Mainframe of substrate processing system

Info

Patent number: D973737
Type: Grant
Filed: Nov 17, 2020
Date of Patent: Dec 27, 2022
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Michael R. Rice (Pleasanton, CA), Michael C. Kuchar (Georgetown, TX), Travis Morey (Austin, TX), Adam J. Wyatt (Round Rock, TX), Ofer Amir (Half Moon Bay, CA)
Primary Examiner: Patricia A Palasik
Application Number: 29/758,663

Description

Description

FIG. 1 is a perspective view of a mainframe for a substrate processing system of the present design.

FIG. 2 is a side view thereof.

FIG. 3 is a side view thereof.

FIG. 4 is a front view thereof.

FIG. 5 is a rear view thereof.

FIG. 6 is a top view of thereof.

FIG. 7 is a bottom view thereof; and,

FIG. 8 is a top perspective view thereof, showing unclaimed components attached thereto.

The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.

Claims

The ornamental design for a mainframe for a substrate processing system, as shown and described.