Abstract: In sophisticated semiconductor devices including copper-based metallization systems, a substantially aluminum-free bump structure in device regions and a substantially aluminum-free wire bond structure in test regions may be formed on the basis of a manufacturing process resulting in identical final dielectric layer stacks in these device areas. The number of process steps may be reduced by making a decision as to whether a substrate is to become a product substrate or test substrate for estimating the reliability of actual semiconductor devices. For example, nickel contact elements may be formed above copper-based contact areas wherein the nickel may provide a base for wire bonding or forming a bump material thereon.

Abstract: When forming complex metallization systems on the basis of copper, the very last metallization layer may receive contact regions on the basis of copper, the surface of which may be passivated on the basis of a dedicated protection layer, which may thus allow the patterning of the passivation layer stack prior to shipping the device to a remote manufacturing site. Hence, the protected contact surface may be efficiently re-exposed in the remote manufacturing site on the basis of an efficient non-masked wet chemical etch process.

Abstract: In semiconductor devices, the alignment mark for performing alignment processes of measurement tools and the like may be positioned within the die seal area on the basis of a geometric configuration, which still preserves mechanical integrity of the die seal without compromising the spatial information encoded into the alignment marks. For example, L-shaped alignment marks may be provided at one or more corners of the die seal area.

Abstract: In semiconductor devices having a copper-based metallization system, bond pads for wire bonding may be formed directly on copper surfaces, which may be covered by an appropriately designed protection layer to avoid unpredictable copper corrosion during the wire bond process. A thickness of the protection layer may be selected such that bonding through the layer may be accomplished, while also ensuring a desired high degree of integrity of the copper surface.

Abstract: A program and corresponding method allow for the enablement of customizable extension fields into a form template, independent of the field type of the extension field. New extension fields corresponding to section headers of the form template can be created and added to a user interface. A new extension field can drive the form template and be added to all applicable section headers in the form template from the user interface.

Abstract: By moderately introducing defects into a highly conductive material, such as copper, the resistance versus temperature behavior may be significantly modified so that enhanced electromigration behavior and/or electrical performance may be obtained in metallization structures of advanced semiconductor devices. The defect-related portion of the resistance may be moderately increased so as to change the slope of the resistance versus temperature curve, thereby allowing the incorporation of impurity atoms for enhancing the electromigration endurance while not unduly increasing the overall resistance at the operating temperature or even reducing the corresponding resistance at the specified operating temperature. Thus, by appropriately designing the electrical resistance for a target operating temperature, both the electromigration behavior and the electrical performance may be enhanced.

Abstract: A semiconductor chip and a package substrate may be directly connected on the basis of form closure by providing appropriately shaped complementary contact structures in the semiconductor chip and the package substrate. Consequently, solder material may no longer be required and thus any elevated temperatures during the assembly process may be avoided, which may conventionally result in significant stress forces, thereby creating damage, in particular in very complex metallization systems.

Abstract: In a semiconductor device or test structure, appropriate heating elements, for instance in the form of resistive structures, are implemented so as to obtain superior area coverage, thereby enabling a precise evaluation of the thermal conditions within a complex semiconductor device. In particular, the device internal heating elements may allow the evaluation of hot spots and the response of a complex metallization system to specific temperature profiles, in particular at critical areas, such as edge regions in which mechanical stress forces are typically highest in contact regimes in which the package substrate and the metallization system are directly connected.

Abstract: By forming a trench-like test opening above a respective test metal region during the etch process for forming via openings in a dielectric layer stack of sophisticated metallization structures of semiconductor devices, the difference in etch rate in the respective openings may be used for generating a corresponding variation of electrical characteristics of the test metal region. Consequently, by means of the electrical characteristics, respective variations of the etch process may be identified.

Abstract: According to some embodiments, a business user interface page associated with a business service provider may be established. The user interface page may have, for example, at least one in-port to receive data from components and at least one out-port to provide data to components. A mashup component may be embedded within the business user interface page, and may also have at least one out-port to provide data to components. A display of the user interface page to a client may then be facilitated, including the embedded mashup component, wherein the mashup component combines and displays data received from a plurality of external data sources.

Abstract: Transporting of flexibility changes of customer content between tenants in a multi-tenant computing system can be performed by exporting customer content from a first tenant of the multi-tenant computing system, transporting the customer content exported from the first tenant to a second tenant of the multi-tenant computing system, importing the customer content into a staging area in the second tenant to enable a user associated with second tenant to access the customer content via the staging area based on a content extraction trigger, and activating selected customer content from the staging area in a productive component of the second tenant. The content extraction trigger can characterize an extraction of at least some of the customer content from the staging area. Related methods, systems, and articles of manufacture are also disclosed.

Abstract: According to some embodiments, a business service provider may define a stable user interface anchor entity associated with a business object data structure. A reference field may be associated with the stable user interface anchor, the reference field representing a path to a persistent node of the business object data structure. An end user adaptation to a user interface may then be applied in connection with the business object data structure, the adaptation referencing the stable user interface anchor entity.

Abstract: A system may include presentation, to a user, of a consuming business entity including a reference field of a business object, reception of an instruction from the user to add an extension field to the consuming business entity based on the reference field of the business object, determination of a second consuming business entity including the reference field of the business object, and presentation of the second consuming business entity to the user.

Abstract: A system may include reception of a definition of an extension field to be added to a business object node, generation of metadata for a data type enhancement object associated with the extension field, and generation of an ABAP dictionary proxy object based on the data type enhancement object, wherein the ABAP dictionary proxy object describes the extension field in a sub-structure of a first field of the ABAP dictionary proxy object.

Abstract: In semiconductor devices having a copper-based metallization system, bond pads for wire bonding may be formed directly on copper surfaces, which may be covered by an appropriately designed protection layer to avoid unpredictable copper corrosion during the wire bond process. A thickness of the protection layer may be selected such that bonding through the layer may be accomplished, while also ensuring a desired high degree of integrity of the copper surface.

Abstract: A die seal of a semiconductor device may be provided with a varying pattern density such that a gradient between the die region and the die seal may be reduced. Consequently, for a given width of the die seal, a required mechanical stability may be achieved, while at the same time differences in topography between the die region and the die seal may be reduced, thereby contributing to superior process conditions for sophisticated lithography processes.

Abstract: A high yield plasma etch process for an interlayer dielectric layer of a semiconductor device is provided, according to an embodiment of which a dielectric layer is etched with a nitrogen-containing plasma. In this way, the formation of polymers on a backside bevel of a substrate is avoided or substantially reduced. Remaining polymer at the backside bevel can be removed in situ by post-etch treatment. Further, a plasma etching device is provided comprising a chamber, a substrate receiving space for receiving a substrate, a plasma generator for generating a plasma in the chamber and a temperature conditioner for conditioning a temperature at an outer circumferential region of the substrate receiving space and thereby minimizing temperature gradients at a bevel of the wafer.

Abstract: By moderately introducing defects into a highly conductive material, such as copper, the resistance versus temperature behavior may be significantly modified so that enhanced electromigration behavior and/or electrical performance may be obtained in metallization structures of advanced semiconductor devices. The defect-related portion of the resistance may be moderately increased so as to change the slope of the resistance versus temperature curve, thereby allowing the incorporation of impurity atoms for enhancing the electromigration endurance while not unduly increasing the overall resistance at the operating temperature or even reducing the corresponding resistance at the specified operating temperature. Thus, by appropriately designing the electrical resistance for a target operating temperature, both the electromigration behavior and the electrical performance may be enhanced.

Abstract: In complex metallization systems of sophisticated semiconductor devices, appropriate stress compensation mechanisms may be implemented in order to reduce undue substrate deformation during the overall manufacturing process. For example, additional dielectric material and/or functional layers of one or more metallization layers may be provided with appropriate internal stress levels so as to maintain substrate warpage at a non-critical level, thereby substantially reducing yield losses in the manufacturing process caused by non-reliable attachment of substrates to substrate holders in process and transport tools.

Abstract: In semiconductor devices having a copper-based metallization system, bond pads for wire bonding may be formed directly on copper surfaces, which may be covered by an appropriately designed protection layer to avoid unpredictable copper corrosion during the wire bond process. A thickness of the protection layer may be selected such that bonding through the layer may be accomplished, while also ensuring a desired high degree of integrity of the copper surface.