Patents by Inventor Michio Hatano

Michio Hatano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060186337
    Abstract: A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.
    Type: Application
    Filed: September 21, 2005
    Publication date: August 24, 2006
    Inventors: Michio Hatano, Sukehiro Ito, Shinichi Tomita, Junichi Katane