Abstract: The present invention relates to semiconductor inspection and provides a technology capable of efficiently detecting a systematic defect. In the present system, with regard to the process (S7, S8) of matching hot spot (HS) points that can be simulated in advance and defect points obtained as a result of a visual inspection each other and the unmatched defect points, a process (S6, S9) of classifying the defect points into groups based on similarity of pattern layout at the defect points to determine the defects belonging to a pattern layout where defects frequently occur, thereby reliably detecting the systematic defect. Also, with a process (S11) of acquiring an uneven distribution in a defect occurrence distribution on a wafer, the systematic defect occurring due to topography of the wafer can also be detected.

Abstract: A method for reviewing a defect on a sample involves the steps of imaging a defect image containing the defect in first magnification by using an image acquisition unit, synthesizing a reference image not containing the defect from the defect image, comparing the defect image acquired with the reference image synthesized to detect a defect applicant, executing a processing for classifying the defect applicant into a defect and a normal portion and imaging only the portion identified as the detect in second magnification. The method makes it possible to specify a defect position without error from the image taken in the first magnification and to image the defect in the second magnification when a large number of defects are observed within a short time by using the image acquisition unit.

Abstract: Provided is a defect observation apparatus capable of analyzing a structure such as an arrangement and a vertical relationship of a circuit pattern formed by using design information of a sample, creating a non-defective product image from a defect image based on the analysis results, and detecting a defect by comparative inspection.

Abstract: A review SEM is provided with a means to store sets of images acquired using multiple imaging conditions or sets of images for which multiple imaging conditions are simulated using simulation, a means to store defect position information for each set of images, and a means to store information relating to imaging conditions and process time. A means to estimate predicted capture rate and throughput with the individual imaging conditions for the sets of images from the stored information, and a means to display the results thereof are additionally provided.

Abstract: Crystals of a purine nucleoside compound, particularly crystals of 2?,3?-dideoxyinosine, which have excellent storage stability and have a concentration of phosphate attached to the crystal of 25 ppm or more, may be produce by: (1) preparing an aqueous solution containing phosphate ion (PO43?) and a purine nucleoside compound; and (2) crystallizing the purine nucleoside compound from the aqueous solution.

Abstract: It is intended to reduce the auto focusing time and to increase the stability in a case that a defect on a specimen that has been detected by an inspection apparatus is observed by using a scanning electron microscope. One or more regions to be used for auto focusing are set in an imaging region or its neighborhood on the basis of semiconductor design information. A target focusing position in the imaging region is determined by performing auto focusing using the thus-set regions. The determined target focusing position is used for low-magnification imaging and high-magnification imaging. An auto focusing mode that is suitable for each imaging region is selected on the basis of the semiconductor design information.

Abstract: When an electronic apparatus is forcibly put into an inoperable state by theft, the inoperable state is canceled using a code from a dealer, without carrying the electronic apparatus into the dealer. After electric power is supplied again, a CD reproduction apparatus is used to playback a CD, and TOC information is used as a code C1. When code C1 is identical to an authorized code A21, the electronic apparatus is made operable. To cancel the inoperable state after the number of inconsistencies becomes 10 or more, a code A22 is notified to the dealer. The dealer carries out a calculation using the code A22, and a result B2 of the calculation is notified to the user. An individual code calculating means carries out the same calculation as the above-mentioned calculation and obtains calculation result B3. When calculation result B2 coincides with calculation result B3, the inoperable state is canceled.

Abstract: An operation support apparatus includes a display device (16) displaying a setting screen including an operating instruction information setting section in which operating instruction information related to the operating instruction is set and an applicable condition setting section having a menu for setting an applicable condition when notifying the operating instruction information. A CPU (11) selects one item from display items in the menu based on an operating input by a PD (14), and performs control to change and display display items in a lower menu below the menu depending on the selected item.

Abstract: Crystals of a purine nucleoside compound, particularly crystals of 2?,3?-dideoxyinosine, which have excellent storage stability and have a concentration of phosphate attached to the crystal of 25 ppm or more, may be produce by: (1) preparing an aqueous solution containing phosphate ion (PO43?) and a purine nucleoside compound; and (2) crystallizing the purine nucleoside compound from the aqueous solution.

Abstract: Disclosed is a method for reviewing defects in a large number of samples within a short period of time through the use of a defect review apparatus. To collect defect images steadily and at high throughput, a defect detection method is selected before imaging and set up for each of review target defects in the samples in accordance with the external characteristics of the samples that are calculated from the design information about the samples. The defect images are collected after an imaging sequence is set up for the defect images and reference images in such a manner as to reduce the time required for stage movement in accordance with the defect coordinates of the samples and the selected defect detection method.

Abstract: A method for reviewing a defect on a sample involves the steps of imaging a defect image containing the defect in first magnification by using an image acquisition unit, synthesizing a reference image not containing the defect from the defect image, comparing the defect image acquired with the reference image synthesized to detect a defect applicant, executing a processing for classifying the defect applicant into a defect and a normal portion and imaging only the portion identified as the detect in second magnification. The method makes it possible to specify a defect position without error from the image taken in the first magnification and to image the defect in the second magnification when a large number of defects are observed within a short time by using the image acquisition unit.

Abstract: An electronic drum system includes an electronic drum having a shell, a drum head stretched across an opening of the shell, a vibration sensor converting vibrations of the drum head to an electric signal and a damper held in contact with the reverse surface of the drum head; when a drummer strikes the drum head with a stick, the drum head is shaken, and vibrations follow; the damper is held in contact with a certain area on the reverse surface, and the shake and vibrations are propagated from another area free from the damper to the vibration sensor; the shake is surely propagated to the vibration sensor, and the vibrations are rapidly decayed; for this reason, the vibration sensor exactly discriminates the shake from the peaks of the vibrations, thereby preventing an electronic sound generator from unintentionally repeated electronic beats.

Abstract: A gas dissolved water producing apparatus includes a gas dissolving section, a gas channel for guiding a gas into the dissolving section, a first water channel for guiding water into the dissolving section, a gas dissolved water discharge channel, and a second water channel for guiding the water without passing through the dissolving section. The second water channel joins the gas dissolved water discharge channel to control the solution gas dissolved in the gas dissolved water can be controlled to a prescribed level of concentration.

Abstract: A candidate-defect classification method includes the steps of acquiring a scanning electron microscope (SEM) image of a candidate defect detected in an inspection from a sample including a pattern formed thereon, the inspection being preliminarily performed by an other inspection device; computing a feature value of the candidate defect by processing the SEM image; executing defect classification of the candidate defect as any one of a pattern shape defect and an other defect by using the computed feature value; acquiring positional information contained in design data of the pattern with respect to a candidate defect classified as the pattern shape defect; and extracting a systematic defect from among candidate defects classified as the pattern shape defects by performing a comparison of the positional information contained in the design data of the acquired candidate defect to positional information of a portion that has a high probability of causing a pattern formation failure and that has been obtained f

Abstract: It is intended to reduce the auto focusing time and to increase the stability in a case that a defect on a specimen that has been detected by an inspection apparatus is observed by using a scanning electron microscope. One or more regions to be used for auto focusing are set in an imaging region or its neighborhood on the basis of semiconductor design information. A target focusing position in the imaging region is determined by performing auto focusing using the thus-set regions. The determined target focusing position is used for low-magnification imaging and high-magnification imaging. An auto focusing mode that is suitable for each imaging region is selected on the basis of the semiconductor design information.

Abstract: As a result of the improvement in throughput of review SEMs, the volume of defect image data which are collected in a semiconductor mass production line becomes larger. In order to achieve efficiency in management (deletion, search, display, and the like) of the image data in response to the above circumstance, a review SEM according to the present invention is configured to judge the importance levels of defect images taken and the like from information such as the classification results of the defect images, the defect feature computed from the defect images, and the imaging states of the defect images and to provide each of the defect images with the importance level and the like as supplementary information so that a large quantity of image data is managed on the basis of the supplementary information.

Abstract: In the event that an electronic apparatus having a security function is forcibly put into an inoperable state because electric power is shut off once by an operation equivalent to theft, the inoperable state can be canceled by using a code notified by the dealer by telephone, without carrying the electronic apparatus into its dealer. After electric power is supplied again, the vehicle-mounted compact disc (abbreviated as CD) reproduction apparatus is used to play back a CD, and its TOC information is used as a judgment identification code C1. When the code C1 is identical to the authorized identification code A21, the electronic apparatus is made operable. In order to cancel the inoperable state after the number of inconsistencies becomes 10 or more, the individual code A22 of an EEPROM 21 is indicated and notified to the dealer. The dealer carries out calculation by using the individual code A22, and a result B2 of the calculation is notified to the user. The user inputs the calculation result B2.

Abstract: In the event that an electronic apparatus having a security function is forcibly put into an inoperable state because electric power is shut off once by an operation equivalent to theft, the inoperable state can be canceled by using a code notified by the dealer by telephone, without carrying the electronic apparatus in its dealer. After electric power is supplied again, the vehicle-mounted compact disc (abbreviated as CD) reproduction apparatus is used to play back a CD, and its TOC information is used as a judgment identification code C1. When the code C1 is identical to the authorized identification code A21, the electronic apparatus is made operable. In order to cancel the inoperable state after the number of inconsistencies becomes 10 or more, the individual code A22 of an EEPROM 21 is indicated and notified to the dealer. The dealer carries out calculation by using the individual code A22, and a result B2 of the calculation is notified to the user. The user inputs the calculation result B2.

Abstract: A power supply control apparatus is provided in which it is possible to easily calculate and predict a necessary and sufficient power consumption value in a device which consumes electric power. As a result, it can positively prevent a shortage or surplus of the power supply capacity, thus saving unnecessary costs for power supply equipment. Still further, it is also prevent the occurrence of critical situations such as missing or loss of stored information due to a shortage of the power supply capacity. To this end, in a device which is supplied with electric power from a power supply unit, configuration units constituting the device are stored as configuration information, and an amount of power consumed by each configuration unit is also stored as power consumption information. Based on the configuration information and the power consumption information thus stored, there is obtained a power consumption value of the device, on the basis of which a prescribed processing is carried out.

Abstract: In the event that an electronic apparatus having a security function is forcibly put into an inoperable state because electric power is shut off once by an operation equivalent to theft, the inoperable state can be canceled by using a code notified by the dealer by telephone, without carrying the electronic apparatus into its dealer. After electric power is supplied again, the vehicle-mounted compact disc (abbreviated as CD) reproduction apparatus is used to play back a CD, and its TOC information is used as a judgment identification code C1. When the code C1 is identical to the authorized identification code A21, the electronic apparatus is made operable. In order to cancel the inoperable state after the number of inconsistencies becomes 10 or more, the individual code A22 of an EEPROM 21 is indicated and notified to the dealer. The dealer carries out calculation by using the individual code A22, and a result B2 of the calculation is notified to the user. The user inputs the calculation result B2.