Patents by Inventor Mei Chang

Mei Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10553425
    Abstract: Embodiments described herein provide a self-limiting and saturating Si—Ox bilayer process which does not require the use of a plasma or catalyst and that does not lead to undesirable substrate oxidation. Methods of the disclosure do not produce SiO2, but instead produce a saturated Si—Ox film with —OH termination to make substrate surfaces highly reactive towards metal ALD precursors to seed high nucleation and growth of gate oxide ALD materials.
    Type: Grant
    Filed: September 25, 2017
    Date of Patent: February 4, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Jessica S. Kachian, Naomi Yoshida, Mei Chang, Mary Edmonds, Andrew C. Kummel, Sang Wook Park, Hyunwoong Kim
  • Publication number: 20200020509
    Abstract: Embodiments of a gas delivery apparatus for use in a radio frequency (RF) processing apparatus are provided herein. In some embodiments, a gas delivery apparatus for use in a radio frequency (RF) processing apparatus includes: a conductive gas line having a first end and a second end; a first flange coupled to the first end; a second flange coupled to the second end, wherein the conductive gas line extends through and between the first and second flanges; and a block of ferrite material surrounding the conductive gas line between the first and second flanges.
    Type: Application
    Filed: September 23, 2019
    Publication date: January 16, 2020
    Inventors: DAPING YAO, HYMAN W.H. LAM, JOHN C. FORSTER, JIANG LU, CAN XU, DIEN-YEH WU, PAUL F. MA, MEI CHANG
  • Patent number: 10535527
    Abstract: A method for forming a film on a substrate in a semiconductor process chamber includes forming a first layer on the substrate using a plasma enhanced process and a gas compound of a chloride-based gas, a hydrogen gas, and an inert gas. The process chamber is then purged and the first layer is thermally soaked with a hydrogen-based precursor gas. The process chamber is then purged again and the process may be repeated with or without the plasma enhanced process until a certain film thickness is achieved on the substrate.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: January 14, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Yi Xu, Takashi Kuratomi, Avgerinos V. Gelatos, Vikash Banthia, Mei Chang, Kazuya Daito
  • Patent number: 10524590
    Abstract: A wrench support rack including a base, and at least one clamp assembly attached to the base and comprising a vertical stop spaced apart from a push member. The space in between the vertical stop and the push member forms a groove configured to receive a stem of a wrench. The vertical stop includes an upper ridge portion configured to engage a stem of a wrench and limit vertical movement of a wrench disposed in the groove. The push member includes an inward protrusion configured to press a stem of a wrench in to the vertical stop and limit horizontal movement of a wrench disposed in the groove.
    Type: Grant
    Filed: August 30, 2017
    Date of Patent: January 7, 2020
    Assignee: Stanley Chiro International Ltd.
    Inventors: Yen-ting Wu, Chihchiang Lee, Wan-chiang Wang, Yi Tung Chan, Ching-Yi Tu, Hui-Mei Chang
  • Patent number: 10525214
    Abstract: An aerosolization system includes a container that is configured to deliver a unit dosage of a liquid when squeezed a single time. The system also includes an aerosolizer that is constructed of a housing defining a mouthpiece, and an aerosol generator disposed in the housing. The aerosol generator includes a vibratable membrane having a front face and a rear face, and a vibratable element used to vibrate the membrane. Further, the housing includes an opening that is adapted to receive a unit dosage of the liquid from the container. The opening provides a liquid path to the rear face of the vibratable membrane.
    Type: Grant
    Filed: May 26, 2016
    Date of Patent: January 7, 2020
    Assignee: Dance Biopharm Inc.
    Inventors: John S. Patton, Ryan S. Patton, Mei-chang Kuo, Yehuda Ivri
  • Publication number: 20200006054
    Abstract: A method and apparatus for removing native oxides from a substrate surface is provided. In one aspect, the apparatus comprises a support assembly. In one embodiment, the support assembly includes a shaft coupled to a disk-shaped body. The shaft has a vacuum conduit, a heat transfer fluid conduit and a gas conduit formed therein. The disk-shaped body includes an upper surface, a lower surface and a cylindrical outer surface. A thermocouple is embedded in the disk-shaped body. A flange extends radially outward from the cylindrical outer surface, wherein the lower surface of the disk-shaped body comprises one side of the flange. A fluid channel is formed in the disk-shaped body proximate the flange and lower surface. The fluid channel is coupled to the heat transfer fluid conduit of the shaft. A plurality of grooves are formed in the upper surface of the disk-shaped body, and are coupled by a hole in the disk-shaped body to the vacuum conduit of the shaft.
    Type: Application
    Filed: September 11, 2019
    Publication date: January 2, 2020
    Inventors: Chien-Teh KAO, Joel M. HUSTON, Mei CHANG, Xiaoxiong YUAN
  • Publication number: 20190380955
    Abstract: Dry powder vancomycin compositions and methods for administering and preparing such compositions are provided.
    Type: Application
    Filed: August 9, 2019
    Publication date: December 19, 2019
    Inventors: John Lord, Jaakko Taneli Jouhikainen, Herman E. Snyder, Pravin Soni, Mei-Chang Kuo
  • Publication number: 20190385838
    Abstract: Methods to selectively deposit a film on a first surface (e.g., a metal surface) relative to a second surface (e.g., a dielectric surface) by exposing the surface to a pre-clean plasma comprising one or more of argon or hydrogen followed by deposition. The first surface and the second surface can be substantially coplanar. The selectivity of the deposited film may be increased by an order of magnitude relative to the substrate before exposure to the pre-cleaning plasma.
    Type: Application
    Filed: August 26, 2019
    Publication date: December 19, 2019
    Inventors: Kai Wu, Vikash Banthia, Sang Ho Yu, Mei Chang, Feiyue Ma
  • Patent number: 10506224
    Abstract: A holographic three dimensional imaging projecting medical apparatus is provided, including: a three dimensional imaging device, having a projecting mechanism and an image forming mechanism, the projecting mechanism including a housing and a projecting unit, the projecting unit projecting a plurality of projected images through the housing to the image forming mechanism, to form a three dimensional image within an image forming space of the image forming mechanism, the housing having a plurality of reflection portions, each of the plurality of reflection portions having a through hole and a plurality of light reflecting sheets disposed around the through hole, the projecting unit attached to the housing; a motion detector, detecting an operating gesture and generating a control signal corresponding to the operating gesture; and a processor, receiving the control signal and controlling the three dimensional image according to the control signal.
    Type: Grant
    Filed: November 7, 2017
    Date of Patent: December 10, 2019
    Assignee: ORIENTAL INSTITUTE OF TECHNOLOGY
    Inventors: Chin-Lun Lai, Yu-Mei Chang
  • Publication number: 20190365601
    Abstract: A spa apparatus may comprise a cart, a magnifying lamp, a phototherapy mask, a bed, and a bathtub. A computer, a storage battery, and a communicator are electrically connected and installed inside the cart, and the cart is electrically connected to a power outlet and a display, which enables the cart to be moved and used not limited by the location of power supply. Moreover, the cart has a drawer and a spacing for the storage of beauty products and tools, and through sequentially connecting to a front arm, a rear arm, and a base, the phototherapy mask is configured to be used in different angles and to be held above or in front of a user's in a preferable height.
    Type: Application
    Filed: May 29, 2018
    Publication date: December 5, 2019
    Applicants: YI JIN SHIUAN BEAUTY CO., LTD., Department of Electrical Engineering, National Changhua University of Education
    Inventors: Hui-Mei Chang, Tsair-Rong Chen
  • Publication number: 20190368034
    Abstract: Methods of depositing a metal selectively onto a metal surface relative to a dielectric surface are described. Methods include reducing a metal oxide surface to a metal surface and protecting a dielectric surface to minimize deposition thereon and exposing the substrate to a metal precursor and an alcohol to deposit a film.
    Type: Application
    Filed: March 1, 2018
    Publication date: December 5, 2019
    Inventors: Feng Q. Liu, Mei Chang, David Thompson
  • Patent number: 10483116
    Abstract: Processing methods comprising exposing a substrate to an optional nucleation promoter followed by sequential exposure of a first reactive gas comprising a metal oxyhalide compound and a second reactive gas to form a metal film on the substrate.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: November 19, 2019
    Assignee: Applied Materials, Inc.
    Inventors: Xinyu Fu, David Knapp, David Thompson, Jeffrey W. Anthis, Mei Chang
  • Publication number: 20190343768
    Abstract: A dry powder insulin formulation for reconstitution including insulin, a buffering agent, and a salt. The dry powder insulin formulation includes between about 70 and 95% w/w of insulin, between about 5 and 30% w/w of the buffering agent, and less than about 1% w/w of the salt. The dry powder insulin formulation has less than about 5% water content.
    Type: Application
    Filed: May 14, 2019
    Publication date: November 14, 2019
    Inventors: Blaine Bueche, Matthew Sander, Mei-chang Kuo
  • Publication number: 20190326120
    Abstract: The present disclosure relates to a method for forming a p-metal work function nitride film having a desired p-work function on a substrate, including: adjusting one or more of a temperature of a substrate, a duration of one or more temporally separated vapor phase pulses, a ratio of a tungsten precursor to a titanium precursor, or a pressure of a reaction to tune a work function of a p-metal work function nitride film to a desired p-work function, and contacting the substrate with temporally separated vapor phase pulses of the tungsten precursor, the titanium precursor, and a reactive gas to form a p-metal work function nitride film thereon having the desired p-work function.
    Type: Application
    Filed: April 11, 2019
    Publication date: October 24, 2019
    Inventors: Guoqiang JIAN, WEI TANG, CHI-CHOU LIN, PAUL MA, YIXIONG YANG, MEI CHANG, WENYI LIU
  • Patent number: 10453657
    Abstract: Embodiments of a gas delivery apparatus for use in a radio frequency (RF) processing apparatus are provided herein. In some embodiments, a gas delivery apparatus for use in a radio frequency (RF) processing apparatus includes: a conductive gas line having a first end and a second end; a first flange coupled to the first end; a second flange coupled to the second end, wherein the conductive gas line extends through and between the first and second flanges; and a block of ferrite material surrounding the conductive gas line between the first and second flanges.
    Type: Grant
    Filed: July 5, 2017
    Date of Patent: October 22, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Daping Yao, Hyman W. H. Lam, John C. Forster, Jiang Lu, Can Xu, Dien-Yeh Wu, Paul F. Ma, Mei Chang
  • Patent number: 10420722
    Abstract: Dry powder vancomycin compositions and methods for administering and preparing such compositions are provided.
    Type: Grant
    Filed: December 10, 2015
    Date of Patent: September 24, 2019
    Assignee: SAVARA INC.
    Inventors: John Lord, Jaakko Taneli Jouhikainen, Herman E. Snyder, Pravin Soni, Mei-Chang Kuo
  • Patent number: 10400335
    Abstract: Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectible with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: September 3, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Zhenbin Ge, Chien-Teh Kao, Joel M. Huston, Mei Chang
  • Patent number: 10395916
    Abstract: Methods to selectively deposit a film on a first surface (e.g., a metal surface) relative to a second surface (e.g., a dielectric surface) by exposing the surface to a pre-clean plasma comprising one or more of argon or hydrogen followed by deposition. The first surface and the second surface can be substantially coplanar. The selectivity of the deposited film may be increased by an order of magnitude relative to the substrate before exposure to the pre-cleaning plasma.
    Type: Grant
    Filed: September 8, 2017
    Date of Patent: August 27, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Kai Wu, Vikash Banthia, Sang Ho Yu, Mei Chang, Feiyue Ma
  • Patent number: 10373824
    Abstract: Methods for depositing silicon include cycling dosing between 1 and 100 cycles of one or more first chlorosilane precursors on a III-V surface at a temperature between 300° C. and 500° C. to form a first layer. Methods may include desorbing chlorine from the first layer by treating the first layer with atomic hydrogen to form a second layer. Methods may include forming a silicon multilayer on the second layer by cycling dosing between 1 and 100 cycles of one or more second chlorosilane precursors and atomic hydrogen at a temperature between 300° C. and 500° C. A layered composition includes a first layer selected from the group consisting of InxGa1?xAs, InxGa1?xSb, InxGa1?xN, SiGe, and Ge, wherein X is between 0.1 and 0.99, and a second layer, wherein the second layer comprises Si—H and Si—OH.
    Type: Grant
    Filed: October 6, 2017
    Date of Patent: August 6, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Andrew C. Kummel, Mary Edmonds, Mei Chang, Jessica S. Kachian
  • Publication number: 20190210061
    Abstract: Methods and apparatus for removing deposits in self-assembled monolayer (SAM) based selective deposition process schemes using cryogenic gas streams are described. Some methods include removing deposits in self-assembled monolayer (SAM) based selective depositions by exposing the substrate to cryogenic aerosols to remove undesired deposition on SAM protected surfaces. Processing chambers for cryogenic gas assisted selective deposition are also described.
    Type: Application
    Filed: January 8, 2019
    Publication date: July 11, 2019
    Inventors: Chang Ke, Song-Moon Suh, Liqi Wu, Michael S. Jackson, Lei Zhou, Biao Liu, Cheng Pan, Paul F. Ma, Mei Chang