Abstract: In a step S1, an excimer laser control unit sets a central wavelength command value, an integral spectrum distribution command value, and an exposure pulse number in a laser internal control unit. In a step S2, the laser internal control unit receives the central wavelength command value, the integral spectrum distribution command value, and the exposure pulse number from the excimer control unit, and executes an actual exposure when an exposure command is received. In a step S3, the laser internal control unit, after executing exposure, measures the central wavelength of the pulse and the spectral distribution, and corrects any discrepancy between the actually measured central wavelength and the central wavelength command value by outputting a drive command to the narrow-band module so that the central wavelength of the succeeding pulse substantially matches the central wavelength command value. In a step S4, spectral distribution data is integrated with each exposure.

Abstract: Two independent fine adjustment stages (62, 72) are arranged on one coarse adjustment stage (73) to simultaneously perform all of focus measurement and part of alignment measurement in parallel with exposure operation. A method of transporting a wafer together with a chuck is adopted as a precondition. Alignment of a pattern on a wafer (60) with a chuck (61) is performed before the chuck is mounted on each fine adjustment stage.

Abstract: A sensor is provided for identifying the type of discharge lamp mounted as the light source of an exposure apparatus, and at least one of an optical condition, power-source condition and cooling condition is set based upon the identification made. For example, an optical condition is changed by adjusting the zoom lens of an illuminating optical unit in dependence upon the type of discharge lamp. Alternatively, a power-source condition or discharge-lamp cooling performance is changed by setting the range of allowable power applied to the discharge lamp.

Abstract: An information storage input system for storing predetermined storage data in a storage server on a network accessible from a communication device open to public, includes a plurality of remote input terminal for inputting supplied input data in a predetermined input form, a remote input server for receiving input data from the remote input terminal, and a mobile communication terminal for communicating with at least the remote input server. Here, at least when the input data is stored in the storage server as the storage data, the remote input server notifies the fact to the mobile communication terminal.

Abstract: A membership information integrated management system comprising a target server, and a membership server that is connected to the target server and that requires a membership registration, wherein

Abstract: In a step S1, an excimer laser control unit sets a central wavelength command value, an integral spectrum distribution command value, and an exposure pulse number in a laser internal control unit. In a step S2, the laser internal control unit receives the central wavelength command value, the integral spectrum distribution command value, and the exposure pulse number from the excimer control unit, and executes an actual exposure when an exposure command is received. In a step S3, the laser internal control unit, after executing exposure, measures the central wavelength of the pulse and the spectral distribution, and corrects any discrepancy between the actually measured central wavelength and the central wavelength command value by outputting a drive command to the narrow-band module so that the central wavelength of the succeeding pulse substantially matches the central wavelength command value. In a step S4, spectral distribution data is integrated with each exposure.

Abstract: There is provided an information storage output system enhanced in mobility and improved in convenience to use. In the information storage output system for storing predetermined storage data in a storage server on a network, the storage server can be accessed from many and unspecified communication devices. The information storage output system includes a plurality of remote output terminals for outputting supply data supplied via a network in a predetermined output form, a remote output server having a function of supplying at least the supply data to one of the remote output terminals, and an output request communication terminal for transmitting a primary output request of the storage data to the storage server or the remote output server via a network. The storage data is output from the remote output terminal in response to the primary output request transmitted from the output request communication terminal.

Abstract: A scan type exposure apparatus wherein a pattern of an original is lithographically transferred to a substrate sequentially while the original and the substrate are scanningly moved relative to exposure light, the apparatus including a photodetector disposed at a position optically conjugate with the original, and a storing device for storing correction information with respect to an output of the photodetector, in relation to different positions of the original to be illuminated with the exposure light, such that, in the lithographic pattern transfer, the output of the photodetector can be corrected by use of the correction information.

Abstract: A sensor is provided for identifying the type of discharge lamp mounted as the light source of an exposure apparatus, and at least one of an optical condition, power-source condition and cooling condition is set based upon the identification made. For example, an optical condition is changed by adjusting the zoom lens of an illuminating optical unit in dependence upon the type of discharge lamp. Alternatively, a power-source condition or discharge-lamp cooling performance is changed by setting the range of allowable power applied to the discharge lamp.

Abstract: A sensor is provided for identifying the type of discharge lamp mounted as the light source of an exposure apparatus, and at least one of an optical condition, power-source condition and cooling condition is set based upon the identification made. For example, an optical condition is changed by adjusting the zoom lens of an illuminating optical unit in dependence upon the type of discharge lamp. Alternatively, a power-source condition or discharge-lamp cooling performance is changed by setting the range of allowable power applied to the discharge lamp.

Abstract: An interlocking apparatus includes a plurality of determination units independent of each other, an operation stopping circuit, a switch, and a restoring circuit. The plurality of determination units determine that a semiconductor device manufacturing equipment has shifted to a predetermined state. The operation stopping circuit sets the manufacturing equipment to an operation stop state when at least one of the plurality of determination units determines that the manufacturing equipment has shifted to the predetermined state. The switch inputs a restoration instruction instructing that the manufacturing equipment set in the operation stop state is restored to an operation state.

Abstract: A scan type exposure apparatus includes a first movable stage for carrying a reticle thereon and a second movable stage for carrying a wafer thereon, a projection system for projecting a pattern of the reticle onto the wafer through a projection optical system while scanningly moving the first and second movable stages in a timed relation, relative to the projection optical system, a first mark formed on the reticle and including a plurality of marks arrayed along a scan direction, a reference plate fixedly mounted on the second movable stage and having a second mark including a plurality of marks arrayed along the scan direction, a third movable stage for carrying the second movable stage thereon and being movable in a direction different from the movement direction of the second stage, and a photodetector fixedly mounted on the third movable stage.

Abstract: A scanning type exposure apparatus and method includes structure and steps for: scanningly moving a mask and a substrate relative to light pulses; continuously irradiating the light pulse to the substrate through the mask; and controlling an exposure amount of the substrate, wherein the control causes an average value of light quantity of a predetermined number of continuous light pulses to be substantially equal to a target value by controlling the light quantity of a next light pulse, in accordance with an integrated light quantity of a previous number of light pulses.

Abstract: A wafer prober for contacting probe needles of a probe card to bonding pads of a chip formed on a wafer, for allowing examination of characteristics of the chip, is disclosed. The wafer prober includes a wafer holder for holding a wafer and moving the same in X and Y directions. By the wafer holder, the wafer can be moved from an alignment information detecting station whereat alignment information can be detected by use of a TV camera, to an examining station whereat the probe needles of the probe card are used for the examination. The position of the wafer in a Z direction at the time when the alignment information is detected by the TV camera, can be made substantially coincident with the position of the wafer in the Z direction at the time when the probe needles contact the bonding pads.

Abstract: A wafer prober usable with a probe card for examination of chips formed on a wafer is disclosed. The wafer prober has a function for automatically aligning bonding pads of each chip with probe needles of the probe card. The prober includes a contact plate movable in X and Y directions with a wafer chuck. The contact blade is pressed against at least one of the tips of the probe needles, and the thus contacted needle tip is observed by a TV camera from the underneath of the contact plate. The video signal obtained thereby is used for the alignment between the bonding pads and the probe needles. Also, the TV camera is moved in the X and Y directions with the wafer chuck to allow that one and the same reference mark is observed by this TV camera and by another TV camera provided for image-taking the bonding pads. With the proposed structure, the bonding pads and the probe needles can be aligned automatically and accurately.

Abstract: A method of detecting a position of a wafer, including memorizing a pattern of a part of the wafer, comparing a pattern of another part of the wafer at a position which is in a predetermined positional relationship with the first part, with the memorized pattern, and detecting a rotational position of the wafer on the basis of the comparison.

Abstract: Wafer prober usable for examining, in a predetermined sequence, integrated microcircuits formed on a semiconductor wafer, is disclosed. The prober includes a contact plate which is movable in a Z-axis direction (the direction of height). The contact of the contact plate to a probe needle group is detected by detecting deformation of the contact plate. From the position of the contact plate at the time of deformation, the position of the needle tips of the probe needle group in the Z-axis direction is detected automatically. In another aspect, a laser beam source and a photosensor are provided as a unit with a wafer stage which is movable in each of an X-axis direction, a Y-axis direction and a .theta. (rotational) direction while carrying thereon a semiconductor wafer. With the aid of the movement of the wafer stage, the laser beam emitted from the laser beam source toward the photosensor is crossed by the probe needle group.

Abstract: A wafer processing apparatus, comprising a wafer processing station for processing a wafer, a key input portion for inputting wafer processing instructions into the wafer processing station, and wherein at least one of a portion for accommodating a wafer carrier for carrying the wafer, a mechanism for taking the wafer out of the wafer carrier and putting it back into the wafer carrier, wafer alignment station for aligning the wafer and a wafer observing station for allowing an operator to observe the wafer, is disposed at a front side of the apparatus to which the operator faces when actuating the key input portion.

Abstract: A probing apparatus for use in examination of a chip formed on a wafer, the probing apparatus including a holder for holding the wafer, a support for supporting a sheet-like member having a probe to be contacted to the chip on the wafer, a driving unit for displacing the wafer relative to the sheet-like member, and a detecting system for reading a record carried on the sheet-like member. In another aspect of the invention, there is provided a probe card for use in examination of a tip formed on a wafer, the probe card including a flat plate member having an aperture, a plurality of fine conductive members each extending from a peripheral portion of the flat plate member around the aperture toward a central portion of the aperture, each of the fine conductive members having a free end extending beyond one of the surfaces of the flat plate member, and a record carried on the flat plate member and capable of being sensed from a sensor disposed opposed to the one surface.

Abstract: A wafer chuck for releasably holding a wafer, includes a base member having an upper surface for carrying and holding thereon the wafer, a lift mechanism operative on the wafer when it rests on the base member to move the wafer relative to the base member in a direction away from the base member, the lift mechanism having an operative member extending substantially in a direction to a radially inward position from a radially outward position of the base member, the operative member having an end portion movable, relative to the base member, between a first position at which it is retracted from the upper surface of the base member and a second position at which it is protrudent from the upper surface of the base member so as to engage with the wafer to move the same relative to the base member, and driving means for moving, relative to the base member, the end portion of the operative member between the first and second positions.