Abstract: A liquid discharge head to discharge a liquid includes a piezoelectric body, a first electrode layer disposed at least partly on the piezoelectric body in a stacking direction, and a first wiring disposed on the first electrode layer in the stacking direction, the first wiring being more likely to cause ion migration than the first electrode layer, in which the piezoelectric body, the first electrode layer, and the first wiring are stacked in the stacking direction. When a predetermined area on the piezoelectric body is a first area, and a predetermined area adjacent to the first area on the piezoelectric body is a second area, both the first wiring and the first electrode layer are disposed in the first area, and the first wiring is not disposed while the first electrode layer is disposed in the second area.

Abstract: The liquid discharge head is configured to switch between a first mode in which the liquid supplied into the common liquid chamber is discharged through the individual flow channel from the outlet and a second mode in which the liquid supplied into the common liquid chamber is discharged from the outlet without passing through the individual flow channel.

Abstract: A piezoelectric device (an actuator unit) includes the following: a first substrate (a pressure chamber forming substrate, a diaphragm) having a piezoelectric layer and a first wiring conductor (a top electrode layer) that is at least partially stacked on the piezoelectric layer; and a second substrate (a sealing substrate) having a second wiring conductor (a bottom wiring conductor) that faces and is separated from the first wiring conductor (a top electrode layer) and to which an electrical signal different from an electrical signal that is applied to the first wiring conductor (a top electrode layer) is applied. At least one of the first wiring conductor (a top electrode layer) and the second wiring conductor (a bottom wiring conductor) is at least partially covered with an electrically insulating protective layer.

Abstract: A method for producing a piezoelectric actuator including forming a vibration plate, forming a first electrode on the vibration plate, forming a piezoelectric layer on the first electrode, and forming a second electrode on the piezoelectric layer, wherein the forming the vibration plate has a single layer forming step including forming a metal layer containing zirconium by a gas phase method, and forming a metal oxide layer by firing the metal layer, the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and the metal oxide layer has a thickness less than 200 nm.

Abstract: Provided is a piezoelectric device including: a substrate (10) on which a plurality of recesses (12) are provided; a vibrating plate (50) which is provided on one surface side of the substrate; and a piezoelectric element (300) which is provided over the vibrating plate (50) and on which a first electrode (60), a piezoelectric layer (70), and a second electrode (80) are laminated from the substrate (10) side, in which the first electrode (60) is formed to have a first width which is smaller than a dimension of the recess in a parallel arrangement direction in the parallel arrangement direction of at least one recess (12), and the piezoelectric layer (70) is extended to the outer side of the first electrode (60) in the parallel arrangement direction and has a second width which is greater than the first width and smaller than a width of the recess (12) in the parallel arrangement direction, the vibrating plate (50) contains a zirconium oxide layer (52), and when an area of the zirconium oxide layer (52) corres

Abstract: when one position where a distance in the second direction to the partition wall located at a nearest position in the second direction is long is assumed as a first position, and the other position where the distance is short is assumed as a second position, both the piezoelectric body and the vibration plate are provided at the first position and the second position, and a thickness of the vibration plate at the second position is smaller than a thickness of the vibration plate at the first position.

Abstract: Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus. Provided is a MEMS device that includes a first substrate on which a flexibly deformable thin film member is laminated, a second substrate disposed at an interval with respect to the first substrate, and an adhesion layer that adheres the first substrate to the second substrate, in which an end of the thin film member extends to the outside of the end of the first substrate in an in-plane direction of the first substrate.

Abstract: A flow path formation substrate to which a nozzle plate is mounted includes a pressure chamber per nozzle, an individual supply path leading to the pressure chamber, an individual recovery path communicating with a flow channel near the nozzle. A conduction unit electrically coupled through a lead electrode to a pressure generator causing a pressure of the pressure chamber to vary is located at a position where the conduction unit overlaps with a flow path area of at least one individual flow path of the individual supply path or the individual recovery path in a plan view from a lamination direction in which the nozzle plate and the flow path formation substrate are laminated.

Abstract: A liquid discharging head includes a first flow path member comprising a first flow path and a pressure chamber; a second flow path member stacked on the first flow path member and comprising a second flow path; a wiring substrate comprising a connection terminal for electrically connected to a driving element to generate a pressure change in the pressure chamber; and a circulation flow path for circulating the liquid through the pressure chamber. A surface of the first flow path member includes a first region which is stacked on the second flow path member via the wiring substrate and a second region which is stacked on the second flow path member without the wiring substrate. The first flow path and the second flow path are in communication with each other in the second region so as to be the circulation flow path.

Abstract: A liquid ejecting head capable of suppressing an increase in size in a configuration in which a liquid circulates between the liquid ejecting head and a liquid storage portion and a liquid ejecting apparatus are provided. Pressures chambers communicating with nozzles that eject a liquid, a first common flow path through which the liquid is supplied to the pressure chambers side, a second common flow path through which the liquid is led out from the pressure chambers side, a first compliance portion that deforms in response to a pressure change in the liquid inside the first common flow path, and a second compliance portion that deforms in response to a pressure change in the liquid inside the second common flow path are provided. The first compliance portion and the second compliance portion overlap each other when viewed in a thickness direction of at least one of the compliance portions.

Abstract: There is provided a liquid discharge head including a drive IC that outputs the first signal and the second signal, and a wiring substrate having a first side and a second side longer than the first side, electrically connected to the drive IC, and propagating the first signal and the second signal, in which the wiring substrate includes a first electrode to which the first signal is input, a second electrode to which the second signal is input, a third electrode electrically connected to the first electrode, and a fourth electrode electrically connected to the second electrode, and in a direction along the second side, the second electrode is positioned between the first electrode and the third electrode, and the third electrode is positioned between the second electrode and the fourth electrode.

Abstract: A liquid ejecting head including a plurality of pressure chambers in communication with nozzles that eject a liquid, a diaphragm that includes layers including a first layer and a second layer and that constitutes wall surfaces of the plurality of pressure chambers, a plurality of piezoelectric elements formed on a first region of the diaphragm, the piezoelectric elements each being formed to correspond to a corresponding one of the pressure chambers, and a barrier layer that is in contact with an interface between the first layer and the second layer in a second region of the diaphragm, the second region surrounding the first region.

Abstract: A liquid ejecting head includes a driving circuit configured to output a driving pulse; and a wiring substrate including a base body portion disposed between a flow path formation portion and the driving circuit, and a signal wiring formed on the base body portion and configured to transmit a driving signal for use in generation of the driving pulse by the driving circuit to the driving circuit from an input terminal. The signal wiring includes a first portion overlapping, in a plan view, at least one coupling terminal included in the driving circuit and coupled to the signal wiring, and a second portion located on the side of the input terminal when seen from the first portion, and the total number of wirings constituting the second portion is larger than the total number of wirings constituting the first portion.

Abstract: Provided is a liquid discharge head that includes a nozzle plate provided with a nozzle hole that discharges a liquid, a silicon substrate provided with a pressure generating chamber that communicates with the nozzle hole, a vibration plate provided on the silicon substrate, and a piezoelectric element that is provided on the vibration plate and changes a volume of the pressure generating chamber. The piezoelectric element includes a piezoelectric layer including a composite oxide of a perovskite structure containing lead, zirconium, and titanium. A difference between a peak position derived from a (100) surface of the piezoelectric layer and a peak position derived from a (220) surface of the silicon substrate in an X-ray diffraction of the piezoelectric layer is less than 25.00°.

Abstract: A flow path forming substrate on which a nozzle plate including a plurality of nozzles is mounted forms a supply flow path from a shared supply path shared for liquid supply to the plurality of nozzles, and an individual supply path branching from the shared supply path and leading to a pressure chamber for each of the nozzles, and forms a collecting flow path from an individual collecting path for each of the nozzles communicated with the communication flow path for each of the nozzles communicating with the nozzles and pressure chambers, and a shared collecting path shared for liquid collection from the plurality of nozzles by joining to the individual collecting path. The shared supply path is liquid-tightly closed by a supply-side flexible plate having flexibility, and the collecting flow path is liquid-tightly closed by a collecting-side flexible plate having flexibility over a flow path area.

Abstract: An electronic device includes a first member configured by single crystal silicon, in which the first member includes a first surface configured by a {110} plane in the single crystal silicon, a second surface of an opposite side from the first surface, a through-hole which spans from the first surface to the second surface, a first recessed portion which is opened in the first surface and includes a wall surface configured by a {111} plane, the wall surface being inclined by an angle greater than 0° and less than 90° with respect to the first surface in the single crystal silicon, and a second recessed portion opened in the second surface, and a level difference surface having a different inclination to that of the {111} plane is provided in the middle of the wall surface of the first recessed portion in a depth direction.

Abstract: A liquid discharge head includes: a nozzle plate provided with a nozzle hole that discharges a liquid; a silicon substrate provided with a pressure chamber that is connected with the nozzle hole; a diaphragm provided on the silicon substrate; and a piezoelectric element that is provided on the diaphragm and that changes a volume of the pressure chamber, where: the diaphragm includes a zirconium oxide layer; the zirconium oxide layer has (?111) preferred orientation; and in X-ray diffraction of the diaphragm, a difference between a position of (002) peak of the zirconium oxide layer and a position of (220) peak of the silicon substrate is 13.26° or more and 13.30° or less.

Abstract: A liquid discharging head includes a nozzle plate and a chamber plate, the chamber plate is disposed on a second surface side of the nozzle plate, and a first pressure chamber and a second pressure chamber among a plurality of pressure chambers communicate with a nozzle through one communication flow path.

Abstract: The terminal portion extends onto a surface of the protrusion portion from part positioned in the second layer and corresponding to the second portion, and part on the surface of the protrusion portion contacts an electrode of the drive element.

Abstract: Provided is a liquid discharging head including: a nozzle discharging a liquid; a pressure chamber row in which a plurality of pressure chambers communicating with the nozzle are arranged side by side along a first axis direction; and a first reservoir and a second reservoir commonly communicating with the plurality of pressure chambers, in which the pressure chamber row includes a first pressure chamber communicating with the first reservoir and a second pressure chamber communicating with the second reservoir, and the liquid discharging head further comprises a communication flow path causing the first pressure chamber and the second pressure chamber to commonly communicate with one nozzle.