Patents by Inventor Matthew Metz

Matthew Metz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200006523
    Abstract: Embodiments herein describe techniques, systems, and method for a semiconductor device. Embodiments herein may present a semiconductor device including a substrate with a surface that is substantially flat. A channel area including an III-V compound may be above the substrate, where the channel area is an epitaxial layer directly in contact with the surface of the substrate. A gate dielectric layer is adjacent to the channel area and in direct contact with the channel area, while a gate electrode is adjacent to the gate dielectric layer. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: June 29, 2018
    Publication date: January 2, 2020
    Inventors: Matthew METZ, Willy RACHMADY, Sean MA, Jessica TORRES, Nicholas MINUTILLO, Cheng-Ying HUANG, Anand MURTHY, Harold KENNEL, Gilbert DEWEY, Jack KAVALIEROS, Tahir GHANI
  • Publication number: 20190393356
    Abstract: Embodiments herein describe techniques for a semiconductor device including a transistor. The transistor includes a first metal contact as a source electrode, a second metal contact as a drain electrode, a channel area between the source electrode and the drain electrode, and a third metal contact aligned with the channel area as a gate electrode. The first metal contact may be located in a first metal layer along a first direction. The second metal contact may be located in a second metal layer along the first direction, in parallel with the first metal contact. The third metal contact may be located in a third metal layer along a second direction substantially orthogonal to the first direction. The third metal layer is between the first metal layer and the second metal layer. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: June 22, 2018
    Publication date: December 26, 2019
    Inventors: Van H. LE, Seung Hoon SUNG, Benjamin CHU-KUNG, Miriam RESHOTKO, Matthew METZ, Yih WANG, Gilbert DEWEY, Jack KAVALIEROS, Tahir GHANI, Nazila HARATIPOUR, Abhishek SHARMA, Shriram SHIVARAMAN
  • Publication number: 20190229022
    Abstract: Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.
    Type: Application
    Filed: April 1, 2019
    Publication date: July 25, 2019
    Inventors: Marko RADOSAVLJEVIC, Ravi PILLARISETTY, Gilbert DEWEY, Niloy MUKHERJEE, Jack KAVALIEROS, Willy RACHMADY, Van LE, Benjamin CHU-KUNG, Matthew METZ, Robert CHAU
  • Publication number: 20190184341
    Abstract: The invention is directed to preparation of hollow fiber membrane devices that exhibit improved durability and mechanical strength in air separation operations such as generation of nitrogen enriched air on board aircraft. In particular the invention provides for preparation of hollow fiber membrane modules with terminal tubesheets of superior mechanical properties and improved long term durability in air separation operations.
    Type: Application
    Filed: December 18, 2018
    Publication date: June 20, 2019
    Applicants: L'Air Liquide, Societe Anonyme Pour I' Etude et I' Exploitation des Procedes Georges Claude, Air Liquide Advanced Technologies U.S, LLC
    Inventors: Moutushi Dey, Matthew Metz, James Macheras, Benjamin Bikson, Tao Li
  • Publication number: 20190189753
    Abstract: Semiconductor devices, computing devices, and related methods are disclosed herein. A semiconductor device includes a seed material, an epitaxial material in contact with the seed material, and at least one quantum region including an elastic stiffness that is greater than an elastic stiffness of the epitaxial material. The epitaxial material has lattice parameters that are different from lattice parameters of the seed material by at least a threshold amount. Lattice parameters of the quantum region are within the threshold amount of the lattice parameters of the epitaxial material. A method includes disposing an epitaxial material on a seed material, disposing a quantum region on the epitaxial material, and disposing the epitaxial material on the quantum region.
    Type: Application
    Filed: September 30, 2016
    Publication date: June 20, 2019
    Applicant: INTEL CORPORATION
    Inventors: Matthew Metz, Gilbert Dewey, Harold W. Kennel, Cheng-Ying Huang, Sean T. Ma, Willy Rachmady
  • Patent number: 10319646
    Abstract: Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.
    Type: Grant
    Filed: April 26, 2017
    Date of Patent: June 11, 2019
    Assignee: Intel Corporation
    Inventors: Marko Radosavljevic, Ravi Pillarisetty, Gilbert Dewey, Niloy Mukherjee, Jack Kavalieros, Willy Rachmady, Van Le, Benjamin Chu-Kung, Matthew Metz, Robert Chau
  • Publication number: 20190165106
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Application
    Filed: January 11, 2019
    Publication date: May 30, 2019
    Inventors: Han Wui THEN, Robert CHAU, Benjamin CHU-KUNG, Gilbert DEWEY, Jack KAVALIEROS, Matthew METZ, Niloy MUKHERJEE, Ravi PILLARISETTY, Marko RADOSAVLJEVIC
  • Patent number: 10263074
    Abstract: Transistors suitable for high voltage and high frequency operation are disclosed. A nanowire is disposed vertically or horizontally on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first semiconductor material, a source region electrically coupled with a first end of the channel region, a drain region electrically coupled with a second end of the channel region, and an extrinsic drain region disposed between the channel region and drain region. The extrinsic drain region has a wider bandgap than that of the first semiconductor. A gate stack including a gate conductor and a gate insulator coaxially wraps completely around the channel region, drain and source contacts similarly coaxially wrap completely around the drain and source regions.
    Type: Grant
    Filed: May 25, 2017
    Date of Patent: April 16, 2019
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 10186581
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Grant
    Filed: June 14, 2017
    Date of Patent: January 22, 2019
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 10121897
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: July 26, 2017
    Date of Patent: November 6, 2018
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Patent number: 9947780
    Abstract: Transistors for high voltage and high frequency operation. A non-planar, polar crystalline semiconductor body having a top surface disposed between first and second opposite sidewalls includes a channel region with a first crystalline semiconductor layer disposed over the first and second sidewalls. The first crystalline semiconductor layer is to provide a two dimensional electron gas (2DEG) within the channel region. A gate structure is disposed over the first crystalline semiconductor layer along at least the second sidewall to modulate the 2DEG. First and second sidewalls of the non-planar polar crystalline semiconductor body may have differing polarity, with the channel proximate to a first of the sidewalls. The gate structure may be along a second of the sidewalls to gate a back barrier. The polar crystalline semiconductor body may be a group III-nitride formed on a silicon substrate with the (1010) plane on a (110) plane of the silicon.
    Type: Grant
    Filed: August 4, 2016
    Date of Patent: April 17, 2018
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 9865684
    Abstract: An embodiment of the invention includes an epitaxial layer that directly contacts, for example, a nanowire, fin, or pillar in a manner that allows the layer to relax with two or three degrees of freedom. The epitaxial layer may be included in a channel region of a transistor. The nanowire, fin, or pillar may be removed to provide greater access to the epitaxial layer. Doing so may allow for a “all-around gate” structure where the gate surrounds the top, bottom, and sidewalls of the epitaxial layer. Other embodiments are described herein.
    Type: Grant
    Filed: May 8, 2015
    Date of Patent: January 9, 2018
    Assignee: Intel Corporation
    Inventors: Benjamin Chu-Kung, Van Le, Robert Chau, Sansaptak Dasgupta, Gilbert Dewey, Niti Goel, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Willy Rachmady, Marko Radosavljevic, Han Wui Then, Nancy Zelick
  • Publication number: 20170365681
    Abstract: An interlayer is used to reduce Fermi-level pinning phenomena in a semiconductive device with a semiconductive substrate. The interlayer may be a rare-earth oxide. The interlayer may be an ionic semiconductor. A metallic barrier film may be disposed between the interlayer and a metallic coupling. The interlayer may be a thermal-process combination of the metallic barrier film and the semiconductive substrate. A process of forming the interlayer may include grading the interlayer. A computing system includes the interlayer.
    Type: Application
    Filed: August 16, 2017
    Publication date: December 21, 2017
    Inventors: Gilbert DEWEY, Niloy MUKHERJEE, Matthew METZ, Jack T. KAVALIEROS, Nancy M. ZELICK, Robert S. CHAU
  • Publication number: 20170323972
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Application
    Filed: July 26, 2017
    Publication date: November 9, 2017
    Inventors: Robert S. CHAU, Suman DATTA, Jack KAVALIEROS, Justin K. BRASK, Mark L. DOCZY, Matthew METZ
  • Publication number: 20170288022
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Application
    Filed: June 14, 2017
    Publication date: October 5, 2017
    Inventors: Han Wui THEN, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
  • Patent number: 9768269
    Abstract: An interlayer is used to reduce Fermi-level pinning phenomena in a semiconductive device with a semiconductive substrate. The interlayer may be a rare-earth oxide. The interlayer may be an ionic semiconductor. A metallic barrier film may be disposed between the interlayer and a metallic coupling. The interlayer may be a thermal-process combination of the metallic barrier film and the semiconductive substrate. A process of forming the interlayer may include grading the interlayer. A computing system includes the interlayer.
    Type: Grant
    Filed: September 18, 2014
    Date of Patent: September 19, 2017
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Niloy Mukherjee, Matthew Metz, Jack T. Kavalieros, Nancy M. Zelick, Robert S. Chau
  • Publication number: 20170263708
    Abstract: Transistors suitable for high voltage and high frequency operation. A nanowire is disposed vertically or horizontally on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first semiconductor material, a source region electrically coupled with a first end of the channel region, a drain region electrically coupled with a second end of the channel region, and an extrinsic drain region disposed between the channel region and drain region. The extrinsic drain region has a wider bandgap than that of the first semiconductor. A gate stack including a gate conductor and a gate insulator coaxially wraps completely around the channel region, drain and source contacts similarly coaxially wrap completely around the drain and source regions.
    Type: Application
    Filed: May 25, 2017
    Publication date: September 14, 2017
    Inventors: Han Wui THEN, Robert CHAU, Benjamin CHU-KUNG, Gilbert DEWEY, Jack KAVALIEROS, Matthew METZ, Niloy MUKHERJEE, Ravi PILLARISETTY, Marko RADOSAVLJEVIC
  • Patent number: 9748391
    Abstract: A transistor having a narrow bandgap semiconductor source/drain region is described. The transistor includes a gate electrode formed on a gate dielectric layer formed on a silicon layer. A pair of source/drain regions are formed on opposite sides of the gate electrode wherein said pair of source/drain regions comprise a narrow bandgap semiconductor film formed in the silicon layer on opposite sides of the gate electrode.
    Type: Grant
    Filed: February 24, 2017
    Date of Patent: August 29, 2017
    Assignee: Intel Corporation
    Inventors: Robert S. Chau, Suman Datta, Jack Kavalieros, Justin K. Brask, Mark L. Doczy, Matthew Metz
  • Publication number: 20170229354
    Abstract: Architectures and techniques for co-integration of heterogeneous materials, such as group III-V semiconductor materials and group IV semiconductors (e.g., Ge) on a same substrate (e.g. silicon). In embodiments, multi-layer heterogeneous semiconductor material stacks having alternating nanowire and sacrificial layers are employed to release nanowires and permit formation of a coaxial gate structure that completely surrounds a channel region of the nanowire transistor. In embodiments, individual PMOS and NMOS channel semiconductor materials are co-integrated with a starting substrate having a blanket layers of alternating Ge/III-V layers. In embodiments, vertical integration of a plurality of stacked nanowires within an individual PMOS and individual NMOS device enable significant drive current for a given layout area.
    Type: Application
    Filed: April 26, 2017
    Publication date: August 10, 2017
    Inventors: Marko RADOSAVLJEVIC, Ravi PILLARISETTY, Gilbert DEWEY, Niloy MUKHERJEE, Jack KAVALIEROS, Willy RACHMADY, Van LE, Benjamin CHU-KUNG, Matthew METZ, Robert CHAU
  • Patent number: 9691857
    Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: June 27, 2017
    Assignee: Intel Corporation
    Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic