Abstract: An exposure apparatus configured to expose a pattern of an original onto a substrate includes a wire electrode row that includes plural parallel wire electrodes, and that is opposed to the original, and a power source that applies an AC voltage to the plural wire electrodes, wherein the wire electrode row includes a first electrode group, and a second wire electrode group to which an AC voltage having a phase different from that of an AC voltage applied to the first electrode group is applied.

Abstract: An exposure apparatus including a projection optical system and configured to expose a substrate to light via the projection optical system includes a support configured to support the projection optical system, an object supported by the support and movable relative the support, an actuator configured to drive the object, a detector configured to detect a relative position between the object and the support, and a controller configured to perform a control of the actuator based on an output of the detector to cause the object to follow the support. The controller is configured to perform an estimation of a vibration of the support based on an output of the detector in parallel with the control to cause the object to follow the support.

Abstract: A data processing method for a disk array device capable of achieving a duplex system of data and improving performance of the same device while a quantity of processing for writing into a cache memory (through a switch) is reduced. In the disk array device, a host interface portion comprises a nonvolatile memory portion for saving data written from a host computer/server, and a data transfer control portion for transferring write data from the host computer/server to the nonvolatile memory portion and a global cache memory portion. If a write request is received from the host computer/server, a data transfer control portion transfers the write data from the host computer/server to the nonvolatile memory portion and to the global cache memory portion through a switch portion.

Abstract: An anti-vibration apparatus includes a target object, a reference object, a measuring device which measures the position of the target object relative to the reference object, a driving mechanism to drive the target object based on the measurement result obtained by the measuring device, a Lorentz's force actuator which supports the reference object, and a power supply device which supplies a constant current to the Lorentz's force actuator. The actuator which supports the reference object uses a Lorentz's force actuator or an actuator which supports the reference object by the pressure of a gas.

Abstract: The invention proposes a storage apparatus and conversion board that can increase the number of hard disk drive heads in a given, limited space for installation of disk units in the storage apparatus, and can consequently improve data read/write performance. A storage apparatus has a plurality of first disk units of a specific size, each removable, and a controller that controls data read/write from/to the first disk units, and the storage apparatus includes: external connectors, each provided in corresponding positions where the first disk units are installed, and physically and electrically connected with the first disk units installed in a specific state; and a removable conversion unit provided in one or more of the external connectors, and used for installing, in the position where one or more of the first disk units are to be installed, a larger number of second disk units, each smaller in physical size, than the one or more first disk units.

Abstract: A torsion beam suspension is provided in which an open end face at the rear end of a trailing arm is butt-welded to a spindle support plate, wherein a front bent flange (13F) is provided integrally with a front end part of a plate main body (13M) of the spindle support plate (13), the front bent flange (13F) extending forward along an outer face of a rear end part of the trailing arm (10) and having its front edge welded (w3) to the outer face of the rear end part, and a rear bent flange (13R) is provided integrally with a rear end part of the plate main body (13M), the rear bent flange (13R) engaging with and being welded (w4) to a rear edge part of the trailing arm (10), a spindle base plate (14b) being superimposed on and secured (w2) to an outer face of the plate main body (13M) and comprising four threaded hole portions (Sfu, Sfd, Sru, Srd) for bolting a brake related plate-shaped component (P) to the spindle base plate (14b), the four threaded hole portions (Sfu, Sfd, Sru, Srd) being at front, rear, upp

Abstract: At least one exemplary embodiment is directed to an exposure apparatus configured to perform an exposure process by interposing a liquid along a path of exposure light between a projection optical system and a substrate surface of an exposure object. A top plate that is coated with a diamond thin film or a diamond like carbon film at least on a surface in contact with the liquid and irradiated with the exposure light is used as a top plate for matching the height of an area surrounding the substrate surface with the height of the substrate surface during the exposure process. Alternately, a surface of a final lens of the projection optical system that is in contact with liquid is coated with a diamond thin film or a diamond like carbon film.

Abstract: In a torsion beam suspension including: a pair of left and right trailing arms 1; a torsion beam 2 providing connection between the trailing arms 1; and gussets 3 which are U-shaped in section and substantially triangular in plane view and which are welded to inner side surfaces of connecting portions between the trailing arms 1 and the torsion beam 2, seat surfaces 9 are formed by crushing at left and right opposite end portions of a rear wall 2a of the torsion beam 2, the seat surfaces 9 being offset forward from a general outer surface of the rear wall 2a by an amount e larger than a plate thickness t of the gussets 3, and each gusset 3 includes an inner end edge portion 3d superposed on an intermediate portion in a lateral direction of the seat surface 9, and upper and lower front edge portions 3c, 3c connected by a weld W3 to upper and lower portions of an outer surface of the torsion beam 2.

Abstract: A data processing method for a disk array device capable of achieving a duplex system of data and improving performance of the same device while a quantity of processing for writing into a cache memory (through a switch) is reduced. In the disk array device, a host interface portion comprises a nonvolatile memory portion for saving data written from a host computer/server, and a data transfer control portion for transferring write data from the host computer/server to the nonvolatile memory portion and a global cache memory portion. If a write request is received from the host computer/server, a data transfer control portion transfers the write data from the host computer/server to the nonvolatile memory portion and to the global cache memory portion through a switch portion.

Abstract: A data processing method for a disk array device capable of achieving a duplex system of data and improving performance of the same device while a quantity of processing for writing into a cache memory (through a switch) is reduced. In the disk array device, a host interface portion comprises a nonvolatile memory portion for saving data written from a host computer/server, and a data transfer control portion for transferring write data from the host computer/server to the nonvolatile memory portion and a global cache memory portion. If a write request is received from the host computer/server, a data transfer control portion transfers the write data from the host computer/server to the nonvolatile memory portion and to the global cache memory portion through a switch portion.

Abstract: The present invention provides a positioning apparatus capable of performing six-axis micro adjustment of an optical element in an exposure apparatus with high accuracy, and the exposure apparatus. The positioning apparatus of the present invention includes a first measurement unit for measuring a position/inclination of a moving part having an optical element while being kept from contact with the moving part, and a driving unit capable of driving the moving part in directions of six axes with respect to a fixed part while being kept from contact with the moving part, based on the result of measurement by the first measurement unit.

Abstract: A backplane has signal connectors for connecting signals of logical boards connected to an upper level of the backplane; signal connectors for connecting signals of logical boards connected to a lower level of the backplane; power source connectors for supplying power to the logical boards connected to the upper level of the backplane; and power source connectors for supplying power to the logical boards connected to the lower level of the backplane. Some power source connectors are formed at one end of the backplane and the other power source connectors are formed at the other end of the backplane.

Abstract: A data processing method for a disk array device capable of achieving a duplex system of data and improving performance of the same device while a quantity of processing for writing into a cache memory (through a switch) is reduced. In the disk array device, a host interface portion comprises a nonvolatile memory portion for saving data written from a host computer/server, and a data transfer control portion for transferring write data from the host computer/server to the nonvolatile memory portion and a global cache memory portion. If a write request is received from the host computer/server, a data transfer control portion transfers the write data from the host computer/server to the nonvolatile memory portion and to the global cache memory portion through a switch portion.

Abstract: A substrate holding device has a substrate holding unit and supporting elements movable to protrude from a substrate-holding surface of the substrate holding unit. The substrate holding unit holds the substrate in a predetermined state with a first holding force after relative positions of the substrate and the substrate holding unit are adjusted while the supporting elements lift the substrate off the substrate-holding surface. Before the relative positions of the substrate and the substrate holding unit are adjusted, the substrate holding device holds the substrate with a second holding force that is smaller than the first holding force and includes a zero holding force. Thus, the substrate holding device is able to align and hold the substrate in a short time.

Abstract: A data processing method for a disk array device capable of achieving a duplex system of data and improving performance of the same device while a quantity of processing for writing into a cache memory (through a switch) is reduced. In the disk array device, a host interface portion comprises a nonvolatile memory portion for saving data written from a host computer/server, and a data transfer control portion for transferring write data from the host computer/server to the nonvolatile memory portion and a global cache memory portion. If a write request is received from the host computer/server, a data transfer control portion transfers the write data from the host computer/server to the nonvolatile memory portion and to the global cache memory portion through a switch portion.

Abstract: There are provided a cache region that stores write data from a host device, storage media, a data storage region for the storage media, and a comparison unit. A first comparison object is generated for N items of write data on the cache region and the N items of write data are transferred to the data storage region. Write data is read from a designated address of the data storage region and this write data is written to the storage media. When N items of write data have been read, a second comparison object is generated in respect of the write data. The comparison unit compares the first comparison object and the second comparison object, and if the result of the comparison is a mismatch, the N items of write data on the cache region are again transferred to the data storage region.

Abstract: The invention efficiently mounts substrates to back planes and accomplishes high quality signal transfer. Connectors to which N adaptor substrates are fitted and connectors to which M bus switch substrates are fitted are provided to a multi-layered back plane. Signal pin groups of the connector on the adaptor substrate side are grouped into M data paths. Signal pins of the connector on the adaptor substrate side and corresponding signal pins of the connector on the bus switch substrate side are arranged horizontally in such a fashion as to exist on the same plane (with positions in a Z direction being substantially equal). Therefore, wiring patterns for connecting corresponding signal pins can be formed substantially linearly and a large number of substrates can be efficiently mounted to a limited area.

Abstract: A stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The stage system includes a first fixed guide having a plane along X and Y directions, a first movable guide to be guided by the first fixed guided (the first movable guide having a Y guide 3f extending in the Y direction), a second fixed guide having a plane along X and Y directions, a second movable guide to be guided by the second fixed guide (the second movable guide having an X guide extending in the X direction), and a central movable member to be guided in the X and Y directions by the Y guide and the X guide.

Abstract: A stage system including a first fixed guide having a first guide surface being parallel to a first direction and a second direction being orthogonal to the first direction, a first movable guide to be guided by the first fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about a third direction being orthogonal to the first and second directions, the first movable guide extending in the second direction, a second fixed guide having a second guide surface being parallel to the first and second directions, a second movable guide to be guided by the second fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about the third direction, the second movable guide having a second guide extending in the first direction, and a movable member to be guided in the first and second directions by the first and second movable guides.

Abstract: The object of the invention is to enable the appropriate change of a path according to a situation at that time of a user himself/herself and a situation of a target store and the path without having a special terminal when the user of facilities utilizes the target store and to perform appropriate guidance. To achieve the object, first, plural spatial recognition nodes respectively provided with a sensor and information processing equipment are installed in each location in the facilities and are connected via a network. The node recognizes the position, the action and the behavior of a user of the facilities, a server that controls a system manages the result of recognition and constantly grasp the situation of the user. Besides, the situation of the user is recognized by the node installed at a destination and on a path and is similarly notified to the server.