Abstract: A piezoelectric device includes a substrate on which a plurality of recesses are arranged in a first direction, a vibration plate, and a piezoelectric actuator having a first electrode, a second electrode and a third electrode, a fourth electrode, and a piezoelectric layer, in which a plurality of active portions are provided, the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess, the first electrode is formed between the second electrode and the third electrode, the second electrode, the third electrode, and the fourth electrode configure common electrodes for the plurality of active portions, and the first electrode configures an individual electrode provided independently for each of the active portions.

Abstract: A piezoelectric device includes a substrate on which a plurality of recesses are arranged in a first direction, a vibration plate, and a piezoelectric actuator having a first electrode, a second electrode and a third electrode, a fourth electrode, and a piezoelectric layer, in which a plurality of active portions are provided, the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess, the first electrode is formed between the second electrode and the third electrode, and the fourth electrode configures a common electrode for the plurality of active portions.

Abstract: A bonding substrate is provided with nozzle communication channels that establish communication between pressure chambers and nozzles. Each nozzle communication channel includes a pair of first inner wall surfaces constituting wall surfaces in a first direction, and a pair of second inner wall surfaces constituting wall surfaces in a second direction being orthogonal to the first direction. At least one of the second inner wall surfaces includes an inclined surface being inclined such that a length of the nozzle communication channel becomes gradually shorter toward the nozzle. An angle of the inclined surface relative to a liquid ejecting surface where the nozzles are opened is smaller than an angle of the first inner wall surface relative to the liquid ejecting surface.

Abstract: A MEMS device includes a first substrate 22 including a single-crystal silicon substrate and a second substrate 23 including a single-crystal silicon substrate, in which the first substrate 22 and the second substrate 23 are laminated together, and the first substrate 22 and the second substrate 23 are joined to each other such that the cleavage directions of both substrates intersect each other.

Abstract: The controller drives the piezoelectric body such that, when the cumulative number of times of the driving is a second number of times greater than the first number of times, the voltage difference is a second value smaller than the first value.

Abstract: A liquid ejecting head includes: a sealing substrate provided in such a way as to cover the first piezoelectric element and the second piezoelectric element; a wiring board configured to apply a voltage to a common electrode, a first individual electrode, and a second individual electrode; a first wiring portion provided above the pressure chamber substrate and configured to electrically couple the common electrode to the wiring board; a second wiring portion provided at a lower surface of the sealing substrate and configured to electrically couple the common electrode to the wiring board; and a third wiring portion provided between the first piezoelectric element and the second piezoelectric element and configured to electrically couple the first wiring portion to the second wiring portion.

Abstract: A liquid discharge head includes a pressure chamber substrate that is provided with a plurality of pressure chambers, a piezoelectric body that is driven to apply pressure to liquid in the pressure chambers, an upper electrode that is provided above the piezoelectric body for applying a voltage to the piezoelectric body, a lower electrode that is provided below the piezoelectric body for applying a voltage to the piezoelectric body, a detection resistor that is provided below the piezoelectric body for detecting temperature of the liquid in the pressure chambers, and a first wiring portion that is electrically coupled to the detection resistor. The first wiring portion includes a first part that is extended above the piezoelectric body, and a second part that is provided in at least a part of a through hole penetrating the piezoelectric body and electrically coupled to the detection resistor.

Abstract: A liquid discharge head includes an individual electrode that is individually provided for the plurality of pressure chambers, a common electrode that is commonly provided for the plurality of pressure chambers, a piezoelectric body that is provided between the individual electrode and the common electrode for applying pressure to liquid in the pressure chambers, a drive wiring that is electrically coupled to the individual electrode and the common electrode, and applies a voltage for driving the piezoelectric body, a detection resistor that is formed of the same material as any of the individual electrode, the common electrode, and the drive wiring for detecting temperature of the liquid in the pressure chambers, and a first layer that is provided on a surface opposite to a surface facing the pressure chamber substrate in the detection resistor, and has a lower thermal conductivity than the detection resistor.

Abstract: A liquid ejecting head includes: a nozzle; a pressure chamber; a supply flow channel which is located on one side in a first direction relative to the pressure chamber and through which a liquid is supplied to the pressure chamber; a discharge flow channel which is located on another side in the first direction relative to the pressure chamber and through which the liquid is discharged from the pressure chamber; a supply-side compliance substrate which absorbs a vibration of the liquid in the supply flow channel; and a discharge-side compliance substrate which absorbs a vibration of the liquid in the discharge flow channel. A length of the discharge-side compliance substrate in the first direction is shorter than a length of the supply-side compliance substrate in the first direction.

Abstract: A liquid discharge head that includes piezoelectric elements, a pressure chamber plate defining pressure chambers corresponding to the piezoelectric elements, and a vibrating plate disposed between the piezoelectric elements and the pressure chamber plate is provided. In the liquid discharge head, the vibrating plate has, in a first position and a second position, a first portion and a second portion that is away from the end of the pressure chamber than the first portion in a first direction and has a thickness different from a thickness of the first portion. In the first position, a width of the second portion in the first direction is a first width, and in the second position, a width of the second portion in the first direction is a second width that is less than the first width.

Abstract: A liquid discharge head to discharge a liquid includes a piezoelectric body, a first electrode layer disposed at least partly on the piezoelectric body in a stacking direction, and a first wiring disposed on the first electrode layer in the stacking direction, the first wiring being more likely to cause ion migration than the first electrode layer, in which the piezoelectric body, the first electrode layer, and the first wiring are stacked in the stacking direction. When a predetermined area on the piezoelectric body is a first area, and a predetermined area adjacent to the first area on the piezoelectric body is a second area, both the first wiring and the first electrode layer are disposed in the first area, and the first wiring is not disposed while the first electrode layer is disposed in the second area.

Abstract: In this liquid ejecting head, the pressure chamber extends in a second direction crossing a first direction, the first direction being a direction from the pressure chamber to the nozzle. The pressure chamber and the absorbing chamber are disposed at a same position in the first direction and next to each other in the second direction. The actuator is disposed on an opposite side in the first direction with respect to the pressure chamber. The absorption member is disposed on the opposite side in the first direction with respect to the absorbing chamber, the absorption member including at least part of members constituting the actuator.

Abstract: A liquid discharge head includes a pressure chamber substrate that has a plurality of pressure chambers, a piezoelectric element that is laminated at the pressure chamber substrate, and has an individual electrode individually provided for each of the plurality of pressure chambers, a common electrode commonly provided for the plurality of pressure chambers, and a piezoelectric body provided between the individual electrode and the common electrode in a lamination direction of the piezoelectric element and provided to apply pressure to a liquid in the pressure chamber, a drive wiring that is electrically coupled to the individual electrode and the common electrode, and provided to apply a voltage for driving the piezoelectric body to the piezoelectric body, and a heating resistor that is formed of the same material as any of the individual electrode, the common electrode, and the drive wiring, and provided to heat the liquid in the pressure chamber.

Abstract: A liquid ejecting head in which a first electrode layer, a piezoelectric layer, and a second electrode layer of a piezoelectric element are laminated, a pressure chamber, which is partitioned by a partition wall, has an elongated shape, in a structure including the diaphragm and the piezoelectric element including an active portion and a non-active portion lateral direction, a first position is a position on an inner side of the active portion when viewed in the thickness direction, a second position is a position on an inner side of the non-active portion and closest to a boundary between the pressure chamber and the partition wall, and EI1/EI2?40, wherein EI1 is a bending rigidity of the active portion at the first position and EI2 is a bending rigidity of the non-active portion at the second position.

Abstract: A liquid ejecting head includes a diaphragm, a first electrode, a piezoelectric layer, and a second electrode in this order in a first direction, and ejects liquid. The second electrode includes a first portion that is next to the piezoelectric layer in the first direction and is electrically conductive. A length in the first direction is defined as a thickness. One position in a second direction intersecting with the first direction is defined as a first position. Another one position is defined as a second position that is closer to an end of the second electrode in the second direction than the first position is. Given the definition, the thickness of the first portion at the second position is less than the thickness of the first portion at the first position.

Abstract: when one position where a distance in the second direction to the partition wall located at a nearest position in the second direction is long is assumed as a first position, and the other position where the distance is short is assumed as a second position, both the piezoelectric body and the vibration plate are provided at the first position and the second position, and a thickness of the vibration plate at the second position is smaller than a thickness of the vibration plate at the first position.

Abstract: A method for producing a piezoelectric actuator including forming a vibration plate, forming a first electrode on the vibration plate, forming a piezoelectric layer on the first electrode, and forming a second electrode on the piezoelectric layer, wherein the forming the vibration plate has a single layer forming step including forming a metal layer containing zirconium by a gas phase method, and forming a metal oxide layer by firing the metal layer, the single layer forming step is repeated, thereby forming the vibration plate in which the metal oxide layers are stacked, and the metal oxide layer has a thickness less than 200 nm.

Abstract: A piezoelectric actuator includes, in a first direction in which pressure chambers are arranged side by side, an active portion in which a piezoelectric layer is sandwiched between a first electrode and a second electrode in a first area of a vibration plate corresponding to opposite ends of each pressure chamber and does not include the active portion in a second area of the vibration plate corresponding to a center of the pressure chamber. The vibration plate has, in the first direction, a thick-walled portion with a predetermined thickness in the first area and a thin-walled portion thinner than the thick-walled portion in the second area.

Abstract: Provided are an MEMS device, a liquid ejecting head, a liquid ejecting apparatus, a manufacturing method of a MEMS device, a manufacturing method of a liquid ejecting head and a manufacturing method of a liquid ejecting apparatus. Provided is a MEMS device that includes a first substrate on which a flexibly deformable thin film member is laminated, a second substrate disposed at an interval with respect to the first substrate, and an adhesion layer that adheres the first substrate to the second substrate, in which an end of the thin film member extends to the outside of the end of the first substrate in an in-plane direction of the first substrate.

Abstract: A liquid ejecting head includes a pressure compartment forming substrate, a piezoelectric actuator, a sealing plate, and a flexible wiring board. A pressure compartment is formed in the pressure compartment forming substrate. The piezoelectric actuator is disposed over the pressure compartment. The sealing plate has an opening going from a first surface, which is farther from the pressure compartment, to a second surface, which is closer to the pressure compartment. The sealing plate is configured to cover the piezoelectric actuator located in a first direction with respect to the opening. The flexible wiring board is inserted in the opening and is electrically coupled to the piezoelectric actuator. A first opening width of the opening at the first surface in the first direction is greater than a second opening width of the opening at the second surface in the first direction.