Patents by Inventor Mohammad Nosrati
Mohammad Nosrati has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11917730Abstract: A control system for controlling an operation of a resistive heater includes a dielectric parameter determination module, a prediction module, and a heater operation control module. The dielectric parameter determination module determines a material property of a dielectric material of the resistive heater when the resistive heater is in an active mode. The prediction module predicts a life expectancy of the resistive heater based on the material property of the dielectric material. The heater operation control module changes operation of the resistive heater based on the material property and the life expectancy.Type: GrantFiled: August 1, 2019Date of Patent: February 27, 2024Assignee: WATLOW ELECTRIC MANUFACTURING COMPANYInventors: Mohammad Nosrati, Roger Brummell, Timothy Tompkins
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Patent number: 11895741Abstract: A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.Type: GrantFiled: June 6, 2022Date of Patent: February 6, 2024Assignee: WATLOW ELECTRIC MANUFACTURING COMPANYInventors: Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames, Patrick Margavio, Kurt English
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Patent number: 11692905Abstract: A method of monitoring a condition of a dynamic system includes installing a vibration signal acquisition device at a predetermined location of the dynamic system, acquiring vibration signals by the vibration signal acquisition device, analyzing the vibration signals in a frequency domain, and predicting a change in the condition of the dynamic system based on the vibration signals in the frequency domain. A system is also provided, and a condition of the dynamic system includes clogging.Type: GrantFiled: June 22, 2020Date of Patent: July 4, 2023Assignee: WATLOW ELECTRIC MANUFACTURING COMPANYInventors: Mohammad Nosrati, Fatemeh Nosrati, Jacob Lindley, John Lilleland, Sanhong Zhang
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Patent number: 11574838Abstract: A method of manufacturing a support pedestal for use in semiconductor processing includes applying a protective layer on a conductive member of the support pedestal with an atomic layer deposition (ALD) process. The support pedestal has a support plate bonded to a tubular shaft. The support plate has a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, and the tubular shaft defines an internal chamber. The ALD process introducing first precursors into the chamber of the tubular shaft to form a first monolayer on the conductive member, and introducing second precursors into the chamber of the tubular shaft to form a second monolayer on the first monolayer.Type: GrantFiled: October 21, 2020Date of Patent: February 7, 2023Assignee: Watlow Electric Manufacturing CompanyInventor: Mohammad Nosrati
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Publication number: 20220338305Abstract: A support pedestal includes a support member including a resistive layer having a plurality of zones, a routing layer, and a plurality of conductive vias. The plurality of zones are defined by a plurality of independently controllable resistive heating elements. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of conductive vias.Type: ApplicationFiled: June 6, 2022Publication date: October 20, 2022Applicant: Watlow Electric Manufacturing CompanyInventors: Kevin PTASIENSKI, Stanton Hopkins BREITLOW, Mohammad NOSRATI, Kevin SMITH, Brittany PHILLIPS, Ken AMES, Patrick MARGAVIO, Kurt ENGLISH
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Patent number: 11382180Abstract: The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.Type: GrantFiled: November 20, 2018Date of Patent: July 5, 2022Assignee: WATLOW ELECTRIC MANUFACTURING COMPANYInventors: Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames, Patrick Margavio, Kurt English
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Publication number: 20220210873Abstract: A support pedestal includes a substrate, a plurality of resistive heating elements disposed on the substrate and defining a plurality of heating zones, and electric terminals disposed at a central region of the substrate. At least one of the electric terminals is connected to at least two of the plurality of resistive heating elements.Type: ApplicationFiled: March 16, 2022Publication date: June 30, 2022Applicant: WATLOW ELECTRIC MANUFACTURING COMPANYInventors: Kevin PTASIENSKI, Stanton Hopkins BREITLOW, Mohammad NOSRATI, Kevin SMITH, Brittany PHILLIPS, Ken AMES, Patrick MARGAVIO, Kurt ENGLISH
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Patent number: 11343879Abstract: A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.Type: GrantFiled: November 20, 2018Date of Patent: May 24, 2022Assignee: Watlow Electric Manufacturing CompanyInventors: Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames, Patrick Margavio, Kurt English
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Patent number: 11133201Abstract: A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.Type: GrantFiled: December 13, 2016Date of Patent: September 28, 2021Assignee: WATLOW ELECTRIC MANUFACTURING COMPANYInventors: Kevin R. Smith, Kevin Ptasienski, Ray Alan Derler, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati, Jacob R. Lindley, Allen N. Boldt, Sanhong Zhang, Louis P. Steinhauser, Dennis S. Grimard
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Patent number: 11018048Abstract: A method of manufacturing a pedestal includes having a support plate including a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, preparing a tubular shaft that defines a chamber, securing the tubular shaft to the support plate, the conductive member being exposed in the chamber of the tubular shaft, and applying a protective layer on the conductive member by an atomic layer deposition (ALD) process. A system for manufacturing the pedestal and a pedestal are also provided in the present disclosure.Type: GrantFiled: November 20, 2018Date of Patent: May 25, 2021Assignee: Watlow Electric Manufacturing CompanyInventor: Mohammad Nosrati
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Publication number: 20210035849Abstract: A method of manufacturing a support pedestal for use in semiconductor processing includes applying a protective layer on a conductive member of the support pedestal with an atomic layer deposition (ALD) process. The support pedestal has a support plate bonded to a tubular shaft. The support plate has a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, and the tubular shaft defines an internal chamber. The ALD process introducing first precursors into the chamber of the tubular shaft to form a first monolayer on the conductive member, and introducing second precursors into the chamber of the tubular shaft to form a second monolayer on the first monolayer.Type: ApplicationFiled: October 21, 2020Publication date: February 4, 2021Applicant: Watlow Electric Manufacturing CompanyInventor: Mohammad NOSRATI
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Publication number: 20200400530Abstract: A method of monitoring a condition of a dynamic system includes installing a vibration signal acquisition device at a predetermined location of the dynamic system, acquiring vibration signals by the vibration signal acquisition device, analyzing the vibration signals in a frequency domain, and predicting a change in the condition of the dynamic system based on the vibration signals in the frequency domain. A system is also provided, and a condition of the dynamic system includes clogging.Type: ApplicationFiled: June 22, 2020Publication date: December 24, 2020Applicant: Watlow Electric Manufacturing CompanyInventors: Mohammad NOSRATI, Fatemeh NOSRATI, Jacob LINDLEY, John LILLELAND, Sanhong ZHANG
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Patent number: 10770318Abstract: A heater assembly includes a heating member, a mounting member that mounts the heating member to a wall of an external component, and an insulator disposed between the heating member and the wall. The insulator electrically insulates the heating member from the wall and blocks a ground path from the heating member to the wall of the external component.Type: GrantFiled: September 9, 2016Date of Patent: September 8, 2020Assignee: Watlow Electric Manufacturing CompanyInventors: Mohammad Nosrati, Roger Brummell, Kenneth D. Ames, Paul S. Whetstone
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Patent number: 10734256Abstract: A heater system is provided that includes a base functional layer having at least one functional zone. A substrate is secured to the functional member, and a tuning layer is secured to the substrate opposite the base functional layer. The tuning layer includes a plurality of zones that is greater in number than the zones of the base functional layer, and the tuning layer provides lower power than the base functional layer. A component is secured to the tuning layer opposite the substrate, and the substrate defines a thermal conductivity to absorb and dissipate a requisite amount of power from the base functional layer. A control system is also provided that has a plurality of addressable control elements in electrical communication with power lines and with the tuning layer, the control elements providing selective control of the tuning layer zones.Type: GrantFiled: January 7, 2016Date of Patent: August 4, 2020Assignee: Watlow Electric Manufacturing CompanyInventors: Kevin Ptasienski, Kevin Robert Smith, Cal Thomas Swanson, Philip Steven Schmidt, Mohammad Nosrati, Jacob Lindley, Allen Norman Boldt, Sanhong Zhang, Louis P. Steinhauser, Dennis Stanley Grimard
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Patent number: 10681778Abstract: A method of constructing a heater includes providing a substrate, forming at least one trench into the substrate, depositing a functional material onto the substrate and into the at least one trench to form a functional element, and providing an electrical termination in contact with the functional element.Type: GrantFiled: November 21, 2017Date of Patent: June 9, 2020Assignee: Watlow Electric Manufacturing CompanyInventors: Mohammad Nosrati, Kurt English, Patrick Margavio, Kevin Smith
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Publication number: 20190357311Abstract: A control system for controlling an operation of a resistive heater includes a dielectric parameter determination module, a prediction module, and a heater operation control module. The dielectric parameter determination module determines a material property of a dielectric material of the resistive heater when the resistive heater is in an active mode. The prediction module predicts a life expectancy of the resistive heater based on the material property of the dielectric material. The heater operation control module changes operation of the resistive heater based on the material property and the life expectancy.Type: ApplicationFiled: August 1, 2019Publication date: November 21, 2019Applicant: Watlow Electric Manufacturing CompanyInventors: Mohammad NOSRATI, Roger BRUMMELL, Timothy TOMPKINS
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Patent number: 10483147Abstract: A ceramic pedestal assembly and a method of forming a ceramic pedestal assembly is provided. The ceramic pedestal assembly includes a ceramic substrate defining an upper surface and a lower surface, at least one via extending through the ceramic substrate, an upper conductive foil layer extending across the upper surface of the ceramic substrate and a lower conductive foil layer extending across the lower surface of the ceramic substrate. Each via includes an upper via defining a cavity and a lower via defining a corresponding tapered insert. In one form, the upper via, the lower via, and the conductive foil layers define a material having a melting temperature greater than 2,000° C. and a CTE less than or equal to the ceramic substrate.Type: GrantFiled: November 20, 2018Date of Patent: November 19, 2019Assignee: Wallow Electric Manufacturing CompanyInventors: Mohammad Nosrati, Kevin Ptasienski
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Patent number: 10444083Abstract: A fiber optic sensing system includes a plurality of optical probes, a light source, and a light splitting unit connecting the light source to the plurality of optical probes. The light splitting unit splits a light emitted from the light source into a plurality of divided lights, the divided lights being transmitted to the plurality of optical probes.Type: GrantFiled: November 21, 2017Date of Patent: October 15, 2019Assignee: Watlow Electric Manufacturing CompanyInventor: Mohammad Nosrati
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Patent number: 10420173Abstract: A control system for controlling an operation of a resistive heater includes a dielectric parameter determination module for determining a dielectric parameter of the resistive heater when the resistive heater is in an active mode, and a diagnostic module for diagnosing performance of the resistive heater based on the dielectric parameter.Type: GrantFiled: October 3, 2016Date of Patent: September 17, 2019Assignee: Watlow Electric Manufacturing CompanyInventors: Mohammad Nosrati, Roger Brummell, Timothy Tompkins
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Patent number: 10361103Abstract: A thermal system includes: a base member including at least one fluid passageway in which a two-phase fluid is disposed; a tuning layer secured to the base member; and a control system. The pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning layer includes a plurality of zones. The control system includes a plurality of sets of power lines in communication with the tuning layer, and a plurality of addressable control elements in electrical communication with the power lines and with the tuning layer. The control elements provide selective control of the tuning layer zones.Type: GrantFiled: December 13, 2016Date of Patent: July 23, 2019Assignee: Watlow Electric Manufacturing CompanyInventors: Kevin R. Smith, Kevin Ptasienski, Ray Alan Derler, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati, Jacob R. Lindley, Allen N. Boldt, Sanhong Zhang, Louis P. Steinhauser, Dennis S. Grimard