Abstract: The present disclosure includes a semiconductor device and a method of manufacturing the same. The semiconductor device includes a substrate including a first area and a second area, a vertical insulating film passing through the substrate between the first area of the substrate and the second area of the substrate, an interlayer insulating structure disposed on the substrate, and a conductive pad formed on the interlayer insulating structure and overlapping the first area of the substrate. The semiconductor device also includes a through electrode passing through the conductive pad, the interlayer insulating structure, and the substrate in the first area.

Abstract: A semiconductor device includes: a substrate extending in a first direction and a second direction intersecting with the first direction; a plurality of input/output pads disposed at one side of the substrate; a first circuit adjacent to the input/output pads in the first direction; a second circuit disposed to be spaced farther apart from the input/output pads in the first direction than the first circuit; a first memory cell array overlapping the first circuit; a second memory cell array overlapping the second circuit; first metal source patterns overlapping the first memory cell array and being spaced apart from each other in the second direction; and a second metal source pattern overlapping the second memory cell array and formed to have a width wider than a width of each of the first metal source patterns in the second direction.

Abstract: A stack package includes first and second sub-chip stacks stacked on a package substrate and bonding wires. The first sub-chip stack includes first and second sub-chips. The first sub-chip has a first surface on which a first common pad is disposed. The second sub-chip has a third surface on which a second common pad is disposed. The third surface is bonded to the first surface such that the second common pad is bonded to the first common pad. The second sub-chip includes a fourth surface opposite to the second common pad and a through hole extending from the fourth surface to reveal the second common pad. The bonding wire is connected to the second common pad via the through hole and electrically connects both of the first and second common pads to the package substrate.

Abstract: The present disclosure relates to a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a word line, a first select line on the word line, a second select line on the first select line, a first upper contact extending to be in contact with a first surface of the first select line, and a second upper contact extending through the second select line to be in contact with a second surface of the first select line, wherein the first surface and the second surface of the first select line are on opposites sides of each other.

Abstract: There are provided a semiconductor memory device and a method of manufacturing a semiconductor memory device. The semiconductor memory device includes a conductive pattern, an etch stop layer on the conductive pattern, a conductive bonding pattern including a contact portion connected to the conductive pattern, and a pad portion extending from the contact portion, a first dielectric layer disposed on the etch stop layer and spaced apart from the conductive bonding pattern, and a second dielectric layer including a first portion surrounding a sidewall of the contact portion of the conductive bonding pattern between the pad portion of the conductive bonding pattern and the etch stop layer, and a second portion extending from the first portion to cover an upper surface of the first dielectric layer.

Abstract: There are provided a semiconductor memory device and a manufacturing method of the same. The semiconductor memory device includes: a peripheral circuit structure with a page buffer group; a net-shaped first source pattern disposed on the peripheral circuit structure, the net-shaped first source pattern with a plurality of openings; a memory cell array disposed on the net-shaped first source pattern; a second source pattern disposed between the net-shaped first source pattern and the memory cell array; and a cell-array-side pad pattern, disposed between the net-shaped first source pattern and the second source pattern, extending toward the net-shaped first source pattern from the second source pattern, the cell-array-side pad pattern being bonded directly to the net-shaped first source pattern.

Abstract: A semiconductor device includes: conductive layers and interlayer insulating layers, which are alternately stacked; a select conductor spaced apart from the conductive layers; cell plugs penetrating the conductive layers, the interlayer insulating layers, and the select conductor; and an auxiliary conductor in contact with the select conductor.

Abstract: A semiconductor memory device, and a method of manufacturing the same, includes: a gate stack structure including interlayer insulating layers and conductive patterns stacked in a first direction; a channel structure penetrating the gate stack structure; a peripheral contact plug spaced apart from the gate stack structure on a plane intersecting the channel structure, the peripheral contact plug extending in the first direction; and a capacitor spaced apart from the gate stack structure and the peripheral contact plug on the plane, the capacitor having an area wider than an area of the peripheral contact plug.

Abstract: The present disclosure relates to a semiconductor memory device and a manufacturing method of the semiconductor memory device. A semiconductor memory device includes a gate stacked structure, a channel layer passing through the gate stacked structure in a vertical direction, a memory layer disposed between the channel layer and the gate stacked structure, a dummy stacked structure extended toward the gate stacked structure, a first dummy pattern passing through the dummy stacked structure in the vertical direction, and a gap arranged in the first dummy pattern.

Abstract: Provided is a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a first circuit structure, a first conductive line connected to the first circuit structure, a second conductive line facing the first conductive line, and a second circuit structure overlapping with the first circuit structure with the first and second conductive lines interposed therebetween, the second circuit structure being connected to the second conductive line. One of the first conductive line and the second conductive line has a region protruding toward the other of the first conductive line and the second conductive line.

Abstract: A semiconductor memory device and a manufacturing method of a semiconductor memory device are described. The semiconductor memory device includes a gate stack structure including interlayer insulating layers and conductive patterns, which are alternately stacked, a first channel structure penetrating the gate stack structure, a first contact structure connected to the first channel structure, the first contact structure extending onto the gate stack structure, a bit line disposed on the first contact structure and being in contact with the first contact structure, a tunnel insulating layer disposed between the first channel structure and the gate stack structure, a data storage layer disposed between the tunnel insulating layer and the gate stack structure, and a blocking insulating layer disposed between the data storage layer and the gate stack structure, the blocking insulating layer extending between the first contact structure and the gate stack structure.

Abstract: Provided herein may be a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes a source structure, a stacked conductive layer that overlaps with the source structure, a first select conductive layer and a second select conductive layer disposed between the source structure and the stacked conductive layer, a stacked insulating layer disposed between the first and second select conductive layers and the stacked conductive layer, and a separation insulating structure provided between the first select conductive layer and the second select conductive layer.

Abstract: The present disclosure includes a semiconductor device and a method of manufacturing the same. The semiconductor device includes a substrate including a first area and a second area, a vertical insulating film passing through the substrate between the first area of the substrate and the second area of the substrate, an interlayer insulating structure disposed on the substrate, and a conductive pad formed on the interlayer insulating structure and overlapping the first area of the substrate. The semiconductor device &so includes a through electrode passing through the conductive pad, the interlayer insulating structure, and the substrate in the first area.

Abstract: A semiconductor device and a method of manufacturing a semiconductor device may be provided. The semiconductor device may include first and second vertical conductive patterns isolated from each other by a first slit. The semiconductor device may include at least one first half conductive pattern extending toward a first region disposed at one side of the first slit from the first vertical conductive pattern. The semiconductor device may include at least one second half conductive pattern extending toward a second region disposed at the other side of the first slit from the second vertical conductive pattern.

Abstract: A semiconductor device includes a stacked body including a conductive pattern and an insulating pattern, a cell plug passing through the stacked body, a semiconductor layer, a peripheral transistor arranged on the semiconductor layer, a first conductor coupling the peripheral transistor to the cell plug, a second conductor coupled to the conductive pattern, a pass plug coupled to the second conductor, and a pass gate surrounding the pass plug, wherein the pass gate is arranged at substantially a same level as the semiconductor layer.

Abstract: A memory device and a method of manufacturing the memory device includes a stacked structure having a cell region and a slimming region therein and formed by alternately stacking insulating layers and conductive layers, vertical channel structures formed to pass through the stacked structure in the cell region, support structures formed to pass through the stacked structure in the slimming region, and having different heights depending on a stacked height of the slimming region, each of the support structures having the vertical channel structure, an etching prevention layer formed over the stacked structure and including carbon, and contact plugs formed to pass through the etching prevention layer and coupled to the conductive layers.

Abstract: A semiconductor device includes a first insulating layer, a first bonding pad in the first insulating layer, a second insulating layer in contact with the first insulating layer, and a second bonding pad in the second insulating layer. The first bonding pad includes a first conductive layer and a first barrier layer surrounding the first conductive layer, and the second bonding pad includes a second conductive layer and a second barrier layer surrounding the second conductive layer. The second barrier layer is in contact with the first conductive layer. The second conductive layer is spaced apart from the first conductive layer. The first conductive layer includes a metal material which is different from a metal material included in the second conductive layer. The first and second barrier layers each include at least one of titanium and tantalum.

Abstract: A semiconductor device includes a first insulating layer, wire contacts spaced apart from each other by the first insulating layer, and a bonding wire connected to the wire contacts. Each of the wire contacts includes a base part in the first insulating layer and a protrusion part protruding from inside to outside the first insulating layer. The protrusion parts of the wire contacts are in contact with the bonding wire.

Abstract: There are provided a semiconductor memory device and a manufacturing method of the semiconductor memory device. The semiconductor memory device includes: a channel structure including a first pillar part and a second pillar part extending from the first pillar part; a blocking insulating layer surrounding a sidewall of the first pillar part; a data storage layer disposed between the first pillar part and the blocking insulating layer; an upper select line overlapping with an end portion of the blocking insulating layer and an end of the data storage layer, which face in an extending direction of the second pillar part, the upper select line surrounding a sidewall of the second pillar part; and a tunnel insulating layer disposed between the first pillar part and the data storage layer, the tunnel insulating layer extending between the second pillar part and the upper select line.

Abstract: A semiconductor device according to an embodiment of the present disclosure may include: a stack structure including a plurality of first conductive patterns and a plurality of dielectric layers, which are alternately stacked, the stack structure having a stepped structure such that any one of the first conductive patterns further protrudes than the first conductive pattern positioned immediately above it; a plurality of second conductive patterns which are respectively formed over protrusions of the first conductive patterns; a plurality of contact plugs which overlap the plurality of second conductive patterns, respectively, and pass through the overlapping second conductive patterns and the stack structure; and a sealing layer pattern which is interposed between the first conductive patterns and the contact plugs and separates the first conductive patterns from the contact plugs.