Abstract: An exposure apparatus includes an exposure device for effecting a multiplex pattern exposure of a photosensitive substrate before development and an alignment device for effecting alignment between the photosensitive substrate and the exposure device using a latent image of an alignment mark formed on the photosensitive substrate before one or some of the pattern exposures of the multiplex exposure. The latent image of the alignment mark is disposed outside a pattern provided by the pattern exposure.

Abstract: Near-field light pumped in the vicinity of an alignment mark upon irradiating pumping light onto the alignment mark formed on the object surface is detected by a probe. Based on the near-field light detected by the probe, the position information of the object is detected.

Abstract: A projection exposure apparatus and a device manufacturing method using the same, wherein a glass material or materials constituting a projection optical system are less deteriorated and high optical performance is assured, through appropriate setting of components of the projection optical system or a pulse light source for projection exposure of a mask pattern onto a substrate to be exposed.

Abstract: An image processing apparatus and method for performing color processes by using spectral characteristics values, namely, spectral information comprises an input unit to input image information shown by spectral information, a color processing unit to color process on the basis of the image information inputted by the input unit, a spectral information display unit to display the spectral information, a spectral information correction unit to correct the spectral information, and a formation unit to form an image on the basis of the image data which was color processed by the color processing means.

Abstract: A beam tracking calculating device by a Monte Carlo method is used as an image reproducibility presuming apparatus of a recording matter, image reproducibility of the recording matter after the recording is presumed from characteristics of a material to be recorded and a recording color material, and it is used and fed back to a recording condition, thereby reproducing an image. A presuming method and apparatus for presuming an image reproducibility of the recording matter after the recording are obtained with enough precision from the characteristics of the material to be recorded and the recording color material. By using the presuming method and apparatus and performing the feedback control of the recording condition, an image adjusting device which can automatically adjust the recording with high precision without performing a test print, and an excellent image reproducing apparatus using such an image adjusting device, can be obtained.