Abstract: The invention efficiently mounts substrates to back planes and accomplishes high quality signal transfer. Connectors to which N adaptor substrates are fitted and connectors to which M bus switch substrates are fitted are provided to a multi-layered back plane. Signal pin groups of the connector on the adaptor substrate side are grouped into M data paths. Signal pins of the connector on the adaptor substrate side and corresponding signal pins of the connector on the bus switch substrate side are arranged horizontally in such a fashion as to exist on the same plane (with positions in a Z direction being substantially equal). Therefore, wiring patterns for connecting corresponding signal pins can be formed substantially linearly and a large number of substrates can be efficiently mounted to a limited area.

Abstract: A stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The stage system includes a first fixed guide having a plane along X and Y directions, a first movable guide to be guided by the first fixed guided (the first movable guide having a Y guide 3f extending in the Y direction), a second fixed guide having a plane along X and Y directions, a second movable guide to be guided by the second fixed guide (the second movable guide having an X guide extending in the X direction), and a central movable member to be guided in the X and Y directions by the Y guide and the X guide.

Abstract: A stage system including a first fixed guide having a first guide surface being parallel to a first direction and a second direction being orthogonal to the first direction, a first movable guide to be guided by the first fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about a third direction being orthogonal to the first and second directions, the first movable guide extending in the second direction, a second fixed guide having a second guide surface being parallel to the first and second directions, a second movable guide to be guided by the second fixed guide and having three freedoms of straight motions in the first and second directions and a motion in a rotational direction about the third direction, the second movable guide having a second guide extending in the first direction, and a movable member to be guided in the first and second directions by the first and second movable guides.

Abstract: The object of the invention is to enable the appropriate change of a path according to a situation at that time of a user himself/herself and a situation of a target store and the path without having a special terminal when the user of facilities utilizes the target store and to perform appropriate guidance. To achieve the object, first, plural spatial recognition nodes respectively provided with a sensor and information processing equipment are installed in each location in the facilities and are connected via a network. The node recognizes the position, the action and the behavior of a user of the facilities, a server that controls a system manages the result of recognition and constantly grasp the situation of the user. Besides, the situation of the user is recognized by the node installed at a destination and on a path and is similarly notified to the server.

Abstract: There is provided a data processing method for a disk array device capable of achieving a duplex system of data and improving performance of the same device while a quantity of processing for writing into a cache memory (through a switch) is reduced. In the disk array device, a host interface portion comprises a nonvolatile memory portion for saving data written from a host computer/server, and a data transfer control portion for transferring write data from the host computer/server to the nonvolatile memory portion and a global cache memory portion. If a write request is received from the host computer/server, a data transfer control portion transfers the write data from the host computer/server to the nonvolatile memory portion and to the global cache memory portion through a switch portion.

Abstract: Opposite ends of a torsion beam are connected to left and right trailing arms, and a spindle which supports a wheel is secured to a spindle support plate which is welded to each of the left and right trailing arms. Bent flanges which are formed in the outer periphery of a body of the spindle support plate, are fitted to the outer periphery of the end of trailing arm and secured by welding. With this arrangement, thermal warp of the body of the spindle support plate which supports spindle can be prevented, and not only can the mounting precision of the spindle be improved, but also the thickness of the spindle support plate can be reduced to reduce the weight.

Abstract: The invention efficiently mounts substrates to back planes and accomplishes high quality signal transfer. Connectors to which N adaptor substrates are fitted and connectors to which M bus switch substrates are fitted are provided to a multi-layered back plane. Signal pin groups of the connector on the adaptor substrate side are grouped into M data paths. Signal pins of the connector on the adaptor substrate side and corresponding signal pins of the connector on the bus switch substrate side are arranged horizontally in such a fashion as to exist on the same plane (with positions in a Z direction being substantially equal). Therefore, wiring patterns for connecting corresponding signal pins can be formed substantially linearly and a large number of substrates can be efficiently mounted to a limited area.

Abstract: In a disk array system of the present invention, each host or disk interface unit is connected to each shared memory unit through a switch unit. The switch unit includes the number of packet buffers greater than the number of the host or disk interface units connected thereto, and can always hold the number of access requests greater than the number of the host or disk interface units. The disk array system uses the packet buffers to compensate for a transfer rate difference between the host interface units and the shared memory units, thereby allowing connection of the host interface units having different performance. The disk array system improves the efficiency of usage of internal paths without increasing the number of I/O ports of the switch unit. The system throughput is thereby improved, and the support for host I/Fs having different performance is thereby facilitated.

Abstract: Disclosed is a stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The stage system includes a first fixed guide (1a, 1c) having a plane along X and Y directions, a first movable guide (3) to be guided by the first fixed guided (the first movable guide having a Y guide 3f extending in Y direction), a second fixed guide (1b, 1d) having a plane along X and Y directions, a second movable guide (2) to be guided by the second fixed guide (the second movable guide having an X guide 2f extending in X direction), and a central movable member (4) to be guided in the X and Y directions by the Y guide (3f) and X guide (2f).

Abstract: A substrate holding device has a substrate holding unit and supporting elements movable to protrude from a substrate-holding surface of the substrate holding unit. The substrate holding unit holds the substrate in a predetermined state with a first holding force after relative positions of the substrate and the substrate holding unit are adjusted while the supporting elements lift the substrate off the substrate-holding surface. Before the relative positions of the substrate and the substrate holding unit are adjusted, the substrate holding device holds the substrate with a second holding force that is smaller than the first holding force and includes a zero holding force. Thus, the substrate holding device is able to align and hold the substrate in a short time.

Abstract: A vehicular suspension includes a trailing arm and a substantially plate-like lower arm. The trailing arm is pivotably supported at its front end on a vehicle body via an elastic joint and extends from the front end toward the rear of the vehicle body. The lower arm extends in the vehicle width direction with its inner end pivotably supported on the vehicle body and its outer end fixed to a rear part of the trailing arm. A flat first seating surface of an end plate welded to the rear end of the trailing arm is superimposed on a flat second seating surface provided at the outer end of the lower arm, and an inner periphery of a closed rectangular opening formed on the second seating surface is welded to the first seating surface by a weld. The second seating surface of the lower arm protrudes from a main body portion via a slant surface.

Abstract: The present invention provides a positioning apparatus capable of performing six-axis micro adjustment of an optical element in an exposure apparatus with high accuracy, and the exposure apparatus. The positioning apparatus of the present invention includes a first measurement unit for measuring a position/inclination of a moving part having an optical element while being kept from contact with the moving part, and a driving unit capable of driving the moving part in directions of six axes with respect to a fixed part while being kept from contact with the moving part, based on the result of measurement by the first measurement unit.

Abstract: An evacuation use sample chamber is constituted by a top table 21 which is provided with a recessed portion disposed in a sample chamber main body 10 and for mounting a sample 8 and a groove portion surrounding the recessed portion; a stage 20 which holds the top table 21 and is displaceable in front and back, right and left and up and down directions together with the top table 21; a sample chamber cover 11 which covers above the sample chamber main body 10 including the top table 21; and an evacuation use pipe 21C which communicates with the groove portion and evacuates gas between the bottom face of the sample chamber cover 11 and the top face of the top table 21 including the sample 8. Thereby, an evacuation use sample chamber which performs a stable evacuation and keeps around a sample at a predetermined high vacuum and a circuit pattern forming apparatus which permits a highly accurate pattern drawing over the entire region of the sample are provided.

Abstract: A vehicular suspension includes a trailing arm and a substantially plate-like lower arm. The trailing arm is pivotably supported at its front end on a vehicle body via an elastic joint and extends from the front end toward the rear of the vehicle body. The lower arm extends in the vehicle width direction with its inner end pivotably supported on the vehicle body and its outer end fixed to a rear part of the trailing arm. A flat first seating surface of an end plate welded to the rear end of the trailing arm is superimposed on a flat second seating surface provided at the outer end of the lower arm, and an inner periphery of a closed rectangular opening formed on the second seating surface is welded to the first seating surface by a weld. The second seating surface of the lower arm protrudes from a main body portion via a slant surface.

Abstract: An electron beam lithography apparatus of the present invention prevents the electron beam trajectory from being affected by a leakage magnetic field from a permanent magnet which is used as a sample stage guide/driving mechanism. In this electron beam lithography apparatus, an air bearing guide is used as a sample stage guide mechanism, and the stage posture is held by attracting the stage floating on a surface plate to the surface plate side by the permanent magnet. To avoid the leakage magnetic field from the permanent magnet from affecting the electron beam irradiation position on the sample, the permanent magnet is magnetically shielded by a shield member. In addition, to reduce variations in magnetic field above the sample, which are generated when the shield member moves in a leakage magnetic field from the electron lens, another shield member is arranged under the electron lens.

Abstract: Opposite ends of a torsion beam are connected to left and right trailing arms, and a spindle which supports a wheel is secured to a spindle support plate which is welded to each of the left and right trailing arms. Bent flanges which are formed in the outer periphery of a body of the spindle support plate, are fitted to the outer periphery of the end of trailing arm and secured by welding. With this arrangement, thermal warp of the body of the spindle support plate which supports spindle can be prevented, and not only can the mounting precision of the spindle be improved, but also the thickness of the spindle support plate can be reduced to reduce the weight.

Abstract: A stage device includes a table having a reference plane parallel to first and second directions; a driving body movable along the first direction; a moving body movable along the second direction with respect to the driving body; a static pressure bearing provided on the moving body; an exhaust groove provided surrounding the static pressure bearing; and a mechanism for delivering a gas of the static pressure bearing recovered by the exhaust groove between the moving body and the driving body. The adverse affects of piping on the moving body can be reduced and it is possible to position the moving body with high precision.

Abstract: A scanning type exposure apparatus includes a substrate stage for holding a substrate and for moving the substrate in at least one of a scanning direction and a rotational direction, an original stage for holding an original and for moving the original in at least one of the scanning direction and the rotational direction, an optical system for transferring a pattern of the original onto the substrate, and a controller for controlling movements of the substrate stage and the original stage. The controller synchronously controls the substrate stage and the original stage in the scanning direction, and independently controls the substrate stage and the original stage in the rotational direction.

Abstract: A scanning type exposure apparatus includes a substrate stage for holding a substrate and for moving the substrate in at least one of a scanning direction and a rotational direction, an original stage for holding an original and for moving the original in at least one of the scanning direction and the rotational direction, an optical system for transferring a pattern of the original onto the substrate, and a controller for controlling movements of the substrate stage and the original stage. The controller synchronously controls the substrate stage and the original stage in the scanning direction, and independently controls the substrate stage and the original stage in the rotational direction.

Abstract: In a disk array system of the present invention, each host or disk interface unit is connected to each shared memory unit through a switch unit. The switch unit includes the number of packet buffers greater than the number of the host or disk interface units connected thereto, and can always hold the number of access requests greater than the number of the host or disk interface units. The disk array system uses the packet buffers to compensate for a transfer rate difference between the host interface units and the shared memory units, thereby allowing connection of the host interface units having different performance. The disk array system improves the efficiency of usage of internal paths without increasing the number of I/O ports of the switch unit. The system throughput is thereby improved, and the support for host I/Fs having different performance is thereby facilitated.