Abstract: Provided is a light source device, a projector, a machining device, a light source unit, and a light source device adjusting method in which a replacement of a light source unit can be easily performed when required. The light source device 1 includes: a plurality of light source units 21 arranged in a two-dimensional array, each of the plurality of light source units having a plurality of light sources 21 and a support plate 22 supporting the plurality of light sources 21, each of the plurality of light sources 21 including a light emitting element for emitting a laser beam and a package housing the light emitting element; a base substrate 31 having a surface 311 on which the plurality of light source units 2 is arranged; and a fixing member 4 configured to detachably fix the support plate 22 to the base substrate 31.

Abstract: Provided is a high-voltage control circuit capable of shortening a time required for voltage bucking with a simple configuration without requiring a complicated control algorithm. A high-voltage control circuit 1 includes: a high-voltage rectifier circuit 100 configured to convert an AC voltage into a DC high voltage; a smoothing capacitor 140 configured to smooth the DC high voltage output from the high-voltage rectifier circuit 100; a switch circuit 102 connected in parallel to the smoothing capacitor 140; a feedback circuit 103 including an error amplifier 133 configured to amplify a differential voltage Vdf between a command voltage Viv and a divided voltage Vdv following the DC high voltage, and configured to control the high-voltage rectifier circuit 100 based on an output signal of the error amplifier 133; and an amplifier 105 configured to amplify the differential voltage Vdf. The switch circuit 102 is controlled by an output signal of the amplifier 105.

Abstract: There is provided a technique capable of reducing deterioration of a back scattered electron (BSE) detector caused by a dark pulse. Charged particle beam apparatus includes: a plurality of BSE detectors configured to detect a BSE from a sample; and a controller. The controller acquires, within a period, a first peak time of a first peak included in an output signal from a first BSE detector among the plurality of BSE detectors, and a second peak time of a second peak included in an output signal from a second BSE detector other than the first BSE detector among the plurality of BSE detectors, determines, when the second peak is present where a time difference between the first peak time and the second peak time is within a threshold value, that the first peak is caused by the BSE, and determines, when the second peak is not present where the time difference is within the threshold value, that the first peak is caused by the dark pulse.

Abstract: A distributed control system includes a tree topology network or a daisy-chain network including a communication parent station, communication child stations, and a plurality of communication paths among the communication parent station and the communication child stations, in which the communication parent station and the communication child stations include a scheduling unit that controls a transfer cycle that is temporal intervals of data transfer. The scheduling unit sets the transfer cycle that is the fastest out of a plurality of the data as a reference cycle, counts the number of times each time the reference cycle elapses, and imparts a value of the number of times to the reference cycle as a cycle number. When the cycle number reaches an optional number, the number of times is returned to an initial value, which makes one cycle of transfer control, and the transfer control is repeatedly executed.

Abstract: A charged particle beam device according to the present invention comprises a charged particle source that emits charged particles, a detection circuit that detects electrons which are generated by a sample as a result of irradiation with the charged particles, and a power storage device (107_VHD) that holds direct voltage, and comprises a charge circuit (107_CHG) that charges the power storage device with supplied voltage, and a control circuit (107_CTL) that controls the charge circuit such that charging is carried out in a period in which no sample is measured, wherein the direct voltage held by the power storage device (107_VHD) is used as operating voltage.

Abstract: Provided is a charged particle beam device capable of improving the accuracy of measurement and processing. The charged particle beam device includes an electrostatic chuck that adsorbs an inspection object, a voltage generation unit that generates a voltage to be supplied to the electrostatic chuck, and a state determination unit that determines a state of the inspection object.

Abstract: Provided is a light source device, a projector, a machining device, a light source unit, and a light source device adjusting method in which a replacement of a light source unit can be easily performed when required. The light source device 1 includes: a plurality of light source units 21 arranged in a two-dimensional array, each of the plurality of light source units having a plurality of light sources 21 and a support plate 22 supporting the plurality of light sources 21, each of the plurality of light sources 21 including a light emitting element for emitting a laser beam and a package housing the light emitting element; a base substrate 31 having a surface 311 on which the plurality of light source units 2 is arranged; and a fixing member 4 configured to detachably fix the support plate 22 to the base substrate 31.

Abstract: The invention provides a power supply module and a charged particle beam device that are capable of reducing ripple noise. A high-voltage generation circuit 101 includes booster circuits CPa and CPb of two systems that are configured to be symmetrical to each other, and performs a boosting operation by using a capacitive element and a diode in the booster circuits CPa and CPb of the two systems. The high-voltage generation circuit is housed in a housing and a reference power supply voltage is applied thereto. A left electrode 102a is fixedly provided in the vicinity of one of the booster circuits CPa and CPb of the two systems in the housing, and a right electrode 102b is fixedly provided in the vicinity of the other of the booster circuits CPa and CPb of the two systems in the housing.

Abstract: A semiconductor processing apparatus according to the present invention includes a main body cover that covers a main body device and a control device. The main body cover has a transfer opening for transferring a semiconductor, and the main body cover further has an intake port that generates an air flow in a horizontal direction inside the main body cover.

Abstract: Provided is a charged particle beam device capable of improving the accuracy of measurement and processing. The charged particle beam device includes an electrostatic chuck that adsorbs an inspection object, a voltage generation unit that generates a voltage to be supplied to the electrostatic chuck, and a state determination unit that determines a state of the inspection object.

Abstract: A charged particle beam system includes a charged particle beam device 101 and the detection circuit 114. The charged particle beam device 101 includes a first antenna 102 having a first resonant frequency and a second antenna 103 having a second resonant frequency. The detection circuit 114 includes a first amplitude detection unit 110 which detects a first amplitude of a signal after passing a first filter 107, a second amplitude detection unit 111 which detects a second amplitude of a signal after passing a second filter 108, and an amplitude comparison unit 113 which compares the first amplitude with the second amplitude.

Abstract: The present disclosure relates to a charged particle beam device intended to appropriately measure the amount of foreign substances in a vacuum chamber. As one aspect for achieving the above object, proposed is a charged particle beam device including a charged particle beam column (9) configured to irradiate a sample with a charged particle beam, vacuum chambers (1, 2) configured to create a vacuum around the sample, a plurality of electrodes (12) arranged in the vacuum chambers, and a capacitance measuring device (13) for measuring the capacitance between the plurality of electrodes.

Abstract: The present invention prevents breakage of a chip by using a simple configuration even when an extraction-electrode power source cannot apply voltage to an extraction electrode due to a malfunction, etc. This charged particle beam device is provided with: a charged particle source; an extraction electrode that extracts charged particles from the charged particle source; an extraction-electrode power source that applies voltage to the extraction electrode; an accelerating electrode for accelerating the charged particles; an accelerating power source that applies voltage to the accelerating electrode; and a diode and a resistor which are connected in series between a middle stage of the accelerating power source and the output side of the extraction-electrode power source.

Abstract: The present disclosure relates to a charged particle beam device intended to appropriately measure the amount of foreign substances in a vacuum chamber. As one aspect for achieving the above object, proposed is a charged particle beam device including a charged particle beam column (9) configured to irradiate a sample with a charged particle beam, vacuum chambers (1, 2) configured to create a vacuum around the sample, a plurality of electrodes (12) arranged in the vacuum chambers, and a capacitance measuring device (13) for measuring the capacitance between the plurality of electrodes.

Abstract: A laser device includes: a plurality of collimating lenses collimate light emitted from the plurality of light sources; a plurality of holders each hold a pair of light sources and the collimating lens and which adjust emission positions and emission angles of the collimated light of the collimating lenses; a housing which holds the plurality of holders; a light condensing part which condenses each of the collimated light whose emission position and emission angle are adjusted; a heat exhausting member which exhausts heat generated from the plurality of light sources; and a heat transfer member which is disposed between the heat exhausting surfaces of the light sources and a heat absorbing surface of the heat exhausting member, includes an elastic part abutting against the heat exhausting surfaces and the heat absorbing surface, has heat conductivity, and transfers the heat from the heat exhausting surfaces to the heat absorbing surface.

Abstract: A laser device has a plurality of laser diodes; a plurality of optical elements installed corresponding to the plurality of the laser diodes; a plurality of units formed by fixing the laser diodes and the optical elements per each laser diode and installed corresponding to the plurality of the laser diodes; a converging element that converges laser beams emitted from the plurality of the laser diodes to a fiber; a housing element houses the plurality of the units and the converging element; and a thermal transfer plate performs heat dissipation of the plurality of the units. The heat resistance reducing element having a heat resistance value that is smaller than a predetermined value is installed between the thermal transfer plate and each unit or the processing for reducing the heat resistance is performed.

Abstract: The present invention prevents breakage of a chip by using a simple configuration even when an extraction-electrode power source cannot apply voltage to an extraction electrode due to a malfunction, etc. This charged particle beam device is provided with: a charged particle source; an extraction electrode that extracts charged particles from the charged particle source; an extraction-electrode power source that applies voltage to the extraction electrode; an accelerating electrode for accelerating the charged particles; an accelerating power source that applies voltage to the accelerating electrode; and a diode and a resistor which are connected in series between a middle stage of the accelerating power source and the output side of the extraction-electrode power source.

Abstract: A charged particle beam system includes a charged particle beam device 101 and the detection circuit 114. The charged particle beam device 101 includes a first antenna 102 having a first resonant frequency and a second antenna 103 having a second resonant frequency. The detection circuit 114 includes a first amplitude detection unit 110 which detects a first amplitude of a signal after passing a first filter 107, a second amplitude detection unit 111 which detects a second amplitude of a signal after passing a second filter 108, and an amplitude comparison unit 113 which compares the first amplitude with the second amplitude.

Abstract: A laser device includes: a plurality of collimating lenses collimate light emitted from the plurality of light sources; a plurality of holders each hold a pair of light sources and the collimating lens and which adjust emission positions and emission angles of the collimated light of the collimating lenses; a housing which holds the plurality of holders; a light condensing part which condenses each of the collimated light whose emission position and emission angle are adjusted; a heat exhausting member which exhausts heat generated from the plurality of light sources; and a heat transfer member which is disposed between the heat exhausting surfaces of the light sources and a heat absorbing surface of the heat exhausting member, includes an elastic part abutting against the heat exhausting surfaces and the heat absorbing surface, has heat conductivity, and transfers the heat from the heat exhausting surfaces to the heat absorbing surface.

Abstract: The present invention comprises: a light-emitting element group configured from columns of serially connected light-emitting elements, one of the ends from each of the columns of the light-emitting elements being collectively connected to a power source; current control elements, provided to correspond to the columns, and being connected to each of the columns of the light-emitting elements at the other end thereof, for controlling the current flowing through the light-emitting elements; a forward voltage monitoring circuit for monitoring, for each of the columns, the total forward voltage across the light-emitting elements; and a control circuit for controlling the current control elements, on the basis of the total forward voltage across the light-emitting elements from each of the columns detected by the forward voltage monitoring circuit, in such a manner that the variations in the total forward voltage across the columns of the light-emitting elements reach a threshold value or lower.