Patents by Inventor Michael Brugger
Michael Brugger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20150200123Abstract: An apparatus for treating a wafer-shaped article, comprises a spin chuck for holding a wafer-shaped article in a predetermined orientation, at least one upper nozzle for dispensing a treatment fluid onto an upwardly facing surface of a wafer-shaped article when positioned on the spin chuck, and at least one lower nozzle arm comprising a series of lower nozzles extending from a central region of the spin chuck to a peripheral region of the spin chuck. The series of nozzles comprises a smaller nozzle in a central region of the spin chuck and a larger nozzle in a peripheral region of the spin chuck. In the method according to the invention, a heated liquid is supplied through the series of nozzles so as to supply more heat to peripheral regions of a wafer than to central regions.Type: ApplicationFiled: January 14, 2014Publication date: July 16, 2015Applicant: LAM RESEARCH AGInventors: Michael BRUGGER, Karl-Heinz HOHENWARTER, Dieter SPITALER, Gerald ANTON
-
Patent number: 8974632Abstract: A method and device for processing wafer-shaped articles comprises a closed process chamber. A rotary chuck is located within the process chamber, and is adapted to hold a wafer shaped article thereon. An interior fluid distribution ring is positioned above the rotary chuck, and comprises an annular surface inclined downwardly from a radially inner edge to a radially outer edge thereof. At least one fluid distribution nozzle extends into the closed process chamber and is positioned so as to discharge fluid onto the annular surface of the fluid distribution ring.Type: GrantFiled: November 30, 2011Date of Patent: March 10, 2015Assignee: Lam Research AGInventors: Ulrich Tschinderle, Andreas Gleissner, Michael Brugger
-
Patent number: 8936832Abstract: A method for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.Type: GrantFiled: December 21, 2011Date of Patent: January 20, 2015Assignee: Lam Research AGInventors: Michael Brugger, Alexander Schwarzfurtner
-
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND HEATING SYSTEM FOR USE IN SUCH APPARATUS
Publication number: 20140339215Abstract: An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. At least the transparent plate positioned between the infrared heating elements and the underside of a wafer is mounted for rotation with the spin chuck. Alternatively, the transparent plate is part of a housing that encloses the infrared heating elements and that rotates with the spin chuck as the heating elements are stationary relative thereto.Type: ApplicationFiled: May 15, 2013Publication date: November 20, 2014Applicant: LAM RESEARCH AGInventors: Ante PLAZONIC, Vijay Kumar BADAM, Michael BRUGGER -
Patent number: 8888952Abstract: Disclosed is an apparatus for wet treatment of a plate-like article, which includes: a spin chuck for holding and rotating the plate-like article including an element for holding the plate-like article at the plate-like article's edge and a gas supply element for directing gas towards the side of the plate-like article, which faces the spin chuck, wherein the gas supply element includes a gas nozzle rotating with the spin chuck, for providing a gas cushion between the plate-like article and the spin chuck; a fluid supply element for directing fluid onto the side of the plate-like article, which is facing the spin chuck, through a non-rotatable fluid nozzle.Type: GrantFiled: August 7, 2008Date of Patent: November 18, 2014Assignee: Lam Research AGInventors: Markus Gigacher, Michael Brugger
-
Publication number: 20140102637Abstract: In an apparatus and process for treating wafer-shaped articles, a spin chuck holds a wafer-shaped article in a predetermined orientation relative to an upper surface of the spin chuck. A heating assembly comprises a housing containing at least one infrared heating element. The heating assembly is mounted above the upper surface of the spin chuck and adjacent a wafer-shaped article when mounted on the spin chuck. The housing also contains a conduit having an inlet connected to a source of cooling fluid and an outlet returning cooling fluid to the source of cooling fluid.Type: ApplicationFiled: October 12, 2012Publication date: April 17, 2014Applicant: LAM RESEARCH AGInventors: Michael BRUGGER, Otto LACH, Olivier POSTEL
-
Patent number: 8613288Abstract: Improved resistance to temperature-related degradation or deformation in a wafer-supporting chuck is provided by at least one shielding member that physically and/or thermally shields chuck components from effects of elevated temperature processing fluids.Type: GrantFiled: December 18, 2009Date of Patent: December 24, 2013Assignee: Lam Research AGInventors: Michael Brugger, Otto Lach
-
Patent number: 8608146Abstract: Improved durability and longevity of spin chucks is achieved by using a composite support pin structure in which a pin body of a chemically inert plastic includes a hollow cavity containing an insert formed from a material whose Young's modulus is greater than that of the inert plastic.Type: GrantFiled: December 18, 2009Date of Patent: December 17, 2013Assignee: Lam Research AGInventors: Michael Brugger, Otto Lach, Dietmar Hammer
-
Publication number: 20130233356Abstract: An apparatus and method for processing wafer-shaped articles comprises an array of nozzles that are stationary in use, and are individually controlled to simulate the action of a moving boom arm without the actual need for such an arm. Preferably three such arrays are provided, for dispensing three different types of liquid at various process stages. The computer control of the nozzle valves may cause only one nozzle of each array to be open at any given time, or may cause a pair of adjacent nozzles to be open simultaneously.Type: ApplicationFiled: March 12, 2012Publication date: September 12, 2013Applicant: LAM RESEARCH AGInventors: Rainer OBWEGER, Michael BRUGGER, Franz KUMNIG
-
Publication number: 20130134128Abstract: A method and device for processing wafer-shaped articles comprises a closed process chamber. A rotary chuck is located within the process chamber, and is adapted to hold a wafer shaped article thereon. An interior fluid distribution ring is positioned above the rotary chuck, and comprises an annular surface inclined downwardly from a radially inner edge to a radially outer edge thereof. At least one fluid distribution nozzle extends into the closed process chamber and is positioned so as to discharge fluid onto the annular surface of the fluid distribution ring.Type: ApplicationFiled: November 30, 2011Publication date: May 30, 2013Applicant: LAM RESEARCH AGInventors: Ulrich TSCHINDERLE, Andreas GLEISSNER, Michael BRUGGER
-
Patent number: 8231939Abstract: A method and device for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.Type: GrantFiled: November 19, 2007Date of Patent: July 31, 2012Assignee: Lam Research AGInventors: Michael Brugger, Alexander Schwarzfurtner
-
Publication number: 20120131815Abstract: A gas dispenser in a process module for wet processing of wafer-shaped articles is substantially smaller than the article to be processed and is movable laterally of the article as it dispenses inert gas above the article.Type: ApplicationFiled: November 30, 2010Publication date: May 31, 2012Applicant: LAM RESEARCH AGInventors: Harald KRAUS, Marco NARDONI, Michael BRUGGER
-
Publication number: 20120085374Abstract: A method for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.Type: ApplicationFiled: December 21, 2011Publication date: April 12, 2012Applicant: LAM RESEARCH AGInventors: Michael BRUGGER, Alexander SCHWARZFURTNER
-
Publication number: 20110254236Abstract: Improved reduction of static charge in spin chucks is achieved by providing one or more pin assemblies which are formed from chemically inert material and which include an electrically conductive inlay.Type: ApplicationFiled: April 16, 2010Publication date: October 20, 2011Applicant: Lam Research AGInventors: Michael BRUGGER, Otto LACH
-
Patent number: 8029641Abstract: Method and device for wet treating a defined peripheral edge-region of a wafer-shaped article having a first surface plane W1, a second surface plane W2 and an edge surface. The device includes a support for holding the wafer-shaped article; liquid dispensing members for dispensing liquid onto the first surface plane W1 of the wafer-shaped article not facing the support and liquid guiding member connected to the support for guiding at least a part of the liquid around the edge surface of the wafer-shaped article towards the second surface plane W2 of the wafer-shaped article facing the support thereby wetting at least the edge surface, wherein the liquid guiding member has the form of a ring.Type: GrantFiled: May 18, 2006Date of Patent: October 4, 2011Assignee: Lam Research AGInventors: Andreas Baldy, Markus Gacher, Michael Brugger
-
Publication number: 20110148022Abstract: Improved durability and longevity of spin chucks is achieved by using a composite support pin structure in which a pin body of a chemically inert plastic includes a hollow cavity containing an insert formed from a material whose Young's modulus is greater than that of the inert plastic.Type: ApplicationFiled: December 18, 2009Publication date: June 23, 2011Applicant: LAM RESEARCH AGInventors: Michael BRUGGER, Otto LACH, Dietmar HAMMER
-
Publication number: 20110146728Abstract: Improved resistance to temperature-related degradation or deformation in a wafer-supporting chuck is provided by at least one shielding member that physically and/or thermally shields chuck components from effects of elevated temperature processing fluids.Type: ApplicationFiled: December 18, 2009Publication date: June 23, 2011Applicant: LAM RESEARCH AGInventors: Michael BRUGGER, Otto LACH
-
Publication number: 20110059242Abstract: A method and device for wet treatment of plate-like articles includes, a chuck for holding a single plate-like article having an upwardly facing surface for receiving liquid running off a plate-like article when being treated with liquid, wherein the chuck is outwardly bordered by a circumferential annular lip. The chuck has an outer diameter greater than the greatest diameter of the plate-like article to be treated, and a rotatable part with an upwardly facing ring-shaped surface for receiving liquid running off the circumferential lip of the chuck. The rotatable part is rotatable with respect to the chuck, the ring-shaped surface is coaxially arranged with respect to the circumferential annular lip, the inner diameter of the ring-shaped surface is smaller than the outer diameter of the chuck, and the distance d between the lip and the upwardly facing ring-shaped surface is in a range from 0.1 mm to 5 mm.Type: ApplicationFiled: November 19, 2007Publication date: March 10, 2011Applicant: SEZ AGInventors: Michael Brugger, Alexander Schwarzfurtner
-
Publication number: 20100206481Abstract: Disclosed is an apparatus for wet treatment of a plate-like article, which includes: a spin chuck for holding and rotating the plate-like article including an element for holding the plate-like article at the plate-like article's edge and a gas supply element for directing gas towards the side of the plate-like article, which faces the spin chuck, wherein the gas supply element includes a gas nozzle rotating with the spin chuck, for providing a gas cushion between the plate-like article and the spin chuck; a fluid supply element for directing fluid onto the side of the plate-like article, which is facing the spin chuck, through a non-rotatable fluid nozzle.Type: ApplicationFiled: August 7, 2008Publication date: August 19, 2010Applicant: SEZ AGInventors: Markus Gigacher, Michael Brugger
-
Publication number: 20080196835Abstract: Method and device for wet treating a defined peripheral edge-region of a wafer-shaped article having a first surface plane W1, a second surface plane W2 and an edge surface. The device includes a support for holding the wafer-shaped article; liquid dispensing members for dispensing liquid onto the first surface plane W1 of the wafer-shaped article not facing the support and liquid guiding member connected to the support for guiding at least a part of the liquid around the edge surface of the wafer-shaped article towards the second surface plane W2 of the wafer-shaped article facing the support thereby wetting at least the edge surface, wherein the liquid guiding member has the form of a ring.Type: ApplicationFiled: May 18, 2006Publication date: August 21, 2008Applicant: SEZ AGInventors: Andreas Baldy, Markus Gigacher, Michael Brugger