Abstract: Image observation at high resolution is realized and irregularity information of a sample is obtained. The reflected electrons 12a emitted in a direction at a small angle with the surface of the sample 8 are detected by the detectors 10a and 10b arranged on the side of the electron source 1 of the magnetic field leakage type object lens 7 and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.

Abstract: In a battery charger device 1 for a portable telephone, a front pocket 11 suitable for a portable telephone 4 having a large battery pack 3, and a rear pocket 12 suitable for a large battery pack 3 are disposed. Rotatable levers 5 which are urged by spiral springs 6 are disposed in pocket back faces 11a. A small battery pack 2 and a portable telephone 4 having a small battery pack 2 are held by the levers 5. Since the levers 5 are rotated so as to be housed in the battery charger, the large battery pack 3 and the portable telephone 4 having the large battery pack 3 are held by the pocket back faces 11a. The rotatable levers allow a small battery pack and a portable telephone having a small battery pack, and a large battery pack and a portable telephone having a large battery pack to be selectively held in a fixed state. Therefore, either of a small battery pack and a large battery pack can be stably held.

Abstract: A scanning electron microscope is provided which can achieve an improved detection efficiency in the detection of secondary electrons without affecting an electron beam for irradiating a specimen, and which is suitable for detecting specific secondary electrons in a specific energy range. Secondary electrons 14 generated by irradiation of specimen 8 with electron beam 4 are decelerated by a decelerating electrical field formed by a pair of electrodes 10, 11 of field generation unit 28. Thereby, a portion of secondary electrons having a low energy is repelled. Other secondary electrons not having been repelled are deflected by a deflecting electrical field formed between the pair of electrodes as well as by a deflecting magnetic field which is orthogonal to the deflecting electrical field, to be detected by secondary electron detector 12.

Abstract: In an electron microscope employing an X-ray spectrometer according to the present invention, a collimator is provided in a head portion of the X-ray spectrometer and a part of the collimator is arranged in a leakage magnetic field of an objective lens included in the electron microscope, whereby the orbits of the scattering electrons are curved and hence the scattering electrons are prevented from colliding with the X-ray spectrometer to dissolve the background noises in the X-ray spectrum

Abstract: A scanning electron microscope in which means for generating crossed electric and magnetic fields is provided on an electron source side of an objective lens, secondary electrons emitted from a specimen are detected through the crossed electric and magnetic fields (E+B), a deflecting electrode or a deflecting coil is provided in a scanning coil part, means for detecting a beam current is provided in the crossed electric and magnetic fields, whereby accurate measurement of the beam current can be realized while maintaining the array of a high resolution optical system without need for performing mechanical or electrical adjustment.