Patents by Inventor Michael C. Kuchar
Michael C. Kuchar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11415230Abstract: Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.Type: GrantFiled: March 31, 2020Date of Patent: August 16, 2022Assignee: Applied Material, Inc.Inventors: Paul Z. Wirth, Ofer Amir, Michael C. Kuchar
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Publication number: 20220199436Abstract: A substrate processing system includes a factory interface having a controlled environment and a transfer chamber. The transfer chamber includes four first facets and three second facets, where each of the three second facets has a width that is narrower than that of each of the four first facets. A first processing chamber is attached to one of the four first facets. A first auxiliary chamber is attached to a first of the three second facets, where the first auxiliary chamber is smaller than the first processing chamber. A load lock is attached to a second of the three second facets and to the factory interface. A robot is attached to a bottom of the transfer chamber, the robot adapted to transfer substrates to and from the first processing chamber, the first auxiliary chamber, and the load lock.Type: ApplicationFiled: May 11, 2021Publication date: June 23, 2022Inventors: Nir Merry, Schubert S. Chu, Sushant S. Koshti, Michael C. Kuchar, Nyi Oo Myo, Songjae Lee
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Patent number: 11211269Abstract: A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.Type: GrantFiled: July 8, 2020Date of Patent: December 28, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Andrew Paul Harbert, Michael C Kuchar, Nicholas Michael Bergantz, Leon Volfovski, Sivakumar Ramalingam, Karuppasamy Muthukamatchi, Douglas R McAllister
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Publication number: 20210301929Abstract: Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.Type: ApplicationFiled: March 31, 2020Publication date: September 30, 2021Inventors: Paul Z. Wirth, Ofer Amir, Michael C. Kuchar
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Publication number: 20210020476Abstract: A method includes receiving, by a first loadlock chamber of the loadlock system, a first object from a factory interface via a first opening. The first object is transferred into the first loadlock chamber via a first robot arm. The factory interface is at a first state. The first loadlock chamber is configured to receive different types of objects. The method further includes sealing a first loadlock door against the first opening to create a first sealed environment at the first state in the first loadlock chamber and causing the first sealed environment of the first loadlock chamber to be changed to a second state. The method further includes actuating a second loadlock door to provide a second opening between the first loadlock chamber and a transfer chamber. The first object is to be transferred from the first loadlock chamber to the transfer chamber via a second robot arm.Type: ApplicationFiled: July 8, 2020Publication date: January 21, 2021Inventors: Andrew Paul Harbert, Michael C. Kuchar, Nicholas Michael Bergantz, Leon Volfovski, Sivakumar Ramalingam, Karuppasamy Muthukamatchi, Douglas R. McAllister
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Publication number: 20200126826Abstract: A load lock apparatus may include a body portion including one or more surfaces. A first groove may extend into and along a first surface of the one or more surfaces. A first tube may be received in the first groove, wherein the first tube may be configured to transport a liquid (e.g., to thermally control the body portion). Other apparatus and methods of manufacturing load lock apparatus in accordance with these and other embodiments are disclosed.Type: ApplicationFiled: October 18, 2018Publication date: April 23, 2020Inventors: Ram Dayal Malviya, Travis Morey, Theodossios V. Costuros, Michael C. Kuchar, Pandu Maddherla, Richard Giljum, Edward Ng
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Publication number: 20170213705Abstract: Slit valve gates and methods for cleaning are provided. Slit valves include: a slit valve gate configured to seal an opening of a process chamber, the slit valve gate comprising a surface that faces an processing volume of the process chamber; and a non-porous anodized coating on the surface of the slit valve gate. Methods of cleaning include: immersing the slit valve gate in a tank comprising deionized water; sonicating the slit valve gate at a first power density of about 6 W/cm2 to about 15 W/cm2 and a frequency of about 25 kHz to about 40 kHz for a first period of time; sonicating the slit valve gate at a second power density of about 30 W/cm2 to about 45 W/cm2 and a frequency of about 25 kHz to about 40 kHz for a second period of time; and removing the slit valve gate from the tank.Type: ApplicationFiled: January 24, 2017Publication date: July 27, 2017Inventors: OFER AMIR, JENNIFER Y. SUN, MICHAEL R. RICE, MICHAEL C. KUCHAR, JOSEPH F. SOMMERS
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Publication number: 20170211706Abstract: Slit valve doors including a door body made entirely of an Al2O3 ceramic material, and a seal coupled to the door body. Slit valve door assemblies and slit valve assemblies including the slit valve door are disclosed, as are numerous other aspects.Type: ApplicationFiled: January 17, 2017Publication date: July 27, 2017Inventors: Ofer Amir, Michael R. Rice, Jennifer Y. Sun, Michael C. Kuchar
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Patent number: 5480062Abstract: A vacuum operated system for individually dispensing items of oral solid medicine from bulk storage to a user, where the medicine is dispensed under computer control, and the quantity and type of medicine is selected in advance by the user. The invention includes medicine dispensing equipment and a computer that provides a user interface. A plurality of storage containers arranged in a rotatable carousel or a rectilinear array may contain various pharmaceutical articles, or various types, dosages, ages, and lot numbers of medicines. The storage containers may be easily refilled by inserting modular refill cartridges into the storage containers. After a user enters certain data into the computer, the invention aligns a universal vacuum probe with the storage container that contains the desired items. The universal vacuum probe is lowered to the desired storage container and engaged with a container probe that is exclusive to that storage container.Type: GrantFiled: January 30, 1995Date of Patent: January 2, 1996Assignee: KVM Technologies, Inc.Inventors: Lisa W. Rogers, Thomas L. Kraft, John F. Berry, Scott A. Kelley, John A. Thompson, III, Clifford D. Ober, Michael C. Kuchar, Robert R. Mayer, Jr., Van W. Hoskins, Vincent C. Weido, Mark G. Henckel
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Patent number: 5405048Abstract: A vacuum operated system for individually dispensing items of oral solid medicine from bulk storage to a user, where the medicine is dispensed under computer control, and the quantity and type of medicine is selected in advance by the user. The invention includes medicine dispensing equipment and a computer that provides a user interface. A plurality of storage containers arranged in a rotatable carousel or a rectilinear array may contain various pharmaceutical articles, or various types, dosages, ages, and lot numbers of medicines. The storage containers may be easily refilled by inserting modular refill cartridges into the storage containers. After a user enters certain data into the computer, the invention aligns a universal vacuum probe with the storage container that contains the desired items. The universal vacuum probe is lowered to the desired storage container and engaged with a container probe that is exclusive to that storage container.Type: GrantFiled: December 6, 1993Date of Patent: April 11, 1995Assignee: KVM Technologies, Inc.Inventors: Lisa W. Rogers, Thomas L. Kraft, John F. Berry, Scott A. Kelley, John A. Thompson, III, Clifford D. Ober, Michael C. Kuchar, Robert R. Mayer, Jr., Van W. Hoskins, Vincent C. Weido, Mark G. Henckel
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Patent number: D357581Type: GrantFiled: December 3, 1993Date of Patent: April 25, 1995Assignee: KVM Technologies, Inc.Inventors: Lisa W. Rogers, John A. Thompson, III, Michael C. Kuchar, Ronald J. Kokot, Scott A. Kelley
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Patent number: D973116Type: GrantFiled: November 17, 2020Date of Patent: December 20, 2022Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Michael C. Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir
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Patent number: D973737Type: GrantFiled: November 17, 2020Date of Patent: December 27, 2022Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Michael C. Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir
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Patent number: D991994Type: GrantFiled: November 8, 2022Date of Patent: July 11, 2023Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Michael C. Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir
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Patent number: D992611Type: GrantFiled: November 8, 2022Date of Patent: July 18, 2023Assignee: Applied Materials, Inc.Inventors: Michael R. Rice, Michael C. Kuchar, Travis Morey, Adam J. Wyatt, Ofer Amir