Patents by Inventor Mirko Hattass

Mirko Hattass has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180209790
    Abstract: A rotation rate sensor including a substrate having a principal plane of extension, and a structure movable with respect to the substrate; the structure being excitable from a neutral position into an oscillation having a movement component substantially parallel to a driving direction, which is substantially parallel to the principal plane of extension. To induce the oscillation, the rotation rate sensor includes a comb electrode moved along with the structure and a comb electrode fixed in position relative to the substrate. The excitation is produced by applying a voltage to the moving comb electrode and/or to the stationary comb electrode. Due to a rotation rate of the rotation rate sensor about an axis running substantially perpendicularly to the driving direction and substantially perpendicularly to the detection direction, a force applied to the structure with a force component along a detection direction substantially perpendicular to the driving direction is detectable.
    Type: Application
    Filed: May 24, 2016
    Publication date: July 26, 2018
    Inventors: Patrick Wellner, Burkhard Kuhlmann, Mirko Hattass
  • Patent number: 10030977
    Abstract: A multiaxial rotation rate sensor for detecting rotation rates on three mutually perpendicular rotation axes.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: July 24, 2018
    Assignee: ROBERT BOSCH GMBH
    Inventors: Mirko Hattass, David Csima, Thorsten Balslink
  • Publication number: 20180202808
    Abstract: A rotation rate sensor having a first structure movable with respect to the substrate, a second structure movable with respect to the substrate and with respect to the first structure, a first drive structure for deflecting the first structure with a motion component parallel to a first axis, and a second drive structure for deflecting the second structure with a motion component parallel to the first axis. The first and second structures are excitable to oscillate in counter-phase, with motion components parallel to the first axis, the first drive structure having a first spring mounted on the substrate to counteract a pivoting of the first structure around an axis parallel to a second axis extending perpendicularly to a principal extension plane, the second drive structure having a second spring mounted on the substrate to counteracts a pivoting of the second structure around a further axis parallel to the second axis.
    Type: Application
    Filed: May 24, 2016
    Publication date: July 19, 2018
    Inventors: Benjamin Schmidt, Andreas Lassl, Burkhard Kuhlmann, Christian Hoeppner, Mirko Hattass, Thorsten Balslink
  • Patent number: 10017376
    Abstract: Measures are described which contribute simply and reliably to the mechanical decoupling of a MEMS functional element from the structure of a MEMS element. The MEMS element includes at least one deflectable functional element, which is implemented in a layered structure on a MEMS substrate, so that a space exists between the layered structure and the MEMS substrate, at least in the area of the functional element. According to the invention, a stress decoupling structure is formed in the MEMS substrate in the form of a blind hole-like trench structure, which is open to the space between the layered structure and the MEMS substrate and extends into the MEMS substrate to only a predefined depth, so that the rear side of the MEMS substrate is closed, at least in the area of the trench structure.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: July 10, 2018
    Assignee: ROBERT BOSCH GMBH
    Inventors: Johannes Classen, Jochen Reinmuth, Mirko Hattass, Ralf Reichenbach, Antoine Puygranier
  • Publication number: 20180128614
    Abstract: A rotation rate sensor includes a first rotationally suspended mass that exhibits a first axis of rotation. The first mass includes a first rotation-rate-measuring element that captures a first rate of rotation about the first axis of rotation and that outputs the first rate of rotation in a first signal. The sensor further includes a second rotationally suspended mass that exhibits a second axis of rotation and is arranged parallel to the first axis of rotation. The second mass includes a second rotation-rate-measuring element that captures a second rate of rotation about the second axis of rotation and that outputs the second rate of rotation in a second signal. The sensor further includes a propulsion device that propels the first and second mass and an evaluating device that outputs a difference of the signals as a third rate of rotation to be measured.
    Type: Application
    Filed: March 10, 2016
    Publication date: May 10, 2018
    Inventors: Robert Maul, Mirko Hattass, Christian Hoeppner
  • Patent number: 9945669
    Abstract: A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor include: a first rotational element, a second rotational element and a drive structure moveable in parallel to the drive plane, the first rotational element being drivable about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element being drivable about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure being (i) coupled to the first and second rotational elements, and (ii) configured to generate a drive mode in phase opposition of the first and second rotational vibrations.
    Type: Grant
    Filed: May 5, 2014
    Date of Patent: April 17, 2018
    Assignee: ROBERT BOSCH GMBH
    Inventors: Thorsten Balslink, Rolf Scheben, Benjamin Schmidt, Ralf Ameling, Mirko Hattass, Burkhard Kuhlmann, Robert Maul
  • Publication number: 20180067304
    Abstract: A micromechanical device and a method for the two-dimensional deflection of light. The device includes a mirror unit having a mirror surface for deflecting light striking the mirror surface; the mirror unit being rotatably situated about a first axis within a first frame unit and being fastened to the first frame unit; the first frame unit being rotatably situated about a second axis within an actuator structure and being fastened to the actuator structure; the actuator structure including at least four piezoelectric actuator units; and the positions of the at least four piezoelectric actuator units being situated symmetrically with respect to the first axis and also with respect to the second axis.
    Type: Application
    Filed: August 28, 2017
    Publication date: March 8, 2018
    Inventors: Mirko Hattass, Robert Maul
  • Patent number: 9835645
    Abstract: An acceleration sensor includes a circuit board with a recess that exposes a spring structure. The spring structure is formed from a material of the circuit board exposed by the recess and includes a vibrating element that is held in a resilient manner via at least one spring element. The sensor further includes a reference element connected rigidly to the circuit board and arranged at a distance from and opposite the vibrating element, an electrical circuit arranged on the vibrating element at a distance from the reference element, and at least one detection element. The circuit is configured to evaluate a signal that is configured to be influenced by a change in distance between the reference element and the at least one detection element in order to sense an acceleration of the acceleration sensor.
    Type: Grant
    Filed: October 17, 2013
    Date of Patent: December 5, 2017
    Assignee: Robert Bosch GmbH
    Inventors: Remigius Has, Mirko Hattass, Frederik Ante
  • Publication number: 20170343795
    Abstract: A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.
    Type: Application
    Filed: May 24, 2017
    Publication date: November 30, 2017
    Inventors: Helmut Grutzeck, Joerg Muchow, Mirko Hattass, Stefan Mark, Thorsten Balslink, Frank Schatz
  • Patent number: 9823073
    Abstract: A rotation-rate sensor having a substrate with main extension plane, for detecting a rotation rate, extending in a direction parallel/orthogonal to the main plane; the sensor including a primary/secondary pair of seismic masses; the primary pair having first/second primary masses; the secondary pair having first/second secondary masses; the first/second primary masses being movable relative to the substrate along a primary deflection direction extending parallel to the main plane; the first/second secondary masses being movable relative to the substrate along a secondary deflection direction extending parallel to the main plane; the first/second primary masses and the first/second primary masses being movable antiparallel or parallel to one another corresponding to the deflection direction, essentially extending orthogonally to the secondary deflection direction; and the primary pair and/or secondary pair being drivable so that, based on sensor rotation, the Coriolis force leads to deflection of the first/sec
    Type: Grant
    Filed: May 14, 2014
    Date of Patent: November 21, 2017
    Assignee: ROBERT BOSCH GMBH
    Inventors: Thorsten Balslink, Rolf Scheben, Benjamin Schmidt, Ralf Ameling, Mirko Hattass, Burkhard Kuhlmann, Robert Maul
  • Patent number: 9818792
    Abstract: An infrared sensor device includes a semiconductor substrate, at least one sensor element that is micromechanically formed in the semiconductor substrate, and at least one calibration element, which is micromechanically formed in the semiconductor substrate, for the sensor element. An absorber material is arranged on the semiconductor substrate in the area of the sensor element and the calibration element. One cavern each is formed in the semiconductor substrate substantially below the sensor element and substantially below the calibration element. The sensor element and the calibration element are thermally and electrically isolated from the rest of the semiconductor substrate by the caverns. The infrared sensor device has high sensitivity, calibration functionality for the sensor element, and a high signal-to-noise ratio.
    Type: Grant
    Filed: April 19, 2013
    Date of Patent: November 14, 2017
    Assignee: Robert Bosch GmbH
    Inventors: Ingo Herrmann, Edda Sommer, Christoph Schelling, Christian Rettig, Mirko Hattass
  • Patent number: 9791275
    Abstract: A method for calibrating a selected yaw rate sensor includes: determining a scaling function between a yaw rate sensitivity and a test signal sensitivity of a yaw rate sensor selected for carrying out a test and denoted as first sampling yaw rate sensor is determined in a first method step, the scaling function being determined from a measured first sample yaw rate sensitivity and from a measured first sample test signal sensitivity of the sampling yaw rate sensor; calculating a production yaw rate sensitivity for a yaw rate sensor denoted as production yaw rate sensor from a measured production test signal sensitivity of the production yaw rate sensor and the scaling function; and subsequently calibrating the production yaw rate sensor with the aid of the production yaw rate sensitivity.
    Type: Grant
    Filed: October 21, 2013
    Date of Patent: October 17, 2017
    Assignee: ROBERT BOSCH GMBH
    Inventors: Axel Franke, Mirko Hattass
  • Patent number: 9650240
    Abstract: Measures are provided for improving and simplifying metallic bonding processes which enable a reliable initiation of the bonding process and thus contribute to a uniform bonding. The present method provides a further option for using bonding layers. The method in the case of which the two semiconductor elements are bonded to one another via a bond of at least one metallic starting layer and at least one further starting layer provides that the two starting layers are structured in such a way that the layer areas which are assigned to one another have differently sized areal extents. Moreover, the layer thicknesses of the two starting layers should be selected in such a way that the layer areas which are assigned to one another meet the material ratio necessary for the bonding process.
    Type: Grant
    Filed: June 4, 2015
    Date of Patent: May 16, 2017
    Assignee: Robert Bosch GmbH
    Inventors: Mirko Hattass, Heiko Stahl, Jochen Reinmuth, Julian Gonska, Johannes Classen
  • Publication number: 20170096331
    Abstract: Measures are described which contribute simply and reliably to the mechanical decoupling of a MEMS functional element from the structure of a MEMS element. The MEMS element includes at least one deflectable functional element, which is implemented in a layered structure on a MEMS substrate, so that a space exists between the layered structure and the MEMS substrate, at least in the area of the functional element. According to the invention, a stress decoupling structure is formed in the MEMS substrate in the form of a blind hole-like trench structure, which is open to the space between the layered structure and the MEMS substrate and extends into the MEMS substrate to only a predefined depth, so that the rear side of the MEMS substrate is closed, at least in the area of the trench structure.
    Type: Application
    Filed: May 29, 2015
    Publication date: April 6, 2017
    Inventors: Johannes Classen, Jochen Reinmuth, Mirko Hattass, Ralf Reichenbach, Antoine Puygranier
  • Publication number: 20170081177
    Abstract: An interposer is provided which is made up of a flat carrier substrate including at least one front wiring plane, in which front terminal pads are formed for mounting a component on the interposer, including at least one rear wiring plane, in which rear terminal pads are formed for mounting on a component carrier, the front terminal pads and the rear terminal pads being arranged offset from each other; and including vias for electrical connection of the at least one front wiring plane and the at least one rear wiring plane. The carrier substrate includes at least one edge section and at least one center section, which are at least largely mechanically decoupled via a stress-decoupling structure. The front terminal pads are arranged exclusively on the center section for mounting the component, while the rear terminal pads are arranged exclusively on the edge section for mounting on a component carrier.
    Type: Application
    Filed: May 29, 2015
    Publication date: March 23, 2017
    Applicant: Robert Bosch GmbH
    Inventors: Reinhard Neul, Johannes Classen, Torsten Kramer, Jochen Reinmuth, Mirko Hattass, Lars Tebje, Daniel Christoph Meisel, Ralf Reichenbach, Friedjof Heuck, Antoine Puygranier
  • Publication number: 20170059323
    Abstract: A method for operating a rotational rate sensor having a substrate and at least one structure movable relative thereto, at least one first and at least one fourth electrodes fastened to the structure, and at least one second, at least one third, at least one fifth, and at least one sixth electrodes fixed to the substrate, the first electrode being situated at least partially between second and third electrodes, the fourth electrode being situated at least partially between fifth and sixth electrodes, in each case in a rest position of the structure and along a direction essentially parallel to a first axis, the structure being excited, in a first task, from a rest position of the structure to an oscillation having a movement component essentially parallel to a second axis running perpendicular to the first axis during at least one first time interval within at least one oscillation period.
    Type: Application
    Filed: August 24, 2016
    Publication date: March 2, 2017
    Inventors: Mirko HATTASS, Odd-Axel PRUETZ
  • Publication number: 20170016726
    Abstract: A multiaxial rotation rate sensor for detecting rotation rates on three mutually perpendicular rotation axes.
    Type: Application
    Filed: July 8, 2016
    Publication date: January 19, 2017
    Inventors: Mirko Hattass, David Csima, Thorsten Balslink
  • Publication number: 20160356599
    Abstract: A sensor drive includes at least one first seismic mass and an operating apparatus. The operating apparatus is configured to put the first seismic mass into oscillatory motion such that (i) a projection of the oscillatory motion of the first seismic mass onto a first spatial direction is a first harmonic oscillation of the first seismic mass at a first frequency, and (ii) a projection of the oscillatory motion of the first seismic mass onto a second spatial direction oriented at an angle to the first spatial direction is a second harmonic oscillation of the first seismic mass at a second frequency not equal to the first frequency. A method includes operating such a sensor device having at least one seismic mass.
    Type: Application
    Filed: January 21, 2015
    Publication date: December 8, 2016
    Inventors: Robert Maul, Mirko Hattass, Rolf Scheben
  • Patent number: 9434606
    Abstract: A micromechanical inertial sensor includes an ASIC element having a processed front side, an MEMS element having a micromechanical sensor structure, and a cap wafer mounted above the micromechanical sensor structure, which sensor structure includes a seismic mass and extends over the entire thickness of the MEMS substrate. The MEMS element is mounted on the processed front side of the ASIC element above a standoff structure and is electrically connected to the ASIC element via through-contacts in the MEMS substrate and in adjacent supports of the standoff structure. A blind hole is formed in the MEMS substrate in the area of the seismic mass, which blind hole is filled with the same electrically conductive material as the through-contacts, the conductive material having a greater density than the MEMS substrate.
    Type: Grant
    Filed: May 9, 2013
    Date of Patent: September 6, 2016
    Assignee: ROBERT BOSCH GMBH
    Inventors: Johannes Classen, Mirko Hattass, Daniel Christoph Meisel
  • Publication number: 20160138666
    Abstract: A micromechanical spring for an inertial sensor, including segments of a monocrystalline base material, the segments having surfaces which are situated at a right angle to one another with respect to a plane of oscillation of the spring and normal to the plane of oscillation of the spring, the segments being manufactured in a crystal-direction-dependent etching process and each having two different orientations normal to the plane of oscillation, in which the spring includes a defined number of segments situated in a defined manner.
    Type: Application
    Filed: October 27, 2015
    Publication date: May 19, 2016
    Inventors: Christian HOEPPNER, Benjamin Schmidt, Mirko Hattass, Odd-Axel Pruetz, Robert Maul, Friedjof Heuck, Rolf Scheben, Torsten Ohms, Reinhard Neul