Abstract: A piezoelectric actuator includes a substrate, and a first piezoelectric device and a second piezoelectric device formed at the substrate. The first piezoelectric device includes a first lower electrode, a first piezoelectric body, and a first upper electrode. The second piezoelectric device includes a second lower electrode, a second piezoelectric body, and a second upper electrode. A side surface of the first lower electrode is not covered with the first piezoelectric body, and a side surface of the second lower electrode is not covered with the second piezoelectric body. The piezoelectric actuator further includes a common electrode formed at the substrate and coupled to the first upper electrode and the second upper electrode, and an insulating layer located between the common electrode and the first lower electrode and between the common electrode and the second lower electrode.

Abstract: A liquid discharge head including a diaphragm, a pressure chamber substrate that is laminated on the diaphragm, and a piezoelectric element that includes a first active portion and a second active portion, and is laminated on the diaphragm, in which when a direction in which the first active portion and the second active portion are arranged is defined as a second direction when viewed in a lamination direction, and a direction orthogonal to the lamination direction and the second direction is defined as a third direction, and the piezoelectric element includes a first region which is a region in which both the first active portion and the second active portion are provided, and a second region which is a region in which one of the first active portion and the second active portion is provided and the other is not provided.

Abstract: The controller drives the piezoelectric body such that, when the cumulative number of times of the driving is a second number of times greater than the first number of times, the voltage difference is a second value smaller than the first value.

Abstract: A liquid discharge device has a liquid discharge head that includes a pressure chamber substrate provided with a first pressure chamber in which a liquid is accommodated, a first piezoelectric body provided to correspond to the first pressure chamber, and a detection resistor for detecting a temperature in a vicinity of the first pressure chamber, and a decision section that decides a degree of deterioration of the first piezoelectric body based on a detection result of the detection resistor.

Abstract: A piezoelectric body that is driven to apply pressure to a liquid in the plurality of pressure chambers, and contains lead atoms, a first electrode that is provided on a first surface of two surfaces of the piezoelectric body, a second electrode that is provided on a second surface opposite to the first surface of the two surfaces of the piezoelectric body, a drive wiring that is electrically coupled to the first electrode and the second electrode, and applies a voltage for driving the piezoelectric body, a resistor that is formed of the same material as any of the first electrode, the second electrode, and the drive wiring to measure a temperature of the liquid in the plurality of pressure chambers, and a diffusion suppression layer that is provided between the resistor and the piezoelectric body to suppress diffusion of lead atoms contained in the piezoelectric body into the resistor.

Abstract: A piezoelectric device includes a substrate on which a plurality of recesses are arranged in a first direction, a vibration plate, and a piezoelectric actuator having a first electrode, a second electrode and a third electrode, a fourth electrode, and a piezoelectric layer, in which a plurality of active portions are provided, the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess, the first electrode is formed between the second electrode and the third electrode, the second electrode, the third electrode, and the fourth electrode configure common electrodes for the plurality of active portions, and the first electrode configures an individual electrode provided independently for each of the active portions.

Abstract: A liquid discharge head includes a pressure chamber substrate that has a plurality of pressure chambers, a piezoelectric element that is laminated at the pressure chamber substrate, and has an individual electrode individually provided for each of the plurality of pressure chambers, a common electrode commonly provided for the plurality of pressure chambers, and a piezoelectric body provided between the individual electrode and the common electrode in a lamination direction of the piezoelectric element and provided to apply pressure to a liquid in the pressure chamber, a drive wiring that is electrically coupled to the individual electrode and the common electrode, and provided to apply a voltage for driving the piezoelectric body to the piezoelectric body, and a heating resistor that is formed of the same material as any of the individual electrode, the common electrode, and the drive wiring, and provided to heat the liquid in the pressure chamber.

Abstract: A liquid discharge head includes an individual electrode that is individually provided for the plurality of pressure chambers, a common electrode that is commonly provided for the plurality of pressure chambers, a piezoelectric body that is provided between the individual electrode and the common electrode for applying pressure to liquid in the pressure chambers, a drive wiring that is electrically coupled to the individual electrode and the common electrode, and applies a voltage for driving the piezoelectric body, a detection resistor that is formed of the same material as any of the individual electrode, the common electrode, and the drive wiring for detecting temperature of the liquid in the pressure chambers, and a first layer that is provided on a surface opposite to a surface facing the pressure chamber substrate in the detection resistor, and has a lower thermal conductivity than the detection resistor.

Abstract: A bonding substrate is provided with nozzle communication channels that establish communication between pressure chambers and nozzles. Each nozzle communication channel includes a pair of first inner wall surfaces constituting wall surfaces in a first direction, and a pair of second inner wall surfaces constituting wall surfaces in a second direction being orthogonal to the first direction. At least one of the second inner wall surfaces includes an inclined surface being inclined such that a length of the nozzle communication channel becomes gradually shorter toward the nozzle. An angle of the inclined surface relative to a liquid ejecting surface where the nozzles are opened is smaller than an angle of the first inner wall surface relative to the liquid ejecting surface.

Abstract: A MEMS device includes a first substrate 22 including a single-crystal silicon substrate and a second substrate 23 including a single-crystal silicon substrate, in which the first substrate 22 and the second substrate 23 are laminated together, and the first substrate 22 and the second substrate 23 are joined to each other such that the cleavage directions of both substrates intersect each other.

Abstract: A liquid discharge apparatus includes a pressure chamber substrate laminated on a first surface of a diaphragm and including a partition wall partitioning a pressure chamber communicating with a nozzle for discharging liquid, a piezoelectric element laminated on a second surface of the diaphragm and including a first active portion that overlaps a center of the pressure chamber when viewed in a thickness direction of the diaphragm and a second active portion that overlaps the pressure chamber at a position closer to an outer edge of the pressure chamber than the first active portion, and a drive signal generation portion that generates a drive signal, and a shrinkage step is executed in which a first period during which a first shrinkage element is supplied to the first active portion and a second period during which a second shrinkage element is supplied to the second active portion overlap.

Abstract: A liquid discharge apparatus includes a diaphragm, a pressure chamber substrate including a partition wall partitioning a pressure chamber communicating with a nozzle discharging liquid, a piezoelectric element including a first active portion that overlaps a center of the pressure chamber and a second active portion that overlaps the pressure chamber at a position closer to an outer edge of the pressure chamber than the first active portion, and a drive signal generation portion that generates a discharge signal for discharging the liquid by being supplied to one of the first active portion and the second active portion and a correction signal that is supplied to the other of the first active portion and the second active portion, in which a potential of the discharge signal changes over time and a potential of the correction signal is constant during a discharge period for discharging the liquid.

Abstract: A method for producing a piezoelectric actuator including forming a vibration plate, forming a first electrode on the vibration plate, forming a piezoelectric layer on the first electrode, and forming a second electrode on the piezoelectric layer, wherein the forming the vibration plate has a single layer forming step including forming a metal layer containing zirconium by a gas phase method, and forming a metal oxide layer by firing the metal layer, the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and the metal oxide layer has a thickness less than 200 nm.

Abstract: A liquid ejecting head includes: a nozzle; a pressure chamber; a supply flow channel which is located on one side in a first direction relative to the pressure chamber and through which a liquid is supplied to the pressure chamber; a discharge flow channel which is located on another side in the first direction relative to the pressure chamber and through which the liquid is discharged from the pressure chamber; a supply-side compliance substrate which absorbs a vibration of the liquid in the supply flow channel; and a discharge-side compliance substrate which absorbs a vibration of the liquid in the discharge flow channel. A length of the discharge-side compliance substrate in the first direction is shorter than a length of the supply-side compliance substrate in the first direction.

Abstract: A piezoelectric device includes a substrate on which a plurality of recesses are arranged in a first direction, a vibration plate, and a piezoelectric actuator having a first electrode, a second electrode and a third electrode, a fourth electrode, and a piezoelectric layer, in which a plurality of active portions are provided, the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess, the first electrode is formed between the second electrode and the third electrode, and the fourth electrode configures a common electrode for the plurality of active portions.

Abstract: A liquid ejecting head includes: a sealing substrate provided in such a way as to cover the first piezoelectric element and the second piezoelectric element; a wiring board configured to apply a voltage to a common electrode, a first individual electrode, and a second individual electrode; a first wiring portion provided above the pressure chamber substrate and configured to electrically couple the common electrode to the wiring board; a second wiring portion provided at a lower surface of the sealing substrate and configured to electrically couple the common electrode to the wiring board; and a third wiring portion provided between the first piezoelectric element and the second piezoelectric element and configured to electrically couple the first wiring portion to the second wiring portion.

Abstract: A liquid discharge head includes a pressure chamber substrate that is provided with a plurality of pressure chambers, a piezoelectric body that is driven to apply pressure to liquid in the pressure chambers, an upper electrode that is provided above the piezoelectric body for applying a voltage to the piezoelectric body, a lower electrode that is provided below the piezoelectric body for applying a voltage to the piezoelectric body, a detection resistor that is provided below the piezoelectric body for detecting temperature of the liquid in the pressure chambers, and a first wiring portion that is electrically coupled to the detection resistor. The first wiring portion includes a first part that is extended above the piezoelectric body, and a second part that is provided in at least a part of a through hole penetrating the piezoelectric body and electrically coupled to the detection resistor.

Abstract: A liquid ejecting head in which a first electrode layer, a piezoelectric layer, and a second electrode layer of a piezoelectric element are laminated, a pressure chamber, which is partitioned by a partition wall, has an elongated shape, in a structure including the diaphragm and the piezoelectric element including an active portion and a non-active portion lateral direction, a first position is a position on an inner side of the active portion when viewed in the thickness direction, a second position is a position on an inner side of the non-active portion and closest to a boundary between the pressure chamber and the partition wall, and EI1/EI2?40, wherein EI1 is a bending rigidity of the active portion at the first position and EI2 is a bending rigidity of the non-active portion at the second position.

Abstract: The plurality of pressure compartments includes a first pressure compartment and a second pressure compartment located next to the first pressure compartment in the first direction. The plurality of nozzles includes a first nozzle that is in communication with the first pressure compartment and the second pressure compartment in a shared manner. The piezoelectric element includes a first active region where the piezoelectric body is sandwiched between the common electrode and, among the plurality of individual electrodes, a first individual electrode. The first active region is located to span from at least a part of the first pressure compartment to at least a part of the second pressure compartment as viewed in the second direction.

Abstract: A liquid discharge head includes a diaphragm, a first electrode, a piezoelectric body, and a second electrode which are stacked in this order in a first direction, in which when a region of the piezoelectric body interposed between the first electrode and the second electrode is set as a first region, a region of the piezoelectric body other than the first region is set as a second region, a portion of the diaphragm that overlaps a boundary between the first region and the second region when viewed in the first direction is set as a first portion, and a portion of the diaphragm that is different from the first portion and overlaps the first region when viewed in the first direction is set as a second portion, a thickness of the first portion is smaller than a thickness of the second portion.