Patents by Inventor Michael Specht

Michael Specht has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20080073694
    Abstract: A memory cell arrangement includes a first memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells, a second memory cell string having a plurality of serially source-to-drain-coupled transistors, at least some of them being memory cells. A dielectric material is between and above the first memory cell string and the second memory cell string. A source/drain line groove is defined in the dielectric material. The source/drain line groove extends from a source/drain region of one transistor of the first memory cell string to a source/drain region of the second memory cell string. Electrically conductive filling material is disposed in the source/drain line groove. Dielectric filling material is disposed in the source/drain line groove between the source/drain regions.
    Type: Application
    Filed: September 22, 2006
    Publication date: March 27, 2008
    Inventors: Josef Willer, Thomas Mikolajick, Nicolas Nagel, Michael Specht
  • Patent number: 7344923
    Abstract: An NROM semiconductor memory device and fabrication method are disclosed. According to one aspect, a method for fabricating an NROM semiconductor memory device can include providing a plurality of u-shaped MOSFETs, which are spaced apart from one another and have a multilayer dielectric. The dielectric suitable for charge trapping along rows in a first direction and alone columns in a second direction in trenches of a semiconductor substrate. Source/drain regions are provided between the u-shaped MOSFETs in interspaces between the rows which run parallel to the columns. Isolation trenches are provided in the source/drain regions between the u-shaped MOSFETs of adjacent columns as far as a particular depth in the semiconductor substrate. The isolation trenches are filled with an insulation material. Word lines are provided for connecting respective rows of u-shaped MOSFETs.
    Type: Grant
    Filed: November 18, 2005
    Date of Patent: March 18, 2008
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Erhard Landgraf, Michael Specht
  • Publication number: 20080054324
    Abstract: An integrated circuit including a gate electrode is disclosed. One embodiment provides a transistor including a first source/drain electrode and a second source/drain electrode. A channel is arranged between the first and the second source/drain electrode in a semiconductor substrate. A gate electrode is arranged adjacent the channel layer and is electrically insulated from the channel layer. A semiconductor substrate electrode is provided on a rear side. The gate electrode encloses the channel layer at at least two opposite sides.
    Type: Application
    Filed: October 29, 2007
    Publication date: March 6, 2008
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Richard Luyken, Franz Hofmann, Lothar Risch, Dirk Manger, Wolfgang Rosner, Till Schloesser, Michael Specht
  • Patent number: 7335939
    Abstract: An array of charge-trapping memory cells and pluralities of parallel wordlines and parallel bitlines running transversely to the wordlines are arranged on a substrate surface. Gate electrodes are located between the wordlines and bitlines and are, in their sequence along the direction of the wordlines, connected alternatingly to one of two adjacent wordlines.
    Type: Grant
    Filed: May 23, 2005
    Date of Patent: February 26, 2008
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Johannes Luyken, Michael Specht
  • Patent number: 7298004
    Abstract: The memory cell array comprises a plurality of parallel fins provided as bitlines arranged at a distance of down to about 40 nm from one another and having a lateral dimension of less than about 30 nm, subdivided into pairs of adjacent first and second fins. A charge-trapping memory layer sequence is arranged on the fins. Wordlines are arranged across the fins, and source/drain regions are located in the fins between the wordlines and at the ends of the fins. There are preferably self-aligned contact areas of the source/drain regions at the ends of the fins, each contact area being common to the fins of one of said pairs. Select transistors and select lines are provided for the first and second fins individually to enable a separate addressing of the memory cells.
    Type: Grant
    Filed: November 30, 2004
    Date of Patent: November 20, 2007
    Assignee: Infineon Technologies AG
    Inventors: Michael Specht, Wolfgang Roesner, Franz Hofmann
  • Patent number: 7265376
    Abstract: A nonvolatile memory cell, memory cell arrangement, and method for production of a nonvolatile memory cell is disclosed. The nonvolatile memory cell includes a vertical field-effect transistor (FET). The FET contains a nanoelement arranged as a channel region and an electrically insulating layer. The electrically insulating layer at least partially surrounds the nanoelement and acts as a charge storage layer and as a gate-insulating layer. The electrically insulating layer is arranged such that electrical charge carriers may be selectively introduced into or removed from the electrically insulating layer and the electrical conductivity characteristics of the nanoelement may be influenced by the electrical charge carriers introduced into the electrically insulating layer.
    Type: Grant
    Filed: October 29, 2003
    Date of Patent: September 4, 2007
    Assignee: Infineon Technologies, Inc.
    Inventors: Andrew Graham, Franz Hofmann, Wolfgang Hönlein, Johannes Kretz, Franz Kreupl, Erhard Landgraf, Richard Johannes Luyken, Wolfgang Rösner, Thomas Schulz, Michael Specht
  • Patent number: 7265413
    Abstract: The invention relates to a semiconductor memory having a multiplicity of memory cells and a method for forming the memory cells. The semiconductor memory generally includes a semiconductor layer arranged on a substrate surface that includes a normally positioned step between a deeper region and a higher region. The semiconductor memory further includes doped contact regions, channel regions, a trapping layer arranged on a gate oxide layer, and at least one gate electrode. The method for forming the memory cells includes patterning a semiconductor layer to form a deeper semiconductor region and a higher semiconductor region having a step positioned between the regions.
    Type: Grant
    Filed: March 5, 2005
    Date of Patent: September 4, 2007
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Erhard Landgraf, Richard Johannes Luyken, Thomas Schulz, Michael Specht
  • Publication number: 20070158756
    Abstract: The present invention provides a production method for a FinFET transistor arrangement, and a corresponding FinFET transistor arrangement.
    Type: Application
    Filed: January 4, 2007
    Publication date: July 12, 2007
    Inventors: Lars Dreeskornfeld, Franz Hofmann, Johannes Luyken, Michael Specht
  • Patent number: 7214582
    Abstract: A semiconductor substrate and a semiconductor circuit formed therein and associated fabrication methods are provided. A multiplicity of depressions with a respective dielectric layer and a capacitor electrode are formed for realizing buried capacitors in a carrier substrate and an actual semiconductor component layer being insulated from the carrier substrate by an insulation layer.
    Type: Grant
    Filed: September 13, 2003
    Date of Patent: May 8, 2007
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Volker Lehmann, Lothar Risoh, Wolfgang Rösner, Michael Specht
  • Publication number: 20070096198
    Abstract: The invention relates to non-volatile memory cells. Further, the invention relates to a method for fabricating non-volatile memory cells. Memory cells are formed on a semiconductor wafer having a protruding element with a top surface. A transistor is formed having a first part, a second part, and a third part. The first part includes a first junction region and a first charge trapping layer on the top surface. The second part includes a second junction region and charge trapping layer on the top surface. The third part has a gate electrode and a gate dielectric layer at least partially on sidewalls of the protruding element. The gate electrode contacts the first and second charge trapping layers.
    Type: Application
    Filed: October 28, 2005
    Publication date: May 3, 2007
    Inventors: Franz Hofmann, Johannes Luyken, Michael Specht, Wolfgang Rosner
  • Patent number: 7208794
    Abstract: Semiconductor memory having memory cells, each including first and second conductively-doped contact regions and a channel region arranged between the latter, formed in a web-like rib made of semiconductor material and arranged one behind the other in this sequence in the longitudinal direction of the rib. The rib has an essentially rectangular shape with an upper side of the rib and rib side faces lying opposite. A memory layer is configured for programming the memory cell, arranged on the upper side of the rib spaced apart by a first insulator layer, and projects in the normal direction of the one rib side face over one of the rib side faces so that the one rib side face and the upper side of the rib form an edge for injecting charge carriers from the channel region into the memory layer.
    Type: Grant
    Filed: March 4, 2005
    Date of Patent: April 24, 2007
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Erhard Landgraf, Richard Johannes Luyken, Wolfgang Roesner, Michael Specht
  • Patent number: 7195978
    Abstract: Memory cell having an auxiliary substrate, on which a first gate insulating layer is formed, a floating gate formed on the first gate insulating layer, an electrically insulating layer formed on the floating gate, a memory gate electrode formed on the electrically insulating layer, a substrate fixed to the memory gate electrode, a second gate insulating layer formed on a part of a surface of the auxiliary substrate, which surface is uncovered by partially removing the auxiliary substrate, a read gate electrode formed on the second gate insulating layer, and two source/drain regions located essentially in a surface region of the remaining material of the auxiliary substrate that is free of the second gate insulating layer and the read gate electrode, a channel region located between the two source/drain regions, wherein the channel region at least partly laterally overlaps the floating gate and the read gate electrode.
    Type: Grant
    Filed: November 29, 2004
    Date of Patent: March 27, 2007
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Richard Johannes Luyken, Michael Specht
  • Publication number: 20070023808
    Abstract: A semiconductor memory having a multitude of memory cells (21-1), the semiconductor memory having a substrate (1), at least one wordline (5-1), a first (15-1) and a second line (15-2; 16-1), wherein each of the multitude of memory cells (21-1) comprises a first doping region (6) disposed in the substrate (1), a second doping region (7) disposed in the substrate (1), a channel region (22) disposed in the substrate (1) between the first doping region (6) and the second doping region (7), a charge-trapping layer stack (2) disposed on the substrate (1), on the channel region (22), on a portion of the first doping region (6) and on a portion of the second doping region (7). Each memory cell (21-1) further comprises a conductive layer (3) disposed on the charge-trapping layer stack (2), wherein the conductive layer (3) is electrically floating. A dielectric layer (4) is disposed on a top surface of the conductive layer (3) and on sidewalls (23) of the conductive layer (3).
    Type: Application
    Filed: July 29, 2005
    Publication date: February 1, 2007
    Inventors: Michael Specht, Wolfgang Roesner, Franz Hofmann
  • Publication number: 20070018218
    Abstract: The invention relates to a bridge field-effect transistor storage cell comprising first and second source/drain areas and a channel area arranged therebetween, which are formed in a semiconductor bridge. The inventive storage cell also comprises a charge-coupled layer that is disposed at least partially on the semiconductor bridge and a metal conductive gate area on at least one part of the charge-coupled layer that is arranged in such a way that electric charge carriers are selectively introducible or removable by applying a predetermined electric voltage to the bridge field-effect transistor storage cell.
    Type: Application
    Filed: June 19, 2006
    Publication date: January 25, 2007
    Inventors: Johannes Kretz, Franz Kreupl, Michael Specht, Gernot Steinlesberger
  • Publication number: 20070018201
    Abstract: The invention relates to a method for fabricating stacked non-volatile memory cells. Further, the invention relates to stacked non-volatile memory cells. The invention particularly relates to the field of non-volatile NAND memories having non-volatile stacked memory cells. The stacked non-volatile memory cells are formed on a semiconductor wafer, having a bulk semi-conductive substrate and an SOI semi-conductive layer and are arranged as a bulk FinFET transistor and an SOI FinFet transistor being arranged on top of the bulk FinFET transistor. Both the FinFET transistor and the SOI FinFet transistor are attached to a common charge-trapping layer. A word line with sidewalls is arranged on top of said patterned charge-trapping layer and a spacer oxide layer is arranged on the sidewalls of said word line.
    Type: Application
    Filed: July 22, 2005
    Publication date: January 25, 2007
    Inventors: Michael Specht, Franz Hofmann, Johannes Luyken
  • Patent number: 7157767
    Abstract: A semiconductor memory element has a substrate, in which a source region and a drain region are formed, a floating gate electrically insulated from the substrate, and a tunnel barrier arrangement, via which charging or discharging of the floating gate can be performed. It is possible to alter the conductivity of a channel between source and drain regions by charging or discharging the floating gate. A source line is electrically conductively connected to the source region and controls the charge transmission of the tunnel barrier arrangement.
    Type: Grant
    Filed: September 2, 2002
    Date of Patent: January 2, 2007
    Assignee: Infineon Technologies AG
    Inventors: Michael Specht, Franz Hofmann
  • Patent number: 7157768
    Abstract: In a semiconductor memory, a plurality of FinFET arrangements with trapping layers or floating gate electrodes as storage mediums are present on respective top sides of fins made from semiconductor material. The material of the gate electrodes is also present on two side walls of the fins, in order to form side wall transistors, and between the gate electrodes forms parts of a word line belonging to the corresponding fin.
    Type: Grant
    Filed: November 9, 2004
    Date of Patent: January 2, 2007
    Assignee: Infineon Technologies AG
    Inventors: Franz Hofmann, Erhard Landgraf, Wolfgang Rosner, Michael Specht, Martin Staedele
  • Publication number: 20060267082
    Abstract: A semiconductor memory component comprises at least one memory cell. The memory cell comprises a semiconductor body comprised of a body region, a drain region and a source region, a gate dielectric, and a gate electrode. The body region comprises a first conductivity type and a depression between the source and drain regions, and the source and drain regions comprise a second conductivity type. The gate electrode is arranged at least partly in the depression and is insulated from the body, source, and drain regions by the gate dielectric. The body region further comprises a first continuous region with a first dopant concentration and a second continuous region with a second dopant concentration greater than the first dopant concentration. The first continuous region adjoins the drain region, the depression and the source region, and the second region is arranged below the first region and adjoins the first region.
    Type: Application
    Filed: May 23, 2006
    Publication date: November 30, 2006
    Inventors: Franz Hofmann, Richard Luyken, Wolfgang Roesner, Michael Specht, Martin Staedele
  • Publication number: 20060267084
    Abstract: A semiconductor memory device comprises a plurality of memory cells, each memory cell having a respective transistor. The transistor comprises a transistor body of a first conductivity type, a drain area and a source area each having a second conductivity type, wherein said drain area and source area are embedded in the transistor body on a first surface of said transistor body, a gate structure having a gate dielectric layer and a gate electrode. Said gate structure is arranged between said drain area and said source area. An emitter area of said first conductivity type is provided wherein said emitter area is arranged on top of said drain area.
    Type: Application
    Filed: May 31, 2005
    Publication date: November 30, 2006
    Applicant: Infineon Technologies AG
    Inventors: Wolfgang Rosner, Franz Hofmann, Michael Specht, Martin Stadele, Johannes Luyken
  • Publication number: 20060267064
    Abstract: The semiconductor memory device comprises a plurality of memory cells. Each memory cell comprises a respective transistor and a respective capacitor unit. The transistor comprises a transistor body of a first conductivity type, a drain area and a source area each having a second conductivity type, the drain area and source area are embedded in the transistor body on a first surface of the transistor body, and a gate structure having a gate dielectric layer and a gate electrode, the gate structure is arranged between the drain area and the source area. An isolation trench is arranged adjacent to said transistor body, having a dielectric layer and a conductive material, wherein the isolation trench is at least partially filled with the conductive material. The conductive material is isolated by said dielectric layer from the transistor body. The capacitor unit is formed by the transistor body representing a first electrode and the conductive material representing the second electrode.
    Type: Application
    Filed: May 31, 2005
    Publication date: November 30, 2006
    Applicant: Infineon Technologies AG
    Inventors: Wolfgang Rosner, Franz Hofmann, Michael Specht, Martin Stadele