Patents by Inventor Mohammad Nosrati

Mohammad Nosrati has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11133201
    Abstract: A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.
    Type: Grant
    Filed: December 13, 2016
    Date of Patent: September 28, 2021
    Assignee: WATLOW ELECTRIC MANUFACTURING COMPANY
    Inventors: Kevin R. Smith, Kevin Ptasienski, Ray Alan Derler, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati, Jacob R. Lindley, Allen N. Boldt, Sanhong Zhang, Louis P. Steinhauser, Dennis S. Grimard
  • Patent number: 11018048
    Abstract: A method of manufacturing a pedestal includes having a support plate including a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, preparing a tubular shaft that defines a chamber, securing the tubular shaft to the support plate, the conductive member being exposed in the chamber of the tubular shaft, and applying a protective layer on the conductive member by an atomic layer deposition (ALD) process. A system for manufacturing the pedestal and a pedestal are also provided in the present disclosure.
    Type: Grant
    Filed: November 20, 2018
    Date of Patent: May 25, 2021
    Assignee: Watlow Electric Manufacturing Company
    Inventor: Mohammad Nosrati
  • Publication number: 20210035849
    Abstract: A method of manufacturing a support pedestal for use in semiconductor processing includes applying a protective layer on a conductive member of the support pedestal with an atomic layer deposition (ALD) process. The support pedestal has a support plate bonded to a tubular shaft. The support plate has a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, and the tubular shaft defines an internal chamber. The ALD process introducing first precursors into the chamber of the tubular shaft to form a first monolayer on the conductive member, and introducing second precursors into the chamber of the tubular shaft to form a second monolayer on the first monolayer.
    Type: Application
    Filed: October 21, 2020
    Publication date: February 4, 2021
    Applicant: Watlow Electric Manufacturing Company
    Inventor: Mohammad NOSRATI
  • Publication number: 20200400530
    Abstract: A method of monitoring a condition of a dynamic system includes installing a vibration signal acquisition device at a predetermined location of the dynamic system, acquiring vibration signals by the vibration signal acquisition device, analyzing the vibration signals in a frequency domain, and predicting a change in the condition of the dynamic system based on the vibration signals in the frequency domain. A system is also provided, and a condition of the dynamic system includes clogging.
    Type: Application
    Filed: June 22, 2020
    Publication date: December 24, 2020
    Applicant: Watlow Electric Manufacturing Company
    Inventors: Mohammad NOSRATI, Fatemeh NOSRATI, Jacob LINDLEY, John LILLELAND, Sanhong ZHANG
  • Patent number: 10770318
    Abstract: A heater assembly includes a heating member, a mounting member that mounts the heating member to a wall of an external component, and an insulator disposed between the heating member and the wall. The insulator electrically insulates the heating member from the wall and blocks a ground path from the heating member to the wall of the external component.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: September 8, 2020
    Assignee: Watlow Electric Manufacturing Company
    Inventors: Mohammad Nosrati, Roger Brummell, Kenneth D. Ames, Paul S. Whetstone
  • Patent number: 10734256
    Abstract: A heater system is provided that includes a base functional layer having at least one functional zone. A substrate is secured to the functional member, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer provides lower power than the base functional layer. A component is secured to the tuning layer opposite the substrate, and the substrate defines a thermal conductivity to absorb and dissipate a requisite amount of power from the base functional layer. A control system is also provided that has a plurality of addressable control elements in electrical communication with power lines and with the tuning layer, the control elements providing selective control of the tuning layer zones.
    Type: Grant
    Filed: January 7, 2016
    Date of Patent: August 4, 2020
    Assignee: Watlow Electric Manufacturing Company
    Inventors: Kevin Ptasienski, Kevin Robert Smith, Cal Thomas Swanson, Philip Steven Schmidt, Mohammad Nosrati, Jacob Lindley, Allen Norman Boldt, Sanhong Zhang, Louis P. Steinhauser, Dennis Stanley Grimard
  • Patent number: 10681778
    Abstract: A method of constructing a heater includes providing a substrate, forming at least one trench into the substrate, depositing a functional material onto the substrate and into the at least one trench to form a functional element, and providing an electrical termination in contact with the functional element.
    Type: Grant
    Filed: November 21, 2017
    Date of Patent: June 9, 2020
    Assignee: Watlow Electric Manufacturing Company
    Inventors: Mohammad Nosrati, Kurt English, Patrick Margavio, Kevin Smith
  • Publication number: 20190357311
    Abstract: A control system for controlling an operation of a resistive heater includes a dielectric parameter determination module, a prediction module, and a heater operation control module. The dielectric parameter determination module determines a material property of a dielectric material of the resistive heater when the resistive heater is in an active mode. The prediction module predicts a life expectancy of the resistive heater based on the material property of the dielectric material. The heater operation control module changes operation of the resistive heater based on the material property and the life expectancy.
    Type: Application
    Filed: August 1, 2019
    Publication date: November 21, 2019
    Applicant: Watlow Electric Manufacturing Company
    Inventors: Mohammad NOSRATI, Roger BRUMMELL, Timothy TOMPKINS
  • Patent number: 10483147
    Abstract: A ceramic pedestal assembly and a method of forming a ceramic pedestal assembly is provided. The ceramic pedestal assembly includes a ceramic substrate defining an upper surface and a lower surface, at least one via extending through the ceramic substrate, an upper conductive foil layer extending across the upper surface of the ceramic substrate and a lower conductive foil layer extending across the lower surface of the ceramic substrate. Each via includes an upper via defining a cavity and a lower via defining a corresponding tapered insert. In one form, the upper via, the lower via, and the conductive foil layers define a material having a melting temperature greater than 2,000° C. and a CTE less than or equal to the ceramic substrate.
    Type: Grant
    Filed: November 20, 2018
    Date of Patent: November 19, 2019
    Assignee: Wallow Electric Manufacturing Company
    Inventors: Mohammad Nosrati, Kevin Ptasienski
  • Patent number: 10444083
    Abstract: A fiber optic sensing system includes a plurality of optical probes, a light source, and a light splitting unit connecting the light source to the plurality of optical probes. The light splitting unit splits a light emitted from the light source into a plurality of divided lights, the divided lights being transmitted to the plurality of optical probes.
    Type: Grant
    Filed: November 21, 2017
    Date of Patent: October 15, 2019
    Assignee: Watlow Electric Manufacturing Company
    Inventor: Mohammad Nosrati
  • Patent number: 10420173
    Abstract: A control system for controlling an operation of a resistive heater includes a dielectric parameter determination module for determining a dielectric parameter of the resistive heater when the resistive heater is in an active mode, and a diagnostic module for diagnosing performance of the resistive heater based on the dielectric parameter.
    Type: Grant
    Filed: October 3, 2016
    Date of Patent: September 17, 2019
    Assignee: Watlow Electric Manufacturing Company
    Inventors: Mohammad Nosrati, Roger Brummell, Timothy Tompkins
  • Patent number: 10361103
    Abstract: A thermal system includes: a base member including at least one fluid passageway in which a two-phase fluid is disposed; a tuning layer secured to the base member; and a control system. The pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning layer includes a plurality of zones. The control system includes a plurality of sets of power lines in communication with the tuning layer, and a plurality of addressable control elements in electrical communication with the power lines and with the tuning layer. The control elements provide selective control of the tuning layer zones.
    Type: Grant
    Filed: December 13, 2016
    Date of Patent: July 23, 2019
    Assignee: Watlow Electric Manufacturing Company
    Inventors: Kevin R. Smith, Kevin Ptasienski, Ray Alan Derler, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati, Jacob R. Lindley, Allen N. Boldt, Sanhong Zhang, Louis P. Steinhauser, Dennis S. Grimard
  • Publication number: 20190159291
    Abstract: The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.
    Type: Application
    Filed: November 20, 2018
    Publication date: May 23, 2019
    Applicant: Watlow Electric Manufacturing Company
    Inventors: Kevin PTASIENSKI, Stanton Hopkins BREITLOW, Mohammad NOSRATI, Kevin SMITH, Brittany PHILLIPS, Ken AMES, Patrick MARGAVIO, Kurt ENGLISH
  • Publication number: 20190157127
    Abstract: A ceramic pedestal assembly and a method of forming a ceramic pedestal assembly is provided. The ceramic pedestal assembly includes a ceramic substrate defining an upper surface and a lower surface, at least one via extending through the ceramic substrate, an upper conductive foil layer extending across the upper surface of the ceramic substrate and a lower conductive foil layer extending across the lower surface of the ceramic substrate. Each via includes an upper via defining a cavity and a lower via defining a corresponding tapered insert. In one form, the upper via, the lower via, and the conductive foil layers define a material having a melting temperature greater than 2,000° C. and a CTE less than or equal to the ceramic substrate.
    Type: Application
    Filed: November 20, 2018
    Publication date: May 23, 2019
    Applicant: Watlow Electric Manufacturing Company
    Inventors: Mohammad NOSRATI, Kevin PTASIENSKI
  • Publication number: 20190153598
    Abstract: A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.
    Type: Application
    Filed: November 20, 2018
    Publication date: May 23, 2019
    Applicant: Watlow Electric Manufacturing Company
    Inventors: Kevin PTASIENSKI, Stanton Hopkins BREITLOW, Mohammad NOSRATI, Kevin SMITH, Brittany PHILLIPS, Ken AMES, Patrick MARGAVIO, Kurt ENGLISH
  • Publication number: 20190157131
    Abstract: A method of manufacturing a pedestal includes having a support plate including a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, preparing a tubular shaft that defines a chamber, securing the tubular shaft to the support plate, the conductive member being exposed in the chamber of the tubular shaft, and applying a protective layer on the conductive member by an atomic layer deposition (ALD) process. A system for manufacturing the pedestal and a pedestal are also provided in the present disclosure.
    Type: Application
    Filed: November 20, 2018
    Publication date: May 23, 2019
    Applicant: Watlow Electric Manufacturing Company
    Inventor: Mohammad NOSRATI
  • Publication number: 20190154521
    Abstract: A fiber optic sensing system includes a plurality of optical probes, a light source, and a light splitting unit connecting the light source to the plurality of optical probes. The light splitting unit splits a light emitted from the light source into a plurality of divided lights, the divided lights being transmitted to the plurality of optical probes.
    Type: Application
    Filed: November 21, 2017
    Publication date: May 23, 2019
    Applicant: Watlow Electric Manufacturing Company
    Inventor: Mohammad NOSRATI
  • Publication number: 20190159293
    Abstract: A method of constructing a heater includes providing a substrate, forming at least one trench into the substrate, depositing a functional material onto the substrate and into the at least one trench to form a functional element, and providing an electrical termination in contact with the functional element.
    Type: Application
    Filed: November 21, 2017
    Publication date: May 23, 2019
    Applicant: Watlow Electric Manufacturing Company
    Inventors: Mohammad NOSRATI, Kurt ENGLISH, Patrick MARGAVIO, Kevin SMITH
  • Patent number: 10049903
    Abstract: Methods of manufacturing a heater are provided that generally include forming a laminate having a dielectric layer, a first double-sided adhesive dielectric layer, and a conductive layer. Next, a circuit pattern is created into the conductive layer, and then the circuit pattern is covered with a second double-sided adhesive dielectric layer. The second double-sided adhesive dielectric layer is covered with a sacrificial layer, and then the heater is formed, the heater comprising the dielectric layer, the first double-sided adhesive dielectric layer, the conductive layer, and the second double-sided adhesive dielectric layer. Subsequently, the sacrificial layer is removed.
    Type: Grant
    Filed: August 30, 2012
    Date of Patent: August 14, 2018
    Assignee: Watlow Electric Manufacturing Company
    Inventors: Kevin Ptasienski, Allen Norman Boldt, Janet Lea Smith, Cal Thomas Swanson, Mohammad Nosrati, Kevin Robert Smith
  • Patent number: 10043685
    Abstract: An apparatus is provided, by way of example, a heater for use in semiconductor processing equipment, that includes a base functional layer having at least one functional zone. A substrate is secured to the base functional layer, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer has lower power than the base functional layer. Further, a component, such as a chuck by way of example, is secured to the tuning layer opposite the substrate. The substrate defines a thermal conductivity to dissipate a requisite amount of power from the base functional layer.
    Type: Grant
    Filed: January 7, 2016
    Date of Patent: August 7, 2018
    Assignee: Watlow Electric Manufacturing Company
    Inventors: Kevin Ptasienski, Kevin Robert Smith, Cal Thomas Swanson, Philip Steven Schmidt, Mohammad Nosrati, Jacob Lindley, Allen Norman Boldt, Sanhong Zhang, Louis P. Steinhauser, Dennis Stanley Grimard