Patents by Inventor Myung-Hee Na

Myung-Hee Na has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11101367
    Abstract: A method for forming a device structure provides for forming a fin of a semiconductor material. A first contact is formed on the fin. A second contact is formed on the fin and spaced along a length of the fin from the first contact. A self-aligned gate electrode is formed on the fin that is positioned along the length of the fin between the first contact and the second contact.
    Type: Grant
    Filed: October 31, 2019
    Date of Patent: August 24, 2021
    Assignee: International Business Machines Corporation
    Inventors: Terence B. Hook, Myung-Hee Na, Balasubramanian Pranatharthiharan, Andreas Scholze
  • Patent number: 10937961
    Abstract: A Phase-change-memory (PCM) cell and method of forming the PCM are provided. In an illustrative embodiment, a method of forming a PCM cell includes forming a first layer of a first germanium-antimony-tellurium (GST) type material over at least a portion of the bottom and sides of a pore through a dielectric layer of low dielectric material to a bottom electrode. The method also includes forming a second layer of a second GST type material over the first GST type material along the bottom and sides of the pore over the bottom electrode. The first GST type material is different from the second GST type material.
    Type: Grant
    Filed: November 6, 2018
    Date of Patent: March 2, 2021
    Assignee: International Business Machines Corporation
    Inventors: Injo Ok, Myung-Hee Na, Nicole Saulnier, Balasubramanian Pranatharthiharan
  • Patent number: 10892331
    Abstract: Techniques are provided to fabricate semiconductor integrated circuit devices which include complementary metal-oxide-semiconductor gate-all-around field-effect transistor devices (e.g., nanosheet field-effect transistor devices), wherein the channel orientation layout of N-type and P-type field-effect transistor devices are independently configured to provide enhanced carrier mobility in the channel layers of the different type field-effect transistor devices.
    Type: Grant
    Filed: June 5, 2019
    Date of Patent: January 12, 2021
    Assignee: International Business Machines Corporation
    Inventors: Tenko Yamashita, Myung-Hee Na
  • Publication number: 20200388681
    Abstract: Techniques are provided to fabricate semiconductor integrated circuit devices which include complementary metal-oxide-semiconductor gate-all-around field-effect transistor devices (e.g., nanosheet field-effect transistor devices), wherein the channel orientation layout of N-type and P-type field-effect transistor devices are independently configured to provide enhanced carrier mobility in the channel layers of the different type field-effect transistor devices.
    Type: Application
    Filed: June 5, 2019
    Publication date: December 10, 2020
    Inventors: Tenko Yamashita, Myung-Hee Na
  • Patent number: 10833267
    Abstract: A self-align metal contact for a phase control memory (PCM) element is provided that mitigates unwanted residual tantalum nitride (TaN) particles that would otherwise remain after patterning a TaN surface using an RIE process.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: November 10, 2020
    Assignee: International Business Machines Corporation
    Inventors: Injo Ok, Myung-Hee Na, Nicole Saulnier, Balasubramanian Pranatharthiharan
  • Patent number: 10803933
    Abstract: A method of forming a self-aligned phase change memory element is provided. A bottom electrode is formed on a landing pad of a phase change memory element. A layer of dielectric material over the bottom electrode and a via etched through the dielectric material to expose the bottom electrode. The via is lined with a GST phase change layer that is etched back from the top surface of the dielectric layer. The via is then filled with a nitride fill, at least of portion of which is etched back from the top surface of the dielectric layer. A top electrode metal is then deposited at the top of the via, wherein the top electrode material is coupled to the phase change material and nitride fill material.
    Type: Grant
    Filed: August 21, 2018
    Date of Patent: October 13, 2020
    Assignee: International Business Machines Corporation
    Inventors: Injo Ok, Myung-Hee Na, Nicole Saulnier, Balasubramanian Pranatharthiharan
  • Patent number: 10693005
    Abstract: A method for manufacturing a semiconductor device comprises forming a plurality of fins in an active region, forming a plurality of gates around the plurality of fins in the active region, forming one or more gate contacts in the active region, and forming a plurality of contacts to source/drain regions in the active region.
    Type: Grant
    Filed: April 30, 2019
    Date of Patent: June 23, 2020
    Assignee: International Business Machines Corporation
    Inventors: Emre Alptekin, Albert M. Chu, Eric Eastman, Myung-Hee Na, Ravikumar Ramachandran
  • Publication number: 20200144501
    Abstract: A Phase-change-memory (PCM) cell and method of forming the PCM are provided. In an illustrative embodiment, a method of forming a PCM cell includes forming a first layer of a first germanium-antimony-tellurium (GST) type material over at least a portion of the bottom and sides of a pore through a dielectric layer of low dielectric material to a bottom electrode. The method also includes forming a second layer of a second GST type material over the first GST type material along the bottom and sides of the pore over the bottom electrode. The first GST type material is different from the second GST type material.
    Type: Application
    Filed: November 6, 2018
    Publication date: May 7, 2020
    Inventors: Injo Ok, Myung-Hee Na, Nicole Saulnier, Balasubramanian Pranatharthiharan
  • Publication number: 20200136043
    Abstract: A self-align metal contact for a phase control memory (PCM) element is provided that mitigates unwanted residual tantalum nitride (TaN) particles that would otherwise remain after patterning a TaN surface using an RIE process.
    Type: Application
    Filed: October 26, 2018
    Publication date: April 30, 2020
    Inventors: Injo OK, Myung-Hee Na, Nicole Saulnier, Balasubramanian Pranatharthiharan
  • Patent number: 10614877
    Abstract: A technique relates to a circuit. At least one 4 transistor (4T) static random access memory (SRAM) bitcell is included. Each of the 4T SRAM bitcells includes a first PFET, a first NFET, a second PFET, and a second NFET, the first PFET and the first NFET being coupled to form a first output node, and the second PFET and the second NFET being coupled to form a second output node. A pulldown circuit is coupled to the first NFET, the pulldown circuit operable to pull down a voltage at the first output node. A feedback circuit is operable to monitor the first output node, the feedback circuit operable to control the pulldown circuit.
    Type: Grant
    Filed: January 10, 2019
    Date of Patent: April 7, 2020
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Albert Chu, Myung-Hee Na, Robert Wong, Sean Burns, Jens Haetty
  • Publication number: 20200066337
    Abstract: A method of forming a self-aligned phase change memory element is provided. A bottom electrode is formed on a landing pad of a phase change memory element. A layer of dielectric material over the bottom electrode and a via etched through the dielectric material to expose the bottom electrode. The via is lined with a GST phase change layer that is etched back from the top surface of the dielectric layer. The via is then filled with a nitride fill, at least of portion of which is etched back from the top surface of the dielectric layer. A top electrode metal is then deposited at the top of the via, wherein the top electrode material is coupled to the phase change material and nitride fill material.
    Type: Application
    Filed: August 21, 2018
    Publication date: February 27, 2020
    Inventors: Injo OK, Myung-Hee Na, Nicole Saulnier, Balasubramanian Pranatharthiharan
  • Publication number: 20200066871
    Abstract: A method for forming a device structure provides for forming a fin of a semiconductor material. A first contact is formed on the fin. A second contact is formed on the fin and spaced along a length of the fin from the first contact. A self-aligned gate electrode is formed on the fin that is positioned along the length of the fin between the first contact and the second contact.
    Type: Application
    Filed: October 31, 2019
    Publication date: February 27, 2020
    Inventors: Terence P. Hook, Myung-Hee Na, Balasubramanian Pranatharthiharan, Andreas Scholze
  • Patent number: 10424576
    Abstract: A method is presented for forming a layout of a MOSFET (metal oxide semiconductor field effect transistor) circuit. The method includes forming a plurality of gate conductors, forming a plurality of active areas, and forming at least one gate contact (CB contact) within an active region of the plurality of active regions. The method further includes placing a marker over the at least one gate contact to identify a location of the at least one gate contact. Additionally, a distance between the at least one gate contact and at least one TS contact is optimized based on device specifications.
    Type: Grant
    Filed: November 3, 2017
    Date of Patent: September 24, 2019
    Assignee: International Business Machines Corporation
    Inventors: Albert M. Chu, Myung-Hee Na, Ravikumar Ramachandran
  • Patent number: 10424574
    Abstract: A method is presented for forming a layout of a MOSFET (metal oxide semiconductor field effect transistor) circuit. The method includes forming a plurality of gate conductors, forming a plurality of active areas, and forming at least one gate contact (CB contact) within an active region of the plurality of active regions. The method further includes placing a marker over the at least one gate contact to identify a location of the at least one gate contact. Additionally, a distance between the at least one gate contact and at least one TS contact is optimized based on device specifications.
    Type: Grant
    Filed: January 23, 2017
    Date of Patent: September 24, 2019
    Assignee: International Business Machines Corporation
    Inventors: Albert M. Chu, Myung-Hee Na, Ravikumar Ramachandran
  • Publication number: 20190259869
    Abstract: A method for manufacturing a semiconductor device comprises forming a plurality of fins in an active region, forming a plurality of gates around the plurality of fins in the active region, forming one or more gate contacts in the active region, and forming a plurality of contacts to source/drain regions in the active region.
    Type: Application
    Filed: April 30, 2019
    Publication date: August 22, 2019
    Inventors: Emre Alptekin, Albert M. Chu, Eric Eastman, Myung-Hee Na, Ravikumar Ramachandran
  • Patent number: 10381338
    Abstract: A technique relates to a method of optimizing self-aligned double patterning. Predefined locations for required metal cuts are provided in order to form metal wires from metal fills that have been cut. Extended locations for extended metal cuts are provided in order to cut adjacent metal fills. The adjacent metal fills are the metal fills that are adjacent to the predefined locations for the required metal cuts, and the extended metal cuts extend beyond the required metal cuts. The required metal cuts into the metal fills are performed and the extended metal cuts into the adjacent metal fills are performed.
    Type: Grant
    Filed: May 24, 2017
    Date of Patent: August 13, 2019
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Albert M. Chu, Lawrence A. Clevenger, Ximeng Guan, Myung-Hee Na
  • Patent number: 10381480
    Abstract: A method for manufacturing a semiconductor device comprises forming a plurality of fins in an active region, forming a plurality of gates around the plurality of fins in the active region, forming one or more gate contacts in the active region, and forming a plurality of contacts to source/drain regions in the active region.
    Type: Grant
    Filed: September 27, 2017
    Date of Patent: August 13, 2019
    Assignee: International Business Machines Corporation
    Inventors: Emre Alptekin, Albert M. Chu, Eric Eastman, Myung-Hee Na, Ravikumar Ramachandran
  • Patent number: 10381068
    Abstract: Ultra dense and stable 4T SRAM designs are provided. In one aspect, a 4T SRAM bitcell includes: two NFETs cross-coupled with two PFETs, wherein the NFETs are both connected directly to a word line, wherein a first one of the PFETs is connected to a first bit line via a first one of the NFETs and a second one of the PFETs is connected to a second bit line via a second one of the NFETs, and wherein the PFETs are each separately connected to ground. An SRAM device including the present 4T SRAM bitcell as well as a method of operating the SRAM device are also provided.
    Type: Grant
    Filed: December 20, 2017
    Date of Patent: August 13, 2019
    Assignee: International Business Machines Corporation
    Inventors: Myung-Hee Na, Robert Wong, Jens Haetty, Sean Burns
  • Publication number: 20190189195
    Abstract: Ultra dense and stable 4T SRAM designs are provided. In one aspect, a 4T SRAM bitcell includes: two NFETs cross-coupled with two PFETs, wherein the NFETs are both connected directly to a word line, wherein a first one of the PFETs is connected to a first bit line via a first one of the NFETs and a second one of the PFETs is connected to a second bit line via a second one of the NFETs, and wherein the PFETs are each separately connected to ground. An SRAM device including the present 4T SRAM bitcell as well as a method of operating the SRAM device are also provided.
    Type: Application
    Filed: December 20, 2017
    Publication date: June 20, 2019
    Inventors: Myung-Hee Na, Robert Wong, Jens Haetty, Sean Burns
  • Publication number: 20190097016
    Abstract: A method for manufacturing a semiconductor device comprises forming a plurality of fins in an active region, forming a plurality of gates around the plurality of fins in the active region, forming one or more gate contacts in the active region, and forming a plurality of contacts to source/drain regions in the active region.
    Type: Application
    Filed: September 27, 2017
    Publication date: March 28, 2019
    Inventors: Emre Alptekin, Albert M. Chu, Eric Eastman, Myung-Hee Na, Ravikumar Ramachandran