETs constituting the peripheral circuits of the storage system, and third n-channel MISFETs constituting the output circuit among the peripheral circuits. The respective threshold voltages of the first n-channel MISFETs, the second n-channel MISFETs and the third n-channel MISFETs are decreased in that order when the respective gate lengths of those MISFETs are substantially the same.

Abstract: A transmission device has holding slots provided in a boss portion thereof for holding engaging elements. A drive shaft has engaging recesses provided in an outer surface thereof for accepting partially the engaging elements to engage the transmission device with the drive shaft. The engaging elements remain urged against the engaging recesses of the drive shaft by a resilient member which is disposed radially of a boss portion of the transmission device for maintaining the engagement of the transmission device with the drive shaft. When the transmission device is overloaded, the engaging elements depart from the engaging recesses in the drive shaft, against the urging force of the resilient member, to cancel the transmission of torque from the drive shaft to the transmission device.

Abstract: An automatic film processing apparatus includes a detector plate which is projected upward when cartridges are placed in cartridge case in an adverse manner. Limit switches detect the upward displacement of the detector plate and present a warning signal to an operator.

Abstract: A process for forming an upper-layer fin and a lower-layer fin of a storage electrode, and a semiconductor integrated circuit device fabricated by the process. When two-layered polycrystalline silicon films are to be sequentially etched to form the upper-layer fin and the lower-layer fin by the dry-etching method using a first mask, the upper polycrystalline silicon film is patterned at first so far as to form the clearance of the upper-layer fins with the minimum working size of the memory cells of a DRAM, to form the upper-layer fin. Next, the lower-layer fin is formed by the dry-etching method using a second mask which has a pattern enlarged in self-alignment from the pattern of the first mask, so that it is given a larger horizontal size than that of the upper-layer fin.

Abstract: A photographic processing apparatus including at least a printer section and a printing paper developing section further includes a printing paper transport apparatus having a mechanism which holds printing paper received from the printer section, slides the printing paper to the printing paper developing section, and delivers the printing paper thereto. The photographic processing apparatus is preferably provided with an index printer and an enveloper to implement effective continuous processing. In the printer section of the photographic processing apparatus, a scanner and a lens are disposed in different positions on a negative film conveying line, and an optical path changeover mirror is provided which is capable of changing the facing direction of the reflecting surface thereof in two directions with respect to the optical axis of one light source lamp.

Abstract: A sewage treatment system is provided for cleaning sewage by filtering solid components in the sewage through use of a floating filter medium, wherein the filtration performance can be improved and the filtration cleaning can be performed efficiently. The sewage flows upwardly in the treatment tank and is filtered through the floating filter media layer made of cylindrical mesh floating filter media which have a smaller specific gravity than the sewage. To wash the floating filter medium, air is jetted from the air jetting pipes to generate a circular flow to scape off solid components adhering to the filter medium. Then the waste, which has washed the floating filter medium is discharged to the outside of the treatment tank while the air is jetted from the air jetting pipe for full jetting of the floating filter media layer unidirectionally.

Abstract: Extra printing is made possible during a set of ordinary processing operations such as film development and printing. A film is developed and dried while being fed by a leader attached thereto. After cutting the leader from the film, it is fed to the printing unit to print the images on the film onto photographic paper. A plurality of film stocking units are provided in a path from the film drying unit to the printing unit. Each stocking unit can selectively stock a single film or allow it to pass without stocking. A second film stocking unit can move laterally to change the film track. If a film requiring a long exposure time is present in the printing unit, the subsequent films that have been developed and dried can be stocked in the other film stocking units. Thus, continuous film developing operations are not interrupted.

Abstract: A sewage treatment system is provided, for cleaning a sewage by filtering solid components in the swage through floating filter medium, wherein the filtration performance can be improved and the filtration cleaning can be performed efficiently. The sewage 18 is flowed into the treatment tank 12 in upward-flow, and filtered through the floating filter media layer 22 made of the meshy cylindrical floating filter medium 20 which have smaller specific gravity than the sewage 18. To wash floating filter medium 20, the air is jetted from the air jetting pipe 54 and the revolution flow is generated to scale solid components adhering to filter medium, and then the sewage 18, which has washed the floating filter medium 20, are discharged to the outside of the tank 12 while the air is jetted from the air jetting pipe 56 for full jetting to jet the floating filter media layer 22 in whole.

Abstract: Various arrangements are proposed for coupling films to a leader. A hole is formed in one of the films and the leader to receive a tab which is formed on the other. These arrangements allow stable coupling of the films to the leader and easy uncoupling. They eliminate the use of splice tape.

Abstract: The films are developed and printed continuously and automatically even if the film feed direction in the film processor and the one in the printer are not in the same vertical plane. A film stocking unit is provided downstream of the film driving unit. The film stocking unit is movable to a position aligned with the film feed path extending to the printing unit. This increases the freedom or flexibility in arranging the film processor and the printer.