Abstract: An optical tomographic imaging method is provided in which light from a light source is split into a measuring beam and a reference beam, the measuring beam being moved by a scanning optical system and guided to an object to be examined, the reference beam being guided to a reference mirror, and in which a tomogram of the object is generated from a return beam of the measuring beam reflected or scattered by the object and the reference beam reflected by the reference mirror. The method includes acquiring longitudinal sectional information on the object, calculating depth-position information on the object from the longitudinal sectional information, and acquiring a three-dimensional surface image of the object by controlling a reference-path length defined by the reference mirror and a scanning operation of the scanning optical system in accordance with the depth-position information on the object.

Abstract: The present invention provides a sensor device for detecting a substance contained in a fluid comprising a first photonic crystal region, a second photonic crystal region, a first channel which is connected to the first photonic crystal region, and passes the fluid containing the substance therein, a second channel which is connected to the second photonic crystal region, and passes a fluid for reference therein, an optical waveguide which is connected to the first photonic crystal region and the second photonic crystal region, and guides light, and a detecting section for detecting a difference between a light which has passed through the optical waveguide and the first photonic crystal region and a light which has passed through the optical waveguide and the second photonic crystal region.

Abstract: An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.

Abstract: An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.

Abstract: An exposure apparatus includes an illumination optical system for illuminating a predetermined mask, a projection optical system for projecting light from the mask to a predetermined exposure region, a first exposure device for illuminating the mask with a first sigma and for projecting light from the mask to the exposure region at a first spatial frequency passage spectrum of the projection system, so that the exposure region is exposed with a first pattern, and a second exposure device for illuminating the mask with a second sigma, different from the first sigma, and for projecting light from the mask to the exposure region at a second spatial frequency passage spectrum of the projection system, different from the first spatial frequency passage spectrum, so that the exposure region is exposed with a second pattern. A first exposure by the first exposure device and a second exposure by the second exposure device are carried out prior to a development process.

Abstract: A sensor device for detecting a substance contained in a fluid comprises first and second photonic crystal regions, first and second flow channels, an optical waveguide connected to the first and second photonic crystal regions and an optical detector for detecting the lights transmitted through the first photonic crystal region and the waveguide and transmitted through or reflected by the second photonic crystal region.

Abstract: Sensors are provided which enable detection with a high sensitivity in microchemistry and biochemical analysis by using devices integrated into a compact configuration and can be freely disposed on desired positions of a channel to perform detection. A measuring apparatus for detecting information and outputting light according to the information, the apparatus comprising: an active layer for emitting light and a micro-optical cavity, wherein light emission is limited in the active layer due to the influence of the selection of a photoelectromagnetic field mode, the selection is made by the micro-optical cavity, the light emission and a degree of selection of a photoelectromagnetic field mode is changed according to an environmental condition of the micro-optical cavity, so that the light emission is changed and the environmental condition is measured according to a change in the light emission.

Abstract: A method for acquiring information includes the steps of preparing a laser having a micro-cavity, and detecting a light emitted from the laser. An oscillation state of the laser is changed according to a change of an environmental condition around the micro-cavity, and the light emitted from the laser is changed.

Abstract: An exposure apparatus includes an illumination optical system for illuminating a predetermined mask, a projection optical system for projecting light from the mask to a predetermined exposure region, a first exposure device for illuminating the mask with a first sigma and for projecting light from the mask to the exposure region at a first spatial frequency passage spectrum of the projection system, so that the exposure region is exposed with a first pattern, and a second exposure device for illuminating the mask with a second sigma, different from the first sigma, and for projecting light from the mask to the exposure region at a second spatial frequency passage spectrum of the projection system, different from the first spatial frequency passage spectrum, so that the exposure region is exposed with a second pattern. A first exposure by the first exposure device and a second exposure by the second exposure device are carried out prior to a development process.

Abstract: A sensor device for detecting a substance contained in a fluid comprises first and second photonic crystal regions, first and second flow channels, an optical waveguide connected to the first and second photonic crystal regions and an optical detector for detecting the lights transmitted through the first photonic crystal region and the waveguide and transmitted through or reflected by the second photonic crystal region.

Abstract: An information-acquiring device for acquiring information on an objective substance to be detected, which is provided with a sensing element that has a surface capable of fixing the objective substance to be detected thereon, and makes applied light change its wavelength characteristics in response to the fixed state of the objective substance to be detected onto the surface, a light source, and light-receiving means for receiving light emitted from the light source through the sensing element, has the light-receiving means and the light source arranged on the same substrate so that the light which has been emitted from the light source and has been transmitted through the sensing element can be led to the light-receiving means, and has means for varying the wavelength regions of each light incident on each of a plurality of the light-receiving means installed in an optical path from the light source to the light-receiving means.

Abstract: A method for production of an optical element includes preparing a first member having formed on the surface of a first substrate 101 a first layer 103 by at least one of epitaxial growth and pore-making (micropore-making) and a second member having a porous layer for layer separation formed on a second substrate 104 and having formed thereon a second layer by at least one of epitaxial growth and pore-making (micropore-making), bonding the first layer 103 and the second layer, separating the second substrate 104 and the second layer of the second member from each other at the porous layer for layer separation in the second member, to form a laminated structure on the first substrate 101, forming a refraction index distribution pattern produced by a difference in refraction index in the plane of at least one of the first layer 103 and the second layer.

Abstract: To provide a novel technique for producing a difference in refractive index between two regions. An optical element according to the present invention includes a first porous region (2002), a second porous region (2004), and a non-porous region (2003) formed between the first porous region (2002) and the second porous region (2004), the non-porous region having a refractive index higher than a refractive index of the first porous region.

Abstract: A method for production of an optical element includes preparing a first member having formed on the surface of a first substrate 101 a first layer 103 by at least one of epitaxial growth and pore-making (micropore-making) and a second member having a porous layer for layer separation formed on a second substrate 104 and having formed thereon a second layer by at least one of epitaxial growth and pore-making (micropore-making), bonding the first layer 103 and the second layer, separating the second substrate 104 and the second layer of the second member from each other at the porous layer for layer separation in the second member, to form a laminated structure on the first substrate 101, forming a refraction index distribution pattern produced by a difference in refraction index in the plane of at least one of the first layer 103 and the second layer.

Abstract: To provide a novel technique for producing a difference in refractive index between two regions. An optical element according to the present invention includes a first porous region (2002), a second porous region (2004), and a non-porous region (2003) formed between the first porous region (2002) and the second porous region (2004), the non-porous region having a refractive index higher than a refractive index of the first porous region.

Abstract: The present invention provides a sensor device for detecting a substance contained in a fluid comprising a first photonic crystal region, a second photonic crystal region, a first channel which is connected to the first photonic crystal region, and passes the fluid containing the substance therein, a second channel which is connected to the second photonic crystal region, and passes a fluid for reference therein, an optical waveguide which is connected to the first photonic crystal region and the second photonic crystal region, and guides light, and a detecting section for detecting a difference between a light which has passed through the optical waveguide and the first photonic crystal region and a light which has passed through the optical waveguide and the second photonic crystal region.

Abstract: A sensor device for detecting a substance contained in a fluid comprises first and second photonic crystal regions, first and second flow channels, an optical waveguide connected to the first and second photonic crystal regions and an optical detector for detecting the lights transmitted through the first photonic crystal region and the waveguide and transmitted through or reflected by the second photonic crystal region.

Abstract: A device for detecting a target substance in a fluid is provided. This device comprises a periodic structure having a vacant portion for passing the fluid containing the target substance and a solid portion arranged regularly and capable of transmitting an electromagnetic wave, an electro-magnetic wave-projecting means for projecting the electromagnetic wave to the periodic structure, and a detecting means for measuring the magnetic wave emitted from the periodic structure to detect a change in periodic distribution of a refractive index. This sensor is highly sensitive in a small size.

Abstract: An exposure apparatus which forms a pattern on an object includes an exposure head structure in which a plurality of elemental exposure units each including at least one light source and an optical element which forms an image of the light source on the object are arrayed, a sensor which detects the surface position of the object, and a controller which controls exposure by the exposure head structure based on the detection result by the sensor. The controller forms a pattern on the object while selectively operating one of the plurality of elemental exposure units, which satisfies a predetermined condition.

Abstract: An optical device comprising a substrate, a porous layer laid on the substrate having a pore diameter smaller than the wavelength of light and a crystal layer laid on the porous layer showing a refractive index greater than that of the porous layer is presented. The optical device is manufactured by a method comprising a step of forming a porous layer having a pore diameter smaller than the wavelength of light on the surface of a substrate and a step of forming a crystal layer showing a refractive index greater than that of the porous layer on the porous layer. Since the porous layer is clad, light can be confined with ease.