Patents by Inventor Myung-Hee Na
Myung-Hee Na has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20180211947Abstract: A method is presented for forming a layout of a MOSFET (metal oxide semiconductor field effect transistor) circuit. The method includes forming a plurality of gate conductors, forming a plurality of active areas, and forming at least one gate contact (CB contact) within an active region of the plurality of active regions. The method further includes placing a marker over the at least one gate contact to identify a location of the at least one gate contact. Additionally, a distance between the at least one gate contact and at least one TS contact is optimized based on device specifications.Type: ApplicationFiled: January 23, 2017Publication date: July 26, 2018Inventors: Albert M. Chu, Myung-Hee Na, Ravikumar Ramachandran
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Publication number: 20180211948Abstract: A method is presented for forming a layout of a MOSFET (metal oxide semiconductor field effect transistor) circuit. The method includes forming a plurality of gate conductors, forming a plurality of active areas, and forming at least one gate contact (CB contact) within an active region of the plurality of active regions. The method further includes placing a marker over the at least one gate contact to identify a location of the at least one gate contact. Additionally, a distance between the at least one gate contact and at least one TS contact is optimized based on device specifications.Type: ApplicationFiled: November 3, 2017Publication date: July 26, 2018Inventors: Albert M. Chu, Myung-Hee Na, Ravikumar Ramachandran
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Publication number: 20180082854Abstract: A technique relates to a method of optimizing self-aligned double patterning. Predefined locations for required metal cuts are provided in order to form metal wires from metal fills that have been cut. Extended locations for extended metal cuts are provided in order to cut adjacent metal fills. The adjacent metal fills are the metal fills that are adjacent to the predefined locations for the required metal cuts, and the extended metal cuts extend beyond the required metal cuts. The required metal cuts into the metal fills are performed and the extended metal cuts into the adjacent metal fills are performed.Type: ApplicationFiled: May 24, 2017Publication date: March 22, 2018Inventors: Albert M. Chu, Lawrence A. Clevenger, Ximeng Guan, Myung-Hee Na
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Patent number: 9735029Abstract: A technique relates to a method of optimizing self-aligned double patterning. Predefined locations for required metal cuts are provided in order to form metal wires from metal fills that have been cut. Extended locations for extended metal cuts are provided in order to cut adjacent metal fills. The adjacent metal fills are the metal fills that are adjacent to the predefined locations for the required metal cuts, and the extended metal cuts extend beyond the required metal cuts. The required metal cuts into the metal fills are performed and the extended metal cuts into the adjacent metal fills are performed.Type: GrantFiled: September 22, 2016Date of Patent: August 15, 2017Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Albert M. Chu, Lawrence A. Clevenger, Ximeng Guan, Myung-Hee Na
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Publication number: 20160372600Abstract: Device structures and fabrication methods for a fin-type field-effect transistor. A first contact, a second contact, and a gate electrode are formed on a fin comprised of a semiconductor material. The second contact is spaced along a length of the fin from the first contact. The gate electrode is positioned along the length of the fin between the first contact and the second contact.Type: ApplicationFiled: June 19, 2015Publication date: December 22, 2016Inventors: Terence B. Hook, Myung-Hee Na, Balasubramanian Pranatharthiharan, Andreas Scholze
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Patent number: 9520391Abstract: Methods form complementary metal oxide semiconductor (CMOS) devices that include a first transistor and a complementary second transistor, and an output connected to the first transistor and the second transistor. The first transistor includes a first channel region, a first back gate, a first delay element between the output and the first back gate, and a first back gate insulator separating the first back gate from the first channel region. The second transistor includes a second channel region, a second back gate, a second delay element between the output and the second back gate, and a second back gate insulator separating the second back gate from the second channel region. The first delay element, the first back gate insulator, and the first channel region form a first resistor-capacitor (RC) circuit, and the second delay element, the second back gate insulator, and the second channel region form a second RC circuit.Type: GrantFiled: January 15, 2016Date of Patent: December 13, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Brent A. Anderson, Terence B. Hook, Myung-Hee Na, Edward J. Nowak
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Patent number: 9190520Abstract: A fin structure includes an optional doped well, a disposable single crystalline semiconductor material portion, and a top semiconductor portion formed on a substrate. A disposable gate structure straddling the fin structure is formed, and end portions of the fin structure are removed to form end cavities. Doped semiconductor material portions are formed on sides of a stack of the disposable single crystalline semiconductor material portion and a channel region including the top semiconductor portion. The disposable single crystalline semiconductor material portion may be replaced with a dielectric material portion after removal of the disposable gate structure or after formation of the stack. The gate cavity is filled with a gate dielectric and a gate electrode. The channel region is stressed by the doped semiconductor material portions, and is electrically isolated from the substrate by the dielectric material portion.Type: GrantFiled: September 9, 2014Date of Patent: November 17, 2015Assignee: GLOBALFOUNDRIES INC.Inventors: Henry K. Utomo, Kangguo Cheng, Ramachandra Divakaruni, Dechao Guo, Myung-Hee Na, Ravikumar Ramachandran, Kern Rim, Huiling Shang
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Patent number: 9171935Abstract: A FinFET semiconductor device fabrication process includes forming a plurality of FinFET fins upon a semiconductor substrate, forming a first dielectric layer upon the semiconductor substrate so that an upper surface of the first dielectric layer is coplanar with upper surfaces of the FinFET fins, forming a plurality of dummy gates upon the FinFET fins and the first dielectric layer orthogonal to the FinFET fins, revealing the FinFET fins by removing first portions of the first dielectric layer from source-drain regions, removing the dummy gates, and subsequent to the removal of the dummy gates, revealing the FinFET fins by removing second portions of the first dielectric layer from channel regions.Type: GrantFiled: March 7, 2014Date of Patent: October 27, 2015Assignee: GlobalFoundries Inc.Inventors: Seong-Dong Kim, Myung-Hee Na, Jin Z. Wallner, Thomas A. Wallner, Qintao Zhang
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Publication number: 20150255569Abstract: A FinFET semiconductor device fabrication process includes forming a plurality of FinFET fins upon a semiconductor substrate, forming a first dielectric layer upon the semiconductor substrate so that an upper surface of the first dielectric layer is coplanar with upper surfaces of the FinFET fins, forming a plurality of dummy gates upon the FinFET fins and the first dielectric layer orthogonal to the FinFET fins, revealing the FinFET fins by removing first portions of the first dielectric layer from source-drain regions, removing the dummy gates, and subsequent to the removal of the dummy gates, revealing the FinFET fins by removing second portions of the first dielectric layer from channel regions.Type: ApplicationFiled: March 7, 2014Publication date: September 10, 2015Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Seong-Dong Kim, Myung-Hee Na, Jin Z. Wallner, Thomas A. Wallner, Qintao Zhang
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Patent number: 9029913Abstract: A first silicon-germanium alloy layer is formed on a semiconductor substrate including silicon. A stack of a first silicon layer and a second silicon-germanium alloy layer is formed over a first region of the first silicon-germanium alloy layer, and a second silicon layer thicker than the first silicon layer is formed over a second region of the first silicon-germanium alloy layer. At least one first semiconductor fin is formed in the first region, and at least one second semiconductor fin is formed in the second region. Remaining portions of the first silicon layer are removed to provide at least one silicon-germanium alloy fin in the first region, while at least one silicon fin is provided in the second region. Fin field effect transistors can be formed on the at least one silicon-germanium alloy fin and the at least one silicon fin.Type: GrantFiled: March 11, 2013Date of Patent: May 12, 2015Assignee: International Business Machines CorporationInventors: Henry K. Utomo, Kangguo Cheng, Ramachandra Divakaruni, Myung-Hee Na, Ravikumar Ramachandran, Huiling Shang
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Patent number: 8928086Abstract: A fin structure includes an optional doped well, a disposable single crystalline semiconductor material portion, and a top semiconductor portion formed on a substrate. A disposable gate structure straddling the fin structure is formed, and end portions of the fin structure are removed to form end cavities. Doped semiconductor material portions are formed on sides of a stack of the disposable single crystalline semiconductor material portion and a channel region including the top semiconductor portion. The disposable single crystalline semiconductor material portion may be replaced with a dielectric material portion after removal of the disposable gate structure or after formation of the stack. The gate cavity is filled with a gate dielectric and a gate electrode. The channel region is stressed by the doped semiconductor material portions, and is electrically isolated from the substrate by the dielectric material portion.Type: GrantFiled: January 9, 2013Date of Patent: January 6, 2015Assignee: International Business Machines CorporationInventors: Henry K. Utomo, Kangguo Cheng, Ramachandra Divakaruni, Dechao Guo, Myung-Hee Na, Ravikumar Ramachandran, Kern Rim, Huiling Shang
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Publication number: 20140377924Abstract: A fin structure includes an optional doped well, a disposable single crystalline semiconductor material portion, and a top semiconductor portion formed on a substrate. A disposable gate structure straddling the fin structure is formed, and end portions of the fin structure are removed to form end cavities. Doped semiconductor material portions are formed on sides of a stack of the disposable single crystalline semiconductor material portion and a channel region including the top semiconductor portion. The disposable single crystalline semiconductor material portion may be replaced with a dielectric material portion after removal of the disposable gate structure or after formation of the stack. The gate cavity is filled with a gate dielectric and a gate electrode. The channel region is stressed by the doped semiconductor material portions, and is electrically isolated from the substrate by the dielectric material portion.Type: ApplicationFiled: September 9, 2014Publication date: December 25, 2014Inventors: Henry K. Utomo, Kangguo Cheng, Ramachandra Divakaruni, Dechao Guo, Myung-Hee Na, Ravikumar Ramachandran, Kern Rim, Huiling Shang
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Publication number: 20140252413Abstract: A first silicon-germanium alloy layer is formed on a semiconductor substrate including silicon. A stack of a first silicon layer and a second silicon-germanium alloy layer is formed over a first region of the first silicon-germanium alloy layer, and a second silicon layer thicker than the first silicon layer is formed over a second region of the first silicon-germanium alloy layer. At least one first semiconductor fin is formed in the first region, and at least one second semiconductor fin is formed in the second region. Remaining portions of the first silicon layer are removed to provide at least one silicon-germanium alloy fin in the first region, while at least one silicon fin is provided in the second region. Fin field effect transistors can be formed on the at least one silicon-germanium alloy fin and the at least one silicon fin.Type: ApplicationFiled: March 11, 2013Publication date: September 11, 2014Applicant: International Business Machines CorporationInventors: Henry K. Utomo, Kangguo Cheng, Ramachandra Divakaruni, Myung-Hee Na, Ravikumar Ramachandran, Huiling Shang
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Publication number: 20140191297Abstract: A fin structure includes an optional doped well, a disposable single crystalline semiconductor material portion, and a top semiconductor portion formed on a substrate. A disposable gate structure straddling the fin structure is formed, and end portions of the fin structure are removed to form end cavities. Doped semiconductor material portions are formed on sides of a stack of the disposable single crystalline semiconductor material portion and a channel region including the top semiconductor portion. The disposable single crystalline semiconductor material portion may be replaced with a dielectric material portion after removal of the disposable gate structure or after formation of the stack. The gate cavity is filled with a gate dielectric and a gate electrode. The channel region is stressed by the doped semiconductor material portions, and is electrically isolated from the substrate by the dielectric material portion.Type: ApplicationFiled: January 9, 2013Publication date: July 10, 2014Inventors: Henry K. Utomo, Kangguo Cheng, Ramachandra Divakaruni, Dechao Guo, Myung-Hee Na, Ravikumar Ramachandran, Kern Rim, Huiling Shang
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Patent number: 8648647Abstract: A semiconductor includes: a first field-effect transistor (FET); and a second FET of similar polarity to the first FET, wherein a body of the first FET is electrically coupled to a body of the second FET, and a source of the first FET is electrically coupled to a source of the second FET, such that a body voltage of the second FET controls a body voltage of the first FET.Type: GrantFiled: June 20, 2013Date of Patent: February 11, 2014Assignee: International Business Machines CorporationInventors: Myung-Hee Na, Edward J. Nowak
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Publication number: 20130278281Abstract: A semiconductor includes: a first field-effect transistor (FET); and a second FET of similar polarity to the first FET, wherein a body of the first FET is electrically coupled to a body of the second FET, and a source of the first FET is electrically coupled to a source of the second FET, such that a body voltage of the second FET controls a body voltage of the first FET.Type: ApplicationFiled: June 20, 2013Publication date: October 24, 2013Inventors: Myung-Hee Na, Edward J. Nowak
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Patent number: 8542058Abstract: A semiconductor device includes: a first field-effect transistor (FET); and a second FET of similar polarity to the first FET, wherein a body of the first FET is electrically coupled to a body of the second FET, and a source of the first FET is electrically coupled to a source of the second FET, such that a body voltage of the second FET controls a body voltage of the first FET.Type: GrantFiled: January 3, 2011Date of Patent: September 24, 2013Assignee: International Business Machines CorporationInventors: Myung-Hee Na, Edward J. Nowak
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Patent number: 8354309Abstract: Multiple types of gate stacks are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric is formed on the doped semiconductor well. A metal gate layer is formed in one device area, while the high-k gate dielectric is exposed in other device areas. Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration.Type: GrantFiled: January 10, 2012Date of Patent: January 15, 2013Assignee: International Business Machines CorporationInventors: Brian J. Greene, Michael P. Chudzik, Shu-Jen Han, William K. Henson, Yue Liang, Edward P. Maciejewski, Myung-Hee Na, Edward J. Nowak, Xiaojun Yu
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Publication number: 20120169415Abstract: A semiconductor device is disclosed. The structure includes: a first field-effect transistor (FET); and a second FET of similar polarity to the first FET, wherein a body of the first FET is electrically coupled to a body of the second FET, and a source of the first FET is electrically coupled to a source of the second FET, such that a body voltage of the second FET controls a body voltage of the first FET.Type: ApplicationFiled: January 3, 2011Publication date: July 5, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Myung-Hee Na, Edward J. Nowak
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Publication number: 20120108017Abstract: Multiple types of gate stacks are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric is formed on the doped semiconductor well. A metal gate layer is formed in one device area, while the high-k gate dielectric is exposed in other device areas. Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration.Type: ApplicationFiled: January 10, 2012Publication date: May 3, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brian J. Greene, Michael P. Chudzik, Shu-Jen Han, William K. Henson, Yue Liang, Edward P. Maciejewski, Myung-Hee Na, Edward J. Nowak, Xiaojun Yu