Patents by Inventor Naoharu Sugiyama

Naoharu Sugiyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120292649
    Abstract: According to one embodiment, a semiconductor light emitting device includes a first semiconductor layer, a light emitting layer, a second semiconductor layer, and a low refractive index layer. The first semiconductor layer has a first major surface and a second major surface being opposite to the first major surface. The light emitting layer has an active layer provided on the second major surface. The second semiconductor layer is provided on the light emitting layer. The low refractive index layer covers partially the first major surface and has a refractive index lower than the refractive index of the first semiconductor layer.
    Type: Application
    Filed: August 29, 2011
    Publication date: November 22, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Naoharu Sugiyama, Taisuke Sato, Hiroshi Ono, Satoshi Mitsugi, Tomonari Shioda, Jongil Hwang, Hung Hung, Shinya Nunoue
  • Publication number: 20120292632
    Abstract: According to one embodiment, a nitride semiconductor device includes a foundation layer and a functional layer. The foundation layer is formed on an Al-containing nitride semiconductor layer formed on a silicon substrate. The foundation layer has a thickness not less than 1 micrometer and including GaN. The functional layer is provided on the foundation layer. The functional layer includes a first semiconductor layer. The first semiconductor layer has an impurity concentration higher than an impurity concentration in the foundation layer and includes GaN of a first conductivity type.
    Type: Application
    Filed: August 31, 2011
    Publication date: November 22, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Tomonari SHIODA, Hung Hung, Jongil Hwang, Taisuke Sato, Naoharu Sugiyama, Shinya Nunoue
  • Publication number: 20120295377
    Abstract: According to one embodiment, a method is disclosed for manufacturing a nitride semiconductor device. The method can include removing a growth substrate from a structure body by using a first treatment material. The structure body has the growth substrate, a buffer layer formed on the growth substrate, and the nitride semiconductor layer formed on the buffer layer. A support substrate is bonded to the nitride semiconductor layer. The method can include reducing thicknesses of the buffer layer and the nitride semiconductor layer by using a second treatment material different from the first treatment material after removing the growth substrate.
    Type: Application
    Filed: August 31, 2011
    Publication date: November 22, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Taisuke SATO, Naoharu SUGIYAMA, Tomonari SHIODA, Toshiki HIKOSAKA, Shinya NUNOUE
  • Publication number: 20120292592
    Abstract: According to one embodiment, a semiconductor light emitting device includes: first and second semiconductor layers, a light emitting part, and an In-containing layer. The first semiconductor layer is formed on a silicon substrate via a foundation layer. The light emitting part is provided on the first semiconductor layer, and includes barrier layers and a well layer provided between the barrier layers including Ga1-z1Inz1N (0<z1?1). The second semiconductor layer is provided on the light emitting part. The In-containing layer is provided at at least one of first and second positions. The first position is between the first semiconductor layer and the light emitting part. The second position is between the second semiconductor layer and the light emitting part. The In-containing layer includes In with a composition ratio different from the In composition ratio z1 and has a thickness 10 nm to 1000 nm.
    Type: Application
    Filed: August 26, 2011
    Publication date: November 22, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Jongil HWANG, Tomonari Shioda, Hung Hung, Naoharu Sugiyama, Shinya Nunoue
  • Publication number: 20120223323
    Abstract: According to one embodiment, a wafer includes a substrate, a base layer, a foundation layer, an intermediate layer and a functional unit. The substrate has a major surface. The base layer is provided on the major surface and includes a silicon compound. The foundation layer is provided on the base layer and includes GaN. The intermediate layer is provided on the foundation layer and includes a layer including AlN. The functional unit is provided on the intermediate layer and includes a nitride semiconductor. The foundation layer has a first region on a side of the base layer, and a second region on a side of the intermediate layer. A concentration of silicon atoms in the first region is higher than a concentration of silicon atoms in the second region. The foundation layer has a plurality of voids provided in the first region.
    Type: Application
    Filed: August 22, 2011
    Publication date: September 6, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tomonari SHIODA, Naoharu Sugiyama, Shinya Nunoue
  • Publication number: 20120217471
    Abstract: According to one embodiment, a semiconductor light emitting device includes an n-type semiconductor layer, a p-type semiconductor layer, and a light emitting part. The n-type semiconductor layer includes a nitride semiconductor. The p-type semiconductor layer includes a nitride semiconductor. The light emitting part is provided between the n-type and the p-type semiconductor layers and includes an n-side barrier layer and a first light emitting layer. The first light emitting layer includes a first barrier layer, a first well layer, and a first AlGaN layer. The first barrier layer is provided between the n-side barrier layer and the p-type semiconductor layer. The first well layer contacts the n-side barrier layer between the n-side and the first barrier layer. The first AlGaN layer is provided between the first well layer and the first barrier layer. A peak wavelength ?p of light emitted from the light emitting part is longer than 515 nanometers.
    Type: Application
    Filed: August 19, 2011
    Publication date: August 30, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tomonari SHIODA, Hisashi YOSHIDA, Naoharu SUGIYAMA, Shinya NUNOUE
  • Publication number: 20120146045
    Abstract: According to one embodiment, a semiconductor light emitting device includes a light emitting layer, a light transmitting layer and a first semiconductor layer. The light transmitting layer is transmittable with respect to light emitted from the light emitting layer. The first semiconductor layer contacts the light transmitting layer between the light emitting layer and the light transmitting layer. The light transmitting layer has a thermal expansion coefficient larger than a thermal expansion coefficient of the light transmitting layer, has a lattice constant smaller than a lattice constant of the active layer, and has a tensile stress in an in-plane direction.
    Type: Application
    Filed: August 18, 2011
    Publication date: June 14, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Naoharu SUGIYAMA, Tomonari SHIODA, Hisashi YOSHIDA, Shinya NUNOUE
  • Publication number: 20120138890
    Abstract: According to one embodiment, a semiconductor light emitting device includes an n-type semiconductor layer, a p-type semiconductor layer and a light emitting part. The light emitting part is provided between the n-type semiconductor layer and the p-type semiconductor layer and includes a first light emitting layer. The first light emitting layer includes a first barrier layer, a first well layer, a first n-side intermediate layer and a first p-side intermediate layer. The barrier layer, the well layer, the n-side layer and the p-side intermediate layer include a nitride semiconductor. An In composition ratio in the n-side layer decreases along a first direction from the n-type layer toward the p-type layer. An In composition ratio in the p-side layer decreases along the first direction. An average change rate of the In ratio in the p-side layer is lower than an average change rate of the In ratio in the n-side layer.
    Type: Application
    Filed: August 19, 2011
    Publication date: June 7, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tomonari SHIODA, Toshiki Hikosaka, Yoshiyuki Harada, Naoharu Sugiyama, Shinya Nunoue
  • Publication number: 20120132940
    Abstract: According to one embodiment, an optical semiconductor device includes an n-type semiconductor layer, a p-type semiconductor layer, and a functional part. The functional part is provided between the n-type semiconductor layer and the p-type semiconductor layers. The functional part includes a plurality of active layers stacked in a direction from the n-type semiconductor layer toward the p-type semiconductor layer. At least two of the active layers include a multilayer stacked body, an n-side barrier layer, a well layer and a p-side barrier layer. The multilayer stacked body includes a plurality of thick film layers and a plurality of thin film layers alternately stacked in the direction. The n-side barrier layer is provided between the multilayer stacked body and the p-type layer. The well layer is provided between the n-side barrier layer and the p-type layer. The p-side barrier layer is provided between the well layer and the p-type layer.
    Type: Application
    Filed: August 22, 2011
    Publication date: May 31, 2012
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Tomonari Shioda, Hisashi Yoshida, Koichi Tachibana, Naoharu Sugiyama, Shinya Nunoue
  • Patent number: 8174095
    Abstract: A semiconductor device includes an insulator layer, and an n-channel MIS transistor having an n channel and a pMIS transistor having a p channel which are formed on the insulator layer, wherein the n channel of the n-channel MIS transistor is formed of an Si layer having a uniaxial tensile strain in a channel length direction, the p channel of the p-channel MIS transistor is formed of an SiGe or Ge layer having a uniaxial compressive strain in the channel length direction, and the channel length direction of each of the n-channel MIS transistor and the p-channel MIS transistor is a <110> direction.
    Type: Grant
    Filed: February 28, 2011
    Date of Patent: May 8, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toshifumi Irisawa, Shinichi Takagi, Naoharu Sugiyama
  • Publication number: 20120058626
    Abstract: According to one embodiment, a method is disclosed for manufacturing a nitride semiconductor crystal layer. The method can include forming the nitride semiconductor crystal layer having a first thickness on a silicon crystal layer. The silicon crystal layer is provided on a base body. The silicon crystal layer has a second thickness before the forming the nitride semiconductor crystal layer. The second thickness is thinner than the first thickness. The forming the nitride semiconductor crystal layer includes making at least a portion of the silicon crystal layer incorporated into the nitride semiconductor crystal layer to reduce a thickness of the silicon crystal layer from the second thickness.
    Type: Application
    Filed: March 1, 2011
    Publication date: March 8, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Naoharu SUGIYAMA, Tomonari Shioda, Shinya Nunoue
  • Patent number: 8093083
    Abstract: In one embodiment, a method is disclosed for manufacturing a semiconductor light emitting device. The device includes a crystal layer including a nitride semiconductor. The crystal layer contains In and Ga atoms. The method can include forming the crystal layer by supplying a source gas including a first molecule including Ga atoms and a second molecule including In atoms onto a base body. The crystal layer has a ratio xs of a number of the In atoms to a total of the In atoms and the Ga atoms being not less than 0.2 and not more than 0.4. A vapor phase supply ratio xv of In is a ratio of a second partial pressure to a total of first and second partial pressures. The first and second partial pressures are pressure of the first and second molecules and degradation species of the first and second molecules on the source gas, respectively. (1?1/xv)/(1?1/xs) is less than 0.1.
    Type: Grant
    Filed: February 17, 2011
    Date of Patent: January 10, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toshiki Hikosaka, Tomonari Shioda, Yoshiyuki Harada, Naoharu Sugiyama, Koichi Tachibana, Shinya Nunoue
  • Patent number: 8008751
    Abstract: A semiconductor device includes an insulator layer, and an n-channel MIS transistor having an n channel and a pMIS transistor having a p channel which are formed on the insulator layer, wherein the n channel of the n-channel MIS transistor is formed of an Si layer having a uniaxial tensile strain in a channel length direction, the p channel of the p-channel MIS transistor is formed of an SiGe or Ge layer having a uniaxial compressive strain in the channel length direction, and the channel length direction of each of the n-channel MIS transistor and the p-channel MIS transistor is a <110> direction.
    Type: Grant
    Filed: December 5, 2007
    Date of Patent: August 30, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toshifumi Irisawa, Shinichi Takagi, Naoharu Sugiyama
  • Publication number: 20110147805
    Abstract: A semiconductor device includes an insulator layer, and an n-channel MIS transistor having an n channel and a pMIS transistor having a p channel which are formed on the insulator layer, wherein the n channel of the n-channel MIS transistor is formed of an Si layer having a uniaxial tensile strain in a channel length direction, the p channel of the p-channel MIS transistor is formed of an SiGe or Ge layer having a uniaxial compressive strain in the channel length direction, and the channel length direction of each of the n-channel MIS transistor and the p-channel MIS transistor is a <110> direction.
    Type: Application
    Filed: February 28, 2011
    Publication date: June 23, 2011
    Inventors: Toshifumi Irisawa, Shinichi Takagi, Naoharu Sugiyama
  • Patent number: 7842982
    Abstract: A semiconductor device includes a semiconductor substrate having, on a surface thereof, a (110) surface of Si1-xGex (0.25?x?0.90), and n-channel and p-channel MISFETs formed on the (110) surface, each MISFET having a source region, a channel region and a drain region. Each MISFET has a linear active region which is longer in a [?110] direction than in a [001] direction and which has a facet of a (311) or (111) surface, the source region, the channel region and the drain region are formed in this order or in reverse order in the [?110] direction of the linear active region, the channel region of the n-channel MISFET is formed of Si and having uniaxial tensile strain in the [?110] direction, and the channel region of the p-channel MISFET being formed of Si1-yGey (x<y?1) and having uniaxial compressive strain in the [?110] direction.
    Type: Grant
    Filed: January 28, 2009
    Date of Patent: November 30, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yoshihiko Moriyama, Naoharu Sugiyama
  • Patent number: 7759228
    Abstract: A method of manufacturing a semiconductor device. In the method, a substrate is prepared, which includes a buried oxide film and a SiGe layer formed on the buried oxide film. Then, heat treatment is performed on the substrate at a temperature equal to or lower than a first temperature, to form a protective oxide film on a surface of the SiGe layer. Next, the substrate having the protective oxide film is heated in a non-oxidizing atmosphere to a second temperature higher than the first temperature. Further, heat treatment is performed on the substrate thus heated, in an oxidizing atmosphere at a temperature equal to or higher than the second temperature, to form oxide the SiGe layer, make the SiGe layer thinner and increasing Ge concentration in the SiGe layer, thus forming a SiGe layer having the increased Ge concentration.
    Type: Grant
    Filed: June 9, 2006
    Date of Patent: July 20, 2010
    Assignees: Kabushiki Kaisha Toshiba, Oki Electric Industry Co., Ltd.
    Inventors: Naoharu Sugiyama, Norio Hirashita, Tsutomu Tezuka
  • Patent number: 7629658
    Abstract: A vertical spin transistor according to an embodiment of the present invention includes: a first source/drain layer including a layer formed of magnetic material; a protruding structure including, a channel layer formed on the first source/drain layer and including a layer formed of semiconductor, and a second source/drain layer formed on the channel layer and including a layer formed of magnetic material; a gate insulating film formed on a side of the channel layer; and a gate electrode formed on a surface of the gate insulating film.
    Type: Grant
    Filed: September 14, 2007
    Date of Patent: December 8, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Naoharu Sugiyama, Yoshiaki Saito
  • Patent number: 7622773
    Abstract: In a semiconductor device including a multi-gate MIS transistor having a channel on a plurality of surfaces, a gate electrode is formed on a gate insulating film on side surfaces of an island-like semiconductor layer formed along a given direction on an insulating film, and source/drain electrodes are formed in contact with the semiconductor layer. The semiconductor layer has a plurality of side surfaces along the given direction. All angles formed by adjacent side surfaces are larger than 90°. A section perpendicular to the given direction is vertically and horizontally symmetrical.
    Type: Grant
    Filed: February 13, 2007
    Date of Patent: November 24, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toshifumi Irisawa, Toshinori Numata, Shinichi Takagi, Naoharu Sugiyama
  • Patent number: 7619239
    Abstract: A semiconductor device includes an n-channel MIS transistor and a p-channel MIS transistor on a semiconductor layer formed on an insulating layer, in which the channel of the n-channel MIS transistor is formed of a strained Si layer having biaxial tensile strain and the channel of the p-channel MIS transistor is formed of a strained SiGe layer having uniaxial compression strain in the channel length direction.
    Type: Grant
    Filed: May 22, 2006
    Date of Patent: November 17, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toshifumi Irisawa, Toshinori Numata, Tsutomu Tezuka, Naoharu Sugiyama, Shinichi Takagi
  • Publication number: 20090189199
    Abstract: A semiconductor device includes a semiconductor substrate having, on a surface thereof, a (110) surface of Si1-xGex (0.25?x?0.90), and n-channel and p-channel MISFETs formed on the (110) surface, each MISFET having a source region, a channel region and a drain region. Each MISFET has a linear active region which is longer in a [?110] direction than in a [001] direction and which has a facet of a (311) or (111) surface, the source region, the channel region and the drain region are formed in this order or in reverse order in the [?110] direction of the linear active region, the channel region of the n-channel MISFET is formed of Si and having uniaxial tensile strain in the [?110] direction, and the channel region of the p-channel MISFET being formed of Si1-yGey (x<y?1) and having uniaxial compressive strain in the [?110] direction.
    Type: Application
    Filed: January 28, 2009
    Publication date: July 30, 2009
    Inventors: Yoshihiko MORIYAMA, Naoharu SUGIYAMA