Patents by Inventor Michael Rosenstein
Michael Rosenstein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20120185094Abstract: A mobile robot that includes a drive system, a controller in communication with the drive system, and a volumetric point cloud imaging device supported above the drive system at a height of greater than about one feet above the ground and directed to be capable of obtaining a point cloud from a volume of space that includes a floor plane in a direction of movement of the mobile robot. The controller receives point cloud signals from the imaging device and issues drive commands to the drive system based at least in part on the received point cloud signals.Type: ApplicationFiled: February 22, 2011Publication date: July 19, 2012Applicant: iRobot CorporationInventors: Michael Rosenstein, Michael Halloran, Steven V. Shamlian, Chikyung Won, Mark Chiappetta
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Publication number: 20120185095Abstract: A mobile human interface robot that includes a base defining a vertical center axis and a forward drive direction and a holonomic drive system supported by the base. The drive system has first, second, and third driven drive wheels, each trilaterally spaced about the vertical center axis and having a drive direction perpendicular to a radial axis with respect to the vertical center axis. The robot further includes a controller in communication with the holonomic drive system, a torso supported above the base, and a touch sensor system in communication with the controller. The touch sensor system is responsive to human contact. The controller issues drive commands to the holonomic drive system based on a touch signal received from the touch sensor system.Type: ApplicationFiled: February 22, 2011Publication date: July 19, 2012Applicant: iRobot CorporationInventors: Michael Rosenstein, Chikyung Won, Geoffrey B. Lansberry, Steven V. Shamlian, Michael Halloran, Mark Chiappetta, Thomas P. Allen
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Publication number: 20120185096Abstract: A method of operating a mobile robot to traverse a threshold includes detecting a threshold proximate the robot. The robot includes a holonomic drive system having first, second, and third drive elements configured to maneuver the robot omni-directionally. The method further includes moving the first drive element onto the threshold from a first side and moving the second drive element onto the threshold to place both the first and second drive elements on the threshold. The method includes moving the first drive element off a second side of the threshold, opposite to the first side of the threshold, and moving the third drive element onto the threshold, placing both the second and third drive elements on the threshold. The method includes moving both the second and third drive elements off the second side of the threshold.Type: ApplicationFiled: February 22, 2011Publication date: July 19, 2012Applicant: iRobot CorporationInventors: Michael Rosenstein, Steven V. Shamlian, Chikyung Won, Michael Halloran, Mark Chiappetta, Thomas P. Allen
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Publication number: 20110288684Abstract: A robot system includes a mobile robot having a controller executing a control system for controlling operation of the robot, a cloud computing service in communication with the controller of the robot, and a remote computing device in communication with the cloud computing service. The remote computing device communicates with the robot through the cloud computing service.Type: ApplicationFiled: February 22, 2011Publication date: November 24, 2011Applicant: iRobot CorporationInventors: Tim S. Farlow, Michael Rosenstein, Michael Halloran, Chikyung Won, Steven V. Shamlian, Mark Chiappetta
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Patent number: 7674360Abstract: A lift mechanism for and a corresponding use of a magnetron in a plasma sputter reactor. A magnetron rotating about the target axis is controllably lifted away from the back of the target to compensate for sputter erosion, thereby maintaining a constant magnetic field and resultant plasma density at the sputtered surface, which is particularly important for stable operation with a small magnetron, for example, one executing circular or planetary motion about the target axis. The lift mechanism can include a lead screw axially fixed to the magnetron support shaft and a lead nut engaged therewith to raise the magnetron as the lead nut is turned. Alternatively, the support shaft is axially fixed to a vertically moving slider. The amount of lift may be controlled according a recipe based on accumulated power applied to the target or by monitoring electrical characteristics of the target.Type: GrantFiled: September 16, 2004Date of Patent: March 9, 2010Assignee: Applied Materials, Inc.Inventors: Ilyoung Richard Hong, Donny Young, Michael Rosenstein, Robert B. Lowrance, Daniel C. Lubben, Michael Andrew Miller, Peijun Ding, Sreekrishnan Sankaranarayan, Goichi Yoshidome
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Publication number: 20080116067Abstract: The invention relates to physical vapor deposition (PVD) chambers having a rotatable substrate pedestal and at least one moveable tilted target. Embodiments of the invention facilitate deposition of highly uniform thin films.Type: ApplicationFiled: December 5, 2007Publication date: May 22, 2008Inventors: Ilya Lavitsky, Michael Rosenstein, Goichi Yoshidome, Hougong Wang, Zhendong Liu, Mengqi Ye
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Patent number: 7371285Abstract: A semiconductor processing chamber having a motorized lid is provided. In one embodiment, the semiconductor processing chamber generally includes a chamber body having sidewalls and a bottom defining an interior volume. A lid assembly is coupled to the chamber body and is movable between a first position that encloses the interior volume and a second position. A hinge assembly thereto is coupled between the lid assembly and the chamber body. A motor is coupled to the hinge assembly to facilitate moving the lid assembly between the first position and the second position.Type: GrantFiled: March 19, 2004Date of Patent: May 13, 2008Assignee: Applied Materials, Inc.Inventors: Michael Rosenstein, Alex Shenderovich, Marc O. Schweitzer, Ilya Lavitsky, Alvin Lau, Michael Feltsman
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Publication number: 20070062452Abstract: A coil has an integral fastener portion to facilitate fastening the coil to a shield wall to reduce generation of particulates.Type: ApplicationFiled: November 20, 2006Publication date: March 22, 2007Inventors: Ian Pancham, Michael Rosenstein, Leif DeLaurentis, Allen Lau, Praburam Gopalraja, James Gogh
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Patent number: 7148435Abstract: An apparatus for a lock out/tag out device that is a permanent attachment to a standard breaker box is disclosed. The device is designed to prevent movement of an electrical breaker handle to a closed position when the device is in use. The device also prevents locking a breaker in an on position, thereby lowering safety concerns. When the device is not in use, the device will not interfere with the operation of the breakers and stays conveniently attached to the breaker box. The device also allows storage of locking devices when not in use, thereby enabling personnel to perform a service procedure more efficiently.Type: GrantFiled: December 20, 2005Date of Patent: December 12, 2006Assignee: Applied Materials, Inc.Inventors: Allen K. Lau, Michael Rosenstein, Carl Johnson, Sharon Niehoff
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Patent number: 7097744Abstract: In one embodiment, a target alignment surface disposed on a target support mechanically engages a darkspace shield alignment surface disposed on a darkspace shield as the target is lodged into a chamber body. The respective alignment surfaces are shaped and positioned so that the darkspace shield is physically moved to a desired aligned position as the alignment surfaces engage each other. In this manner a darkspace shield may be directly aligned to a target within a semiconductor fabrication chamber to provide a suitable darkspace gap between the target and the darkspace shield.Type: GrantFiled: June 12, 2003Date of Patent: August 29, 2006Assignee: Applied Materials, Inc.Inventors: Alan Barry Liu, Marc O. Schweitzer, James Stephen Van Gogh, Michael Rosenstein, Jennifer L. Watia, Xinyu Zhang, Yoichiro Tanaka, John C. Forster, Anthony Chen
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Publication number: 20060151306Abstract: An apparatus for a lock out/tag out device that is a permanent attachment to a standard breaker box is disclosed. The device is designed to prevent movement of an electrical breaker handle to a closed position when the device is in use. The device also prevents locking a breaker in an on position, thereby lowering safety concerns. When the device is not in use, the device will not interfere with the operation of the breakers and stays conveniently attached to the breaker box. The device also allows storage of locking devices when not in use, thereby enabling personnel to perform a service procedure more efficiently.Type: ApplicationFiled: December 20, 2005Publication date: July 13, 2006Inventors: Allen Lau, Michael Rosenstein, Carl Johnson, Sharon Niehoff
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Publication number: 20060096857Abstract: The invention relates to physical vapor deposition (PVD) chambers having a rotatable substrate pedestal. Embodiments of the invention facilitate deposition of highly uniform thin films. In further embodiments, one or more sputtering targets are movably disposed above the pedestal. The orientation of the targets relative to the pedestal may be adjusted laterally, vertically or angularly. In one embodiment, the target may be adjusted between angles of about 0 to 45 degreees relative to an axis of pedestal rotation.Type: ApplicationFiled: November 8, 2004Publication date: May 11, 2006Inventors: Ilya Lavitsky, Michael Rosenstein, Goichi Yoshidome, Hougong Wang, Zhendong Liu, Mengqi Ye
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Publication number: 20060096851Abstract: The invention relates to physical vapor deposition (PVD) chambers having a rotatable substrate pedestal and at least one moveable tilted target. Embodiments of the invention facilitate deposition of highly uniform thin films.Type: ApplicationFiled: November 8, 2004Publication date: May 11, 2006Inventors: Ilya Lavitsky, Michael Rosenstein, Goichi Yoshidome, Hougong Wang, Zhendong Liu, Mengqi Ye
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Publication number: 20050133365Abstract: A lift mechanism for and a corresponding use of a magnetron in a plasma sputter reactor. A magnetron rotating about the target axis is controllably lifted away from the back of the target to compensate for sputter erosion, thereby maintaining a constant magnetic field and resultant plasma density at the sputtered surface, which is particularly important for stable operation with a small magnetron, for example, one executing circular or planetary motion about the target axis. The lift mechanism can include a lead screw axially fixed to the magnetron support shaft and a lead nut engaged therewith to raise the magnetron as the lead nut is turned. Alternatively, the support shaft is axially fixed to a vertically moving slider. The amount of lift may be controlled according a recipe based on accumulated power applied to the target or by monitoring electrical characteristics of the target.Type: ApplicationFiled: September 16, 2004Publication date: June 23, 2005Inventors: Ilyoung Hong, Donny Young, Michael Rosenstein, Robert Lowrance, Daniel Lubben, Michael Miller, Peijun Ding, Sreekrishnan Sankaranarayan, Goichi Yoshidome
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Publication number: 20040251130Abstract: In one embodiment, a target alignment surface disposed on a target support mechanically engages a darkspace shield alignment surface disposed on a darkspace shield as the target is lodged into a chamber body. The respective alignment surfaces are shaped and positioned so that the darkspace shield is physically moved to a desired aligned position as the alignment surfaces engage each other. In this manner a darkspace shield may be directly aligned to a target within a semiconductor fabrication chamber to provide a suitable darkspace gap between the target and the darkspace shield.Type: ApplicationFiled: June 12, 2003Publication date: December 16, 2004Applicant: APPLIED MATERIALS, INC.Inventors: Alan Barry Liu, Marc O. Schweitzer, James Stephen Van Gogh, Michael Rosenstein, Jennifer L. Watia, Xinyu Zhang, Yoichiro Tanaka, John C. Forster, Anthony Chan
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Patent number: 6827825Abstract: The present invention generally provides a physical vapor deposition chamber and a method for detecting a position of a shutter disk within a physical vapor deposition chamber. In one embodiment, a physical vapor deposition chamber includes a chamber body having a shutter disk mechanism disposed therein. A housing is sealingly coupled to a sidewall of the chamber body and communicates therewith through a slot formed through the sidewall. At least a first sensor is disposed adjacent to the housing and orientated to detect the presence of a shutter disk mechanism within the housing. In one embodiment, a method for detecting the position of a shutter disk within a physical vapor deposition chamber having a substrate support generally includes moving the shutter disk away from a substrate support, and changing a state of a first sensor in response to a position of an edge the shutter disk.Type: GrantFiled: November 6, 2003Date of Patent: December 7, 2004Assignee: Applied Materials, Inc.Inventors: Michael Feltsman, Allen Lau, Michael Rosenstein, Marc O. Schweitzer
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Publication number: 20040173162Abstract: A semiconductor processing chamber having a motorized lid is provided. In one embodiment, the semiconductor processing chamber generally includes a chamber body having sidewalls and a bottom defining an interior volume. A lid assembly is coupled to the chamber body and is movable between a first position that encloses the interior volume and a second position. A hinge assembly thereto is coupled between the lid assembly and the chamber body. A motor is coupled to the hinge assembly to facilitate moving the lid assembly between the first position and the second position.Type: ApplicationFiled: March 19, 2004Publication date: September 9, 2004Applicant: Applied Materials, Inc.Inventors: Michael Rosenstein, Alex Shenderovich, Marc O. Schweitzer, Ilya Lavitsky, Alvin Lau, Michael Feltsman
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Patent number: 6776848Abstract: A semiconductor processing chamber having a motorized lid is provided. In one embodiment, the semiconductor processing chamber generally includes a chamber body having sidewalls and a bottom defining an interior volume. A lid assembly is coupled to the chamber body and is movable between a first position that encloses the interior volume and a second position. A hinge assembly thereto is coupled between the lid assembly and the chamber body. A motor is coupled to the hinge assembly to facilitate moving the lid assembly between the first position and the second position.Type: GrantFiled: January 17, 2002Date of Patent: August 17, 2004Assignee: Applied Materials, Inc.Inventors: Michael Rosenstein, Alex Shenderovich, Marc O. Schweitzer, Ilya Lavitsky, Alvin Lau, Michael Feltsman
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Publication number: 20040118521Abstract: A coil has an integral fastener portion to facilitate fastening the coil to a shield wall to reduce generation of particulates.Type: ApplicationFiled: December 10, 2003Publication date: June 24, 2004Applicant: Applied Materials, Inc.Inventors: Ian A. Pancham, Michael Rosenstein, Leif Eric DeLaurentis, Allen K. Lau, Praburam Gopalraja, James Van Gogh
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Publication number: 20040089536Abstract: The present invention generally provides a physical vapor deposition chamber and a method for detecting a position of a shutter disk within a physical vapor deposition chamber. In one embodiment, a physical vapor deposition chamber includes a chamber body having a shutter disk mechanism disposed therein. A housing is sealingly coupled to a sidewall of the chamber body and communicates therewith through a slot formed through the sidewall. At least a first sensor is disposed adjacent to the housing and orientated to detect the presence of a shutter disk mechanism within the housing. In one embodiment, a method for detecting the position of a shutter disk within a physical vapor deposition chamber having a substrate support generally includes moving the shutter disk away from a substrate support, and changing a state of a first sensor in response to a position of an edge the shutter disk.Type: ApplicationFiled: November 6, 2003Publication date: May 13, 2004Applicant: Applied Materials, Inc.Inventors: Michael Feltsman, Allen Lau, Michael Rosenstein, Marc O. Schweitzer