Mitsuru Yamamoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
Abstract: There is provided a technique for detecting a fault of a device from an error in device data. According to the technique described herein, there is provided a substrate processing apparatus including: a pipe heater configured to heat a gas pipe; a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe; a control unit configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing a process control program to adjust an electrical power applied to the pipe heater; a memory unit configured to store a monitored item table; and a device status monitoring unit configured to execute a device status monitoring program.
Abstract: A coolant supply device includes a coolant tank having first and second coolant reservoirs arranged in parallel with a predetermined space therebetween and a communicating part arranged between the first and second coolant reservoirs to allow them to communicate with each other, and formed to have a U-shaped overall shape. The coolant supply device further includes pumps pumping up coolant from the second coolant reservoir and supplying the coolant to predetermined destinations. The coolant supplied by the pumps is returned to the first coolant reservoir and flows into the second coolant reservoir through the communicating part. The first coolant reservoir has a first agitating nozzle body disposed therein for discharging coolant to assist a flow of coolant flowing toward the communicating part, and the second coolant reservoir has a second agitating nozzle body disposed therein for discharging coolant to assist a flow of coolant flowing therein from the communicating part.
Abstract: A drive shaft is configured by joining solid stub shafts formed of a medium carbon steel to both ends of a hollow tubular body formed of a medium carbon steel. When expressed as grain size number, the grain size of the hollow tubular body at joint parts where the hollow tubular body and the solid stub shafts are joined together ranges from #5 to #9, and the grain size of the solid stub shafts at the joint parts ranges from #10 to #12.
Abstract: There is provided a configuration that includes: a main controller configured to, when executing a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a predetermined number of times to perform a predetermined process to a substrate: and a device management controller configured to collect device data during an execution of the process, recipe and store the device data in a storage part. The device management controller is further configured to: search the storage part; acquire the device data in a designated step among respective steps constituting the sub-recipe for a number of times of execution of the sub-recipe; calculate a first standard deviation of the device data acquired for the number of times of execution; and compare he first standard deviation with a threshold value and generate an alarm when the first standard deviation exceeds the threshold value.
Abstract: The present invention makes it possible to reduce an afterimage phenomenon while preventing an increase in driving voltage. A liquid crystal display device (10) includes: a liquid crystal layer (3) and a pair of substrates which face each other across the liquid crystal layer (3); and an upper electrode (4), a lower electrode (5), and a first insulating layer (6) which are provided in a stack on one substrate (1) of the pair of substrates so that the upper electrode (4) and the lower electrode (5) overlap each other via the first insulating layer (6), the upper layer electrode (4) having an end surface which constitutes an opening of the upper electrode (4), the end surface being forward tapered and forming, with the one substrate (1), an average angle of inclination of not more than 30 degrees.
Abstract: A wavelength conversion substrate according to one aspect of the present invention includes: a first substrate having an optical transparency; and a light modulation unit provided on one surface of the first substrate and configured to modulate a spectrum of incident light in accordance with a polarization state of the incident light. The light modulation unit includes: a plurality of metallic structures periodically provided at intervals from one another on one surface of the first substrate and configured to exhibit plasmon resonance due to incident light; and a plurality of wavelength conversion units provided so that at least some wavelength conversion units are adjacent to the plurality of metallic structures and comprising a wavelength converting material configured to emit light in a wavelength band different from a wavelength band of the incident light.
Abstract: A seal structure includes a ring-shaped seal member. The seal member is disposed in a seal groove. The case includes a low-pressure lateral face in a cross section of the seal structure, the cross section being taken along an imaginary plane in parallel with a shaft axial direction of the shaft and passing through a center line of the shaft. The seal member includes a first protruding portion. The first protruding portion protrudes from a main portion having a bottom face in contact with the low-pressure lateral face, and has a shape such that the first protruding portion extends toward the shaft as the first protruding portion extends toward the low-pressure side. The first protruding portion includes a tip. The first protruding portion includes a contact region in contact with the shaft. The tip is closer to the low-pressure side than the contact region is.
Abstract: In respective methods for manufacturing a high aspect ratio structure and an ultrasonic probe, a plurality of holes extending in a direction crossing a main surface of a substrate are formed, a plurality of first regions and second regions excluding the first regions from the main surface are periodically defined, and partition walls between the plurality of holes formed in the substrate corresponding to the first regions are removed by etching so that part of each of the partition walls within a predetermined range excluding a bottom portion is left. A high aspect ratio structure and an X-ray imaging apparatus include, over a side wall, a porous member including a plurality of holes extending in a direction crossing a grating surface within a predetermined range excluding a bottom portion in each of a plurality of recesses in a grating.
Abstract: A method for manufacturing a multi-junction photoelectric conversion device includes forming a first electrode on a first photoelectric conversion unit including a first semiconductor layer as a photoelectric conversion layer, the first electrode including a plurality of patterned regions separated from one another by separation grooves; and eliminating a leakage existing in the first semiconductor layer by applying a reverse bias voltage between one of the patterned regions of the first electrode and a second photoelectric conversion unit comprising a second semiconductor layer as a photoelectric conversion layer. The application of the reverse bias voltage is performed while irradiating the second photoelectric conversion unit with light, generating a photocurrent in the second photoelectric conversion unit that is larger than a photocurrent in the first photoelectric conversion unit.
Abstract: An electric vehicle drive apparatus includes a first motor, a second motor, a speed change mechanism coupled to the first motor and the second motor, and a controller controlling operation of the first motor and the second motor. The speed change mechanism includes a first planetary gear mechanism, a second planetary gear mechanism, and a one-way clutch that limits a rotation direction of a first carrier of the first planetary gear mechanism to a certain forward rotation direction. When rotating the first motor in a backward rotation direction opposite to the certain forward rotation direction and rotating the second motor in the forward rotation direction, the controller determines rotation speeds of the first motor and the second motor within a range indicated by Expression (1).
Abstract: An electric vehicle drive device includes: a first motor; a second motor; a transmission mechanism coupled to the first motor and the second motor; and a control unit configured to control operation of the first motor and the second motor based on a drive signal. The transmission mechanism includes: a sun gear shaft coupled to the first motor; a first planetary gear mechanism; a second planetary gear mechanism; and a one-way clutch configured to restrict a rotation direction of a first carrier to a predetermined positive rotation direction. The drive signal includes gear change information indicating a first state in which the second motor is controlled based on torque or a second state in which the second motor is controlled based on rotation speed, and throttle information indicating an acceleration of rotation speed of a wheel.
Abstract: A vehicle-mounted stereo camera device that achieves high-precision distance detection is provided. The provided vehicle-mounted stereo camera device includes a left camera and right camera disposed on a vehicle to cause a visual field of the left camera and a visual field of the right camera to overlap each other, a stereo processor that calculates a distance to a body outside the vehicle based on images captured by the left camera and right camera and on positions of the left camera and right camera on the vehicle, and sensors disposed near the left camera and right camera for detecting displacement amounts of the left camera and right camera. The stereo processor changes a cutout positions in the images captured by the left camera and right camera based on the displacement amounts.
Abstract: A speed limit violation control system of the present disclosure includes: imaging units (320, 330) which image a running vehicle; recorder (420) that records one of videos imaged by the imaging units (320, 330); and controller (360) that calculates a speed of the vehicle based on the videos of imaging units (320, 330) and determines a starting point and an ending point of the one of the videos, which is to be recorded in recorder (420), based on the calculated speed.
Abstract: A problem addressed by an embodiment of the present invention lies in providing a UBM structure which includes thin layers and can prevent diffusion of solder into an electrode. The UBM structure according to an embodiment of the present invention includes: a first UBM layer on an electrode, a second UBM layer on the first UBM layer, and a passivated metal layer between the first UBM layer and the second UBM layer. The passivated metal layer functions as a barrier layer with respect to solder diffusion.
Abstract: A multi-junction photoelectric conversion device includes, in the following order from a light-receiving side: a first photoelectric conversion unit; an intermediate layer; and a second photoelectric conversion unit. The first photoelectric conversion unit includes: a first light absorbing layer comprising a perovskite-type crystal structure photosensitive material; a first charge transport layer on the light-receiving side of the first light absorbing layer; and a second charge transport layer on a rear side of the first light absorbing layer. The second charge transport layer is in contact with the intermediate layer. The second photoelectric conversion unit includes: a second light absorbing layer that is a crystalline silicon substrate; and a first conductive semiconductor layer that is in contact with the intermediate layer.
Abstract: A vehicle-mounted stereo camera device that achieves high-precision distance detection is provided. The provided vehicle-mounted stereo camera device includes a left camera and right camera disposed on a vehicle via a holder to cause visual fields to overlap each other, a stereo processor that calculates a distance to a body outside the vehicle based on images captured by the left camera and right camera and on positions on the vehicle, first and second geomagnetic sensors respectively disposed near the left camera and right camera, and a third geomagnetic sensor disposed on the holder. The stereo processor compares a geomagnetic value detected by the first or second geomagnetic sensor with a geomagnetic value detected by the third geomagnetic sensor, detects a displacement amount of the left camera or right camera, and changes a cutout position in the image captured by the left camera or right camera based on the displacement amount.
Abstract: Disclosed is a salt and crystal of a 2-(oxazole-2-yl)phenol derivative which are the intermediate in the process of producing a N-phenyl-N?-phenylsulfonyl piperazine derivative. Further disclosed is a method of producing the salt and the crystal of the compound represented by Formula(I): wherein X is halogen; as well as a process of producing N-phenyl-N?-phenylsulfonyl piperazine derivative through the salt.
Abstract: An electronic device cooling apparatus including a cooling device including a heat conductive plate formed with a flow path, a circulating pump, a liquid storage tank upper chamber and lower chamber provided on the upper and lower side of the heat conductive plate, and a bypass provided with the heat conductive plate so as to allow the cooling medium to pass through the liquid storage tank upper chamber and the liquid storage tank lower chamber.
Abstract: A communication system has a controller for transmitting data to be played back by a plurality of playback devices corresponding to a plurality of channels, and a plurality of adapters required for executing playback by the playback devices. The controller has a setting unit which sets data to be played back by the playback devices and control information required to control playback of the data in time slots of a sync transmission frame, and a transmission unit which transmits the sync transmission frame the by the setting unit to the adapters. Each adapter has a reception unit which receives the transmitted sync transmission frame, and a playback control unit which extracts data corresponding to the channel to be played back by the adapter from the sync transmission frame, and controls the playback timing of the data based on control information corresponding to the data.
Abstract: A pump chamber (15) is formed between a piezoelectric vibrator (7) and a valve main plate (10). The valve main plate (10) includes an inlet port (13) at its central portion, and an outlet port (14) in its peripheral portion, and the inlet port (13) is made in a smaller diameter than the outlet port (14). On the valve main plate (10) an inflow check valve (11) and an outflow check valve (12) are provided, so that when the inflow check valve (11) and the outflow check valve (12) open and close in response to the vibration of the piezoelectric vibrator (7), a fluid is introduced into and discharged from the pump chamber (15).