Patents by Inventor Minoru Yamazaki
Minoru Yamazaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20140014836Abstract: The charged particle beam apparatus having an opening formation member formed with an opening for passage of a charged particle beam emitted from a charged particle source, and either a detector adapted to detect charged particles having passed through the passage opening or a detector adapted to detect charged particles resulting from bombardment on another member of the charged particles having passed through the opening, comprises an aligner for aligning charged particles discharged from the sample and a control unit for controlling the aligner, wherein the control unit controls the aligner to cause it to shift trajectories of the charged particles discharged from the sample so that length measurement may be executed on the basis of detection signals before and after the alignment by the aligner.Type: ApplicationFiled: July 11, 2013Publication date: January 16, 2014Inventors: Miki ISAWA, Minoru YAMAZAKI, Yuzuru MIZUHARA, Hiroshi MAKINO, Hideyuki KAZUMI
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Publication number: 20130284921Abstract: An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application.Type: ApplicationFiled: June 21, 2013Publication date: October 31, 2013Inventors: Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Osamu Nasu
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Patent number: 8487250Abstract: An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application.Type: GrantFiled: August 7, 2012Date of Patent: July 16, 2013Assignee: Hitachi High-Technologies CorporationInventors: Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Osamu Nasu
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Patent number: 8487253Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.Type: GrantFiled: November 18, 2011Date of Patent: July 16, 2013Assignee: Hitachi High-Technologies CorporationInventors: Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Manabu Yano, Kazunari Asao, Takeshi Mizuno, Yuki Ojima
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Patent number: 8481935Abstract: A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.Type: GrantFiled: July 25, 2011Date of Patent: July 9, 2013Assignee: Hitachi High-Technologies CorporationInventors: Akira Ikegami, Minoru Yamazaki, Hideyuki Kazumi, Koichiro Takeuchi, Hisaya Murakoshi
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Publication number: 20130009057Abstract: The present invention has for its object to provide a charged particle beam irradiation method and a charged particle beam apparatus which can suppress unevenness of electrification even when a plurality of different kinds of materials are contained in a pre-dosing area or degrees of density of patterns inside the pre-dosing area differs with positions. To accomplish the above object, a charged particle beam irradiation method and a charged particle beam apparatus are provided according to which the pre-dosing area is divided into a plurality of divisional areas and electrifications are deposited to the plural divisional areas by using a beam under different beam irradiation conditions.Type: ApplicationFiled: February 9, 2011Publication date: January 10, 2013Applicant: Hitachi High-Technologies CorporationInventors: Toshiyuki Yokosuka, Minoru Yamazaki, Hideyuki Kazumi, Kazutami Tago
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Publication number: 20120298863Abstract: An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application.Type: ApplicationFiled: August 7, 2012Publication date: November 29, 2012Applicant: Hitachi High-Technologies CorporationInventors: Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Osamu Nasu
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Publication number: 20120251646Abstract: A mold assembly includes a product cavity for producing an insert-molded product and a projection-forming cavity for, if an insert of the product is irregularly deformed or disposed in wrong orientation, forming a projection on the insert-molded product. The projection, if present on the product, blocks most of the light emitted from a light-emitting element. A photodetector detects the intensity of the received light and when the detected light intensity is less than a predetermined value due to the presence of the projection, the product is judged to be rejected. Visual inspection or optical sensors judge the product to be rejected if the product has a through-hole closed and to be acceptable if the through-hole of the product is open. This judgment does not require an X-ray inspection device or radiologists.Type: ApplicationFiled: March 29, 2012Publication date: October 4, 2012Inventors: Minoru Yamazaki, Tetsuo Kurasawa
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Patent number: 8263934Abstract: In a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged, a voltage is applied to a sample such that a charged particle beam does not reach the sample (referred to as “mirror state”) when the charged particle beam is applied toward the sample. Information is detected, relating to a potential on the sample using signals obtained by the voltage application.Type: GrantFiled: December 18, 2007Date of Patent: September 11, 2012Assignee: Hitachi High-Technologies CorporationInventors: Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Osamu Nasu
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Publication number: 20120061566Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.Type: ApplicationFiled: November 18, 2011Publication date: March 15, 2012Applicant: Hitachi High-Technologies CorporationInventors: Minoru YAMAZAKI, Akira IKEGAMI, Hideyuki KAZUMI, Manabu YANO, Kazunari ASAO, Takeshi MIZUNO, Yuki OJIMA
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Patent number: 8080790Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.Type: GrantFiled: February 25, 2009Date of Patent: December 20, 2011Assignee: Hitachi High-Technologies CorporationInventors: Minoru Yamazaki, Akira Ikegami, Hideyuki Kazumi, Manabu Yano, Kazunari Asao, Takeshi Mizuno, Yuki Ojima
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Publication number: 20110278454Abstract: A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.Type: ApplicationFiled: July 25, 2011Publication date: November 17, 2011Applicant: Hitachi High-Technologies CorporationInventors: Akira IKEGAMI, Minoru YAMAZAKI, Hideyuki KAZUMI, Koichiro TAKEUCHI, HIsaya Murakoshi
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Patent number: 7989768Abstract: A scanning electron microscope having a charged particle beam that when in a state being irradiated toward a sample, a voltage is applied to the sample so that the charged particle beam does not reach the sample. The scanning electron microscope also detects information on a potential of a sample using a signal obtained, and a device for automatically adjusting conditions based on the result of measuring.Type: GrantFiled: August 8, 2008Date of Patent: August 2, 2011Assignee: Hitachi High-Technologies CorporationInventors: Akira Ikegami, Minoru Yamazaki, Hideyuki Kazumi, Koichiro Takeuchi, Hisaya Murakoshi
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Publication number: 20100168774Abstract: A pricking device having an accurate pricking function, an automatic safe post-use discarding function and a re-use inhibiting function is disclosed. The pricking device is easy and simple to operate, simple in structure and is high in productivity to reduce production costs. The pricking device is made up of a lancet unit and a housing unit. The lancet unit includes a needle. The lancet unit is formed by a unit body member, a restoration member and a resilient piece for lock molded as one with one another. The unit body member operates to cause the needle to pop out from the housing unit in connection with a pricking operation. The restoration member controls the operation of movement of the unit body member as it stores a force of elasticity in it. After the pricking operation, the needle is returned into the inside of the housing unit under the so stored force of elasticity of the restoration member.Type: ApplicationFiled: December 23, 2009Publication date: July 1, 2010Applicant: NISSEI PLASTIC INDUSTRIAL CO., LTD.Inventors: Susumu Morita, Minoru Yamazaki, Hozumi Yoda
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Publication number: 20090272899Abstract: An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application.Type: ApplicationFiled: December 18, 2007Publication date: November 5, 2009Applicant: Hitachi High-Technologies CorporationInventors: Minoru YAMAZAKI, Akira Ikegami, Hideyuki Kazumi, Osamu Nasu
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Publication number: 20090224170Abstract: An object of the present invention is to provide a scanning electron microscope suitable for monitoring apparatus conditions of the microscope itself, irrespective of the presence of charge-up, specimen inclination, and the like. In order to achieve the object, proposed is a scanning electron microscope including a function to monitor the apparatus conditions on the basis of information obtained with an electron beam reflected before reaching a specimen. Specifically, for example, while applying a negative voltage to the specimen to reflect the electron beam before the electron beam reaches the specimen, and simultaneously supplying a predetermined signal to a deflector for alignment, the scanning electron microscope monitors changes of the detected positions of the reflected electrons of the electron beam. If the above-mentioned predetermined signal is under the condition where an alignment is properly performed, the changes of the detected positions of the electrons reflect deviation of an axis.Type: ApplicationFiled: February 25, 2009Publication date: September 10, 2009Inventors: Minoru YAMAZAKI, Akira Ikegami, Hideyuki Kazumi, Manabu Yano, Kazunari Asao, Takeshi Mizuno, Yuki Ojima
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Publication number: 20090039264Abstract: Disclosed herein are a method for applying, while a charged particle beam is in a state being irradiated toward the sample, a voltage to the sample so that the charged particle beam does not reach the sample (hereafter such state may be referred to as a mirror state) and detecting information on a potential of a sample using a signal obtained then, and a device for automatically adjusting conditions of the device based on the result of measuring.Type: ApplicationFiled: August 8, 2008Publication date: February 12, 2009Inventors: Akira IKEGAMI, Minoru Yamazaki, Hideyuki Kazumi, Koichiro Takeuchi, Hisaya Murakoshi
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Patent number: 6388691Abstract: The present invention overcomes disadvantages including the occurrence of uneven printing, the need to provide a large-sized power supply, high cost and the deterioration of energy conversion efficiency resulting from the application of high current to the common resistance of a line head in a thermal printer for printing an image by the line head. Specifically, a gradation generating means (14) for generating gradation data; a selection means (15) for alternatively selecting each image data the number of which corresponds to the number of head elements of a head, and data of value 0 for the respective image data, and for switching selection as to which data is to be selected, the image data or the data of value 0, every time a value of the gradation data changes; and a comparison means (16) for feeding signals each indicating a comparison result of comparing the data selected by the selection means (15) with the gradation data, are provided at a line head controller (7) of a thermal printer.Type: GrantFiled: September 6, 2000Date of Patent: May 14, 2002Assignee: Sony CorporationInventors: Sadao Maeyama, Minoru Yamazaki
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Patent number: 6110104Abstract: An endoscope system having a cover type endoscope provided with an elongate inserting section having therein an observation device and an illuminating device and bulge portions formed on the outer periphery at the side of a forwardmost end of the inserting section; and an endoscope cover having an endoscope inserting passage for covering and protecting the inserting section. The endoscope inserting passage receives the inserting section using the bulge portions as a guide. The bulge portions project more than the outer periphery of the inserting section.Type: GrantFiled: September 17, 1998Date of Patent: August 29, 2000Assignee: Olympus Optical Co., Ltd.Inventors: Akira Suzuki, Hisao Yabe, Yoshihiro Iida, Hideo Itoh, Yoshio Tashiro, Minoru Yamazaki, Osamu Tamada, Keiichi Arai, Hiroshi Ishii, Masaaki Nakazawa, Koji Yamaya, Yasuhito Kura
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Patent number: 5993380Abstract: In an endoscope system including an endoscope having an insertion section to be inserted into a cavity under inspection, a bending portion which is provided in said insertion section near a distal end thereof and is bendable in at least two different directions and an operation section to which a proximal end of the insertion section is connected and a disposable protection cover having an insertion section cover for covering said insertion section of the endoscope and having formed therein an insertion section inserting channel into which said insertion section of the endoscope is insertable and at least one conduit channel, said insertion section and bending portion of the endoscope are formed to have a non-circular lateral cross section, a direction in which said non-circular cross section has a larger size is aligned with a direction in which said bending portion is bent by a maximum bending angle or a direction in which said non-circular cross section has a smaller size is aligned with a direction in whiType: GrantFiled: January 26, 1996Date of Patent: November 30, 1999Assignee: Olympus Optical Co., Ltd.Inventors: Hisao Yabe, Yoshihiro Iida, Akira Suzuki, Hideo Ito, Yoshio Tashiro, Minoru Yamazaki, Osamu Tamada