Patents by Inventor Matthew N. Rocklein

Matthew N. Rocklein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170294219
    Abstract: Methods of operating a ferroelectric memory cell. The method comprises applying one of a positive bias voltage and a negative bias voltage to a ferroelectric memory cell comprising a capacitor including a top electrode, a bottom electrode, a ferroelectric material between the top electrode and the bottom electrode, and an interfacial material between the ferroelectric material and one of the top electrode and the bottom electrode. The method further comprises applying another of the positive bias voltage and the negative bias voltage to the ferroelectric memory cell to switch a polarization of the ferroelectric memory cell, wherein an absolute value of the negative bias voltage is different from an absolute value of the positive bias voltage. Ferroelectric memory cells are also described.
    Type: Application
    Filed: June 23, 2017
    Publication date: October 12, 2017
    Inventors: Steven C. Nicholes, Ashonita A. Chavan, Matthew N. Rocklein
  • Patent number: 9697881
    Abstract: Methods of operating a ferroelectric memory cell. The method comprises applying one of a positive bias voltage and a negative bias voltage to a ferroelectric memory cell comprising a capacitor including a top electrode, a bottom electrode, a ferroelectric material between the top electrode and the bottom electrode, and an interfacial material between the ferroelectric material and one of the top electrode and the bottom electrode. The method further comprises applying another of the positive bias voltage and the negative bias voltage to the ferroelectric memory cell to switch a polarization of the ferroelectric memory cell, wherein an absolute value of the negative bias voltage is different from an absolute value of the positive bias voltage. Ferroelectric memory cells are also described.
    Type: Grant
    Filed: August 19, 2016
    Date of Patent: July 4, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Steven C. Nicholes, Ashonita A. Chavan, Matthew N. Rocklein
  • Patent number: 9698343
    Abstract: A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.
    Type: Grant
    Filed: November 9, 2015
    Date of Patent: July 4, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Qian Tao, Matthew N. Rocklein, Beth R. Cook, D.V. Nirmal Ramaswamy
  • Publication number: 20170186757
    Abstract: A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.
    Type: Application
    Filed: March 15, 2017
    Publication date: June 29, 2017
    Inventors: Qian Tao, Matthew N. Rocklein, Beth R. Cook, D.V. Nirmal Ramaswamy
  • Publication number: 20170062037
    Abstract: Methods of operating a ferroelectric memory cell. The method comprises applying one of a positive bias voltage and a negative bias voltage to a ferroelectric memory cell comprising a capacitor including a top electrode, a bottom electrode, a ferroelectric material between the top electrode and the bottom electrode, and an interfacial material between the ferroelectric material and one of the top electrode and the bottom electrode. The method further comprises applying another of the positive bias voltage and the negative bias voltage to the ferroelectric memory cell to switch a polarization of the ferroelectric memory cell, wherein an absolute value of the negative bias voltage is different from an absolute value of the positive bias voltage. Ferroelectric memory cells are also described.
    Type: Application
    Filed: August 19, 2016
    Publication date: March 2, 2017
    Inventors: Steven C. Nicholes, Ashonita A. Chavan, Matthew N. Rocklein
  • Patent number: 9576805
    Abstract: Memories, systems, and methods for forming memory cells are disclosed. One such memory cell includes a charge storage node that includes nanodots over a tunnel dielectric and a protective film over the nanodots. In another memory cell, the charge storage node includes nanodots that include a ruthenium alloy. Memory cells can include an inter-gate dielectric over the protective film or ruthenium alloy nanodots and a control gate over the inter-gate dielectric. The protective film and ruthenium alloy can be configured to protect at least some of the nanodots from vaporizing during formation of the inter-gate dielectric.
    Type: Grant
    Filed: March 24, 2015
    Date of Patent: February 21, 2017
    Assignee: Micron Technology, Inc.
    Inventors: D. V. Nirmal Ramaswamy, Matthew N. Rocklein, Rhett T. Brewer
  • Patent number: 9466660
    Abstract: A semiconductor structure may include a first electrode over a substrate, a high-K dielectric material over the first electrode, and a second electrode over the high-K dielectric material, wherein at least one of the first electrode and the second electrode may include a material selected from the group consisting of a molybdenum nitride (MoaNb) material, a molybdenum oxynitride (MoOxNy) material, a molybdenum oxide (MoOx) material, and a molybdenum-based alloy material comprising molybdenum and nitrogen.
    Type: Grant
    Filed: October 16, 2013
    Date of Patent: October 11, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Matthew N. Rocklein, Kotha Sai Madhukar Reddy, Vassil Antonov, Vishwanath Bhat
  • Patent number: 9460770
    Abstract: Methods of operating a ferroelectric memory cell. The method comprises applying one of a positive bias voltage and a negative bias voltage to a ferroelectric memory cell comprising a capacitor including a top electrode, a bottom electrode, a ferroelectric material between the top electrode and the bottom electrode, and an interfacial material between the ferroelectric material and one of the top electrode and the bottom electrode. The method further comprises applying another of the positive bias voltage and the negative bias voltage to the ferroelectric memory cell to switch a polarization of the ferroelectric memory cell, wherein an absolute value of the negative bias voltage is different from an absolute value of the positive bias voltage. Ferroelectric memory cells are also described.
    Type: Grant
    Filed: September 1, 2015
    Date of Patent: October 4, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Steven C. Nicholes, Ashonita A. Chavan, Matthew N. Rocklein
  • Publication number: 20160064655
    Abstract: A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.
    Type: Application
    Filed: November 9, 2015
    Publication date: March 3, 2016
    Inventors: Qian Tao, Matthew N. Rocklein, Beth R. Cook, D.V. Nirmal Ramaswamy
  • Patent number: 9231206
    Abstract: A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: January 5, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Qian Tao, Matthew N. Rocklein, Beth R. Cook, D. V. Nirmal Ramaswamy
  • Publication number: 20150380646
    Abstract: Semiconductor memory devices, resistive memory devices, memory cell structures, and methods of forming a resistive memory cell are provided. One example method of a resistive memory cell can include a number of dielectric regions formed between two electrodes, and a barrier dielectric region formed between each of the dielectric regions. The barrier dielectric region serves to reduce an oxygen diffusion rate associated with the dielectric regions.
    Type: Application
    Filed: September 10, 2015
    Publication date: December 31, 2015
    Inventors: Matthew N. Rocklein, D.V. Nirmal Ramaswamy
  • Patent number: 9159921
    Abstract: Semiconductor memory devices, resistive memory devices, memory cell structures, and methods of forming a resistive memory cell are provided. One example method of a resistive memory cell can include a number of dielectric regions formed between two electrodes, and a barrier dielectric region formed between each of the dielectric regions. The barrier dielectric region serves to reduce an oxygen diffusion rate associated with the dielectric regions.
    Type: Grant
    Filed: August 29, 2014
    Date of Patent: October 13, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Matthew N. Rocklein, D. V. Nirmal Ramaswamy
  • Publication number: 20150200101
    Abstract: Memories, systems, and methods for forming memory cells are disclosed. One such memory cell includes a charge storage node that includes nanodots over a tunnel dielectric and a protective film over the nanodots. In another memory cell, the charge storage node includes nanodots that include a ruthenium alloy. Memory cells can include an inter-gate dielectric over the protective film or ruthenium alloy nanodots and a control gate over the inter-gate dielectric. The protective film and ruthenium alloy can be configured to protect at least some of the nanodots from vaporizing during formation of the inter-gate dielectric.
    Type: Application
    Filed: March 24, 2015
    Publication date: July 16, 2015
    Inventors: D.V. Nirmal Ramaswamy, Matthew N. Rocklein, Rhett T. Brewer
  • Publication number: 20150140773
    Abstract: Methods of forming an insulative element are described, including forming a first metal oxide material having a first dielectric constant, forming a second metal oxide material having a second dielectric constant different from the first, and heating at least portions of the structure to crystallize at least a portion of at least one of the first dielectric material and the second dielectric material. Methods of forming a capacitor are described, including forming a first electrode, forming a dielectric material with a first oxide and a second oxide over the first electrode, and forming a second electrode over the dielectric material. Structures including dielectric materials are also described.
    Type: Application
    Filed: January 13, 2015
    Publication date: May 21, 2015
    Inventors: Vassil Antonov, Jennifer K. Sigman, Vishwanath Bhat, Matthew N. Rocklein, Bhaskar Srinivasan, Chris Carlson
  • Publication number: 20150102460
    Abstract: A semiconductor structure may include a first electrode over a substrate, a high-K dielectric material over the first electrode, and a second electrode over the high-K dielectric material, wherein at least one of the first electrode and the second electrode may include a material selected from the group consisting of a molybdenum nitride (MoxNy) material, a molybdenum oxynitride (MoOxNy) material, a molybdenum oxide (MoOx) material, and a molybdenum-based alloy material comprising molybdenum and nitrogen.
    Type: Application
    Filed: October 16, 2013
    Publication date: April 16, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Matthew N. Rocklein, Kotha Sai Madhukar Reddy, Vassil Antonov, Vishwanath Bhat
  • Patent number: 9006702
    Abstract: Semiconductor structures including a zirconium oxide material and methods of forming the same are described herein. As an example, a semiconductor structure can include a zirconium oxide material, a perovskite structure material, and a noble metal material formed between the zirconium oxide material and the perovskite structure material.
    Type: Grant
    Filed: January 20, 2014
    Date of Patent: April 14, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Dale W. Collins, D. V. Nirmal Ramaswamy, Matthew N. Rocklein, Swapnil A. Lengade
  • Patent number: 8987806
    Abstract: Memories, systems, and methods for forming memory cells are disclosed. One such memory cell includes a charge storage node that includes nanodots over a tunnel dielectric and a protective film over the nanodots. In another memory cell, the charge storage node includes nanodots that include a ruthenium alloy. Memory cells can include an inter-gate dielectric over the protective film or ruthenium alloy nanodots and a control gate over the inter-gate dielectric. The protective film and ruthenium alloy can be configured to protect at least some of the nanodots from vaporizing during formation of the inter-gate dielectric.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: March 24, 2015
    Assignee: Micron Technology, Inc.
    Inventors: D. V. Nirmal Ramaswamy, Matthew N. Rocklein, Rhett Brewer
  • Publication number: 20150076437
    Abstract: A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.
    Type: Application
    Filed: September 13, 2013
    Publication date: March 19, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Qian Tao, Matthew N. Rocklein, Beth R. Cook, D. V. Nirmal Ramaswamy
  • Publication number: 20150044850
    Abstract: Semiconductor memory devices, resistive memory devices, memory cell structures, and methods of forming a resistive memory cell are provided. One example method of a resistive memory cell can include a number of dielectric regions formed between two electrodes, and a barrier dielectric region formed between each of the dielectric regions. The barrier dielectric region serves to reduce an oxygen diffusion rate associated with the dielectric regions.
    Type: Application
    Filed: August 29, 2014
    Publication date: February 12, 2015
    Inventors: Matthew N. Rocklein, D.V. Nirmal Ramaswamy
  • Patent number: 8940388
    Abstract: Methods of forming an insulative element are described, including forming a first metal oxide material having a first dielectric constant, forming a second metal oxide material having a second dielectric constant different from the first, and heating at least portions of the structure to crystallize at least a portion of at least one of the first dielectric material and the second dielectric material. Methods of forming a capacitor are described, including forming a first electrode, forming a dielectric material with a first oxide and a second oxide over the first electrode, and forming a second electrode over the dielectric material. Structures including dielectric materials are also described.
    Type: Grant
    Filed: March 2, 2011
    Date of Patent: January 27, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Vassil Antonov, Jennifer K. Sigman, Vishwanath Bhat, Matthew N. Rocklein, Bhaskar Srinivasan, Chris Carlson