Patents by Inventor Naoki Yasuda

Naoki Yasuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20180254279
    Abstract: According to one embodiment, a semiconductor memory device includes a stacked body including a plurality of electrode members and a plurality of insulating members, each of the electrode members and each of the insulating members being stacked alternately in a first direction on the substrate. The semiconductor memory device also includes a memory hole that extends in the stacked body in the first direction and a semiconductor member that is disposed to extend in the memory hole in the first direction. The semiconductor memory device also includes a memory member that is disposed between the semiconductor member and the plurality of electrode members. The plurality of electrode members including a first electrode member and a second electrode member, a thickness of the memory member at the position of the first electrode member being greater than a thickness of the memory member at the position of the second electrode member.
    Type: Application
    Filed: May 1, 2018
    Publication date: September 6, 2018
    Applicant: Toshiba Memory Corporation
    Inventor: Naoki Yasuda
  • Publication number: 20180175048
    Abstract: A nonvolatile semiconductor storage device having a control gate formed on a semiconductor substrate and including a cylindrical through hole. A block insulating film, a charge storage film, a tunnel insulating film, and a semiconductor layer are formed on a side surface of the control gate inside the through hole. The tunnel insulating film includes a first insulating film having SiO2 as a base material and containing an element that lowers a band gap of the base material by being added. A density and a density gradient of the element monotonously increase from the semiconductor layer toward the charge storage film.
    Type: Application
    Filed: January 30, 2018
    Publication date: June 21, 2018
    Applicant: Toshiba Memory Corporation
    Inventors: Naoki YASUDA, Masaru KITO
  • Patent number: 9991274
    Abstract: According to one embodiment, a semiconductor memory device includes a stacked body including a plurality of electrode members and a plurality of insulating members, each of the electrode members and each of the insulating members being stacked alternately in a first direction on the substrate. The semiconductor memory device also includes a memory hole that extends in the stacked body in the first direction and a semiconductor member that is disposed to extend in the memory hole in the first direction. The semiconductor memory device also includes a memory member that is disposed between the semiconductor member and the plurality of electrode members. The plurality of electrode members including a first electrode member and a second electrode member, a thickness of the memory member at the position of the first electrode member being greater than a thickness of the memory member at the position of the second electrode member.
    Type: Grant
    Filed: November 4, 2016
    Date of Patent: June 5, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Naoki Yasuda
  • Publication number: 20180138190
    Abstract: A semiconductor memory device includes a plurality of electrode layers stacked in a first direction; a semiconductor layer of a columnar shape extending through the electrode layers in the first direction; and a plurality of floating gates provided between the electrode layers and the semiconductor layer respectively. The floating gates surround the semiconductor layer. A gate length in a first direction of a floating gate positioned between one of the electrode layers and the semiconductor layer is longer than a layer thickness in the first direction of the one of the electrode layers. A ratio of the layer thickness of the one of the electrode layers to the gate length has a positive correlation with an outer diameter of a first portion of the semiconductor layer surrounded by the floating gate in a second direction from the semiconductor layer toward the one of the electrode layers.
    Type: Application
    Filed: December 26, 2017
    Publication date: May 17, 2018
    Applicant: TOSHIBA MEMORY CORPORATION
    Inventor: Naoki YASUDA
  • Patent number: 9953996
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, and a charge storage film. The stacked body is provided on the substrate. The stacked body includes a plurality of first insulating films and a plurality of electrode films alternately stacked one layer by one layer. The semiconductor pillar is provided inside the stacked body and extends in a stacking direction of the stacked body. The charge storage film is provided between the semiconductor pillar and each of the electrode films. The plurality of first insulating films include a first portion surrounding the semiconductor pillar and a second portion provided between the first portion and the semiconductor pillar, the second portion having a dielectric constant higher than a dielectric constant of the first portion.
    Type: Grant
    Filed: July 26, 2016
    Date of Patent: April 24, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Naoki Yasuda
  • Patent number: 9917095
    Abstract: A nonvolatile semiconductor storage device having a control gate formed on a semiconductor substrate and including a cylindrical through hole. A block insulating film, a charge storage film, a tunnel insulating film, and a semiconductor layer are formed on a side surface of the control gate inside the through hole. The tunnel insulating film includes a first insulating film having SiO2 as a base material and containing an element that lowers a band gap of the base material by being added. A density and a density gradient of the element monotonously increase from the semiconductor layer toward the charge storage film.
    Type: Grant
    Filed: October 26, 2016
    Date of Patent: March 13, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Naoki Yasuda, Masaru Kito
  • Patent number: 9893075
    Abstract: A semiconductor memory device includes a plurality of electrode layers stacked in a first direction; a semiconductor layer of a columnar shape extending through the electrode layers in the first direction; and a plurality of floating gates provided between the electrode layers and the semiconductor layer respectively. The floating gates surround the semiconductor layer. A gate length in a first direction of a floating gate positioned between one of the electrode layers and the semiconductor layer is longer than a layer thickness in the first direction of the one of the electrode layers. A ratio of the layer thickness of the one of the electrode layers to the gate length has a positive correlation with an outer diameter of a first portion of the semiconductor layer surrounded by the floating gate in a second direction from the semiconductor layer toward the one of the electrode layers.
    Type: Grant
    Filed: March 13, 2017
    Date of Patent: February 13, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventor: Naoki Yasuda
  • Patent number: 9786678
    Abstract: According to an embodiment, a nonvolatile semiconductor memory device comprises a plurality of conductive layers stacked in a first direction via an inter-layer insulating layer. In addition, the nonvolatile semiconductor memory device comprises: a semiconductor layer having the first direction as a longer direction; a tunnel insulating layer contacting a side surface of the semiconductor layer; a charge accumulation layer contacting a side surface of the tunnel insulating layer; and a block insulating layer contacting a portion facing the conductive layer, of a side surface of the charge accumulation layer. Moreover, the portion facing the conductive layer, of the charge accumulation layer is thinner compared to a portion facing the inter-layer insulating layer, of the charge accumulation layer.
    Type: Grant
    Filed: July 14, 2015
    Date of Patent: October 10, 2017
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Katsuyuki Sekine, Masaaki Higuchi, Masao Shingu, Hirokazu Ishigaki, Naoki Yasuda
  • Publication number: 20170229475
    Abstract: According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, and a charge storage film. The stacked body is provided on the substrate. The stacked body includes a plurality of first insulating films and a plurality of electrode films alternately stacked one layer by one layer. The semiconductor pillar is provided inside the stacked body and extends in a stacking direction of the stacked body. The charge storage film is provided between the semiconductor pillar and each of the electrode films. The plurality of first insulating films include a first portion surrounding the semiconductor pillar and a second portion provided between the first portion and the semiconductor pillar, the second portion having a dielectric constant higher than a dielectric constant of the first portion.
    Type: Application
    Filed: July 26, 2016
    Publication date: August 10, 2017
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Naoki YASUDA
  • Patent number: 9620653
    Abstract: According to an aspect of the present invention, there is provided a nonvolatile semiconductor memory element including: a semiconductor substrate including: a source region; a drain region; and a channel region; a lower insulating film that is formed on the channel region; a charge storage film that is formed on the lower insulating film and that stores data; an upper insulating film that is formed on the charge storage film; and a control gate that is formed on the upper insulating film, wherein the upper insulating film includes: a first insulting film; and a second insulating film that is laminated with the first insulating film, and wherein the first insulating film is formed to have a trap level density larger than that of the second insulating film.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: April 11, 2017
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Masao Shingu, Jun Fujiki, Naoki Yasuda, Koichi Muraoka
  • Publication number: 20170077109
    Abstract: According to one embodiment, a semiconductor memory device includes a stacked body including a plurality of electrode members and a plurality of insulating members, each of the electrode members and each of the insulating members being stacked alternately in a first direction on the substrate. The semiconductor memory device also includes a memory hole that extends in the stacked body in the first direction and a semiconductor member that is disposed to extend in the memory hole in the first direction. The semiconductor memory device also includes a memory member that is disposed between the semiconductor member and the plurality of electrode members. The plurality of electrode members including a first electrode member and a second electrode member, a thickness of the memory member at the position of the first electrode member being greater than a thickness of the memory member at the position of the second electrode member.
    Type: Application
    Filed: November 4, 2016
    Publication date: March 16, 2017
    Applicant: Kabushiki Kaisha Toshiba
    Inventor: Naoki YASUDA
  • Patent number: 9590117
    Abstract: A nonvolatile semiconductor memory device includes a charge storage layer on a first insulating film, a second insulating film which is provided on the charge storage layer, formed of layers, and a control gate electrode on the second insulating film. The second insulating film includes a bottom layer (A) provided just above the charge storage layer, a top layer (C) provided just below the control gate electrode, and a middle layer (B) provided between the bottom layer (A) and the top layer (C). The middle layer (B) has higher barrier height and lower dielectric constant than both the bottom layer (A) and the top layer (C). The average coordination number of the middle layer (B) is smaller than both the average coordination number of the top layer (C) and the average coordination number of the bottom layer (A).
    Type: Grant
    Filed: May 31, 2016
    Date of Patent: March 7, 2017
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventor: Naoki Yasuda
  • Publication number: 20170053924
    Abstract: According to one embodiment, a control gate is formed on the semiconductor substrate and includes a cylindrical through hole. A block insulating film, a charge storage film, a tunnel insulating film, and a semiconductor layer are formed on a side surface of the control gate inside the through hole. The tunnel insulating film comprises a first insulating film having SiO2 as a base material and containing an element that lowers a band gap of the base material by being added. A density and a density gradient of the element monotonously increase from the semiconductor layer toward the charge storage film.
    Type: Application
    Filed: October 26, 2016
    Publication date: February 23, 2017
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Naoki YASUDA, Masaru Kito
  • Patent number: 9513852
    Abstract: A print instruction device includes an obtaining unit, a detection unit, and a processing unit. The obtaining unit obtains image data including a photographic image and a code image. The detection unit detects the code image from the image data obtained by the obtaining unit. The processing unit performs, for the image data obtained by the obtaining unit, a halftoning process on the photographic image and performs no halftoning process on the code image.
    Type: Grant
    Filed: July 21, 2015
    Date of Patent: December 6, 2016
    Assignee: FUJI XEROX CO., LTD.
    Inventors: Hiroo Yoshida, Naoki Yasuda, Shingo Kato
  • Publication number: 20160349333
    Abstract: An ICP analyzer 100 includes a self-oscillation radio-frequency power supply unit 120 for supplying radio-frequency power for generating plasma to an induction coil 111 wound around a plasma torch 110. To check the type of plasma torch 110, the analyzer 100 further includes: a frequency measurement section 121 for measuring an output frequency of the power supply unit 120; a storage unit 190 holding a reference output frequency for each type of plasma torch; and a torch checker 132 for determining whether or not the output frequency measured by the frequency measurement section 121 after the plasma is lit agrees with any one of the reference output frequencies, and for giving notification of the determination result.
    Type: Application
    Filed: May 25, 2016
    Publication date: December 1, 2016
    Applicant: SHIMADZU CORPORATION
    Inventor: Naoki YASUDA
  • Patent number: 9508739
    Abstract: According to one embodiment, a semiconductor memory device includes a stacked body including a plurality of electrode members and a plurality of insulating members, each of the electrode members and each of the insulating members being stacked alternately in a first direction on the substrate. The semiconductor memory device also includes a memory hole that extends in the stacked body in the first direction and a semiconductor member that is disposed to extend in the memory hole in the first direction. The semiconductor memory device also includes a memory member that is disposed between the semiconductor member and the plurality of electrode members. The plurality of electrode members including a first electrode member and a second electrode member, a thickness of the memory member at the position of the first electrode member being greater than a thickness of the memory member at the position of the second electrode member.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: November 29, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Naoki Yasuda
  • Patent number: 9496278
    Abstract: A nonvolatile semiconductor storage device includes a plurality of electrode films stacked in a first direction; a silicon pillar piercing the stacked electrode films and separated therefrom by a block insulating film; a charge storage film provided between the block insulating film and the silicon pillar; and a tunnel insulating film provided between the charge storage film and the silicon pillar. The tunnel insulating film comprises a first insulating film having silicon oxide as a base material and containing an added element, wherein a density of the element increases from the silicon pillar toward the charge storage film.
    Type: Grant
    Filed: November 18, 2015
    Date of Patent: November 15, 2016
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Naoki Yasuda, Masaru Kito
  • Publication number: 20160276495
    Abstract: A nonvolatile semiconductor memory device includes a charge storage layer on a first insulating film, a second insulating film which is provided on the charge storage layer, formed of layers, and a control gate electrode on the second insulating film. The second insulating film includes a bottom layer (A) provided just above the charge storage layer, a top layer (C) provided just below the control gate electrode, and a middle layer (B) provided between the bottom layer (A) and the top layer (C). The middle layer (B) has higher barrier height and lower dielectric constant than both the bottom layer (A) and the top layer (C). The average coordination number of the middle layer (B) is smaller than both the average coordination number of the top layer (C) and the average coordination number of the bottom layer (A).
    Type: Application
    Filed: May 31, 2016
    Publication date: September 22, 2016
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventor: Naoki YASUDA
  • Patent number: 9425207
    Abstract: According to one embodiment, a non-volatile memory device includes first electrodes, at least one first semiconductor layer, a first memory film, second electrodes, at least one second semiconductor layer, and a second memory film. The first electrodes are stacked in a first direction. The one first semiconductor layer extends in the first direction through the first electrodes. The first memory film is provided between each of the first electrodes and the one first semiconductor layer. The second electrodes are stacked in the first direction and provided together with the first electrodes in a second direction orthogonal to the first direction. The one second semiconductor layer extends in the first direction through the second electrodes. The second memory film is provided between each of the second electrodes and the one second semiconductor layer. An outer diameter of the first memory film is larger than that of the second memory film.
    Type: Grant
    Filed: October 23, 2014
    Date of Patent: August 23, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Naoki Yasuda
  • Publication number: 20160210089
    Abstract: A print instruction device includes an obtaining unit, a detection unit, and a processing unit. The obtaining unit obtains image data including a photographic image and a code image. The detection unit detects the code image from the image data obtained by the obtaining unit. The processing unit performs, for the image data obtained by the obtaining unit, a halftoning process on the photographic image and performs no halftoning process on the code image.
    Type: Application
    Filed: July 21, 2015
    Publication date: July 21, 2016
    Applicant: FUJI XEROX CO., LTD.
    Inventors: Hiroo YOSHIDA, Naoki YASUDA, Shingo KATO