Abstract: A cleaning apparatus for a semiconductor manufacturing apparatus includes: a oxide removal unit that removes an oxide over a surface of a deposit adhered to components of the semiconductor manufacturing apparatus, and a deposit removal unit that removes the deposit after the oxide over the surface is removed by the oxide removal unit.

Abstract: A semiconductor device includes: a semiconductor layer formed over a substrate; an insulating film formed over the semiconductor layer; and an electrode formed over the insulating film, wherein the insulating film includes an amorphous film including carbon.

Abstract: A semiconductor device includes a first semiconductor layer formed over a substrate, a second semiconductor layer formed over the first semiconductor layer, a source electrode and a drain electrode formed over the second semiconductor layer, an insulating film formed over the second semiconductor layer, a gate electrode formed over the insulating film, and a protection film covering the insulating film, the protection film being formed by thermal CVD, thermal ALD, or vacuum vapor deposition.

Abstract: Provided is an electrolyte containing tetrafluoroaluminate ions, which is advantageous in that the electrolyte can be prevented from leaking from both the cathode and the anode in an electrolytic capacitor.

Abstract: According to one embodiment, a magnetic head includes a slider, a recording/reproduction element formed on a distal end face of the slider, and a resin film formed at least on the recording/reproduction element and the distal end face and having at least one of water repellency and oil repellency.

Abstract: A novel technology for lowering the surface free energy is provided. A treatment surface is irradiated with ultraviolet light in a gas containing a fluorine-containing organic substance, thereby forming a coating layer on the treatment surface.

Abstract: It is an object to provide a non-aqueous electrolyte for use in a primary battery, which is advantageous in that the primary battery using the non-aqueous electrolyte suffers less lowering of voltage during the high-rate discharge and can work stably. Disclosed are a non-aqueous electrolyte for use in a primary battery, comprising at least one organic compound selected from the group consisting of 1,2-benzoquinone, 1,4-naphthoquinone, 1,2-naphthoquinone, 9,10-anthraquinone, 1,4-anthraquinone, acenaphthenequinone, and a derivative of 1,2-benzoquinone, 1,4-naphthoquinone, 1,2-naphthoquinone, 9,10-anthraquinone, 1,4-anthraquinone, acenaphthenequinone, or 1,4-benzoquinone; a non-aqueous electrolyte for use in a primary battery, comprising an organic compound exhibiting a reduction potential of 2.

Abstract: An electrolytic capacitor having a low impedance characteristic, having a high withstand voltage characteristic of 100V class, wherein the electrolytic capacitor provides an excellent high temperature life characteristic and an excellent leakage characteristic. The electrolyte solution containing the aluminum tetrafluoride salt is used. The electrolytic capacitor of the present invention has a low impedance characteristic, a high withstand voltage characteristic, and an excellent high temperature life characteristic. Moreover, the aforementioned electrolyte solution is used, and a foil showing noble potential at least in the electrolyte solution than the electrode potential of the cathode tab, or a cathode electrode foil subjected to chemical treatment is used as the cathode electrode foil, so as to obtain an excellent leakage characteristic.

Abstract: An electrolytic capacitor having a low impedance characteristic, having a high withstand voltage characteristic of 100V class, wherein the electrolytic capacitor provides an excellent high temperature life characteristic. The electrolyte solution containing the aluminum tetrafluoride salt is used. The moisture content of the capacitor element is adjusted to 0.7% by weight or less, wit respect to the weight of the capacitor element, preferably 0.5% by weight or less, and most preferably 0.4% by weight or less. In this way, the electrolytic capacitor having the low impedance characteristic and the high resistance voltage characteristic, and the excellent high temperature life characteristic is provided.

Abstract: Provided is an electrolytic capacitor which is advantageous in that an electrolyte is remarkably prevented from leaking from the anode. The present invention is directed to an electrolytic capacitor comprising: a capacitor element which comprises an anode foil with an anode lead means and a cathode foil with a cathode lead means being spirally wound together with a separator disposed therebetween, the capacitor element being impregnated with an electrolyte; a casing for containing therein the capacitor element; and a closure for sealing up an opening portion of the casing, wherein the anode lead means has a ceramic coating layer and/or an insulating synthetic resin layer at least part of the portion in contact with the closure.

Abstract: Provided is an electrolyte containing tetrafluoroaluminate ions, which is advantageous in that the electrolyte can be prevented from leaking from both the cathode and the anode in an electrolytic capacitor.

Abstract: An electrolyte for an electrolytic capacitor which is high in electrolytic conductivity, excellent in heat stability and high in withstand voltage. An electrolyte for an electrolytic capacitor comprising a tetrafluoroaluminate ion; and an electrolyte for an electrolytic capacitor containing a salt and a solvent, characterized in that electrolytic conductivity X (mS·cm?1) at 25° C. and withstand voltage Y (V) of a capacitor satisfy the relationships of formulae (I): Y??7.5X+150, and X?4, Y>0.

Abstract: The present invention provides a surface-modified resist pattern which contains a resist pattern having low etch resistance by itself but having a modified and etch-resistant surface and is suitable for fine and high-definition patterning, and a method for efficiently forming the same. The method forms a surface-modified resist pattern having an etch-resistant surface by selectively depositing an organic compound on a resist pattern. The deposition is preferably carried out by using plasma of a gas. The method preferably includes arranging the organic compound so as to face the resist pattern, the organic compound having been deposited on a base material, and depositing the organic compound onto the resist pattern. The plasma of the gas is preferably introduced from an opposite side of the base material to the organic compound deposited thereon.

Abstract: The present invention provides an electric double layer capacitor which has electrodes made of an alkali-activated carbon, prepared from a graphitic material, useful in manufacturing high-capacitance capacitors and which has an electrolytic solution containing chain carbonate and/or cyclic carbonate. Even if the electric double layer capacitor is used under high-temperature and high-voltage conditions, chain carbonate and/or cyclic carbonate is prevented from being degraded and the amount of generated gas is slight. The electric double layer capacitor has high initial performance and energy density and the performance of the electric double layer capacitor is maintained high.

Abstract: A network monitoring method and system reduces a load to a monitoring network without deteriorating accuracy of detecting a malfunction. A plurality of network constituent elements that constitute a communication network are connected to an operation system through a monitoring network. A health check for detecting a malfunction is periodically performed between a group of the network constituent elements positioned closed to each other within the communication network at a short monitoring period. A health check of malfunction detection on all of the network constituent elements is performed by the operation system at a long monitoring period longer than the short monitoring period.

Abstract: Electrolyte solution and an electrolytic capacitor using it having a low impedance characteristic, having a high withstand voltage characteristic of 100V class, and a high temperature life characteristic is provided. The electrolyte solution containing an aluminum tetrafluoride salt, and a solvent with high boiling point, such as sulfolane, 3-methyl sulfolane, and 2,4-dimethyl sulfolane, and the like are used. The electrolytic capacitor of the present invention has a low impedance characteristic, a high withstand voltage characteristic, and an excellent high temperature life characteristic.

Abstract: There are provided an aluminum electrolytic capacitor comprising an anode, a cathode comprising aluminum and an electrolytic solution containing an onium salt of fluorine-containing anion, wherein the electrolytic solution has a water concentration of 1% by weight or less, or wherein the cathode has a peak top of Al2p spectrum of 74.0 to 75.8 eV as measured by a method in which the surface of the cathode in the aluminum electrolytic capacitor heated at 125° C. for 50 hours is analyzed by X-ray photoelectron spectroscopy (XPS); an electrolytic solution for electrolytic capacitor comprising a quaternary cyclic amidinium tetrafluoroaluminate and a solvent and containing specific impurity compounds in a total amount of 0.6% by weight or less, and an electrolytic capacitor using the electrolytic solution; and a method for preparing an organic onium tetrafluoroaluminate which is advantageously used in an aluminum electrolytic capacitor.

Abstract: In an electric double layer capacitor and electrolytic solution, decomposition of at least one of an open-chain carbonate and a cyclic carbonate can be controlled under high temperature conditions, initial performance and maintained ratio of capacitance are superior, and energy density is high, when graphitized alkali-activated carbon is used as an electrode material and at least one of an open-chain carbonate and a cyclic carbonate is used in an organic electrolytic solution. The electric double layer capacitor includes electrodes containing alkali-activated carbon including graphitized carbon material, and an organic electrolytic solution in which a supporting salt is dissolved in solvent including aromatic carboxylate and at least one of an open-chain carbonate and a cyclic carbonate, in which the content of the aromatic carboxylate is not more than 50 weight % relative to the total weight of the solvent.

Abstract: A magnetic disk is produced with improved yield by forming a DLC protective film by a d.c. magnetron sputtering process conducted in a sputtering atmosphere containing oxygen. The magnetic disk carries a lubricating film on the DLC film wherein a fluorocarbon resin constituting the lubricating film contains photocrosslinking groups. A lubricating film having non-polar end groups is also disclosed.

Abstract: A magnetic disk is produced with improved yield by forming a DLC protective film by a d.c. magnetron sputtering process conducted in a sputtering atmosphere containing oxygen. The magnetic disk carries a lubricating film on the DLC film wherein a fluorocarbon resin constituting the lubricating film contains photocrosslinking groups. A lubricating film having non-polar end groups is also disclosed.