Patents by Inventor Matthew Metz

Matthew Metz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110121393
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: February 4, 2011
    Publication date: May 26, 2011
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 7893506
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: August 4, 2010
    Date of Patent: February 22, 2011
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Publication number: 20100327377
    Abstract: An interlayer is used to reduce Fermi-level pinning phenomena in a semiconductive device with a semiconductive substrate. The interlayer may be a rare-earth oxide. The interlayer may be an ionic semiconductor. A metallic barrier film may be disposed between the interlayer and a metallic coupling. The interlayer may be a thermal-process combination of the metallic barrier film and the semiconductive substrate. A process of forming the interlayer may include grading the interlayer. A computing system includes the interlayer.
    Type: Application
    Filed: June 26, 2009
    Publication date: December 30, 2010
    Inventors: Gilbert Dewey, Niloy Mukherjee, Matthew Metz, Jack T. Kavalieros, Nancy M. Zelick, Robert S. Chau
  • Publication number: 20100295129
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: August 4, 2010
    Publication date: November 25, 2010
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 7825481
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: December 23, 2008
    Date of Patent: November 2, 2010
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Publication number: 20090321707
    Abstract: Embodiments of an apparatus with a crystallization-resistant high-? dielectric and nanolaminate layer stack in a device and methods for forming crystallization-resistant high-? dielectric and nanolaminate layer stack are generally described herein. Other embodiments may be described and claimed.
    Type: Application
    Filed: June 25, 2008
    Publication date: December 31, 2009
    Inventors: Matthew Metz, Gilbert Dewey
  • Publication number: 20090321941
    Abstract: Embodiments of a phase-stable amorphous high-? dielectric layer in a device and methods for forming the phase-stable amorphous high-? dielectric layer in a device are generally described herein. Other embodiments may be described and claimed.
    Type: Application
    Filed: June 25, 2008
    Publication date: December 31, 2009
    Inventors: Matthew Metz, Gilbert Dewey
  • Patent number: 7575991
    Abstract: A metal oxide layer on a substrate is converted at least partly to a metal layer. At least part of the metal layer is covered by an oxidation resistant cover. The covered layer and underlying metal may be removed, for example, using acid.
    Type: Grant
    Filed: June 30, 2004
    Date of Patent: August 18, 2009
    Assignee: Intel Corporation
    Inventors: Mark L. Doczy, Robert L. Norman, Justin K. Brask, Jack Kavalieros, Matthew Metz, Suman Datta, Robert S. Chau
  • Publication number: 20090142897
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: December 23, 2008
    Publication date: June 4, 2009
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 7518196
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: February 23, 2005
    Date of Patent: April 14, 2009
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Publication number: 20090085082
    Abstract: Controlled deposition of HfO2 and ZrO2 dielectrics is generally described. In one example, a microelectronic apparatus includes a substrate and a dielectric film coupled with the substrate, the dielectric film including ZrO2 and HfO2 wherein the ratio of Zr to Hf in the dielectric film is about 5 to 10 atoms of Zr for every 1 atom of Hf to reduce ToxE or reduce Jox of the dielectric film.
    Type: Application
    Filed: September 27, 2007
    Publication date: April 2, 2009
    Inventors: Gilbert Dewey, Matthew Metz, Jack Kavalieros, Robert Chau
  • Patent number: 7425490
    Abstract: In a metal gate replacement process, a gate electrode stack may be formed of a dielectric covered by a sacrificial metal layer covered by a polysilicon gate electrode. In subsequent processing of the source/drains, high temperature steps may be utilized. The sacrificial metal layer prevents reactions between the polysilicon gate electrode and the underlying high dielectric constant dielectric. As a result, adverse consequences of the reaction between the polysilicon and the high dielectric constant dielectric material can be reduced.
    Type: Grant
    Filed: June 24, 2004
    Date of Patent: September 16, 2008
    Assignee: Intel Corporation
    Inventors: Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Uday Shah, Matthew Metz, Suman Datta, Robert S. Chau
  • Publication number: 20080087985
    Abstract: A buffer layer and a high-k metal oxide dielectric may be formed over a smooth silicon substrate. The substrate smoothness may reduce column growth of the high-k metal oxide gate dielectric. The surface of the substrate may be saturated with hydroxyl terminations prior to deposition.
    Type: Application
    Filed: November 29, 2007
    Publication date: April 17, 2008
    Inventors: Justin Brask, Jack Kavalieros, Mark Doczy, Matthew Metz, Suman Datta, Uday Shah, Gilbert Dewey, Robert Chau
  • Publication number: 20070231984
    Abstract: A method for fabricating a three-dimensional transistor is described. Atomic Layer Deposition of nickel, in one embodiment, is used to form a uniform silicide on all epitaxially grown source and drain regions, including those facing downwardly.
    Type: Application
    Filed: March 31, 2006
    Publication date: October 4, 2007
    Inventors: Matthew Metz, Suman Datta, Mark Doczy, Jack Kavalieros, Justin Brask, Robert Chau
  • Publication number: 20070158702
    Abstract: A transistor comprising a semiconductor including a source, a drain, and a channel interposed between the source and the drain; a first dielectric layer having a first thickness, the first dielectric layer being positioned on the channel; a second dielectric layer having a second thickness, the second dielectric layer being positioned on the first dielectric layer; and a gate electrode on the second dielectric layer, wherein the transistor gate is made of a mid-gap metal. A process comprising depositing a first dielectric layer on at least one surface of a semiconductor layer; depositing a second dielectric layer on the first dielectric layer; depositing a layer of mid-gap metal on the second dielectric layer; and patterning and etching the first dielectric layer, the second dielectric layer and the layer of mid-gap metal to create a gate electrode separated from the substrate by a first dielectric and a second dielectric. Other embodiments are disclosed and claimed.
    Type: Application
    Filed: December 30, 2005
    Publication date: July 12, 2007
    Inventors: Mark Doczy, Matthew Metz, Justin Brask, Robert Chau, Gilbert Dewey
  • Publication number: 20070152271
    Abstract: A method of manufacturing a semiconductor device and a novel semiconductor device are disclosed herein. An exemplary method includes sputtering a capping layer in-situ on a gate dielectric layer, before any high temperature processing steps are performed.
    Type: Application
    Filed: December 30, 2005
    Publication date: July 5, 2007
    Inventors: Gilbert Dewey, Mark Doczy, Suman Datta, Justin Brask, Matthew Metz
  • Publication number: 20070145498
    Abstract: Embodiments of the invention provide a device with a metal gate, a high-k gate dielectric layer and reduced oxidation of a substrate beneath the high-k gate dielectric layer. An oxygen-scavenging spacer layer on side walls of the high-k gate dielectric layer and metal gate may reduce such oxidation during high temperature processes.
    Type: Application
    Filed: December 27, 2005
    Publication date: June 28, 2007
    Inventors: Matthew Metz, Mark Doczy, Justin Brask, Robert Chau
  • Publication number: 20070138565
    Abstract: A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.
    Type: Application
    Filed: December 15, 2005
    Publication date: June 21, 2007
    Inventors: Suman Datta, Mantu Hudait, Mark Doczy, Jack Kavalleros, Majumdar Amlan, Justin Brask, Been-Yih Jin, Matthew Metz, Robert Chau
  • Publication number: 20070126067
    Abstract: Embodiments of the invention provide a device with a reverse-tapered gate electrode and a gate dielectric layer with a length close to that of the gate length. In an embodiment, this may be done by altering portions of a blanket dielectric layer with one or more angled ion implants, then removing the altered portions of the blanket dielectric layer.
    Type: Application
    Filed: December 1, 2005
    Publication date: June 7, 2007
    Inventors: Michael Hattendorf, Justin Brask, Justin Sandford, Jack Kavalieros, Matthew Metz
  • Publication number: 20070123003
    Abstract: A Group III-V Semiconductor device and method of fabrication is described. A high-k dielectric is interfaced to a confinement region by a chalcogenide region.
    Type: Application
    Filed: November 30, 2005
    Publication date: May 31, 2007
    Inventors: Justin Brask, Suman Datta, Mark Doczy, James Blackwell, Matthew Metz, Jack Kavalieros, Robert Chau