Patents by Inventor Matthew J. King

Matthew J. King has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230117100
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first deck located over a substrate, and a second deck located over the first deck, and pillars extending through the first and second decks. The first deck includes first memory cells, first control gates associated with the first memory cells, and first conductive paths coupled to the first control gates. The second conductive paths include second conductive pads located on a first level of the apparatus over the substrate. The second deck includes second memory cells, second control gates associated with the second memory cells, and second conductive paths coupled to the second control gates. The second conductive paths include second conductive pads located on a second level of the apparatus. The first and second conductive pads having lengths in a direction perpendicular to a direction from the first deck to the second deck.
    Type: Application
    Filed: December 19, 2022
    Publication date: April 20, 2023
    Inventors: Darwin A. Clampitt, Shawn D. Lyonsmith, Matthew J. King, Lise M. Clampitt, John Hopkins, Kevin Y. Titus, Indra V. Chary, Martin Jared Barclay, Anilkumar Chandolu, Pavithra Natarajan, Roger W. Lindsay
  • Publication number: 20230104297
    Abstract: Some embodiments include an integrated assembly having a first structure containing semiconductor material, and having a second structure contacting the first structure. The first structure has a composition along an interface with the second structure. The composition includes additive to a concentration within a range of from about 1018 atoms/cm3 to about 1021 atoms/cm3. The additive includes one or more of carbon, oxygen, nitrogen and sulfur. Some embodiments include methods of forming integrated assemblies.
    Type: Application
    Filed: December 2, 2022
    Publication date: April 6, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Yiping Wang, Andrew Li, Haoyu Li, Matthew J. King, Wei Yeeng Ng, Yongjun Jeff Hu
  • Patent number: 11621273
    Abstract: Some embodiments include an integrated assembly having a first structure containing semiconductor material, and having a second structure contacting the first structure. The first structure has a composition along an interface with the second structure. The composition includes additive to a concentration within a range of from about 1018 atoms/cm3 to about 1021 atoms/cm3. The additive includes one or more of carbon, oxygen, nitrogen and sulfur. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: May 13, 2020
    Date of Patent: April 4, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Yiping Wang, Andrew Li, Haoyu Li, Matthew J. King, Wei Yeeng Ng, Yongjun Jeff Hu
  • Publication number: 20230063178
    Abstract: A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls.
    Type: Application
    Filed: December 29, 2021
    Publication date: March 2, 2023
    Inventors: Bo Zhao, Matthew J. King, Jason Reece, Michael J. Gossman, Shruthi Kumara Vadivel, Martin J. Barclay, Lifang Xu, Joel D. Peterson, Matthew Park, Adam L. Olson, David A. Kewley, Xiaosong Zhang, Justin B. Dorhout, Zhen Feng Yow, Kah Sing Chooi, Tien Minh Quan Tran, Biow Hiem Ong
  • Publication number: 20230043786
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatus includes a first conductive contact; a second conductive contact; levels of conductive materials stacked over one another and located over the first and second conductive contacts; levels of dielectric materials interleaved with the levels of the conductive materials, the levels of conductive materials and the levels of dielectric materials formed a stack of materials; a first conductive structure located on a first side of the stack of materials and contacting the first conductive contact and a first level of conductive material of the levels of conductive materials; and a second conductive structure located on a second side of the stack of materials and contacting the second conductive contact and a second level of conductive material of the levels of conductive materials.
    Type: Application
    Filed: October 14, 2022
    Publication date: February 9, 2023
    Inventors: Darwin A. Clampitt, Roger W. Lindsay, Christopher R. Ritchie, Shawn D. Lyonsmith, Matthew J. King, Lisa M. Clampitt
  • Publication number: 20230041326
    Abstract: A variety of applications can include memory devices designed to provide enhanced gate-induced-drain-leakage (GIDL) current during memory erase operations. The enhanced operation can be provided by enhancing the electric field in the channel structures of select gate transistors to strings of memory cells. The channel structures can be implemented as a segmented portion for drains and a portion opposite a gate. The segmented portion includes one or more fins and one or more non-conductive regions with both fins and non-conductive regions extending vertically from the portion opposite the gate. Variations of a border region for the portion opposite the gate with the segmented portion can include fanged regions extending from the fins into the portion opposite the gate or rounded border regions below the non-conductive regions. Such select gate transistors can be formed using a single photo mask process. Additional devices, systems, and methods are discussed.
    Type: Application
    Filed: August 9, 2021
    Publication date: February 9, 2023
    Inventors: Darwin A. Clampitt, Albert Fayrushin, Matthew J. King, Madison D. Drake
  • Publication number: 20220415917
    Abstract: A microelectronic device comprises a stack structure comprising alternating conductive structures and insulative structures arranged in tiers, each of the tiers individually comprising a conductive structure and an insulative structure, strings of memory cells vertically extending through the stack structure, the strings of memory cells comprising a channel material vertically extending through the stack structure, and another stack structure vertically overlying the stack structure and comprising other tiers of alternating levels of other conductive structures and other insulative structures, the other conductive structures exhibiting a conductivity greater than a conductivity of the conductive structures of the stack structure. Related memory devices, electronic systems, and methods are also described.
    Type: Application
    Filed: August 26, 2022
    Publication date: December 29, 2022
    Inventors: Daniel Billingsley, Matthew J. King, Jordan D. Greenlee, Yongjun J. Hu, Tom George, Amritesh Rai, Sidhartha Gupta, Kyle A. Ritter
  • Patent number: 11532638
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first deck located over a substrate, and a second deck located over the first deck, and pillars extending through the first and second decks. The first deck includes first memory cells, first control gates associated with the first memory cells, and first conductive paths coupled to the first control gates. The second conductive paths include second conductive pads located on a first level of the apparatus over the substrate. The second deck includes second memory cells, second control gates associated with the second memory cells, and second conductive paths coupled to the second control gates. The second conductive paths include second conductive pads located on a second level of the apparatus. The first and second conductive pads having lengths in a direction perpendicular to a direction from the first deck to the second deck.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: December 20, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Darwin A. Clampitt, Shawn D. Lyonsmith, Matthew J. King, Lisa M. Clampitt, John Hopkins, Kevin Y. Titus, Indra V. Chary, Martin Jared Barclay, Anilkumar Chandolu, Pavithra Natarajan, Roger W. Lindsay
  • Patent number: 11527546
    Abstract: A microelectronic device comprises a stack structure comprising alternating conductive structures and insulative structures arranged in tiers, each of the tiers individually comprising a conductive structure and an insulative structure, strings of memory cells vertically extending through the stack structure, the strings of memory cells comprising a channel material vertically extending through the stack structure, and another stack structure vertically overlying the stack structure and comprising other tiers of alternating levels of other conductive structures and other insulative structures, the other conductive structures exhibiting a conductivity greater than a conductivity of the conductive structures of the stack structure. Related memory devices, electronic systems, and methods are also described.
    Type: Grant
    Filed: July 30, 2020
    Date of Patent: December 13, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Daniel Billingsley, Matthew J. King, Jordan D. Greenlee, Yongjun J. Hu, Tom George, Amritesh Rai, Sidhartha Gupta, Kyle A. Ritter
  • Patent number: 11508746
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatus includes a first conductive contact; a second conductive contact; levels of conductive materials stacked over one another and located over the first and second conductive contacts; levels of dielectric materials interleaved with the levels of the conductive materials, the levels of conductive materials and the levels of dielectric materials formed a stack of materials; a first conductive structure located on a first side of the stack of materials and contacting the first conductive contact and a first level of conductive material of the levels of conductive materials; and a second conductive structure located on a second side of the stack of materials and contacting the second conductive contact and a second level of conductive material of the levels of conductive materials.
    Type: Grant
    Filed: October 25, 2019
    Date of Patent: November 22, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Darwin A. Clampitt, Roger W. Lindsay, Christopher R. Ritchie, Shawn D. Lyonsmith, Matthew J. King, Lisa M. Clampitt
  • Publication number: 20220293726
    Abstract: A variety of applications can include memory devices designed to provide enhanced gate-induced-drain-leakage (GIDL) current during memory erase operations. The enhanced operation can be provided by enhancing the electric field in the channel structures of the topmost select gate transistors to strings of memory cells upon application of a voltage to the gates of the topmost select gate transistors. This electric field can be provided by using a dissected plug as a contact to the channel structure of the topmost select gate transistor, where the dissected plug has one or more conductive regions contacting the channel structure and one or more non-conductive regions contacting the channel structure. The dissected plug can be part of a contact between the data line and the channel structure. Additional devices, systems, and methods are discussed.
    Type: Application
    Filed: April 6, 2022
    Publication date: September 15, 2022
    Inventors: Albert Fayrushin, Haitao Liu, Matthew J. King
  • Publication number: 20220271051
    Abstract: A microelectronic device comprises a stack structure comprising a stack structure comprising alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures, staircase structures within the stack structure and having steps comprising edges of the tiers, and a doped dielectric material adjacent the steps of the staircase structures and comprising silicon dioxide doped with one or more of boron, phosphorus, carbon, and fluorine, the doped dielectric material having a greater ratio of Si—O—Si bonds to water than borophosphosilicate glass. Related methods of forming a microelectronic device and related electronic systems are also disclosed.
    Type: Application
    Filed: May 3, 2022
    Publication date: August 25, 2022
    Inventors: Jivaan Kishore Jhothiraman, Kunal Shrotri, Matthew J. King
  • Publication number: 20220262820
    Abstract: Microelectronic devices include a stack structure comprising a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A series of pillars extends through the stack structure. At least one isolation structure extends through an upper stack portion of the stack structure. The at least one isolation structure protrudes into pillars of neighboring columns of pillars of the series of pillars. Conductive contacts are in electrical communication with the pillars into which the at least one isolation structure protrudes. Related methods and electronic systems are also disclosed.
    Type: Application
    Filed: May 2, 2022
    Publication date: August 18, 2022
    Inventors: Matthew J. King, David A. Daycock, Yoshiaki Fukuzumi, Albert Fayrushin, Richard J. Hill, Chandra S. Tiwari, Jun Fujiki
  • Patent number: 11417681
    Abstract: A method used in forming a memory array comprising strings of memory cells and operative through-array-vias (TAVs) comprises forming a stack comprising vertically-alternating insulative tiers and conductive tiers. The stack comprises a TAV region and an operative memory-cell-string region. The TAV region comprises spaced operative TAV areas. Operative channel-material strings are formed in the stack in the operative memory-cell-string region and dummy channel-material strings are formed in the stack in the TAV region laterally outside of and not within the operative TAV areas. Operative TAVs are formed in individual of the spaced operative TAV areas in the TAV region. Other methods and structure independent of method are disclosed.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: August 16, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Yi Hu, Merri L. Carlson, Anilkumar Chandolu, Indra V. Chary, David Daycock, Harsh Narendrakumar Jain, Matthew J. King, Jian Li, Brett D. Lowe, Prakash Rau Mokhna Rau, Lifang Xu
  • Patent number: 11411013
    Abstract: A microelectronic device comprises a stack structure comprising a stack structure comprising alternating conductive structures and insulating structures arranged in tiers, each of the tiers individually comprising one of the conductive structures and one of the insulating structures, staircase structures within the stack structure and having steps comprising edges of the tiers, and a doped dielectric material adjacent the steps of the staircase structures and comprising silicon dioxide doped with one or more of boron, phosphorus, carbon, and fluorine, the doped dielectric material having a greater ratio of Si—O—Si bonds to water than borophosphosilicate glass. Related methods of forming a microelectronic device and related electronic systems are also disclosed.
    Type: Grant
    Filed: January 8, 2020
    Date of Patent: August 9, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Jivaan Kishore Jhothiraman, Kunal Shrotri, Matthew J. King
  • Publication number: 20220216229
    Abstract: A microelectronic device includes a pair of stack structures. The pair comprises a lower stack structure and an upper stack structure overlying the lower stack structure. The lower stack structure and the upper stack structure each comprise a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A source region is vertically interposed between the lower stack structure and the upper stack structure. A first array of pillars extends through the upper stack structure, from proximate the source region toward a first drain region above the upper stack structure. A second array of pillars extend through the lower stack structure, from proximate the source region toward a second drain region below the lower stack structure. Additional microelectronic devices are also disclosed, as are related methods and electronic systems.
    Type: Application
    Filed: January 5, 2021
    Publication date: July 7, 2022
    Inventors: Darwin A. Clampitt, John D. Hopkins, Matthew J. King, Roger W. Lindsay, Kevin Y. Titus
  • Publication number: 20220199644
    Abstract: Some embodiments include an integrated assembly having a base (e.g., a monocrystalline silicon wafer), and having memory cells over the base and along channel-material-pillars. A conductive structure is between the memory cells and the base. The channel-material-pillars are coupled with the conductive structure. A foundational structure extends into the base and projects upwardly to a level above the conductive structure. The foundational structure locks the conductive structure to the base to provide foundational support to the conductive structure.
    Type: Application
    Filed: March 10, 2022
    Publication date: June 23, 2022
    Applicant: Micron Technology, Inc.
    Inventors: Darwin A. Clampitt, Matthew J. King, John D. Hopkins, M. Jared Barclay
  • Publication number: 20220199641
    Abstract: A microelectronic device comprises a stack structure comprising a stack structure comprising a vertically alternating sequence of conductive structures and insulative structures arranged in tiers, the stack structure divided into block structures separated from one another by slot structures, strings of memory cells vertically extending through the block structures of the stack structure, the strings of memory cells individually comprising a channel material vertically extending through the stack structure, an additional stack structure vertically overlying the stack structure and comprising a vertical sequence of additional conductive structures and additional insulative structures arranged in additional tiers, first pillars extending through the additional stack structure and vertically overlying the strings of memory cells, each of the first pillars horizontally offset from a center of a corresponding string of memory cells, second pillars extending through the additional stack structure and vertically ove
    Type: Application
    Filed: December 18, 2020
    Publication date: June 23, 2022
    Inventors: Yoshiaki Fukuzumi, Jun Fujiki, Matthew J. King, Sidhartha Gupta, Paolo Tessariol, Kunal Shrotri, Kye Hyun Baek, Kyle A. Ritter, Shuji Tanaka, Umberto Maria Meotto, Richard J. Hill, Matthew Holland
  • Publication number: 20220189974
    Abstract: A semiconductor device structure that comprises tiers of alternating dielectric levels and conductive levels and a carbon-doped silicon nitride over the tiers of the staircase structure. The carbon-doped silicon nitride excludes silicon carbon nitride. A method of forming the semiconductor device structure comprises forming stairs in a staircase structure comprising alternating dielectric levels and conductive levels. A carbon-doped silicon nitride is formed over the stairs, an oxide material is formed over the carbon-doped silicon nitride, and openings are formed in the oxide material. The openings extend to the carbon-doped silicon nitride. The carbon-doped silicon nitride is removed to extend the openings into the conductive levels of the staircase structure. Additional methods are disclosed.
    Type: Application
    Filed: March 8, 2022
    Publication date: June 16, 2022
    Inventors: Jun Fang, Fei Wang, Saniya Rathod, Rutuparna Narulkar, Matthew Park, Matthew J. King
  • Patent number: 11362175
    Abstract: A variety of applications can include memory devices designed to provide enhanced gate-induced-drain-leakage (GIDL) current during memory erase operations. The enhanced operation can be provided by enhancing the electric field in the channel structures of the topmost select gate transistors to strings of memory cells upon application of a voltage to the gates of the topmost select gate transistors. This electric field can be provided by using a dissected plug as a contact to the channel structure of the topmost select gate transistor, where the dissected plug has one or more conductive regions contacting the channel structure and one or more non-conductive regions contacting the channel structure. The dissected plug can be part of a contact between the data line and the channel structure. Additional devices, systems, and methods are discussed.
    Type: Grant
    Filed: March 5, 2021
    Date of Patent: June 14, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Albert Fayrushin, Haitao Liu, Matthew J. King