Patents by Inventor Morgan Evans
Morgan Evans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11404278Abstract: An optical grating component may include a substrate, and an optical grating, the optical grating being disposed on the substrate. The optical grating may include a plurality of angled structures, disposed at a non-zero angle of inclination with respect to a perpendicular to a plane of the substrate, wherein the plurality of angled structures are arranged to define a variable depth along a first direction, the first direction being parallel to the plane of the substrate.Type: GrantFiled: September 22, 2020Date of Patent: August 2, 2022Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: John Hautala, Morgan Evans, Rutger Meyer Timmerman Thijssen, Joseph C. Olson
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Patent number: 11402649Abstract: Optical grating components and methods of forming are provided. In some embodiments, a method includes providing an optically transparent substrate, and forming an optical grating layer on the substrate. The method includes forming an optical grating in the optical grating layer, wherein the optical grating comprises a plurality of angled components, disposed at a non-zero angle of inclination with respect to a perpendicular to a plane of the substrate. A first sidewall of the optical grating may have a first angle, and a second sidewall of the grating has a second angle different than the first angle. Modifying process parameters, including selectivity and beam angle spread, has an effect of changing a shape or dimension of the plurality of angled components.Type: GrantFiled: May 8, 2020Date of Patent: August 2, 2022Assignee: Varian Semiconductor Equipment Associates, Inc.Inventors: Morgan Evans, Rutger Meyer Timmerman Thijssen, Joseph Olson, Peter Kurunczi
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Publication number: 20220238295Abstract: Methods of producing grating materials with variable height are provided. In one example, a method may include providing a grating material atop a substrate, and positioning a shadow mask between the grating material and an ion source, wherein the shadow mask is separated from the grating material by a distance. The method may further include etching the grating material using an ion beam passing through a set of openings of the shadow mask, wherein a first depth of a first portion of the grating material is different than a second depth of a second portion of the grating material.Type: ApplicationFiled: April 18, 2022Publication date: July 28, 2022Applicant: Applied Materials, Inc.Inventors: Joseph C. Olson, Morgan Evans, Thomas Soldi, Rutger Meyer Timmerman Thijssen, Maurice Emerson Peploski
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Patent number: 11397289Abstract: Embodiments described herein relate to methods of forming gratings with different slant angles on a substrate and forming gratings with different slant angles on successive substrates using angled etch systems. The methods include positioning portions of substrates retained on a platen in a path of an ion beam. The substrates have a grating material disposed thereon. The ion beam is configured to contact the grating material at an ion beam angle ? relative to a surface normal of the substrates and form gratings in the grating material. The substrates are rotated about an axis of the platen resulting in rotation angles ? between the ion beam and a surface normal of the gratings. The gratings have slant angles ?? relative to the surface normal of the substrates. The rotation angles ? selected by an equation ?=cos?1(tan(??)/tan(?)).Type: GrantFiled: April 17, 2019Date of Patent: July 26, 2022Assignee: Applied Materials, Inc.Inventors: Rutger Meyer Timmerman Thijssen, Morgan Evans, Joseph C. Olson
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Patent number: 11380578Abstract: Systems and methods discussed herein can be used to form gratings at various slant angles across a grating material on a single substrate by determining an ion beam angle and changing the angle of an ion beam among and between ion beam angles to form gratings with varying angles and cross-sectional geometries. The substrate can be rotated around a central axis, and one or more process parameters, such as a duty cycle of the ion beam, can be modulated to form a grating with a depth gradient.Type: GrantFiled: October 18, 2019Date of Patent: July 5, 2022Assignee: APPLIED MATERIALS, INC.Inventors: Rutger Meyer Timmerman Thijssen, Joseph C. Olson, Morgan Evans
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Publication number: 20220202702Abstract: A method may include providing a syringe device having (a) a single needle, (b) a first syringe comprising saline with microbubbles, (c) a second syringe comprising a therapeutic compound, and (d) a connector coupling the single needle to the first syringe and to the second syringe. The method may further include guiding the single needle to an injection site of a patient; injecting, with the first syringe, a quantity of saline with microbubbles; confirming a desired position of the single needle, with ultrasound imaging, by identifying the microbubbles in the quantity of saline relative to a tip of the single needle and further relative to one or more anatomical landmarks visible with the ultrasound imaging; and injecting, with the second syringe, the therapeutic compound at the injection site.Type: ApplicationFiled: January 4, 2022Publication date: June 30, 2022Applicant: Agitated Solutions Inc.Inventors: Morgan Evans, Kenneth Trauner
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Patent number: 11367589Abstract: Embodiments described herein relate to methods and apparatus for forming gratings having a plurality of fins with different slant angles on a substrate and forming fins with different slant angles on successive substrates using angled etch systems and/or an optical device. The methods include positioning portions of substrates retained on a platen in a path of an ion beam. The substrates have a grating material disposed thereon. The ion beam is configured to contact the grating material at an ion beam angle ? relative to a surface normal of the substrates and form gratings in the grating material.Type: GrantFiled: December 5, 2019Date of Patent: June 21, 2022Assignee: Applied Materials, Inc.Inventors: Joseph C. Olson, Morgan Evans, Rutger Meyer Timmerman Thijssen
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Publication number: 20220161363Abstract: Embodiments of the present application generally relate to methods for forming a plurality of gratings. The methods generally include depositing a material over one or more protected regions of a waveguide combiner disposed on a substrate, the material having a thickness inhibiting removal of a grating material disposed on the waveguide combiner when an ion beam is directed toward the substrate, and directing the ion beam toward the substrate. The methods disclosed herein allow for formation of a plurality of gratings in one or more unprotected regions, while no gratings are formed in the protected regions.Type: ApplicationFiled: February 11, 2022Publication date: May 26, 2022Inventors: Morgan EVANS, Joseph C. OLSON, Rutger MEYER TIMMERMAN THIJSSEN
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Publication number: 20220152362Abstract: In some implementations, an intravascular gas exchange catheter includes (a) a catheter wall extending from a proximal end to a distal end; (b) a first internal lumen coupled to a first lumen port at the proximal end and adjacent at least a portion of the catheter wall, and a second internal lumen coupled to a second lumen port at the proximal end; and (c) an interior space enclosed by the catheter wall and disposed at the distal end, wherein the first internal lumen and second interior lumen are fluidly isolated from each other along a length of catheter wall but fluidly coupled to each other at the interior space. The catheter wall may include a porous material that facilitates diffusion of a target gas through the catheter wall, from or to a space exterior to the catheter wall, to or from the first lumen.Type: ApplicationFiled: November 17, 2021Publication date: May 19, 2022Applicant: Agitated Solutions Inc.Inventors: Morgan Evans, Gary Heit, Benjamin Arcand, Carl Lance Boling, Jennifer Chmura, Eric Sabelman, Stephen Ruoss
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Patent number: 11335531Abstract: Methods of producing grating materials with variable height are provided. In one example, a method may include providing a grating material atop a substrate, and positioning a shadow mask between the grating material and an ion source, wherein the shadow mask is separated from the grating material by a distance. The method may further include etching the grating material using an ion beam passing through a set of openings of the shadow mask, wherein a first depth of a first portion of the grating material is different than a second depth of a second portion of the grating material.Type: GrantFiled: February 13, 2020Date of Patent: May 17, 2022Assignee: Applied Materials, Inc.Inventors: Joseph C. Olson, Morgan Evans, Thomas Soldi, Rutger Meyer Timmerman Thijssen, Maurice Emerson Peploski
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Publication number: 20220080106Abstract: A system for intravascular oxygenation may include a catheter shaft, a vibratory member, and an oxygen source. The catheter shaft may have a wall that extends from a proximal end to a distal end along a longitudinal axis to form a lumen. The distal end may terminate in an atraumatic tip that seals off an interior space of the lumen from an adjacent exterior space. The distal end may include a coiled spring whose coils are tightly disposed against adjacent coils. The vibratory member may be configured to produce and transmit via the wall, to the coiled spring, mechanical vibration or high-frequency acoustic energy. The oxygen source may be configured to be coupled to the proximal end and to deliver a flow of oxygen to an interior space for communication to the exterior space, through gaps that exist or are created between adjacent coils of the coiled spring.Type: ApplicationFiled: September 1, 2021Publication date: March 17, 2022Applicant: Agitated Solutions Inc.Inventors: Morgan Evans, Benjamin Arcand, Carl Lance Boling, Jennifer Chmura
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Publication number: 20220051880Abstract: A plasma source may include a plasma chamber, where the plasma chamber has a first side, defining a first plane and an extraction assembly, disposed adjacent to the side of the plasma chamber, where the extraction assembly includes at least two electrodes. A first electrode may be disposed immediately adjacent the side of the plasma chamber, wherein a second electrode defines a vertical displacement from the first electrode along a first direction, perpendicular to the first plane, wherein the first electrode comprises a first aperture, and the second electrode comprises a second aperture. The first aperture may define a lateral displacement from the second aperture along a second direction, parallel to the first plane, wherein the vertical displacement and the lateral displacement define a non-zero angle of inclination with respect to a perpendicular to the first plane.Type: ApplicationFiled: October 29, 2021Publication date: February 17, 2022Applicant: APPLIED Materials, Inc.Inventors: Peter F. Kurunczi, Morgan Evans, Joseph C. Olson
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Patent number: 11247298Abstract: Embodiments of the present application generally relate to methods for forming a plurality of gratings. The methods generally include depositing a material over one or more protected regions of a waveguide combiner disposed on a substrate, the material having a thickness inhibiting removal of a grating material disposed on the waveguide combiner when an ion beam is directed toward the substrate, and directing the ion beam toward the substrate. The methods disclosed herein allow for formation of a plurality of gratings in one or more unprotected regions, while no gratings are formed in the protected regions.Type: GrantFiled: December 17, 2019Date of Patent: February 15, 2022Assignee: Applied Materials, Inc.Inventors: Morgan Evans, Joseph C. Olson, Rutger Meyer Timmerman Thijssen
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Patent number: 11232930Abstract: A carrier proximity mask and methods of assembling and using the carrier proximity mask may include providing a first carrier body, second carrier body, and set of one or more clamps. The first carrier body may have one or more openings formed as proximity masks to form structures on a first side of a substrate. The first and second carrier bodies may have one or more contact areas to align with one or more contact areas on a first and second sides of the substrate. The set of one or more clamps may clamp the substrate between the first carrier body and the second carrier body at contact areas to suspend work areas of the substrate between the first and second carrier bodies. The openings to define edges to convolve beams to form structures on the substrate.Type: GrantFiled: March 25, 2021Date of Patent: January 25, 2022Assignee: APPLIED Materials, Inc.Inventors: Morgan Evans, Charles T. Carlson, Rutger Meyer Timmerman Thijssen, Ross Bandy, Ryan Magee
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Patent number: 11226441Abstract: Methods of producing gratings with trenches having variable height are provided. In one example, a method of forming a diffracted optical element may include providing an optical grating layer over a substrate, patterning a hardmask over the optical grating layer, and forming a sacrificial layer over the hardmask, the sacrificial layer having a non-uniform height measured from a top surface of the optical grating layer. The method may further include etching a plurality of angled trenches into the optical grating layer to form an optical grating, wherein a first depth of a first trench of the plurality of trenches is different than a second depth of a second trench of the plurality of trenches.Type: GrantFiled: October 16, 2020Date of Patent: January 18, 2022Assignee: Applied Materials, Inc.Inventors: Morgan Evans, Rutger Meyer Timmerman Thijssen, Joseph C. Olson
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Patent number: 11193198Abstract: Embodiments of the disclosure relate to systems and methods for forming devices on a substrate. For example, a method for forming devices on a substrate can include projecting one or more ion beams from one or more ion beam chambers to form one or more devices on a first surface of a substrate and projecting one or more ion beams from one or more ion beam chambers to form one or more devices on a second surface of a substrate. In these embodiments, the first surface and the second surface are on opposite sides of the substrate. Therefore, the ion beams can form the devices on both sides of the substrate.Type: GrantFiled: December 6, 2019Date of Patent: December 7, 2021Assignee: Applied Materials, Inc.Inventors: Joseph C. Olson, Ludovic Godet, Rutger Meyer Timmerman Thijssen, Morgan Evans, Jinxin Fu
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Patent number: 11195703Abstract: A plasma source may include a plasma chamber, where the plasma chamber has a first side, defining a first plane and an extraction assembly, disposed adjacent to the side of the plasma chamber, where the extraction assembly includes at least two electrodes. A first electrode may be disposed immediately adjacent the side of the plasma chamber, wherein a second electrode defines a vertical displacement from the first electrode along a first direction, perpendicular to the first plane, wherein the first electrode comprises a first aperture, and the second electrode comprises a second aperture. The first aperture may define a lateral displacement from the second aperture along a second direction, parallel to the first plane, wherein the vertical displacement and the lateral displacement define a non-zero angle of inclination with respect to a perpendicular to the first plane.Type: GrantFiled: November 13, 2019Date of Patent: December 7, 2021Assignee: APPLIED Materials, Inc.Inventors: Peter F. Kurunczi, Morgan Evans, Joseph C. Olson
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Publication number: 20210361868Abstract: A method may include providing a syringe device having (a) a single needle, (b) a first syringe comprising saline with microbubbles, (c) a second syringe comprising a therapeutic compound, and (d) a connector coupling the single needle to the first syringe and to the second syringe. The method may further include guiding the single needle to an injection site of a patient; injecting, with the first syringe, a quantity of saline with microbubbles; confirming a desired position of the single needle, with ultrasound imaging, by identifying the microbubbles in the quantity of saline relative to a tip of the single needle and further relative to one or more anatomical landmarks visible with the ultrasound imaging; and injecting, with the second syringe, the therapeutic compound at the injection site.Type: ApplicationFiled: May 17, 2021Publication date: November 25, 2021Applicant: Agitated Solutions Inc.Inventors: Morgan Evans, Kenneth Trauner
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Publication number: 20210361257Abstract: A method may include intravenously directing first bubbles into a patient's venous circulatory system and to a right side of the patient's heart. The first bubbles may have sizes that fall within a first range. The method may further include monitoring the patient's heart, with ultrasound imaging, to detect presence of the first bubbles on a left side of the patient's heart. Upon detecting the first bubbles on the left side of the patient's heart, the method may further include intravenously directing second bubbles into the patient's venous circulatory system and to the right side of the patient's heart. The second bubbles may have sizes that fall within a second range that is different than the first range. Upon detecting the second bubbles on the left side of the patient's heart, the method may further include initiating treatment to minimize risk of stroke in the patient.Type: ApplicationFiled: May 17, 2021Publication date: November 25, 2021Applicant: Agitated Solutions Inc.Inventors: Micah J Eimer, Morgan Evans, Benjamin Arcand, Jennifer Chmura, C. Lance Boling
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Publication number: 20210351069Abstract: Methods of producing grating materials with variable height fins are provided. In one example, a method may include providing a mask layer atop a substrate, the mask layer including a first opening over a first processing area and a second opening over a second processing area. The method may further include etching the substrate to recess the first and second processing areas, forming a grating material over the substrate, and etching the grating material in the first and second processing areas to form a plurality of structures oriented at a non-zero angle with respect to a vertical extending from a top surface of the substrate.Type: ApplicationFiled: May 11, 2020Publication date: November 11, 2021Applicant: Applied Materials, Inc.Inventors: Morgan Evans, Joseph C. Olson, Rutger Meyer Timmerman Thijssen, Daniel Distaso, Ryan Boas