Abstract: This invention discloses an image forming apparatus having an electron source on which a plurality of electron-emitting devices are arranged, an image forming member on which an image is formed by electrons emitted by the electron-emitting devices, and a structure for maintaining an interval between the electron source and the image forming member, in which

Abstract: An electron-emitting device having an electron-emitting region between electrodes on a substrate where the electron-emitting region contains fine particles dispersed therein at an areal occupation ratio of the fine particles ranging from 20% to 75% of the electron-emitting region is disclosed. The other electron-emitting device where the electron-emitting region contains fine particles being arranged at gaps of from 5 Å to 100 Å and having average particle diameter of from 5 Å to 1000 Å is also disclosed. Electron beam-generating apparatus and image-forming apparatus comprise one of the electron-emitting regions and a modulation means for modulating the electron beams emitted from the electron-emitting devices in accordance with information signals.

Abstract: An image-forming device having, in an envelope, an electron-emitting element, an image-forming member for forming an image by irradiation of an electron beam emitted from the electron-emitting element, and an electroconductive supporting member for supporting the envelope. The potential of the supporting member is controlled to not be higher than the maximum potential applied to the electron-emitting element. The electron-emitting element and the image-forming member can be placed in juxtaposition on the same substrate, an electroconductive substrate can be additionally provided in opposition to the face of the substrate, and the supporting member can be connected electrically to one of the electrodes and also to the electroconductive substrate.

Abstract: An image-forming device having, in an envelope, an electron-emitting element, an image-forming member for forming an image by irradiation of an electron beam emitted from the electron-emitting element, and an electroconductive supporting member for supporting the envelope (internally), comprises a means for controlling the potential of the supporting member to be not higher than the maximum potential applied to the electron-emitting element. The electron-emitting element and the image-forming member can be placed in juxtaposition on the same substrate, an electroconductive substrate can be additionally provided in opposition to the face of the substrate, and the supporting member can be connected electrically to one of said electrodes and also to the electroconductive substrate.

Abstract: An electron beam apparatus includes an electron source having an electron-emitting device, an electrode for controlling an electron beam emitted from the electron source, a target to be irradiated with an electron beam emitted from the electron source and a spacer arranged between the electron source and the electrode. The spacer has a semiconductor film on the surface thereof that is electrically connected to the electron source and the electrode.

Abstract: An image display apparatus includes a panel type light source including a plurality of cold-cathode devices arranged two-dimensionally on a substrate and a phosphor member contained in a same vacuum container for emitting visible light upon irradiation of electron beams by the cold-cathode devices. In addition, a transmission type optical modulation panel using the panel type light source as a back light source.

Abstract: An electron source comprises a substrate, a row wire and a column wire disposed on the substrate, and an electron-emitting element connected to both the row and column wires. The electron-emitting region of the electron-emitting element is surrounded by one of both the row and column wires.

Abstract: A substrate processing apparatus and method restrains outside air and gas-phase backward flow from entering the inside of a reaction chamber during a time period that the inside of the reaction chamber is opened to the outside through a substrate carrying-in/carrying-out opening. The substrate processing apparatus can comprise, for example, a vertical CVD apparatus having a gas supply system and a bypass line. The gas supply system supplies inert gas to a space between an outer tube and an inner tube of a reaction furnace during a boat loading period and a boat unloading period. The bypass line exhausts the atmosphere from the reaction chamber by a slow exhaust operation during the boat loading period and the boat unloading period.

Abstract: In an image-forming apparatus which includes, on a substrate, an electron beam source comprises plurality of electron-emitting devices, and image-forming members for forming an image upon irradiation of electron beams emitted from the electron-emitting devices, the image-forming members are stripe-shaped members, and the plurality of electron-emitting devices each comprise a negative electrode, an electron-emitting region and a positive electrode which are arranged on the substrate surface side by side in a direction vertical to the direction in which the stripe-shaped members are extending. With the present apparatus, deterioration of image quality is prevented even when the positional relationship between the electron-emitting devices such as cold cathode devices and the image-forming members such as fluorescent substances is deviated from predetermined one during assembly.

Abstract: An image-forming apparatus comprises in a vacuum envelope an electron source including a plurality of electron-emitting devices and an image-forming member including a fluorescent layer and a high voltage anode layer disposed vis-a-vis the electron source. The envelope may preferably have a low resistance electroconductive member electrically connected to the ground by way of a low impedance ground connection line for by-passing large electric current which may occur upon electric discharge between the anode layer and the electron source and can possibly destroy the electron-emitting devices if flowing thereinto by way of the driving wires of the devices. The high voltage anode layer and/or the low resistance electroconductive member is drawn out from the inside of the envelope to a recess formed in the outer surface of the envelope and is electrically connected to external wiring in the recess.

Abstract: An image forming apparatus having a plurality of electron emitting devices and luminescent members are arranged into a matrix formed on one surface of a substrate. As rows of electron emitting devices are successively driven, each luminescent member emits light according to a voltage applied to it or other members in accordance with an image information signal when irradiated with a light beam from one of the electron emitting devices mated with it.

Abstract: A semiconductor manufacturing apparatus including a heating device; a reaction tube disposed within the heating device, the reaction tube having a gas inlet portion and an exhaust portion parted from each other by a predetermined distance in the longitudinal direction of the reaction tube; and a plurality of gas feed pipes extending along a side wall of the reaction tube from the exhaust portion side to the gas inlet portion, the plurality of gas feed pipes being parted from each other. The reaction gas is provided through the plurality of gas feed pipes into the reaction tube, thereby providing an improved uniform temperature distribution within the reaction tube and resulting in an improved uniform film thickness of the oxide film formed on the surface of the semiconductor wafer.

Abstract: An electron source comprises a substrate, a row wire and a column wire disposed on the substrate, and an electron-emitting element connected to both the row and column wires. The electron-emitting region of the electron-emitting element is surrounded by one of both the row and column wires.

Abstract: An image-forming device having, in an envelope, an electron-emitting element, an image-forming member for forming an image by irradiation of an electron beam emitted from the electron-emitting element, and an electroconductive supporting member for supporting the envelope. The potential of the supporting member is controlled to not be higher than the maximum potential applied to the electron-emitting element. The electron-emitting element and the image-forming member can be placed in juxtaposition on the same substrate, an electroconductive substrate can be additionally provided in opposition to the face of the substrate, and the supporting member can be connected electrically to one of the electrodes and also to the electroconductive substrate.

Abstract: An image-forming apparatus comprises a back plate carrying thereon a plurality of electron-emitting devices, a face plate arranged vis-a-vis the back plate and carrying thereon a fluorescent member and an anti-atmospheric-pressure spacer. The longitudinal axis of the anti-atmospheric-pressure spacer is arranged substantially in parallel with the direction of deflection of electron beams emitted from said electron-emitting devices.

Abstract: A driving method for an electron beam-generating apparatus having an electron source having a plurality of electron-emitting devices, and a plurality of modulation means for modulating electron beams emitted from the electron source in correspondence with information signals comprises applying a cut-off voltage to a first modulation means adjacent to a second modulation means to which an ON voltage is applied as the information signals in modulation of the electron beam.

Abstract: An electron beam apparatus includes an electron source having an electron-emitting device, an electrode for controlling an electron beam emitted from the electron source, a target to be irradiated with an electron beam emitted from the electron source and a spacer arranged between the electron source and the electrode. The spacer has a semiconductor film on the surface thereof that is electrically connected to the electron source and the electrode.

Abstract: An image-forming apparatus comprises a rear plate bearing thereon electron-emitting devices, a face plate bearing thereon an image-forming member and arranged vis-a-vis the rear plate, a support frame arranged between the rear plate and the face plate to enclose the periphery of the space delimited by the plates and define the distance therebetween and spacers arranged between the face plate and the rear plate and designed to produce images on the image-forming member by irradiating the image-forming member with electrons emitted from the electron-emitting devices. The spacers are shorter than the distance between the face plate and the rear plate defined by the support frame and the spacers are rigidly bonded at least at an end thereof to the rear plate or the face plate by means of an adhesive agent.

Abstract: An electron source emits electrons as a function of input signals. The electron source includes a substrate, a matrix of wires having m row wires and n column wires laid on the substrate with an insulator layer interposed therebetween, and a plurality of surface-conduction electron-emitting devices each having a pair of electrodes and a thin film including an electron emitting region and arranged between the electrodes. The electron-emitting devices are so arranged as to form a matrix with the electrodes connected to the respective row and column wires. The electron source further includes a selector for selecting a row of the plurality of surface-conduction electron-emitting devices, and a modulator for generating modulation signals according to input signals and applying them to the surface-conduction electron-emitting devices selected by the selector.

Abstract: An electron source or electron beam apparatus comprises an electron-emitting device and a shield member disposed above the electron-emitting device. The electron-emitting device generates an electric field component, when energized, that is parallel to a substrate surface on which the electron-emitting device is disposed, while the shield member has an aperture which allows electrons emitted from the electron-emitting device to pass therethrough, but blocks off charged particles flying toward the electron emitting device.