Abstract: There is provided a semiconductor memory device including: a substrate having a Complementary Metal Oxide Semiconductor (CMOS) circuit; a gate stack structure including interlayer insulating layers and conductive patterns, which are alternately stacked in a vertical direction on the substrate; a channel structure having a first part penetrating the gate stack structure and a second part extending from one end of the first part, the second part extending beyond the gate stack structure; a common source line extending to overlap with the gate stack structure, the common source line surrounding the second part of the channel structure; a memory layer disposed between the first part of the channel structure and the gate stack structure; and a bit line connected to the other end of the first part of the channel structure, the bit line being disposed between the substrate and the gate stack structure.

Abstract: A semiconductor device may include a gate structure including gate lines and insulating layers that are alternately stacked; a channel structure extending through the gate structure; a dummy gate structure including stacked dummy gate lines; a dummy channel structure extending through the dummy gate structure; and an isolation insulating structure including horizontal portions stacked between the gate structure and the dummy gate structure and vertical portions extending through the horizontal portions.

Abstract: A semiconductor memory device, and a method of manufacturing the semiconductor memory device, includes a gate stack, a pass gate overlapping a contact region of the gate stack and opening a cell array region of the gate stack, a doped semiconductor layer spaced apart from the pass gate and overlapping the cell array region of the gate stack, and an active pillar passing through the pass gate.

Abstract: There are provided a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a pass gate, a plurality of active pillars respectively disposed in a plurality of active holes included in the pass gate, and a gate stack, the pass gate disposed over the gate stack in a first direction.

Abstract: A semiconductor device may include a first gate structure including first gate lines each first gate line being exposed by a first step structure extending in a first direction, a second gate structure disposed on the first gate structure to expose the first step structure and including second gate lines each second gate line being exposed by a second step structure extending in the first direction, a channel structure extending through the first gate structure and the second gate structure, the channel structure having a first width, a first support extending through the first step structure, the first support having a second width that is greater than the first width, and a second support extending through the second step structure and the first gate structure, the second support having a third width that is greater than the first width.

Abstract: A memory chip includes a plurality of micro pattern lines, a capping layer covering portions of the micro pattern lines. A bonding pad penetrates the capping layer and is coupled to one of the micro pattern lines. The bonding pad includes a first pad portion coupled to the associated micro pattern line and a second pad portion coupled to the first pad portion and exposed to a top surface of the memory chip. An upper surface of the second pad portion has a convex shape.

Abstract: There are provided a semiconductor memory device and a manufacturing method of the semiconductor memory device. The semiconductor memory device includes: a channel structure including a first pillar part and a second pillar part extending from the first pillar part; a blocking insulating layer surrounding a sidewall of the first pillar part; a data storage layer disposed between the first pillar part and the blocking insulating layer; an upper select line overlapping with an end portion of the blocking insulating layer and an end portion of the data storage layer, which face in an extending direction of the second pillar part, the upper select line surrounding a sidewall of the second pillar part; and a tunnel insulating layer disposed between the first pillar part and the data storage layer, the tunnel insulating layer extending between the second pillar part and the upper select line.

Abstract: Provided herein may be a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a stacked body including interlayer insulating layers and a select line disposed between the interlayer insulating layers, a core insulating layer penetrating the stacked body, a semiconductor pattern extending along a sidewall of the core insulating layer and including an undoped area disposed between the select line and the core insulating layer, doped semiconductor patterns disposed between the semiconductor pattern and the interlayer insulating layers, and a gate insulating layer disposed between the semiconductor pattern and the select line.

Abstract: A semiconductor device may include a first cell structure, a second cell structure, a pad structure, a circuit, and one or more openings. The pad structure may be disposed between the first cell structure and the second cell structure, and may be electrically coupled to the first and second cell structures. The pad structure may have a plurality of stepped structures. The circuit may be disposed under the pad structure. The one or more openings may pass through the pad structure, and may expose the circuit. The one or more openings may be disposed between the plurality of stepped structures.

Abstract: A memory device, and a method of manufacturing the memory device, includes first and second vertical structures spaced apart from each other and a connection structure contacting bottoms of the first and second vertical structures. The memory device also includes a first gate layer disposed between the first and second vertical structures and a second gate layer enclosing the first and second vertical structures and the connection structure. The memory device further includes a global line disposed on the first vertical structure and a local line disposed on the second vertical structure.

Abstract: A method of manufacturing a semiconductor device according to an embodiment of the present disclosure may include forming a first sacrificial layer including a first portion and a second portion having a thickness thicker than a thickness of the first portion, forming a stack including first material layers and second material layers alternating with each other on the first sacrificial layer, forming a channel structure passing through the stack and extending to the first portion, forming a slit passing through the stack and extending to the second portion, removing the first sacrificial layer through the slit to form a first opening, and forming a second source layer connected to the channel structure in the first opening.

Abstract: A memory device, and a method of manufacturing the same, includes cell plugs in addition to an insulating pattern provided on the cell plugs, the insulating pattern including openings corresponding to the cell plugs, respectively. The memory device also includes bit lines provided on the insulating pattern and bit line contacts provided in the openings to couple the cell plugs and the bit lines, respectively. The memory device further includes first air gaps provided between the bit lines. The memory device additionally includes second air gaps extending from the first air gaps and enclosed by the bit line contacts and the insulating pattern.

Abstract: A semiconductor memory device, and a method of manufacturing a semiconductor memory device, includes a stacked structure including a plurality of conductive layers for local lines stacked on a semiconductor substrate defined by a cell region and a slimming region to be spaced apart from each other, wherein the plurality of conductive layers for local lines are stacked in a step structure in the slimming region. The semiconductor memory device also includes a plurality of contact plugs formed to penetrate the stack structure in the slimming region, the plurality of contact plugs corresponding to each of the conductive layers for local lines. Each of the plurality of contact plugs includes a protrusion part protruding horizontally, and the protrusion part is connected to a corresponding conductive layer for local lines among the plurality of conductive layers for local lines.

Abstract: Provided herein may be a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a substrate with a complementary metal oxide semiconductor (CMOS) circuit; a gate stacked body with interlayer insulating layers and conductive patterns that are alternately stacked on the substrate in a vertical direction; a plurality of channel structures passing through the gate stacked body, each with a first end that protrudes above the gate stacked body; and a plurality of conductive layers disposed over the gate stacked body. Each of the plurality of conductive layers is in contact with the first end of at least one of the plurality of channel structures.

Abstract: There are provided a semiconductor memory device and a method of manufacturing a semiconductor memory device. The semiconductor memory device includes a conductive pattern, an etch stop layer on the conductive pattern, a conductive bonding pattern including a contact portion connected to the conductive pattern, and a pad portion extending from the contact portion, a first dielectric layer disposed on the etch stop layer and spaced apart from the conductive bonding pattern, and a second dielectric layer including a first portion surrounding a sidewall of the contact portion of the conductive bonding pattern between the pad portion of the conductive bonding pattern and the etch stop layer, and a second portion extending from the first portion to cover an upper surface of the first dielectric layer.

Abstract: A semiconductor device includes: a substrate extending in a first direction and a second direction intersecting with the first direction; a plurality of input/output pads disposed at one side of the substrate; a first circuit adjacent to the input/output pads in the first direction; a second circuit disposed to be spaced farther apart from the input/output pads in the first direction than the first circuit; a first memory cell array overlapping the first circuit; a second memory cell array overlapping the second circuit; first metal source patterns overlapping the first memory cell array and being spaced apart from each other in the second direction; and a second metal source pattern overlapping the second memory cell array and formed to have a width wider than a width of each of the first metal source patterns in the second direction.

Abstract: There are provided a semiconductor memory device and a manufacturing method of the semiconductor memory device. A semiconductor memory device includes a lower stack structure on the substrate and including a plurality of lower layers stacked in a vertical direction, an intermediate stack structure on the lower stack structure and including a plurality of intermediate layers stacked in the vertical direction, a plurality of grooves in the contact region and penetrating the intermediate stack structure, the plurality of grooves exposing the lower stack structure at different depths, and a plurality of steps formed along sidewalls of the grooves.

Abstract: The present disclosure relates to a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a word line, a first select line on the word line, a second select line on the first select line, a first upper contact extending to be in contact with a first surface of the first select line, and a second upper contact extending through the second select line to be in contact with a second surface of the first select line, wherein the first surface and the second surface of the first select line are on opposites sides of each other.

Abstract: There are provided a semiconductor memory device and a manufacturing method of the semiconductor including: a plurality of source channels penetrating a source select line; a gate stack structure overlapping with the source select line; a connection pattern disposed between the source select line and the gate stack structure, the connection pattern being commonly connected to the plurality of source channels; and a plurality of vertical channels penetrating the gate stack structure, the plurality of vertical channels being commonly connected to the connection pattern.

Abstract: A semiconductor device may include: a first gate structure including first gate lines, a first step structure including first pads, a first gap-fill insulating layer located between the first gate lines and the first step structure, and first wiring lines connecting the first gate lines and the first pads, respectively; and a second gate structure including second gate lines located on the first gate lines, a second step structure located on the first gap-fill insulating layer and including second pads, a second gap-fill insulating layer located on the first step structure, and second wiring lines connecting the second gate lines and the second pads, respectively.