Patents by Inventor Matthew Metz

Matthew Metz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9685508
    Abstract: Transistors suitable for high voltage and high frequency operation are disclosed. A nanowire is disposed vertically or horizontally on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first semiconductor material, a source region electrically coupled with a first end of the channel region, a drain region electrically coupled with a second end of the channel region, and an extrinsic drain region disposed between the channel region and drain region. The extrinsic drain region has a wider bandgap than that of the first semiconductor. A gate stack including a gate conductor and a gate insulator coaxially wraps completely around the channel region, drain and source contacts similarly coaxially wrap completely around the drain and source regions.
    Type: Grant
    Filed: November 19, 2015
    Date of Patent: June 20, 2017
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Publication number: 20170170318
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: February 24, 2017
    Publication date: June 15, 2017
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 9666492
    Abstract: Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.
    Type: Grant
    Filed: July 13, 2015
    Date of Patent: May 30, 2017
    Assignee: Intel Corporation
    Inventors: Marko Radosavljevic, Ravi Pillarisetty, Gilbert Dewey, Niloy Mukherjee, Jack Kavalieros, Willy Rachmady, Van Le, Benjamin Chu-Kung, Matthew Metz, Robert Chau
  • Patent number: 9614083
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: June 10, 2016
    Date of Patent: April 4, 2017
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Publication number: 20160343844
    Abstract: Transistors for high voltage and high frequency operation. A non-planar, polar crystalline semiconductor body having a top surface disposed between first and second opposite sidewalls includes a channel region with a first crystalline semiconductor layer disposed over the first and second sidewalls. The first crystalline semiconductor layer is to provide a two dimensional electron gas (2DEG) within the channel region. A gate structure is disposed over the first crystalline semiconductor layer along at least the second sidewall to modulate the 2DEG. First and second sidewalls of the non-planar polar crystalline semiconductor body may have differing polarity, with the channel proximate to a first of the sidewalls. The gate structure may be along a second of the sidewalls to gate a back barrier. The polar crystalline semiconductor body may be a group III-nitride formed on a silicon substrate with the (1010) plane on a (110) plane of the silicon.
    Type: Application
    Filed: August 4, 2016
    Publication date: November 24, 2016
    Inventors: Han Wui Then, Robert CHAU, Benjamin CHU-KUNG, Gilbert DEWEY, Jack KAVALIEROS, Matthew METZ, Niloy MUKHERJEE, Ravi PILLARISETTY, Marko RADOSAVLJEVIC
  • Publication number: 20160315153
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Application
    Filed: June 29, 2016
    Publication date: October 27, 2016
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 9461160
    Abstract: Transistors for high voltage and high frequency operation. A non-planar, polar crystalline semiconductor body having a top surface disposed between first and second opposite sidewalls includes a channel region with a first crystalline semiconductor layer disposed over the first and second sidewalls. The first crystalline semiconductor layer is to provide a two dimensional electron gas (2DEG) within the channel region. A gate structure is disposed over the first crystalline semiconductor layer along at least the second sidewall to modulate the 2DEG. First and second sidewalls of the non-planar polar crystalline semiconductor body may have differing polarity, with the channel proximate to a first of the sidewalls. The gate structure may be along a second of the sidewalls to gate a back barrier. The polar crystalline semiconductor body may be a group III-nitride formed on a silicon substrate with the (1010) plane on a (110) plane of the silicon.
    Type: Grant
    Filed: December 19, 2011
    Date of Patent: October 4, 2016
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Publication number: 20160284847
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: June 10, 2016
    Publication date: September 29, 2016
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 9397188
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: July 19, 2016
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 9368583
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: May 1, 2015
    Date of Patent: June 14, 2016
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Publication number: 20160079359
    Abstract: Transistors suitable for high voltage and high frequency operation. A nanowire is disposed vertically or horizontally on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first semiconductor material, a source region electrically coupled with a first end of the channel region, a drain region electrically coupled with a second end of the channel region, and an extrinsic drain region disposed between the channel region and drain region. The extrinsic drain region has a wider bandgap than that of the first semiconductor. A gate stack including a gate conductor and a gate insulator coaxially wraps completely around the channel region, drain and source contacts similarly coaxially wrap completely around the drain and source regions.
    Type: Application
    Filed: November 19, 2015
    Publication date: March 17, 2016
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Publication number: 20160064512
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Application
    Filed: November 9, 2015
    Publication date: March 3, 2016
    Inventors: Han Wui Then, Robert CHAU, Benjamin CHU-KUNG, Gilbert DEWEY, Jack KAVALIEROS, Matthew METZ, Niloy MUKHERJEE, Ravi PILLARISETTY, Marko RADOSAVLJEVIC
  • Patent number: 9245989
    Abstract: Transistors suitable for high voltage and high frequency operation. A nanowire is disposed vertically or horizontally on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first semiconductor material, a source region electrically coupled with a first end of the channel region, a drain region electrically coupled with a second end of the channel region, and an extrinsic drain region disposed between the channel region and drain region. The extrinsic drain region has a wider bandgap than that of the first semiconductor. A gate stack including a gate conductor and a gate insulator coaxially wraps completely around the channel region, and drain and source contacts similarly coaxially wrap completely around the drain and source regions.
    Type: Grant
    Filed: December 19, 2011
    Date of Patent: January 26, 2016
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 9240410
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Grant
    Filed: December 19, 2011
    Date of Patent: January 19, 2016
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Publication number: 20150325481
    Abstract: Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.
    Type: Application
    Filed: July 13, 2015
    Publication date: November 12, 2015
    Inventors: Marko RADOSAVLJEVIC, Ravi PILLARISETTY, Gilbert DEWEY, Niloy MUKHERJEE, Jack KAVALIEROS, Willy RACHMADY, Van LE, Benjamin CHU-KUNG, Matthew METZ, Robert CHAU
  • Publication number: 20150249131
    Abstract: An embodiment of the invention includes an epitaxial layer that directly contacts, for example, a nanowire, fin, or pillar in a manner that allows the layer to relax with two or three degrees of freedom. The epitaxial layer may be included in a channel region of a transistor. The nanowire, fin, or pillar may be removed to provide greater access to the epitaxial layer. Doing so may allow for a “all-around gate” structure where the gate surrounds the top, bottom, and sidewalls of the epitaxial layer. Other embodiments are described herein.
    Type: Application
    Filed: May 8, 2015
    Publication date: September 3, 2015
    Inventors: BENJAMIN CHU-KUNG, VAN LE, ROBERT CHAU, SANSAPTAK DASGUPTA, GILBERT DEWEY, NITIKA GOEL, JACK KAVALIEROS, MATTHEW METZ, NILOY MUKHERJEE, RAVI PILLARISETTY, WILLY RACHMADY, MARKO RADOSAVLJEVIC, HAN WUI THEN, NANCY ZELICK
  • Patent number: 9123567
    Abstract: Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.
    Type: Grant
    Filed: December 19, 2011
    Date of Patent: September 1, 2015
    Assignee: Intel Corporation
    Inventors: Marko Radosavljevic, Ravi Pillarisetty, Gilbert Dewey, Niloy Mukherjee, Jack Kavalieros, Willy Rachmady, Van Le, Benjamin Chu-Kung, Matthew Metz, Robert Chau
  • Publication number: 20150236100
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: May 1, 2015
    Publication date: August 20, 2015
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 9048314
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: August 21, 2014
    Date of Patent: June 2, 2015
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 9029835
    Abstract: An embodiment of the invention includes an epitaxial layer that directly contacts, for example, a nanowire, fin, or pillar in a manner that allows the layer to relax with two or three degrees of freedom. The epitaxial layer may be included in a channel region of a transistor. The nanowire, fin, or pillar may be removed to provide greater access to the epitaxial layer. Doing so may allow for a “all-around gate” structure where the gate surrounds the top, bottom, and sidewalls of the epitaxial layer. Other embodiments are described herein.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: May 12, 2015
    Assignee: Intel Corporation
    Inventors: Benjamin Chu-King, Van Le, Robert Chau, Sansaptak Dasgupta, Gilbert Dewey, Nitika Goel, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Willy Rachmady, Marko Radosavljevic, Han Wui Then, Nancy Zelick